CN108689592B - 用于制造掺杂稀土金属的石英玻璃组件的方法 - Google Patents
用于制造掺杂稀土金属的石英玻璃组件的方法 Download PDFInfo
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- CN108689592B CN108689592B CN201810295145.7A CN201810295145A CN108689592B CN 108689592 B CN108689592 B CN 108689592B CN 201810295145 A CN201810295145 A CN 201810295145A CN 108689592 B CN108689592 B CN 108689592B
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 143
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 229910052761 rare earth metal Inorganic materials 0.000 title claims description 12
- 150000002910 rare earth metals Chemical class 0.000 title claims description 12
- 239000002245 particle Substances 0.000 claims abstract description 104
- 239000013590 bulk material Substances 0.000 claims abstract description 96
- 238000005245 sintering Methods 0.000 claims abstract description 92
- 239000013067 intermediate product Substances 0.000 claims abstract description 87
- 238000000034 method Methods 0.000 claims abstract description 76
- 238000002844 melting Methods 0.000 claims abstract description 33
- 230000008018 melting Effects 0.000 claims abstract description 33
- 239000002994 raw material Substances 0.000 claims abstract description 12
- 230000004888 barrier function Effects 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 138
- 229910052906 cristobalite Inorganic materials 0.000 claims description 51
- 239000000377 silicon dioxide Substances 0.000 claims description 51
- 229910052681 coesite Inorganic materials 0.000 claims description 49
- 229910052682 stishovite Inorganic materials 0.000 claims description 49
- 229910052905 tridymite Inorganic materials 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 33
- 230000035699 permeability Effects 0.000 claims description 31
- 238000009826 distribution Methods 0.000 claims description 20
- 239000012298 atmosphere Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 238000005253 cladding Methods 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000002203 pretreatment Methods 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 39
- 230000008569 process Effects 0.000 description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 23
- 239000002019 doping agent Substances 0.000 description 20
- 238000005259 measurement Methods 0.000 description 19
- 229910002804 graphite Inorganic materials 0.000 description 18
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- 238000009792 diffusion process Methods 0.000 description 14
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- 238000000280 densification Methods 0.000 description 8
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000002002 slurry Substances 0.000 description 7
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- 230000001603 reducing effect Effects 0.000 description 6
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
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- 150000002739 metals Chemical class 0.000 description 4
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- 230000006641 stabilisation Effects 0.000 description 4
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- 239000010936 titanium Substances 0.000 description 4
- 239000012498 ultrapure water Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
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- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
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- 239000000725 suspension Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- 238000012512 characterization method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
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- 238000011156 evaluation Methods 0.000 description 2
- 229910021397 glassy carbon Inorganic materials 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- 239000008188 pellet Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
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- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007574 beam bending viscometry Methods 0.000 description 1
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- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
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- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
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- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
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- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- CKLHRQNQYIJFFX-UHFFFAOYSA-K ytterbium(III) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Yb+3] CKLHRQNQYIJFFX-UHFFFAOYSA-K 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
