CN108863336B - 一种镍系微波铁氧体基片材料及其制备方法 - Google Patents

一种镍系微波铁氧体基片材料及其制备方法 Download PDF

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CN108863336B
CN108863336B CN201810815703.8A CN201810815703A CN108863336B CN 108863336 B CN108863336 B CN 108863336B CN 201810815703 A CN201810815703 A CN 201810815703A CN 108863336 B CN108863336 B CN 108863336B
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马志强
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Beijing Institute of Radio Measurement
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Abstract

本发明公开一种镍系微波铁氧体基片材料及其制备方法。本发明首先公开了一种镍系微波铁氧体基片材料,该材料为尖晶石结构,其化学式为Ni1‑a‑bZnaCubMnc(MgTi)dFe2‑c‑d‑eO4,其中0≤a≤0.4,0≤b≤0.2,0.04≤c≤0.1,0≤d≤0.3,0≤e≤0.2,e为工艺缺铁量。本发明还提供了上述镍系微波铁氧体基片材料的制备方法。本发明镍系微波铁氧体基片材料显微结构均匀,缺陷少,晶粒平均直径5~10μm,制作成片状产品,抛光后基片表面缺陷小,等效圆直径Φ≤30μm,基片强度高,使用过程中不易断裂。

Description

一种镍系微波铁氧体基片材料及其制备方法
技术领域
本发明涉及材料领域。更具体地,涉及一种镍系微波铁氧体基片材料及其制备方法。
背景技术
随着通讯领域、军事技术的迅猛发展,微波电子元器件逐步形成高频化、小型化、片式化的发展趋势。微带器件在逐步向高频发展时,其尺寸越来越小,越来越薄,器件微波损耗随之逐步增大。常用于高频的微波铁氧体材料,没有针对微带器件的片式化需求进行优化,不仅会引起材料损耗增大,还会导致基片抛光后表面缺陷面积较大,造成器件生产时批次性质量问题。
因此,需要一种低损耗的微波铁氧体,即满足高频应用对材料高饱和磁化强度的要求,又满足其低损耗、基片可加工性的需求。
发明内容
本发明的一个目的在于提供一种镍系微波铁氧体基片材料,解决目前高频铁氧体微带器件用镍系基片材料抛光效果差,易断裂的问题。
本发明的另一个目的在于提供一种上述镍系微波铁氧体基片材料的制备方法。
为达到上述目的,本发明采用下述技术方案:
本发明提供了一种镍系微波铁氧体基片材料,该材料为尖晶石结构,其化学式为Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中0≤a≤0.4,0≤b≤0.2,0.04≤c≤0.1,0≤d≤0.3,0≤e≤0.2,e为工艺缺铁量。
本发明还提供了上述镍系微波铁氧体基片材料的制备方法,包括以下步骤:
配料:按化学式Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中0≤a≤0.4,0≤b≤0.2,0.04≤c≤0.1,0≤d≤0.3,0≤e≤0.2,e为工艺缺铁量计算并称取各原料,所述原料为Fe2O3、NiO、ZnO、CuO、MgO、TiO2、MnCO3
一次球磨:将各原料、钢球和弥散剂混合进行一次球磨,得到一次料浆;
一次烘干:将一次料浆烘干,得到一次粉料;
预烧:将一次粉料进行预烧;
二次球磨:在预烧后的一次粉料中加入钢球和弥散剂进行二次球磨,得到二次料浆;
二次烘干:将二次料浆烘干,得到二次粉料;
造粒:在二次粉料加入粘合剂进行造粒,得到粒料;
成型:将粒料成型,得到压坯;
烧结。
本发明中配方设计时避免使用导致铁磁共振线宽进一步增大的Al3+置换Fe3+,而是用Zn2+、Mg2+、Ti4+联合取代置换Ni2+、Fe3+,调节材料的饱和磁化强度、降低材料损耗。选用CuO作为助熔剂,能够有效的降低烧结温度,避免高温下Zn2+离子挥发,引起成分偏析或气孔增多,造成材料损耗增大。制备的低损耗镍系微波铁氧体基片材料晶粒尺寸均匀,晶界清晰,晶粒完整,无晶粒异常长大,从而提高材料在抛光工序的可加工性,特别适用于表面需要抛光处理的微带器件的制造。
进一步,所述一次球磨中各原料的总质量、钢球和弥散剂的质量比为1:2~4:2,球磨时间24~32h;优选的,所述弥散剂为水。
进一步,所述预烧中预烧温度控制为900℃~950℃,保温时间3~5h。
进一步,所述二次球磨中所述预烧后的一次粉料、钢球和弥散剂的质量比1:2~4:1.5,球磨时间24~32h;优选的,所述弥散剂为水。
进一步,所述造粒中粘合剂为聚乙烯醇水溶液,其添加量为二次粉料重量的10~18wt%;粘合剂添加量会对造粒后的颗粒大小、粒度分布以及材料电磁性能造成极大影响。粘合剂过多,烧结后粘合剂挥发不充分,易存有残留物,造成材料损耗偏大;粘合剂过少,造粒后颗粒呈粉状,成型时压坯强度低,易开裂。
进一步,所述造粒后的粒料的含水量为3.0~6.0wt%。
进一步,所述成型中成型压力为1000~1600kg/cm2,成型密度为3.1~3.4g/cm3;造粒后的粒料的含水量对成型密度造成极大影响:含水量过低,粒料中粘合剂易失活,导致成型密度降低,烧结后材料密度降低,可加工性下降,造成材料抛光后表面光洁度差,进而影响基片镀膜的膜层强度,造成批次性质量问题。
进一步,所述烧结中烧结温度为1160℃~1220℃,保温4~6h。
进一步,所述烧结后得到的产品的内部晶粒平均直径为5~10μm。
进一步,所述制备方法还包括切磨抛;所述切磨抛中将烧结后的产品切成0.5~1.5mm厚的薄片,经双面研磨、抛光后,得到0.2~1.0mm厚的铁氧体基片材料。
