CN108534463A - 多晶硅还原尾气深度净化方法及系统 - Google Patents
多晶硅还原尾气深度净化方法及系统 Download PDFInfo
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- CN108534463A CN108534463A CN201710123404.3A CN201710123404A CN108534463A CN 108534463 A CN108534463 A CN 108534463A CN 201710123404 A CN201710123404 A CN 201710123404A CN 108534463 A CN108534463 A CN 108534463A
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- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1406—Multiple stage absorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1431—Pretreatment by other processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2045—Hydrochloric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/60—Processes or apparatus using other separation and/or other processing means using adsorption on solid adsorbents, e.g. by temperature-swing adsorption [TSA] at the hot or cold end
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/10—Hydrogen
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Abstract
Description
Claims (12)
Priority Applications (1)
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CN201710123404.3A CN108534463B (zh) | 2017-03-03 | 2017-03-03 | 多晶硅还原尾气深度净化方法及系统 |
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CN201710123404.3A CN108534463B (zh) | 2017-03-03 | 2017-03-03 | 多晶硅还原尾气深度净化方法及系统 |
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CN108534463A true CN108534463A (zh) | 2018-09-14 |
CN108534463B CN108534463B (zh) | 2020-08-21 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110947274A (zh) * | 2018-10-15 | 2020-04-03 | 新疆大全新能源股份有限公司 | 多晶硅生产中污染的氟利昂的净化方法 |
CN112138524A (zh) * | 2019-06-28 | 2020-12-29 | 新特能源股份有限公司 | 多晶硅还原工艺尾气的净化方法及净化系统 |
CN113277471A (zh) * | 2021-06-10 | 2021-08-20 | 中国恩菲工程技术有限公司 | 一种多晶硅生产中还原尾气的回收方法及装置 |
CN114870604A (zh) * | 2022-06-01 | 2022-08-09 | 重庆远达烟气治理特许经营有限公司科技分公司 | 碳捕集系统及其使用方法 |
CN115849383A (zh) * | 2022-11-29 | 2023-03-28 | 华陆工程科技有限责任公司 | 一种多晶硅尾气的回收方法 |
CN117486174A (zh) * | 2023-10-31 | 2024-02-02 | 华陆工程科技有限责任公司 | 一种多晶硅还原尾气的分离方法和分离系统 |
CN110078024B (zh) * | 2019-05-29 | 2024-05-07 | 天津中科拓新科技有限公司 | 以有机氯硅烷醇解副产的氯化氢气体为原料制备电子级氯化氢的方法及装置 |
Citations (6)
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CN101327912A (zh) * | 2007-06-18 | 2008-12-24 | 中国恩菲工程技术有限公司 | 从生产多晶硅所产生的尾气中回收氢气的方法 |
US20110000257A1 (en) * | 2009-07-02 | 2011-01-06 | American Air Liquide, Inc. | Effluent Gas Recovery System in Polysilicon and Silane Plants |
CN102580459A (zh) * | 2012-03-02 | 2012-07-18 | 洛阳晶辉新能源科技有限公司 | 一种处理多晶硅生产废气的方法 |
CN102923715A (zh) * | 2012-11-20 | 2013-02-13 | 天威四川硅业有限责任公司 | 一种回收多晶硅生产所产生的尾气的新工艺 |
CN105565323A (zh) * | 2014-10-15 | 2016-05-11 | 新特能源股份有限公司 | 一种多晶硅生产过程中的尾气回收工艺 |
US20170007962A1 (en) * | 2014-01-24 | 2017-01-12 | Hanwha Chemical Corporation | Purification method and purification apparatus for off-gas |
-
2017
- 2017-03-03 CN CN201710123404.3A patent/CN108534463B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101327912A (zh) * | 2007-06-18 | 2008-12-24 | 中国恩菲工程技术有限公司 | 从生产多晶硅所产生的尾气中回收氢气的方法 |
US20110000257A1 (en) * | 2009-07-02 | 2011-01-06 | American Air Liquide, Inc. | Effluent Gas Recovery System in Polysilicon and Silane Plants |
CN102580459A (zh) * | 2012-03-02 | 2012-07-18 | 洛阳晶辉新能源科技有限公司 | 一种处理多晶硅生产废气的方法 |
CN102923715A (zh) * | 2012-11-20 | 2013-02-13 | 天威四川硅业有限责任公司 | 一种回收多晶硅生产所产生的尾气的新工艺 |
US20170007962A1 (en) * | 2014-01-24 | 2017-01-12 | Hanwha Chemical Corporation | Purification method and purification apparatus for off-gas |
CN105565323A (zh) * | 2014-10-15 | 2016-05-11 | 新特能源股份有限公司 | 一种多晶硅生产过程中的尾气回收工艺 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110947274A (zh) * | 2018-10-15 | 2020-04-03 | 新疆大全新能源股份有限公司 | 多晶硅生产中污染的氟利昂的净化方法 |
CN110078024B (zh) * | 2019-05-29 | 2024-05-07 | 天津中科拓新科技有限公司 | 以有机氯硅烷醇解副产的氯化氢气体为原料制备电子级氯化氢的方法及装置 |
CN112138524A (zh) * | 2019-06-28 | 2020-12-29 | 新特能源股份有限公司 | 多晶硅还原工艺尾气的净化方法及净化系统 |
CN113277471A (zh) * | 2021-06-10 | 2021-08-20 | 中国恩菲工程技术有限公司 | 一种多晶硅生产中还原尾气的回收方法及装置 |
CN113277471B (zh) * | 2021-06-10 | 2022-08-30 | 中国恩菲工程技术有限公司 | 一种多晶硅生产中还原尾气的回收方法及装置 |
CN114870604A (zh) * | 2022-06-01 | 2022-08-09 | 重庆远达烟气治理特许经营有限公司科技分公司 | 碳捕集系统及其使用方法 |
CN115849383A (zh) * | 2022-11-29 | 2023-03-28 | 华陆工程科技有限责任公司 | 一种多晶硅尾气的回收方法 |
WO2024113632A1 (zh) * | 2022-11-29 | 2024-06-06 | 华陆工程科技有限责任公司 | 一种多晶硅尾气的回收方法 |
CN117486174A (zh) * | 2023-10-31 | 2024-02-02 | 华陆工程科技有限责任公司 | 一种多晶硅还原尾气的分离方法和分离系统 |
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Application publication date: 20180914 Assignee: Xinte silicon based new materials Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000325 Denomination of invention: Deep purification method and system of polysilicon reduction tail gas Granted publication date: 20200821 License type: Common License Record date: 20220627 Application publication date: 20180914 Assignee: Inner Mongolia Xinte silicon material Co.,Ltd. Assignor: XINTE ENERGY Co.,Ltd. Contract record no.: X2022990000326 Denomination of invention: Deep purification method and system of polysilicon reduction tail gas Granted publication date: 20200821 License type: Common License Record date: 20220627 |