201038760 六、發明說明： ' 【發明所屬之技術領域】 ' 本發明係關於一種連續式鍍膜設備之循環輸送系統， 尤其係指一種設置於連續式鍍膜設備之二端與下方，藉以 節省廢房空間並提升作業效率之循環輸送系統。 【先前技術】 目前在電子、通訊、資訊、顯示器或光電等高科技產 業當中，針對產品的導電性、磁性、光學特性或美觀性等 〇特性，均可由鍍膜製程來達到各項特性在產業標準上的需 求，故鑛膜製程因而被廣泛地運用；再者，真空鑛膜製程 近年來更取代了傳統喷導電漆或電解電鍍之方式而成為重 要的鍍膜技術。 由於真空鍍膜技術所應用的層面日漸廣泛，各鍍膜業 者無不思考如何降低真空鍍膜製程的成本以提升競爭力， 一般而言，目前真空鍍膜製程中所使用的多為連續式的鍍 膜設備，由於連續式鍍膜設備多採用直列式（j n — L i ❹11 e )的設計，每一個鍍膜製程係以腔體進行連接而形 成連續式多腔體（Multi- chambw)_t 流程，其相較於傳統批次式（b a t c h t y p e )或 晶圓式（w a f e r t y p e )的製程方法相比，具有 可大幅減低生產成本、提升量產效能的效果，進而增進廠 商競爭力。 ° 在連續式真空鍍膜製程中，其腔體配置最主要分為三 大區塊：進料腔體、鍍膜腔體及出料腔體，待鍍工件由= 載盤承載並接受腔财輸送機構之運送而進行鑛膜程序， 3 201038760 然而，當工件在腔體中完成艘膜程序之後，若與載盤 -離開該鍍膜設備，則載盤供應量必須搭配工件1量 .大規模量產的情形下，製程中載盤所必須準備;;數^疑 是廠商的成本負擔，因此必須設計_套循環輪送之裝置， 使載盤完成運送後回送至該製程起點再度承接新的待鍵工 件，如此則可大幅降低生產成本。 習用連續式鍍膜設備之循環輸送^ ^ ^ ^ ^ ^ 、、，a 衣直係將該循環輸 ❹ ❹ 达裝置架設於該鍍膜設備外部並且連結於該進料腔體與出 料腔體以形成一輸送循環；♦恭古丁批 要“，、 衣田載有工件之載盤自該循環輸 m經過鑛膜腔體完成鍍膜程 序，再從出料腔體離開後，# ά 了讲^ 傻便由β玄循裱輸送裝置將該載有 ::之載盤傳送回到該起點，接著由-作業人員取下= 凡成之工件並放置另-待鑛工件於該載盤之上，便可接續 進行另一待鍍工件之鍍膜製程。 、·貝 然而，上述的循環輸送方式係 於該鑛模設備外部，整體的設備配置略呈「口 置 將大幅佔據廠房空間，導致廠房空間利用效率低落。 另外，需要一位作聿人a乱/ μ 神 業人員執行取出工件與置放工件之 不僅徒增人事成本的支出，也產生:之 生出來的缺點，舉例而古 乍業所何 搬動過程中的不慎而造^ ^取放可能因該作業人員在 # r r 一 成工件碰撞或掉落的意外而產生工 彰，材斜占夫體製程因而延宕導致作業效率不 人員導致 ' 而增加，工件的不慎掉落更有砸傷作業 人員導致工安意外之虞。 劳U莱 倘若可將該循環輪送裝置與鍍膜設備結合並且讓工件 4 201038760 無需回流至輸送起點而在離開出料腔體後隨即進入 产 , 程 序，便可節省廠房空間以提升空間使用效能以及形成一自 .動化生產流程以提升製程效率。 【發明内容】 本發明人有鑑於上述習用的輸送系、统會造成佔據礙房 空間及人工效率不彰等缺失，乃積極著手從事研究，以期 可以解決上述問題，經過不斷的試驗及努力，終於 本發明。 出 〇 纟發明之主要目的在於提供-種設置於該連續式錢膜 設備之二端與下方，藉以節省廠房空間並提 、 循環輸送系統。 羊之 為了達到上述發明目的，本發明係採取以下之技術手 段予以達成’其中本發明連續式鑛膜設備之循環輸送系 統’係搭配於-具有一進料區、至少一連接於該進料區之 鍍膜區以及一連接於該鍍膜區之出料區的連續式鍍膜設 備，該進料區、鑛膜區以及出料區均設有的傳動复 Ο 包括有： 二升降裝置，係分別設置於該進料區之前端與該出料 區之後端，可使一受承載物件升降並停留於所需要之高 度，其包括： 间 -主體框架，係由複數個框體與複數個桿體所組立之 立體框架； -主要升降單元，係對稱設置於該主體桎架内部之一 側，其各具有一可往復移動之移動元件； 一動力源’係設置於-主要升降單元之頂端並以一傳動 5 201038760 轴連接於另—主要升降單元之頂端； 升降單㈣料單元’係設置於該域框㈣料於該主要 升降早兀之—側，其各具有-可往復移動之移動元件； 艾7 —承載台’其-側固接於該主要升降單元之移動元件， 另-侧則S)接於該辅助升降單元之移動元件； 一傳動裝置’係固定設置於該承載台上； ο 複數組回送裝置’係分別設置於該進料區、賴區、出料區 之下方並且彼此間相互接續，設置於該進料區及出料區下方之回 送裝置則分別銜接於該二升降裝置之傳動裝置。 藉由上述之結構，本發明連續式鑛膜設備之循環輸送系統 係由位於進料區前端之升降裝置的傳動裝置將一載有工件 載盤傳送人進料區，然後，由該連續式鐘膜設備本身之 傳動裝置將該載有工件之載盤自進料區傳送經過鑛膜區及 出料區而凡成鑛膜作業，接著’由位於出料區後端之升降 裝置的傳動裝置承接該载有工件之載盤，之後，該工件便 與該載盤分離而進入下一階段製程，而該载盤則由出料區 後端之升降裝置的傳動裝置下降至與該回送裝置等高之高 度，由該回送裝置將該載盤輸送回到進料區前端之升降裝置， 此時’進料區前端之升降裝置的傳動裝置已下降至該回送裂 置之南度以承接該載盤，繼而上升至卫件導人之高度以承接另— 工件，進而執行後續傳送、鑛膜之作業。 透過上述作業程序重複地進行，本發明連續式鍍膜設備之 循環輸送系統便可建立一自動化之循環輸送模式，於工件 導入或工件刀離之後，將載盤週而復始地輸送於該連續式 鐘膜設備與該二升降裝置之間，進而改善習用輸送系統佔 6 201038760 據廠房空間以及作業效率不佳的缺失。 【實施方式】 請參考第-及四圖所示，本發明連續式鑛膜設備之循 環輸送系、统，係搭配於一具有一進料區（i i )、至小— 連接於該進《(11)之鑛龍（12)以及—連二於 該鍍膜區（12)之出料區（13)的連續式鍍膜 該進料區（⑴、鑛膜區（12)1,及出料區（ Ο Ο 均設有輸送裝置（14)，該循環輸送系統包括有： -升降裝置（2 1 )，係分別設置於該進料區（ 之前端與該出料區（1换 體所組立二：架(211)’係由複數個框體嫩 (21 12 1 二主要升降單元（212)，係對稱設置於該主體框架 :内部之-側，其各具有一可往復移動之移動元件（2 4 —動力源（2 1 3)，係設置於-主要升降單元（2丄 ，頂端並以-傳動軸（214)連接於另—主要 2 )之頂端； 匕 係設置於該主體框架（2 2)之一側，其各具有— 二辅助升降單元（2 1 5)， 1 1 )内部異於該主要升降單元（2 1 可在復移動之移動元件（2 1 5 1 ); -承載台（2 1 6 ) ’其-側固接於該主要升降單元（2 動元件（2 1 2 1)，另-側則固接於該輔助升降單 <丄5)之移動元件（2 1 5 1 ); 7 201038760 、傳動裝置（2 2 ) ’係、固定設置於該承載台（2丄6 )上； 複數組回送装置（2 3)，係分別設置於 鍍膜區（1 2 )、屮姐厂/ 1 ; 設置於該進料區（=13)，下方並且彼此間相互接續’ 3)則分別銜接於該 :1 3 )下方之回送裝置(2 升降裝置（21)之傳動裝置（22)。 、該承載台（2 1 6)異於該主要升降單元（2工 及輔助升降單元（？ ς^ 5 )之二相對側的二端分別設有一滾輪（2 Ο ❹ 體框架（2=二降機構(21)更包括二分別設置於該主 降單元 部異於該主要升降單元（2 1 2)及輔助升 γ單元f 9 π 7之二側的辅助支撲單元（2 1 7)，該辅助支 牙 1 7)係包括相互對角設置的一上設置部（2 i 7工） 與一下設置部（2 17〇、、 r 9 )以及一以二端分別固定於該上設置部 1 )與下設置部（2工7 2)之皮帶 皮帶（2 173)由該 17 3)該 72)係先繞設於—滾輪（ = β( 71)至下設置部（21 (2⑴）之上緣。16U之下緣再繞設於另-滾輪 以及源（2 1 3 )開始運轉時，透過該動力源（2 1 3 ) 2 - (214)將動力輸出至該主要升降單元（212)， ΐ降的Π/ 2 1 2 1 )即帶動該承載台（2 1 6 )進行上升與 …運動，同時’該辅助升降單元（2⑴接受一外部 主Τ力而使其移動元件(2151)亦進行升 與輔升降單元（212)之移動元件（212 或下降2 1 5 )之移動树（2 1 5 1 )可同時上升 戈下降〜動该承載台（216) 載物件之重相轉其在升㈣財的平穩度。