CN108346595A - Macroscopical cut length-measuring appliance - Google Patents
Macroscopical cut length-measuring appliance Download PDFInfo
- Publication number
- CN108346595A CN108346595A CN201710062812.2A CN201710062812A CN108346595A CN 108346595 A CN108346595 A CN 108346595A CN 201710062812 A CN201710062812 A CN 201710062812A CN 108346595 A CN108346595 A CN 108346595A
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- China
- Prior art keywords
- scale
- measuring appliance
- cut length
- length
- macroscopic view
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
Abstract
The present invention provides a kind of macroscopical cut length-measuring appliance, including：The top of rolling clamp, the rolling clamp is circumferentially with sliding slot along it；Light source；The upper surface of scale, the scale is provided along its length scale, and one end of the scale is fixed on via a fixing device at the sliding slot；Described fixing device one end is placed in the sliding slot, and can drive the scale centered on the longitudinal center line of the fixing device in the plane internal rotation for being parallel to the rolling clamp upper surface and the length direction sliding for driving the scale along the sliding slot.Macroscopical cut length-measuring appliance of the present invention can accurately measure macroscopical cut of crystal column surface any position while visual inspection；Macroscopical cut length-measuring appliance of the present invention has many advantages, such as simple in structure, easy to operate and high certainty of measurement.
Description
Technical field
The invention belongs to semi-conductor device technology fields, more particularly to a kind of macroscopical cut length-measuring appliance.
Background technology
Visual inspection (Visual Inspection, VI) has great importance in semiconductor applications, can be with using visual inspection equipment
Detect a variety of defects generated in semiconductor processes.The major defect that one of which visual inspection can detect is macroscopic view
Cut (macro scratch), macroscopical cut will produce serious harmful effect to the performance of chip.Visual inspection equipment is answered extensively
For determining the total length of macroscopical cut to meet the needs of client.Existing visual inspection equipment is as shown in Figures 1 and 2, wherein Fig. 1
For the partial perspective view of the visual inspection equipment, Fig. 2 is bowing for the rolling clamp for being clamped with wafer to be measured in the visual inspection equipment
View.By Fig. 1 and Fig. 2 it is found that existing visual inspection equipment includes：Rolling clamp 11 and light source 13, the rolling clamp 11 are suitable for
Wafer 14 to be measured is clamped, the lower surface of the rolling clamp 11 is connected with a driving device 12, is suitable in the driving device
It being rotated under 12 driving, the light source 13 is located at the side of 11 upper surface of the rolling clamp, suitable for providing strong light in visual inspection,
Wherein, the arrow in Fig. 1 indicates strong light.
However, to obtain the length of macroscopical cut, skilled engineer is needed to operate, this undoubtedly proposes higher to measuring
Requirement, and different personnel operation measures the result come and can also be not quite similar, to be unfavorable for the control of quality.Separately
Outside, the back side of wafer can have a large amount of back defect after epitaxial growth technology, and engineer can generally use visual inspection equipment pair
These back defects are observed, but the general configuration of these back defects can only be observed using visual inspection equipment, and cannot be obtained
To the accurate dimension of these back defects.
Invention content
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of macroscopical cut linear measure longimetry dresses
It sets, is drawn for solving visual inspection equipment in the prior art existing accurate measurement macroscopic view that is unable to when being detected to macroscopical cut
The problem of total length of trace.
In order to achieve the above objects and other related objects, the present invention provides a kind of macroscopical cut length-measuring appliance, described
Macroscopical cut length-measuring appliance includes：Rolling clamp and light source, the rolling clamp are suitable for that wafer to be measured, the rotation is clamped
The lower surface of fixture is connected with a first driving means, suitable for being rotated under the driving of the first driving means, the light
Source is located at the side of the rolling clamp upper surface, is adapted to provide for strong light；The top of the rolling clamp is circumferentially with cunning along it
Slot；It is described macroscopic view cut length-measuring appliance further include：
The upper surface of scale, the scale is provided along its length scale, and one end of the scale is fixed via one to be filled
It sets and is fixed at the sliding slot；Described fixing device one end is placed in the sliding slot, and the scale can be driven with the fixation
In the plane internal rotation and the drive scale edge for being parallel to the rolling clamp upper surface centered on the longitudinal center line of device
The length direction of the sliding slot slides.
