CN108705690A - 一种半导体晶圆划片机 - Google Patents
一种半导体晶圆划片机 Download PDFInfo
- Publication number
- CN108705690A CN108705690A CN201810532880.5A CN201810532880A CN108705690A CN 108705690 A CN108705690 A CN 108705690A CN 201810532880 A CN201810532880 A CN 201810532880A CN 108705690 A CN108705690 A CN 108705690A
- Authority
- CN
- China
- Prior art keywords
- adsorption hole
- sucker
- adsorption
- wafer
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810532880.5A CN108705690B (zh) | 2018-05-29 | 2018-05-29 | 一种半导体晶圆划片机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810532880.5A CN108705690B (zh) | 2018-05-29 | 2018-05-29 | 一种半导体晶圆划片机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108705690A true CN108705690A (zh) | 2018-10-26 |
CN108705690B CN108705690B (zh) | 2020-08-25 |
Family
ID=63869931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810532880.5A Active CN108705690B (zh) | 2018-05-29 | 2018-05-29 | 一种半导体晶圆划片机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108705690B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110349903A (zh) * | 2019-07-11 | 2019-10-18 | 冯聪 | 一种新型芯片吸附装置 |
CN112992738A (zh) * | 2021-02-23 | 2021-06-18 | 石小亮 | 一种晶圆用烘干设备 |
CN113437000A (zh) * | 2021-05-26 | 2021-09-24 | 苏雪雯 | 一种安全性能高的晶圆承载盘 |
CN114523296A (zh) * | 2022-03-23 | 2022-05-24 | 湖南省国创电力有限公司 | 一种铜排自动生产线及铜排生产工艺 |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1334583A (en) * | 1970-07-01 | 1973-10-24 | Signetics Corp | Vacuum chuck assemblies |
JP2001070859A (ja) * | 1999-09-06 | 2001-03-21 | Takata Corp | 薄板円板素材の保持構造 |
KR100622989B1 (ko) * | 2004-08-23 | 2006-09-19 | 한국에너지기술연구원 | 흡착제 기공입구 크기 조절방법 |
JP2007048828A (ja) * | 2005-08-08 | 2007-02-22 | Murata Mfg Co Ltd | 板状体の変形処理装置及び該板状体の変形処理方法 |
CN101531007A (zh) * | 2009-04-20 | 2009-09-16 | 友达光电股份有限公司 | 真空吸附装置 |
JP2010228909A (ja) * | 2009-03-25 | 2010-10-14 | Au Optronics Corp | 真空吸引装置 |
JP2013207128A (ja) * | 2012-03-29 | 2013-10-07 | Dainippon Screen Mfg Co Ltd | 基板保持装置、および、基板処理装置 |
CN104422841A (zh) * | 2013-08-30 | 2015-03-18 | 亚克先进科技股份有限公司 | 电子组件的定位装置 |
CN204308553U (zh) * | 2014-11-26 | 2015-05-06 | 苏州高源科技有限公司 | 一种任意吸附平台结构 |
CN204934870U (zh) * | 2015-07-03 | 2016-01-06 | 北京石油化工学院 | 一种激光电弧复合焊焊枪调节装置 |
CN106033050A (zh) * | 2015-01-12 | 2016-10-19 | 由田新技股份有限公司 | 可调整吸附面积的真空吸平装置、料片检测设备及料片移载设备 |
CN206306009U (zh) * | 2016-12-02 | 2017-07-07 | 佛山市顺德区银美精工五金科技有限公司 | 一种双层结构真空吸台 |
CN107186518A (zh) * | 2017-06-19 | 2017-09-22 | 中国工程物理研究院化工材料研究所 | 适于含能材料加工的柔性快调式真空吸盘 |
CN206509006U (zh) * | 2017-01-13 | 2017-09-22 | 昆明理工大学 | 一种水浴孔孔径大小可调的恒温水浴锅 |
CN206692558U (zh) * | 2017-04-24 | 2017-12-01 | 蓝思科技(长沙)有限公司 | 一种通用于大中型尺寸玻璃加工的底座 |
JP6279269B2 (ja) * | 2013-09-25 | 2018-02-14 | 日本特殊陶業株式会社 | 真空吸着装置 |
CN107737711A (zh) * | 2017-12-08 | 2018-02-27 | 南京中研专利技术开发有限公司 | 一种可调节孔径的菜籽用筛分装置 |
CN207092096U (zh) * | 2017-08-14 | 2018-03-13 | 广东建基基础工程有限公司 | 一种静压桩机的新型刮泥装置 |
-
2018
- 2018-05-29 CN CN201810532880.5A patent/CN108705690B/zh active Active