散其所承 8 201038760 該辅助支#單元（217)之皮帶（2173)係自該上設 P (2 1 7 1 )延伸繞過-滾輪（2 1 6 1 )之下緣並繞過另 滾輪（2 1 6 1 )之上緣，所以在升降的過程中，由於該皮帶 (2 1 7 3 )的張力及其繞設㈣滾輪（2 i 6 1 )的方式可 提升該承載台（2 1 6)移動的穩定度，並且，該承載台（2 i 6)可接受該皮帶（2173)的支擒，不會因為承載物件的重 量較重造成該移動元件（2 1 2 1、2 i 5 χ )的不堪負荷，而 對於遠承載台（216)升降時的平穩度產生負面影響。 〇 3外’凊參考第二及五圖，該傳動裝置（22)具有二相 互平行設置之架設板（2 2 i )、複數個設置於該二架設板（2 2 1)之間的鋁擠型框條（2 2 2 )、複數個對稱設置於該二架 -又板（2 2 1 )内侧之導輪（2 2 3 )、複數個設置於該架設板 (2 2 1 )外側並與該導輪（2 2 ”連動之時規輪（2 2 4)、 -環繞套設於該複數個時規輪（2 2 4 )上的傳動皮帶（2 2 5) 以及二分別設置於該二架設板（2 2 i )二端之間並連動於該導 輪（223)之連動軸（226)。 〇 再者’研參考第二及六至八圖，該連續式鑛膜設備之循環 輸送系統更包括-工件接收傳動裝置（24)，係設置於 該傳動裝置（2 2)之銘擠型框條（2 2 2 )上並可升降穿梭於 該傳動裝置（22)之中，其具有一位移單元（241)以及 設置於該位移單元（2 4 1 )上之傳送單元（2 4 2 )，其中， 忒位移單tl ( 2 4 1 )具有一固接於該傳動裝置（2 2 )之無擠 裂框條2 2)的固定平台（24丄丄）、一設置於該固定平 台（2 4 1 1 )並具有一活塞桿（2 4工2丄）之氣壓虹（^ 12)、複數個均佈於該固定平台（241丄）的直線軸承（2 9 201038760 4 1 3)以及複數個往復移動於該直線軸承（2 4 1 3)之支撐 '軸體（24 1 4);該傳送單元（242)具有一固接於該活塞 ，桿（24121)與支撐軸體（2414)頂端之基礎平台（2 4 2 1 )、二平行設置於該基礎平台（2 4 2 1 )上之固定板（2 4 2 2 )以及複數個可轉動地設置於該二固定板（2 4 2 2)之 間的傳送軸（ 2 4 2 3 )。另外，該回送裝置（2 3)係與該傳 送單元（232)的構造相同，在此不再贅述。 在本實施例中，該連續式鍍膜設備之循環輸送系統係 〇 應用於玻璃基板濺鍍製程中，該二升降裝置（21)之承載 台（2 1 6)在製程中係由電腦程式設定並控制其升降以停 留於低、中、高三個位置，此分別為載盤回傳承接位置、 玻璃基板接收/分離位置及製程腔體高度位置，其作業程 序說明如下： 首先《月參考第一、二、五及六至八圖，一工件載盤（圖中 未示）放置於該傳動裝置（2 2)上時 前端之升降裝置（2 1 )之承載台 基板接收/分離位置，由一外部傳. ，位於進料區（1 1 )201038760 VI. Description of the invention: 'The technical field of the invention belongs to the present invention. The present invention relates to a circulating conveying system for a continuous coating device, in particular to a second end and a lower side of a continuous coating device, thereby saving waste space. And a circulating conveying system that improves work efficiency. [Prior Art] At present, in the high-tech industries such as electronics, communication, information, display or optoelectronics, the characteristics of conductivity, magnetic properties, optical properties or aesthetics of products can be achieved by coating process to achieve various characteristics in the industry standard. On the demand, the mineral film process has been widely used; in addition, the vacuum film process has replaced the traditional spray paint or electrolytic plating in recent years and has become an important coating technology. Due to the increasing application of vacuum coating technology, all coating companies are thinking about how to reduce the cost of vacuum coating process to enhance competitiveness. Generally speaking, most of the vacuum coating processes used in the current vacuum coating process are due to continuous coating equipment. Continuous coating equipment mostly uses in-line (jn - L i ❹11 e ) design, each coating process is connected by cavity to form a continuous multi-chambw_t process, compared with the traditional batch Compared with the batch type or wafer type process method, it has the effect of greatly reducing production cost and improving mass production efficiency, thereby enhancing the competitiveness of the manufacturer. ° In the continuous vacuum coating process, the cavity configuration is divided into three major blocks: the feed cavity, the coating cavity and the discharge cavity. The workpiece to be plated is carried by the carrier and receives the cavity transportation mechanism. The filming process is carried out, 3 201038760 However, after the workpiece is finished in the cavity in the cavity, if the carrier is removed from the coating device, the supply of the carrier must match the amount of the workpiece 1. Mass