The quantity of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is one,
The length of the scale is greater than or equal to the brilliant diameter of a circle to be measured.
The quantity of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is two,
The sum of length of two scales is greater than or equal to the brilliant diameter of a circle to be measured.
The end surface shape of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is circle
Shape.
A kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale can be described in being parallel to
360 ° of rotations in the plane of rolling clamp upper surface.
The upper surface of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is equipped with two
Parallel corresponding scale is arranged, wherein row's scale is located at the side of the scale upper surface, another row's scale is located at the scale
The other side of upper surface.
The least unit of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is milli
Rice.
The material of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is high temperature resistant
Transparent material.
The material of a kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the scale is quartz.
A kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the fixing device are screw.
A kind of preferred embodiment of macroscopical cut length-measuring appliance as the present invention, the macroscopic view cut linear measure longimetry dress
It further includes the second driving device to set, and second driving device is connected with the fixing device, is suitable for driving the fixed dress
It sets and the scale is driven to be parallel to the flat of the rolling clamp upper surface centered on the longitudinal center line of the fixing device
It is rotated in face and the scale is driven to be slided along the length direction of the sliding slot.
As described above, macroscopical cut length-measuring appliance of the present invention, has the advantages that：The present invention is by revolving
Turn to open up at the top of fixture and be circumferentially with sliding slot along it, and add the graduated scale of a tool, and by one end of scale via one
Fixing device is fixed at sliding slot, and ensures that scale can be centered on fixed point in the plane for being parallel to rolling clamp upper surface
Rotation, meanwhile, fixing device one end is placed in sliding slot, and scale can be driven to be slided along the length direction of sliding slot, above-mentioned measurement dress
Macroscopical cut of crystal column surface any position can accurately be measured while visual inspection by setting；Macroscopical cut length of the present invention is surveyed
Amount device has many advantages, such as simple in structure, easy to operate and high certainty of measurement.
Description of the drawings
Fig. 1 and Fig. 2 is shown as the structural schematic diagram of the visual inspection equipment of the prior art.
Fig. 3 is shown as the structural schematic diagram of the macroscopical cut length-measuring appliance provided in the embodiment of the present invention one.
Fig. 4 is shown as rolling clamp and scale in the macroscopical cut length-measuring appliance provided in the embodiment of the present invention one
Measure the schematic diagram of macroscopical cut of crystal column surface.
Fig. 5 is shown as the structural representation of the scale in the macroscopical cut length-measuring appliance provided in the embodiment of the present invention one
Figure.
Fig. 6 is shown as cross section structure schematic diagrams of the Fig. 5 along the directions AA '.
Fig. 7 is shown as rolling clamp and scale in the macroscopical cut length-measuring appliance provided in the embodiment of the present invention two
Measure the schematic diagram of macroscopical cut of crystal column surface.
Component label instructions
11 rolling clamps
12 driving devices
13 light sources
14 wafers to be measured
21 rolling clamps
211 sliding slots
22 first driving means
23 light sources
24 scales
241 scales
242 through-holes
25 fixing devices
26 wafers to be measured
27 macroscopical cuts
Specific implementation mode
Illustrate that embodiments of the present invention, those skilled in the art can be by this specification below by way of specific specific example
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Fig. 3 is please referred to Fig. 7.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, though package count when only display is with related component in the present invention rather than according to actual implementation in diagram
Mesh, shape and size are drawn, when actual implementation form, quantity and the ratio of each component can be a kind of random change, and its
Assembly layout form may also be increasingly complex.