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1334583A (en) * | 1970-07-01 | 1973-10-24 | Signetics Corp | Vacuum chuck assemblies |
JP2001070859A (ja) * | 1999-09-06 | 2001-03-21 | Takata Corp | 薄板円板素材の保持構造 |
KR100622989B1 (ko) * | 2004-08-23 | 2006-09-19 | 한국에너지기술연구원 | 흡착제 기공입구 크기 조절방법 |
JP2007048828A (ja) * | 2005-08-08 | 2007-02-22 | Murata Mfg Co Ltd | 板状体の変形処理装置及び該板状体の変形処理方法 |
JP2010228909A (ja) * | 2009-03-25 | 2010-10-14 | Au Optronics Corp | 真空吸引装置 |
CN101531007A (zh) * | 2009-04-20 | 2009-09-16 | 友达光电股份有限公司 | 真空吸附装置 |
JP2013207128A (ja) * | 2012-03-29 | 2013-10-07 | Dainippon Screen Mfg Co Ltd | 基板保持装置、および、基板処理装置 |
CN104422841A (zh) * | 2013-08-30 | 2015-03-18 | 亚克先进科技股份有限公司 | 电子组件的定位装置 |
JP6279269B2 (ja) * | 2013-09-25 | 2018-02-14 | 日本特殊陶業株式会社 | 真空吸着装置 |
CN204308553U (zh) * | 2014-11-26 | 2015-05-06 | 苏州高源科技有限公司 | 一种任意吸附平台结构 |
CN106033050A (zh) * | 2015-01-12 | 2016-10-19 | 由田新技股份有限公司 | 可调整吸附面积的真空吸平装置、料片检测设备及料片移载设备 |
CN204934870U (zh) * | 2015-07-03 | 2016-01-06 | 北京石油化工学院 | 一种激光电弧复合焊焊枪调节装置 |
CN206306009U (zh) * | 2016-12-02 | 2017-07-07 | 佛山市顺德区银美精工五金科技有限公司 | 一种双层结构真空吸台 |
CN206509006U (zh) * | 2017-01-13 | 2017-09-22 | 昆明理工大学 | 一种水浴孔孔径大小可调的恒温水浴锅 |
CN206692558U (zh) * | 2017-04-24 | 2017-12-01 | 蓝思科技(长沙)有限公司 | 一种通用于大中型尺寸玻璃加工的底座 |
CN107186518A (zh) * | 2017-06-19 | 2017-09-22 | 中国工程物理研究院化工材料研究所 | 适于含能材料加工的柔性快调式真空吸盘 |
CN207092096U (zh) * | 2017-08-14 | 2018-03-13 | 广东建基基础工程有限公司 | 一种静压桩机的新型刮泥装置 |
CN107737711A (zh) * | 2017-12-08 | 2018-02-27 | 南京中研专利技术开发有限公司 | 一种可调节孔径的菜籽用筛分装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110349903A (zh) * | 2019-07-11 | 2019-10-18 | 冯聪 | 一种新型芯片吸附装置 |
CN112992738A (zh) * | 2021-02-23 | 2021-06-18 | 石小亮 | 一种晶圆用烘干设备 |
CN113437000A (zh) * | 2021-05-26 | 2021-09-24 | 苏雪雯 | 一种安全性能高的晶圆承载盘 |
CN113437000B (zh) * | 2021-05-26 | 2023-11-21 | 鄂尔多斯市骁龙半导体有限公司 | 一种安全性能高的晶圆承载盘 |
CN114523296A (zh) * | 2022-03-23 | 2022-05-24 | 湖南省国创电力有限公司 | 一种铜排自动生产线及铜排生产工艺 |
Also Published As
Publication number | Publication date |
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CN108705690B (zh) | 2020-08-25 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200803 Address after: 312500 Shaoxing County, Zhejiang province Xinchang County, Xinchang street, Daming street, Applicant after: XINCHANG HUANGQI ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 210024 Hehai University, No. 1 Xikang Road, Nanjing, Jiangsu Province Applicant before: Li Han |
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GR01 | Patent grant | ||
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Effective date of registration: 20230921 Address after: No. 21 Changsheng Street, Economic Development Zone, Luquan District, Shijiazhuang City, Hebei Province, 050000 Patentee after: Hebei Qingyue Electronic Technology Co.,Ltd. Address before: 312500 Cunxia Street, Daming City, Yulin Street, Xinchang County, Shaoxing City, Zhejiang Province Patentee before: XINCHANG HUANGQI ELECTRONIC TECHNOLOGY Co.,Ltd. |