production In the case of the process, the carrier must be prepared in the process; the number is suspected to be the cost burden of the manufacturer. Therefore, it is necessary to design a set of circulating devices to enable the carrier to be transported and then sent back to the starting point of the process to re-take the new workpiece to be keyed. This can greatly reduce production costs. Circulating conveyance of a conventional continuous coating apparatus ^ ^ ^ ^ ^ ^ , , a clothing line is installed outside the coating apparatus and coupled to the feeding chamber and the discharge chamber to form A transport cycle; ♦ Christine Gudin batches to ",, clothing field carrying the workpiece tray from the cycle through the mineral film cavity to complete the coating process, and then leave the discharge cavity, #ά了说^ silly Transferring the carrier carrying:: back to the starting point by the β Xuanxuan conveying device, and then removing the workpiece from the operator and placing another workpiece on the carrier plate The coating process of another workpiece to be plated is continued. However, the above-mentioned cyclic conveying method is external to the mining equipment, and the overall equipment configuration is slightly "the mouth will occupy a large space of the plant, resulting in low efficiency of the space utilization of the plant. In addition, it is necessary for a person to perform the process of removing the workpiece and placing the workpiece, which not only increases the personnel cost, but also produces the disadvantages of the birth, for example, the operation process of the ancient industry. Inadvertently made It may be caused by the operator's accident that the workpiece collides or falls in the #rr. The material is tilted and the process is delayed, resulting in an increase in the efficiency of the workmanship, and the accidental drop of the workpiece is more bruised. The operator is responsible for the accident of the work safety. If the U-Lai can combine the circulating transfer device with the coating equipment and let the workpiece 4 201038760 not return to the starting point of the transfer, and then enter the production chamber, the program can be entered immediately after leaving the discharge chamber. The invention saves space utilization efficiency and forms a self-property production process to improve process efficiency. SUMMARY OF THE INVENTION The present inventors have in view of the above-mentioned conventional transportation system, which may cause occupational space and artificial efficiency. Missing, is actively engaged in research, in order to solve the above problems, after continuous experimentation and efforts, finally the invention. The main purpose of the invention is to provide - the two ends of the continuous money film equipment and below, In order to save the space of the plant and to raise and recycle the system. In order to achieve the above object, the invention adopts the invention. The following technical means achieve that 'the circulating conveying system of the continuous mineral membrane apparatus of the present invention' is matched with a feeding zone, at least one coating zone connected to the feeding zone, and a connection to the coating zone The continuous coating device of the material zone, the transmission reclamation provided in the feeding zone, the mining film zone and the discharging zone comprises: two lifting devices, which are respectively disposed at the front end of the feeding zone and after