Embodiment one
Fig. 3 and Fig. 4 is please referred to, the present invention provides a kind of macroscopical cut length-measuring appliance, and the macroscopic view cut length is surveyed
Measuring device includes：Rolling clamp 21 and light source 23, the rolling clamp 21 are suitable for that wafer 26 to be measured, the rolling clamp 21 is clamped
Lower surface be connected with a first driving means 22, suitable for being rotated under the driving of the first driving means 22, the light
Source 23 is located at the side of 21 upper surface of the rolling clamp, is adapted to provide for strong light；The top of the rolling clamp 21 is along its circumferential direction
Equipped with sliding slot 211；It is described macroscopic view cut length-measuring appliance further include：Scale 24, the upper surface of the scale 24 is along its length
Direction is equipped with scale 241, and one end of the scale 24 is fixed on via a fixing device 25 at the sliding slot 211；The fixation
25 one end of device is placed in the sliding slot 211, and can drive the scale 24 to be with the longitudinal center line of the fixing device 25
Center is in the plane internal rotation for being parallel to 21 upper surface of the rolling clamp and drives the scale 24 along the length of the sliding slot 211
Spend direction sliding.The present invention is circumferentially with sliding slot 211 by being opened up at the top of the rolling clamp 21 along it, and adds a tool
There is the scale 24 of scale 241, and one end of scale 24 is fixed on via the fixing device 25 at sliding slot 211, and ensures to mark
Ruler 24 can centered on fixed point in the plane internal rotation for being parallel to 21 upper surface of rolling clamp, meanwhile, the fixing device 25
One end is placed in the sliding slot 211, and the scale 24 can be driven to be slided along the length direction of sliding slot 211, above-mentioned measuring device
Macroscopical cut 27 of 26 surface any position of the wafer to be measured can be accurately measured while visual inspection；The macroscopic view of the present invention
Cut length-measuring appliance has many advantages, such as simple in structure, easy to operate and high certainty of measurement.
As an example, the quantity of the scale 24 is one, the length of the scale 24 is greater than or equal to the crystalline substance to be measured
The diameter of circle 26.The length of the scale 24 is greater than or equal to the diameter of the wafer 26 to be measured, it can be ensured that the scale 24
The length of macroscopical cut of 26 surface any position of the wafer to be measured is measured during visual inspection.
As an example, the scale 24 can in the plane for being parallel to 21 upper surface of the rolling clamp 360 ° rotation, with
Ensure that the scale 24 can measure the length of 26 surface of wafer to be measured macroscopical cut at any angle.
It should be noted that for the ease of display, there is no aobvious for the scale 241 on Fig. 3 and 24 surface of the scale in Fig. 4
It shows to come.
As an example, referring to Fig. 5, the upper surface of the scale 24 is equipped with two rows of parallel corresponding scales 241,
In scale 241 described in a row be located at the side of 24 upper surface of the scale, another row's scale 241 is located at 24 upper surface of the scale
The other side.Certainly, in other examples, scale 241 described in a row, the quarter can also be arranged in the upper surface of the scale 24
Degree 241 be a row when, can be located at 24 upper surface of the scale side, can also along the scale 24 width direction across
The scale 24.
As an example, the least unit of the scale 241 is millimeter, to ensure the precision measured；Certainly, in other examples
In, the least unit of the scale 241 may be centimetre, micron etc..
As an example, as shown in figure 5, the fixing end of the scale 24 is equipped with through-hole 242, one end of the fixing device 25
It is inserted into the sliding slot 211 via the through-hole 242, the other end is located at the top of the scale 24；That is the one of the scale 24
End cap is as in the fixing device 25.
As an example, the end surface shape of the scale 24 can be circle.The end face of the scale 24 is provided in round,
The scale that may insure to can be read the scale 24 from any angle, to ensure that measurement can be observed from any angle.
As an example, the measurement range of the scale 24 can be but be not limited only to 300mm.
