CN108987523A - 红外焦平面探测器及其制备方法 - Google Patents
红外焦平面探测器及其制备方法 Download PDFInfo
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- CN108987523A CN108987523A CN201710600470.5A CN201710600470A CN108987523A CN 108987523 A CN108987523 A CN 108987523A CN 201710600470 A CN201710600470 A CN 201710600470A CN 108987523 A CN108987523 A CN 108987523A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 84
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 84
- 239000010703 silicon Substances 0.000 claims abstract description 84
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 229910052738 indium Inorganic materials 0.000 claims abstract description 37
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 22
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 39
- 238000000137 annealing Methods 0.000 claims description 17
- 238000002161 passivation Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 13
- 239000004568 cement Substances 0.000 claims description 12
- 239000000243 solution Substances 0.000 claims description 9
- 238000003475 lamination Methods 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 230000003667 anti-reflective effect Effects 0.000 claims description 3
- 239000000571 coke Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 230000014759 maintenance of location Effects 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 69
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000005057 refrigeration Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
- H01L31/1035—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type the devices comprising active layers formed only by AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1443—Devices controlled by radiation with at least one potential jump or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN2017104140688 | 2017-06-05 | ||
CN201710414068 | 2017-06-05 |
Publications (1)
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CN108987523A true CN108987523A (zh) | 2018-12-11 |
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CN201710600470.5A Pending CN108987523A (zh) | 2017-06-05 | 2017-07-21 | 红外焦平面探测器及其制备方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109742096A (zh) * | 2018-12-24 | 2019-05-10 | 中国电子科技集团公司第十一研究所 | 大阵列规模红外探测器地线结构 |
CN110021617A (zh) * | 2019-03-29 | 2019-07-16 | 中国科学院上海技术物理研究所 | 一种InGaAs雪崩焦平面探测器的串扰抑制结构 |
CN110487203A (zh) * | 2019-07-10 | 2019-11-22 | 中国科学院上海技术物理研究所 | 一种校正红外焦平面探测器电路面形的结构 |
CN112086436A (zh) * | 2020-09-21 | 2020-12-15 | 中国科学院长春光学精密机械与物理研究所 | 一种日盲紫外焦平面成像探测器及其制作方法 |
CN113130676A (zh) * | 2021-04-16 | 2021-07-16 | 中国科学院半导体研究所 | 焦平面红外探测器芯片、探测器和制备方法 |
CN114664974A (zh) * | 2022-02-15 | 2022-06-24 | 中国电子科技集团公司第十一研究所 | 红外焦平面器件芯片及制备方法、读出电路及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102867886A (zh) * | 2012-09-06 | 2013-01-09 | 中国电子科技集团公司第十一研究所 | 应用双色红外材料制备探测器芯片的方法及系统 |
CN106342344B (zh) * | 2009-10-21 | 2013-05-15 | 中国空空导弹研究院 | 一种锑化铟红外焦平面阵列探测器芯片及其制造方法 |
CN103199156A (zh) * | 2013-03-29 | 2013-07-10 | 中国科学院半导体研究所 | InSb晶片与Si晶片键合的方法 |
CN106508076B (zh) * | 2010-12-06 | 2014-02-19 | 中国空空导弹研究院 | 一种借助硅实现大片锑化铟阵列芯片的转移方法 |
CN105826421A (zh) * | 2016-05-12 | 2016-08-03 | 昆明物理研究所 | 一种铟凸点器件结构及其制备方法 |
CN105870097A (zh) * | 2016-04-01 | 2016-08-17 | 武汉高芯科技有限公司 | 一种高像素红外焦平面探测器及其制备方法 |
-
2017
- 2017-07-21 CN CN201710600470.5A patent/CN108987523A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106342344B (zh) * | 2009-10-21 | 2013-05-15 | 中国空空导弹研究院 | 一种锑化铟红外焦平面阵列探测器芯片及其制造方法 |
CN106508076B (zh) * | 2010-12-06 | 2014-02-19 | 中国空空导弹研究院 | 一种借助硅实现大片锑化铟阵列芯片的转移方法 |
CN102867886A (zh) * | 2012-09-06 | 2013-01-09 | 中国电子科技集团公司第十一研究所 | 应用双色红外材料制备探测器芯片的方法及系统 |
CN103199156A (zh) * | 2013-03-29 | 2013-07-10 | 中国科学院半导体研究所 | InSb晶片与Si晶片键合的方法 |
CN105870097A (zh) * | 2016-04-01 | 2016-08-17 | 武汉高芯科技有限公司 | 一种高像素红外焦平面探测器及其制备方法 |
CN105826421A (zh) * | 2016-05-12 | 2016-08-03 | 昆明物理研究所 | 一种铟凸点器件结构及其制备方法 |
Non-Patent Citations (1)
Title |
---|
李忠贺 等: "平面PN结InSb红外焦平面探测器的研究", 《激光与红外》 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109742096A (zh) * | 2018-12-24 | 2019-05-10 | 中国电子科技集团公司第十一研究所 | 大阵列规模红外探测器地线结构 |
CN109742096B (zh) * | 2018-12-24 | 2021-02-19 | 中国电子科技集团公司第十一研究所 | 大阵列规模红外探测器地线结构 |
CN110021617A (zh) * | 2019-03-29 | 2019-07-16 | 中国科学院上海技术物理研究所 | 一种InGaAs雪崩焦平面探测器的串扰抑制结构 |
CN110487203A (zh) * | 2019-07-10 | 2019-11-22 | 中国科学院上海技术物理研究所 | 一种校正红外焦平面探测器电路面形的结构 |
CN112086436A (zh) * | 2020-09-21 | 2020-12-15 | 中国科学院长春光学精密机械与物理研究所 | 一种日盲紫外焦平面成像探测器及其制作方法 |
CN113130676A (zh) * | 2021-04-16 | 2021-07-16 | 中国科学院半导体研究所 | 焦平面红外探测器芯片、探测器和制备方法 |
CN114664974A (zh) * | 2022-02-15 | 2022-06-24 | 中国电子科技集团公司第十一研究所 | 红外焦平面器件芯片及制备方法、读出电路及其制备方法 |
CN114664974B (zh) * | 2022-02-15 | 2023-10-27 | 中国电子科技集团公司第十一研究所 | 红外焦平面器件芯片及制备方法、读出电路及其制备方法 |
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