the discharging zone The end portion can be raised and lowered to a desired height, and includes: a middle-body frame, which is a three-dimensional frame formed by a plurality of frames and a plurality of rod bodies; - a main lifting unit, which is symmetrically arranged One side of the main truss has a reciprocating moving element; a power source is disposed at the top of the main lifting unit and connected to the top of the other main lifting unit by a transmission 5 201038760 shaft The lifting unit (four) material unit is disposed in the domain frame (4) on the side of the main lifting early, each having a reciprocating moving component; the Ai 7 - the carrying platform 'the side is fixed to The moving component of the main lifting unit, the other side is S) is connected to the moving component of the auxiliary lifting unit; a transmission device is fixedly disposed on the loading platform; ο the complex array returning device is respectively disposed in the feeding zone The returning device disposed below the discharge zone and the discharge zone is connected to each other, and the returning device disposed under the feeding zone and the discharge zone is respectively connected to the transmission device of the second lifting device. According to the above structure, the circulating conveying system of the continuous film mining equipment of the present invention transmits a workpiece carrier to the feeding zone by a transmission device of the lifting device located at the front end of the feeding zone, and then, by the continuous clock The transmission device of the membrane device itself transports the carrier carrying the workpiece from the feeding zone through the mineral film zone and the discharge zone to the ore-forming membrane operation, and then 'takes by the transmission device of the lifting device located at the rear end of the discharge zone The carrier carrying the workpiece, after which the workpiece is separated from the carrier and proceeds to the next stage of the process, and the carrier is lowered by the transmission of the lifting device at the rear end of the discharge area to be equal to the returning device The height of the lifting device is transported by the returning device to the lifting device at the front end of the feeding zone, at which time the transmission of the lifting device at the front end of the feeding zone has been lowered to the south of the returning split to receive the carrier Then, it rises to the height of the guards to take over the other workpieces, and then carries out the subsequent transfer and mining operation. Repeatedly through the above-mentioned working procedure, the circulating conveying system of the continuous coating apparatus of the present invention can establish an automatic circulation conveying mode, and the carrier is repeatedly conveyed to the continuous bell membrane apparatus after the workpiece is introduced or the workpiece is separated. Between the two lifting devices, the conventional transportation system is improved, and the lack of efficiency is caused by the space of the factory and the efficiency of the work. [Embodiment] Referring to Figures 4 and 4, the circulating conveying system and system of the continuous mineral film equipment of the present invention are matched with a feeding zone (ii) and a small-connected to the 11) The ore (12) and the continuous coating of the discharge zone (13) of the coating zone (12) the feed zone ((1), the film zone (12) 1, and the discharge