As an example, the material of the scale 24 can be thermostable transparent material；The material high temperature resistant of the scale 24
It may insure its normal use in a high temperauture environment, the material transparent of the scale 24, which is conducive to observe from all angles, to be measured
As a result, causing blocking for observer's sight line to avoid the scale 24.
As an example, the material of the scale 24 can be quartz, crystalline ceramics etc..
As an example, the fixing device 25 can be but be not limited only to screw.
As an example, the macroscopic view cut length-measuring appliance further includes the second driving device (not shown), described second
Driving device is connected with the fixing device 25, suitable for driving the fixing device 25 to drive the scale 24 with the fixation
In the plane internal rotation and the drive mark for being parallel to 21 upper surface of the rolling clamp centered on the longitudinal center line of device 25
Ruler 24 is slided along the length direction of the sliding slot 211.
The operation principle of macroscopical cut length-measuring appliance of the present invention is：During visual inspection, if it find that
There is macroscopical cut 27 on 26 surface of wafer to be measured, then drives the fixing device 25 along described using second driving device
Sliding slot 211 slides into appropriate location, it is preferable that drives the fixing device 25 along the sliding slot using second driving device
211 slide into 27 one end of macroscopical cut to be detected so that the fixing device 25 is located at where macroscopical cut 27
Near the side of straight line；The fixing device 25 is fixed in the sliding slot 211, the second driving device driving is reused
The rotation of the scale 24 is parallel as macroscopical cut 27, and the scale 24 is located on one side near macroscopical cut 27
Or be in contact with macroscopical cut 27, as shown in Figure 4；Read the scale on the corresponding scale of macroscopical cut 27 24
241, the length of macroscopical cut 27 can be precisely determined according to the corresponding scale of the macroscopical cut 27 241.
Embodiment two
Referring to Fig. 7, the present embodiment also provides a kind of macroscopical cut length-measuring appliance, the macroscopic view in the present embodiment
The structure of cut length-measuring appliance is roughly the same with macroscopical structure of cut length-measuring appliance described in embodiment one, and two
Person difference lies in：The quantity of scale 24 described in embodiment one is one, and the length of the scale 24 is greater than or equal to institute
The diameter for stating wafer 26 to be measured is completed using a scale 24 to 26 surface of wafer to be measured during measurement
Macroscopical cut 27 measure；And in the present embodiment, the quantity of the scale 24 is two, two scales 24
The sum of length is greater than or equal to brilliant 26 diameter of a circle to be measured, same using second driving device during measurement
When be drivingly connected two scales 24 the fixing device 25 moved along the sliding slot 211, it is preferable that use described second
The fixing device 25 of driving device two scales 24 of drive connection slides into be detected respectively along the sliding slot 211
27 both ends of the macroscopic view cut so that the side that two fixing devices 25 are located at 27 place straight line of macroscopical cut is attached
Closely, and two scales 24 are located along the same line, according on 27 corresponding two scales 24 of macroscopical cut
The scale 241 can be accurately determined the length of macroscopical cut 27.
In conclusion the present invention provides a kind of macroscopical cut length-measuring appliance, the macroscopic view cut length-measuring appliance
Including：Rolling clamp and light source, the rolling clamp are suitable for that wafer to be measured, the lower surface of the rolling clamp and one first is clamped
Driving device is connected, and suitable for being rotated under the driving of the first driving means, the light source is located on the rolling clamp
The side on surface is adapted to provide for strong light；The top of the rolling clamp is circumferentially with sliding slot along it；The macroscopic view cut length is surveyed
Measuring device further includes：The upper surface of scale, the scale is provided along its length scale, and one end of the scale is solid via one
Determine device to be fixed at the sliding slot；Described fixing device one end is placed in the sliding slot, and the scale can be driven with described
In the plane internal rotation and the drive mark for being parallel to the rolling clamp upper surface centered on the longitudinal center line of fixing device
Ruler is slided along the length direction of the sliding slot.The present invention is circumferentially with sliding slot by being opened up at the top of rolling clamp along it, and
The graduated scale of a tool is added, and one end of scale is fixed on via a fixing device at sliding slot, and ensures that scale can be with
In the plane internal rotation for being parallel to rolling clamp upper surface centered on fixed point, meanwhile, fixing device one end is placed in sliding slot, and
Scale can be driven to be slided along the length direction of sliding slot, above-mentioned measuring device can accurately measure crystal column surface while visual inspection and appoint
Macroscopical cut at meaning position；Macroscopical cut length-measuring appliance of the present invention has simple in structure, easy to operate and measures smart
Spend the advantages that high.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology can all carry out modifications and changes to above-described embodiment without violating the spirit and scope of the present invention.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should by the present invention claim be covered.