本发明的有益效果如下:
本发明镍系微波铁氧体基片材料的饱和磁化强度Ms:148.5kA/m~412.7kA/m,铁磁共振线宽ΔH≤11.9kA/m,介电损耗tanδe≤4*10-4,装配于Ku-Ka波段环形器中,插入损耗≤0.3dB;制备的产品显微结构均匀,缺陷少,晶粒平均直径5~10μm,制作成片状产品,抛光后基片表面缺陷小,等效圆直径Φ≤30μm,基片强度高,使用过程中不易断裂。
具体实施方式
为了更清楚地说明本发明,下面结合优选实施例对本发明做进一步的说明。本领域技术人员应当理解,下面所具体描述的内容是说明性的而非限制性的,不应以此限制本发明的保护范围。
实施例1
一种低损耗镍系微波铁氧体基片材料,尖晶石结构,化学式为Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0.3,b=0.08,c=0.06,d=0.1,e=0.07。制备方法如下:
根据化学式Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0.3,b=0.08,c=0.06,d=0.1,e=0.07,计算并称取各原料;所述原料为Fe2O3、NiO、ZnO、CuO、MgO、TiO2、MnCO3
将各原料、钢球、去离子水装入滚动式球磨机,原料的总质量、钢球、去离子水的质量比为1:3:2,滚动球磨24h。
将一次球磨后的料浆倒入钢盘中,放入烘箱烘干。
将烘干后的粉料装入坩埚中,放入钟罩炉内在空气气氛中烧结,预烧温度控制为950℃,保温时间4h。
将预烧后的粉料、钢球、去离子水装入滚动式球磨机,粉料、钢球、去离子水的质量比为1:3:1.5,滚动球磨24h。
将二次球磨后的料浆倒入钢盘中,放入烘箱烘干,得到二次粉料。
将二次粉料重量的16wt%的聚乙烯醇水溶液加入料浆中进行造粒。
将造粒后的粒料含水自然晾晒至5.2wt%,用压机压制成相应的压坯坯件,压坯的成型压力为1400kg/cm2,压坯的成型密度为3.3g/cm3
将压坯装入匣钵中,放入钟罩炉中在空气气氛中烧结,烧结温度1200℃,保温时间4h。
将烧结后的产品整形后,在线切割机中切成1mm厚的薄片,经双面研磨、抛光,制成0.5mm厚的铁氧体基片材料。
加工后基片的基本性能如表1所示。
实施例2
一种低损耗镍系微波铁氧体基片材料,尖晶石结构,化学式为Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0.4,b=0,c=0.04,d=0,e=0.2。制备方法如下:
根据化学式Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0.4,b=0,c=0.04,d=0,e=0.2,计算并称取原料;所述原料为Fe2O3、NiO、ZnO、CuO、MgO、TiO2、MnCO3
将称好的原料、钢球、去离子水装入滚动式球磨机,原料的总质量、钢球、去离子水的质量比为1:2:2,滚动球磨28h。
将一次球磨后的料浆倒入钢盘中,放入烘箱烘干。
将烘干后的粉料装入坩埚中,放入钟罩炉内在空气气氛中烧结,预烧温度控制为900℃,保温时间3h。
将预烧后的粉料、钢球、去离子水装入滚动式球磨机,粉料、钢球、去离子水的质量比为1:2:1.5,滚动球磨28h。
将二次球磨后的料浆倒入钢盘中,放入烘箱烘干,得到二次粉料。
将二次粉料重量的10wt%的聚乙烯醇水溶液加入料浆中进行造粒。
将造粒后的粒料含水自然晾晒至3.0wt%,用压机压制成相应的压坯坯件,压坯的成型压力为1000kg/cm2,压坯的成型密度为3.1g/cm3
将压坯装入匣钵中,放入钟罩炉中在空气气氛中烧结,烧结温度1160℃,保温时间6h。
将烧结后的产品整形后,在线切割机中切成0.5mm厚的薄片,经双面研磨、抛光,制成0.2mm厚的铁氧体基片材料。
加工后基片的基本性能如表1所示。
实施例3
一种低损耗镍系微波铁氧体基片材料,尖晶石结构,化学式为Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0,b=0.2,c=0.1,d=0.3,e=0。制备方法如下:
根据化学式Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中a=0,b=0.2,c=0.1,d=0.3,e=0,计算并称取原料;所述原料为Fe2O3、NiO、ZnO、CuO、MgO、TiO2、MnCO3
将称好的原料、钢球、去离子水装入滚动式球磨机,原料的总质量、钢球、去离子水的质量比为1:4:2,滚动球磨32h。
将一次球磨后的料浆倒入钢盘中,放入烘箱烘干。
将烘干后的粉料装入坩埚中,放入钟罩炉内在空气气氛中烧结,预烧温度控制为920℃,保温时间5h。
将预烧后的粉料、钢球、去离子水装入滚动式球磨机,粉料、钢球、去离子水的质量比为1:4:1.5,滚动球磨32h。
将二次球磨后的料浆倒入钢盘中,放入烘箱烘干,得到二次粉料。
将二次粉料重量的18wt%的聚乙烯醇水溶液加入料浆中进行造粒。
将造粒后的粒料含水自然晾晒至6.0wt%,用压机压制成相应的压坯坯件,压坯的成型压力为1600kg/cm2,压坯的成型密度为3.4g/cm3
将压坯装入匣钵中,放入钟罩炉中在空气气氛中烧结,烧结温度1220℃,保温时间6h。
将烧结后的产品整形后,在线切割机中切成1.5mm厚的薄片,经双面研磨、抛光,制成1.0mm厚的铁氧体基片材料。
加工后基片的基本性能如表1所示。
表1实施例1-3铁氧体基片材料的各项性能测试记录
Figure BDA0001740261510000051
显然,本发明的上述实施例仅仅是为清楚地说明本发明所作的举例,而并非是对本发明的实施方式的限定,对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动,这里无法对所有的实施方式予以穷举,凡是属于本发明的技术方案所引伸出的显而易见的变化或变动仍处于本发明的保护范围之列。