zone ( Ο 均 are each provided with a conveying device (14), the circulating conveying system comprising: - lifting device (2 1 ), respectively arranged in the feeding zone (the front end and the discharge zone (1 replacement body grouped two: The frame (211)' is composed of a plurality of frame bodies (21 12 1 main lifting unit (212), which are symmetrically disposed on the main frame: the inner side, each of which has a reciprocating moving element (2 4 - the power source (2 1 3) is placed at the top of the - main lifting unit (2丄, the top end and the drive shaft (214) is connected to the other main 2); the tether is placed in the main frame (2 2) One side, each having a second auxiliary lifting unit (2 1 5), 1 1 ) is different from the main lifting unit (2 1 can move the moving element in the complex movement (2 1 5 1); - the carrying platform (2 1 6 ) 'the side is fixed to the main lifting unit (2 moving parts (2 1 2 1), the other side is fixed to the auxiliary lifting list < 丄 5) The moving component (2 1 5 1 ); 7 201038760, the transmission device (2 2 ) is fixedly disposed on the carrying platform (2丄6); the complex array returning device (23) is respectively disposed in the coating zone ( 1 2), 屮 sister factory / 1 ; set in the feeding area (= 13), below and mutually connected '3) respectively connected to the: 1 3) below the return device (2 lifting device (21) The transmission device (22), the carrying platform (2 16) is different from the main lifting unit (2 working and auxiliary lifting unit (? ς ^ 5) on the opposite side of the two ends respectively provided with a roller (2 Ο ❹ The body frame (2=two-drop mechanism (21) further includes two auxiliary baffle units respectively disposed on the two sides of the main descending unit (2 1 2) and the auxiliary rising γ unit f 9 π 7 (2 1 7), the auxiliary teeth 1 7) include an upper setting portion (2 i 7 working) and a lower setting portion (2 17 〇, r 9 ) and a fixed end at each end to The belt belt (2 173) of the upper setting portion 1) and the lower setting portion (2 working 7 2) is first wound around the roller (= β (71) to the lower setting portion (21 () 2(1)) The upper edge. When the lower edge of the 16U is wound around the other roller and the source (2 1 3) starts to operate, the power is output to the main lifting unit through the power source (2 1 3 ) 2 - (214). (212), the Π Π / 2 1 2 1 ) drives the carrying platform (2 1 6 ) to perform the ascending and ... movement, while the auxiliary lifting unit (2 (1) receives an external main force to move the component ( 2151) The moving tree (2 1 5 1 ) that also moves the moving element (212 or descends 2 1 5 ) of the auxiliary lifting unit (212) can simultaneously rise and lower the moving weight of the carrying unit (216) Turn it to the smoothness of the (four) financial. The belt (2173) of the auxiliary branch #217 (217) extends from the upper P (2 1 7 1) to the lower edge of the roller (2 1 6 1 ) and bypasses the other roller. (2 1 6 1 ) the upper edge, so during the lifting process, the bearing table can be lifted due to the tension of the belt (2 1 7 3 ) and its winding (4) roller (2 i 6 1 ) (2 1 6) the stability of the movement, and the carrying platform (2 i 6) can accept the support of the belt (2173) without causing the moving element to be heavy due to the weight of the carrying object (2 1 2 1 , 2 i 5 χ ) is unbearable, and has a negative impact on the smoothness of the long load platform (216) when lifting. 