Claims (11)
1. a kind of macroscopic view cut length-measuring appliance, including：Rolling clamp and light source, the rolling clamp are suitable for that crystalline substance to be measured is clamped
Circle, the lower surface of the rolling clamp are connected with a first driving means, are suitable under the driving of the first driving means
Rotation, the light source are located at the side of the rolling clamp upper surface, are adapted to provide for strong light；It is characterized in that, the rotating clamp
The top of tool is circumferentially with sliding slot along it；It is described macroscopic view cut length-measuring appliance further include：
The upper surface of scale, the scale is provided along its length scale, and one end of the scale is solid via a fixing device
At the sliding slot；Described fixing device one end is placed in the sliding slot, and the scale can be driven with the fixing device
Longitudinal center line centered in the plane internal rotation that is parallel to the rolling clamp upper surface and drive the scale described in
The length direction of sliding slot slides.
2. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The quantity of the scale is one
A, the length of the scale is greater than or equal to the brilliant diameter of a circle to be measured.
3. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The quantity of the scale is two
A, the sum of length of two scales is greater than or equal to the brilliant diameter of a circle to be measured.
4. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The end surface shape of the scale is
It is round.
5. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The scale can be being parallel to
State 360 ° of rotations in the plane of rolling clamp upper surface.
6. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The upper surface of the scale is equipped with
Two rows of parallel corresponding scales, wherein row's scale is located at the side of the scale upper surface, another row's scale is located at the mark
The other side of ruler upper surface.
7. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The least unit of the scale is
Millimeter.
8. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The material of the scale is resistance to height
Warm transparent material.
9. macroscopic view cut length-measuring appliance according to claim 8, it is characterised in that：The material of the scale is stone
English.
10. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The fixing device is screw.
11. macroscopic view cut length-measuring appliance according to claim 1, it is characterised in that：The macroscopic view cut length is surveyed
It further includes the second driving device to measure device, and second driving device is connected with the fixing device, is suitable for driving described solid
Determining device drives the scale being parallel to the rolling clamp upper surface centered on the longitudinal center line of the fixing device
Plane internal rotation and drive the scale to be slided along the length direction of the sliding slot.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710062812.2A CN108346595B (en) | 2017-01-25 | 2017-01-25 | Macroscopic scratch length measuring device |
| TW106126978A TWI668780B (en) | 2017-01-25 | 2017-08-09 | An apparatus for measuring the length of macro scratches |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710062812.2A CN108346595B (en) | 2017-01-25 | 2017-01-25 | Macroscopic scratch length measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108346595A true CN108346595A (en) | 2018-07-31 |
| CN108346595B CN108346595B (en) | 2020-08-18 |
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ID=62963228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710062812.2A Active CN108346595B (en) | 2017-01-25 | 2017-01-25 | Macroscopic scratch length measuring device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108346595B (en) |
| TW (1) | TWI668780B (en) |
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| CN202350919U (en) * | 2011-10-26 | 2012-07-25 | 中国电器科学研究院有限公司 | Clamp with adjustable angle for measuring light spectrums of natural light sources or artificial light sources |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201841283A (en) | 2018-11-16 |
| TWI668780B (en) | 2019-08-11 |
| CN108346595B (en) | 2020-08-18 |
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