Claims (13)

1.一种镍系微波铁氧体基片材料,其特征在于,所述材料为尖晶石结构,其化学式为Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中0≤a≤0.4,0≤b≤0.2,0.04≤c≤0.1,0<d≤0.3,0≤e≤0.2,e为工艺缺铁量,a、b不同时为0。
2.一种如权利要求1所述的镍系微波铁氧体基片材料的制备方法,其特征在于,包括以下步骤:
配料:按化学式Ni1-a-bZnaCubMnc(MgTi)dFe2-c-d-eO4,其中0≤a≤0.4,0≤b≤0.2,0.04≤c≤0.1,0<d≤0.3,0≤e≤0.2,e为工艺缺铁量,a、b不同时为0,计算并称取各原料,所述原料为Fe2O3、NiO、ZnO、CuO、MgO、TiO2、MnCO3
一次球磨:将各原料、钢球和弥散剂混合进行一次球磨,得到一次料浆;
一次烘干:将一次料浆烘干,得到一次粉料;
预烧:将一次粉料进行预烧;
二次球磨:在预烧后的一次粉料中加入钢球和弥散剂进行二次球磨,得到二次料浆;
二次烘干:将二次料浆烘干,得到二次粉料;
造粒:在二次粉料加入粘合剂进行造粒,得到粒料;
成型:将粒料成型,得到压坯;
烧结。
3.根据权利要求2所述的制备方法,其特征在于,所述一次球磨中各原料的总质量、钢球和弥散剂的质量比为1:2~4:2,球磨时间24~32h。
4.根据权利要求3所述的制备方法,其特征在于,所述弥散剂为水。
5.根据权利要求2所述的制备方法,其特征在于,所述预烧中预烧温度控制为900℃~950℃,保温时间3~5h。
6.根据权利要求2所述的制备方法,其特征在于,所述二次球磨中所述预烧后的一次粉料、钢球和弥散剂的质量比1:2~4:1.5,球磨时间24~32h。
7.根据权利要求6所述的制备方法,其特征在于,所述弥散剂为水。
8.根据权利要求2所述的制备方法,其特征在于,所述造粒中粘合剂为聚乙烯醇水溶液,其添加量为二次粉料质量的10~18wt%。
9.根据权利要求2所述的制备方法,其特征在于,所述造粒后的粒料的含水量为3.0~6.0wt%。
10.根据权利要求2所述的制备方法,其特征在于,所述成型中成型压力为1000~1600kg/cm2,成型密度为3.1~3.4g/cm3
11.根据权利要求2所述的制备方法,其特征在于,所述烧结中烧结温度为1160℃~1220℃,保温4~6h。
12.根据权利要求2所述的制备方法,其特征在于,所述制备方法还包括切磨抛。
13.根据权利要求12所述的制备方法,其特征在于,所述切磨抛中将烧结后的产品切成0.5~1.5mm厚的薄片,经双面研磨、抛光后,得到0.2~1.0mm厚的铁氧体基片材料。
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