〇3外'凊 Referring to the second and fifth figures, the transmission device (22) has two erecting plates (2 2 i ) arranged in parallel with each other, and a plurality of aluminum squeezing disposed between the two erecting plates (2 2 1) a frame strip (2 2 2 ), a plurality of guide wheels (2 2 3 ) symmetrically disposed on the inner side of the two-plates (2 2 1 ), and a plurality of guide wheels (2 2 1 ) disposed outside the mounting plate (2 2 1 ) and The guide wheel (2 2 ′′ interlocking timing wheel (2 2 4), a driving belt (2 2 5) surrounding the plurality of timing wheels (2 2 4 ) and two are respectively disposed on the two Between the two ends of the erection plate (2 2 i ) and connected to the linkage shaft (226) of the guide wheel (223). 〇 者 ' 研 参考 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二The system further includes a workpiece receiving transmission (24) disposed on the squeezing frame strip (2 2 2 ) of the transmission device (2 2) and movable up and down in the transmission device (22), a displacement unit (241) and a transmission unit (2 4 2 ) disposed on the displacement unit (2 4 1 ), wherein the 忒 displacement single t1 (2 4 1 ) has a fixed connection to the transmission device (2 2 ) No squeeze a fixed platform (24丄丄) of the split frame 2 2), a pneumatic rainbow (^ 12) disposed on the fixed platform (2 4 1 1 ) and having a piston rod (2 4 working 2丄), and a plurality of a linear bearing (2 9 201038760 4 1 3) disposed on the fixed platform (241丄) and a plurality of support 'shafts (24 1 4) reciprocatingly moving to the linear bearing (2 4 1 3); the transfer unit ( 242) having a base plate (2 4 2 1 ) fixed to the piston, a rod (24121) and a top end of the support shaft body (2414), and two fixing plates disposed on the base platform (2 4 2 1 ) in parallel ( 2 4 2 2 ) and a plurality of transfer shafts ( 2 4 2 3 ) rotatably disposed between the two fixed plates (2 4 2 2). In addition, the loopback device (23) is coupled to the transfer unit ( The structure of 232) is the same and will not be described here. In this embodiment, the circulating conveying system of the continuous coating device is applied to the glass substrate sputtering process, and the carrying platform of the two lifting device (21) (2) 1 6) In the process, the computer program is set and controlled to move up and down to stay in the low, medium and high positions, which are respectively the bearing back position, The receiving/separating position of the glass substrate and the height position of the process chamber are as follows: First, the monthly reference to the first, second, fifth and sixth to eighth figures, a workpiece carrier (not shown) placed on the transmission (2 2) The receiving/separating position of the carrying platform of the lifting device (2 1 ) at the front end is transmitted from an external source. The feeding zone (1 1 )
接收該玻璃基板（3 )，Receiving the glass substrate (3),
的氣壓缸（2 4 1 2) (2 4 2 3 )受一外部動力源驅動後可 並且當s亥玻璃基板被傳送到達定位後， ;接著，該位移單元（241) ，使該玻璃 即下降該傳送單元（2 4 2 )， 201038760 基板（3)落於該工件载盤之上。 然後，為進料區（1 前端之升降裝f 之 ’承載台（216)便上升至製程腔體高度位置，該傳動裝置 (2 2)接爻一外部動力源的驅動，使得該導輪（2 2 3)、時 規輪（2 2 4 )、傳動皮帶（2 2 5 )與連動轴（2 2 6 )產生 連動，進而將該載有玻璃基板（3 )之卫件載盤傳動送入該進料 區（1丄），並由該進料區（1 1 )、鍍膜區（i 2 )以及 Ο Ο 出料區（1 3 )之輸送裝置（“）接續地輸送該載有玻璃 基板之工件載盤以進行減鑛製程。 當該濺鑛製程完成時，位於該出料區（工3 )後端之升降 裝置（21)的承載台（216)已處於製程腔體高度位 置待命，準備承接離開該出料區（i 3 )的載有玻璃基板（3 ) 之工件載盤，承接之後，該承載台（2丄6 )便下降至玻璃基 板接收/分離位置，此時，該工件接收傳動裝置（Μ) 之位移單元（241)的氣壓缸（2412)即進行頂升動作以 將该玻璃基板（3 )頂升離開該工件載盤，接著，該傳送單元（2 4 2 )之傳送軸（2 4 2 3 )受一外部動六、、「去& 力源驅動後，將該玻璃 基板傳送離開該升降裝置（2 1 ) ，# Λ ^ 接收以進入下—階段製程。 