- C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
- C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/03—Press-mould materials defined by material properties or parameters, e.g. relative CTE of mould parts
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/50—Structural details of the press-mould assembly
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/66—Means for providing special atmospheres, e.g. reduced pressure, inert gas, reducing gas, clean room
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Glass Compositions (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17163811.7A EP3381870B1 (de) | 2017-03-30 | 2017-03-30 | Verfahren zur herstellung eines bauteils aus seltenerdmetalldotiertem quarzglas |
| EP17163811.7 | 2017-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108689592A CN108689592A (zh) | 2018-10-23 |
| CN108689592B true CN108689592B (zh) | 2022-03-29 |
Family
ID=58461165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810295145.7A Active CN108689592B (zh) | 2017-03-30 | 2018-03-30 | 用于制造掺杂稀土金属的石英玻璃组件的方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10851008B2 (enExample) |
| EP (1) | EP3381870B1 (enExample) |
| JP (1) | JP6945483B2 (enExample) |
| CN (1) | CN108689592B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3034476A1 (de) * | 2014-12-16 | 2016-06-22 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur herstellung von synthetischem quarzglas unter verwendung einer reinigungsvorrichtung |
| EP3708547A1 (de) * | 2019-03-13 | 2020-09-16 | Heraeus Quarzglas GmbH & Co. KG | Bauteil aus dotiertem quarzglas für den einsatz in einem plasma-unterstützten fertigungsprozess sowie verfahren zur herstellung des bauteils |
| JP2020196645A (ja) * | 2019-06-03 | 2020-12-10 | 株式会社メガテック | 珪石の溶融炉および溶融方法 |
| CN116332250B (zh) * | 2023-05-29 | 2023-09-08 | 四川新能源汽车创新中心有限公司 | 一种正极材料及其制备方法和固态电池 |
| CN117945641A (zh) * | 2024-02-05 | 2024-04-30 | 中天科技精密材料有限公司 | 一种光纤预制棒及其制备方法和应用 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106007352A (zh) * | 2016-05-13 | 2016-10-12 | 中国科学院上海光学精密机械研究所 | 低损耗Yb3+掺杂石英光纤预制棒芯棒的制备方法 |
| CN106116122A (zh) * | 2016-08-31 | 2016-11-16 | 中国建筑材料科学研究总院 | 制备石英玻璃的烧结装置及系统 |
| CN106396378A (zh) * | 2016-09-08 | 2017-02-15 | 中国科学院上海光学精密机械研究所 | 一种Nd3+均匀掺杂石英玻璃的制备方法 |
| CN106396350A (zh) * | 2016-08-31 | 2017-02-15 | 中国建筑材料科学研究总院 | 制备石英玻璃的烧结方法及石英玻璃 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2051104C (en) * | 1990-02-05 | 1996-05-14 | Akira Oyobe | Quartz glass doped with rare earth element and production thereof |
| JP3665664B2 (ja) * | 1995-04-20 | 2005-06-29 | 信越石英株式会社 | 不透明石英ガラスの製造方法 |
| GB2331985B (en) * | 1997-12-03 | 2001-11-21 | Tosoh Corp | High purity transparent silica glass and process for producing same |
| JP2002356340A (ja) * | 2001-06-01 | 2002-12-13 | Tosoh Corp | プラズマ耐食性石英ガラス、その製造方法、これを用いた部材及び装置 |
| DE102004006017B4 (de) | 2003-12-08 | 2006-08-03 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von laseraktivem Quarzglas und Verwendung desselben |
| US7637126B2 (en) | 2003-12-08 | 2009-12-29 | Heraeus Quarzglas Gmbh & Co. Kg | Method for the production of laser-active quartz glass and use thereof |
| DE102006043738B4 (de) | 2006-09-13 | 2008-10-16 | Heraeus Quarzglas Gmbh & Co. Kg | Bauteil aus Quarzglas zum Einsatz bei der Halbleiterfertigung und Verfahren zur Herstellung desselben |
| DE102007045097B4 (de) * | 2007-09-20 | 2012-11-29 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von co-dotiertem Quarzglas |
| DE102008030310B3 (de) * | 2008-06-30 | 2009-06-18 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Quarzglastiegels |
| JP5912999B2 (ja) * | 2012-08-27 | 2016-04-27 | 信越石英株式会社 | 合成石英ガラスの熱処理方法 |
-
2017
- 2017-03-30 EP EP17163811.7A patent/EP3381870B1/de active Active
-
2018
- 2018-03-28 US US15/938,156 patent/US10851008B2/en active Active
- 2018-03-29 JP JP2018065443A patent/JP6945483B2/ja not_active Expired - Fee Related
- 2018-03-30 CN CN201810295145.7A patent/CN108689592B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106007352A (zh) * | 2016-05-13 | 2016-10-12 | 中国科学院上海光学精密机械研究所 | 低损耗Yb3+掺杂石英光纤预制棒芯棒的制备方法 |
| CN106116122A (zh) * | 2016-08-31 | 2016-11-16 | 中国建筑材料科学研究总院 | 制备石英玻璃的烧结装置及系统 |
| CN106396350A (zh) * | 2016-08-31 | 2017-02-15 | 中国建筑材料科学研究总院 | 制备石英玻璃的烧结方法及石英玻璃 |
| CN106396378A (zh) * | 2016-09-08 | 2017-02-15 | 中国科学院上海光学精密机械研究所 | 一种Nd3+均匀掺杂石英玻璃的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US10851008B2 (en) | 2020-12-01 |
| EP3381870A1 (de) | 2018-10-03 |
| JP6945483B2 (ja) | 2021-10-06 |
| EP3381870B1 (de) | 2020-12-23 |
| US20180282196A1 (en) | 2018-10-04 |
| CN108689592A (zh) | 2018-10-23 |
| JP2018172270A (ja) | 2018-11-08 |
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