由另-外部傳動機構 再者’請參考第一、二、五及八圖，該氣 ^下降該傳送單元（2 4 2 )後，該承裁台（216)即= 至載盤回傳承接位置’由該傳動裝置（22)將該工件 入該出料區（13)，並由該出料區（iq、 送 丄°5〕、鍍膜區 以及進料區（11：)下方之回送裝置 ） 盤回傳至進料區（i工）前端之升降裝置（2 /將該工件载 201038760 此時，該進料區（11)前端之升降裝置（2i)的 承載台㈠已位於載盤回傳承接位置待命，由其傳動 裝置（22)承接該工件《，—旦該工件㈣歸至定位， 該傳動裳置（2 2)便停止作動，繼而讓該承載台（2 i 6) 上升至破璃基板接收/分離位置準備接收另—玻璃基板以 進行濺鍍製程。 故本發明連續式鑛膜設備之循環輸送系統，透過其升 〇 〇 降裝置、傳動裝置、工件接收傳動裝置以及回送裝置，並搭配 連續式㈣設備本身的輸送裝置，便可創造—循環輸送之 模式，不僅可依照該連續式㈣設備之鍍膜區多寡配置回送 裝置之數量，更可在製程中運用複數個卫件載盤循環重複地 “載待鍍件’以自動化取代人力而提升整體製程運作效 :二另外’將回送裝置設置於該連續式鍍膜設備各區下方更 疋即’ m ’可增加廠房可用空間以提升利用效率，惟以 述者僅為本發明之較佳實施例，當不能以此限定本 :明實：之範圍"欠，凡依本發明申請專利範圍及創作說 月書内合所作之簡單的等效變化與修_，皆應仍屬本發明 專利涵蓋之範圍内。 【圖式簡單說明】 第一圖係本發明之作業流程示意圖。 第一圖係本發明之升降裝置作動示意圖。 第三圖係本發明之升降裝置立體圖。 第四圖係本發明之升降裝置内部組件立體圖。 第五圖係本發明之傳動裝置俯視圖。 第/、圖係本發明之工件接收傳動裝置俯視圖。 12 201038760 第七圖係本發明之工件接收傳動裝置側視圖。 ' 第八圖係本發明之工件接收傳動裝置前視圖。 【主要元件符號說明】 (11)進料區 （12)鍍膜區 (13)出料區 （14)輸送裝置 (21)升降裝置 （211)主體框架 (212)主要升降單元（2121)移動元件 (2 1 3 )動力源 （2 1 4 )傳動軸 0 (215)輔助升降單元（2151)移動元件 (216)承載台 （2161)滾輪 (2 1 7)輔助支撐單元（2 1 7 1 )上設置部 (2172)下設置部 （2173)皮帶 (2 2 )傳動裝置 （2 2 1 )架設板 (222)鋁擠型框條 （223)導輪 (224)時規輪 （225)傳動皮帶 (226)連動軸 （23)回送裝置 Q (24)工件接收傳動裝置位移單元 (241) 位移單元 （2411)固定平台 (2412) 氣壓缸 （24121)活塞桿 (2413) 直線軸承 （2414)支撐軸體 (242) 傳送單元 （2421)基礎平台 (2422)固定板 （2423)傳送軸 (3 )玻璃基板 13The pneumatic cylinder (2 4 1 2) (2 4 2 3 ) is driven by an external power source and can be used when the glass substrate is transported to the position, and then the displacement unit (241) causes the glass to drop. The transfer unit (2 4 2 ), 201038760 substrate (3) falls on the workpiece carrier. Then, the loading station (216) of the loading and unloading zone (1 front end of the lifting device f) rises to the height position of the process chamber, and the transmission device (2 2) is driven by an external power source to make the guide wheel ( 2 2 3), the timing wheel (2 2 4 ), the transmission belt (2 2 5 ) and the linkage shaft (2 2 6 ) are interlocked, and the transmission of the satellite carrier carrying the glass substrate (3) is transmitted. The feeding zone (1丄), and the conveying device ("2) of the feeding zone (1 1 ), the coating zone (i 2 ) and the Ο Ο discharge zone (1 3 ) successively transport the glass substrate The workpiece carrier is subjected to a demining process. When the sputtering process is completed, the carrying platform (216) of the lifting device (21) located at the rear end of the discharging area (work 3) is already in the process chamber height position. Preparing to receive the workpiece carrier carrying the glass substrate (3) leaving the discharge zone (i3), after the receiving, the loading platform (2丄6) is lowered to the receiving/disengaging position of the glass substrate, at this time, the workpiece The pneumatic cylinder (2412) of the displacement unit (241) of the receiving transmission (Μ) performs a jacking action to lift the glass substrate (3) off The workpiece carrier tray, and then the transfer shaft (2 4 2 3 ) of the transfer unit (2 4 2 ) is driven by an external movement, and the glass substrate is transported away from the lifting device ( 2 1 ) , # Λ ^ Receive to enter the next-stage process. From the other-external transmission mechanism, please refer to the first, second, fifth and eighth diagrams. After the gas drops the transmission unit (2 4 2 ), The cutting table (216) = = to the carrier back to the receiving position 'the workpiece (22) into the discharge area (13) by the transmission (22), and from the discharge area (iq, send 丄 ° 5) , the coating area and the returning device under the feeding area (11:)) The lifting device that is transferred back to the front end of the feeding area (i) (2 / the workpiece is carried 201038760 at this time, the front end of the feeding area (11) The carrying platform (1) of the lifting device (2i) is already in the position where the carrier is returned to the receiving position, and the workpiece is received by the transmission device (22), and the workpiece (4) is returned to the positioning, and the transmission is placed (2 2) Stopping the operation, and then the loading platform (2 i 6) is raised to the receiving/separating position of the broken substrate to prepare to receive the other glass substrate for performing Plating process. Therefore, the circulating conveying system of the continuous mining membrane equipment of the present invention can be created through its lifting and lowering device, transmission device, workpiece receiving transmission device and returning device, and with the continuous (4) equipment itself, The mode of recirculating transportation can not only be configured according to the number of coating devices of the continuous (4) equipment, but also can be used in the process by repeatedly using a plurality of guarding discs to repeatedly "load the parts to be automated" instead of manpower. The overall process operation efficiency: two additional 'set the return device below the various areas of the continuous coating equipment, that is, 'm' can increase the available space of the plant to improve the utilization efficiency, but the description is only the preferred embodiment of the present invention. When it is not possible to limit this: the scope of the truth: the owe, the simple equivalent changes and repairs made in accordance with the scope of the invention and the creation of the monthly book are still covered by the patent of the invention. Within the scope. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram of the operation flow of the present invention. The first figure is a schematic diagram of the operation of the lifting device of the present invention. The third figure is a perspective view of the lifting device of the present invention. The fourth figure is a perspective view of the internal components of the lifting device of the present invention. Figure 5 is a top plan view of the transmission of the present invention. The figure / is a top view of the workpiece receiving transmission of the present invention. 12 201038760 The seventh drawing is a side view of the workpiece receiving transmission of the present invention. The eighth drawing is a front view of the workpiece receiving transmission of the present invention. [Description of main component symbols] (11) Feeding zone (12) Coating zone (13) Drainage zone (14) Conveying device (21) Lifting device (211) Main frame (212) Main lifting unit (2121) Moving element ( 2 1 3) Power source (2 1 4) Drive shaft 0 (215) Auxiliary lifting unit (2151) Moving element (216) Carrier (2161) Roller (2 1 7) Auxiliary support unit (2 1 7 1 ) Part (2172) lower setting part (2173) belt (2 2) transmission (2 2 1 ) erecting plate (222) aluminum extruded frame strip (223) guide wheel (224) timing wheel (225) transmission belt (226 ) linkage shaft (23) return device Q (24) workpiece receiving transmission displacement unit (241) displacement unit (2411) fixed platform (2412) pneumatic cylinder (24121) piston rod (2413) linear bearing (2414) support shaft ( 242) Transfer unit (2421) base platform (2422) fixed plate (2423) transfer shaft (3) glass substrate 13