CN209471932U - A kind of objective table for sic wafer test - Google Patents
A kind of objective table for sic wafer test Download PDFInfo
- Publication number
- CN209471932U CN209471932U CN201920400600.5U CN201920400600U CN209471932U CN 209471932 U CN209471932 U CN 209471932U CN 201920400600 U CN201920400600 U CN 201920400600U CN 209471932 U CN209471932 U CN 209471932U
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- objective table
- distance rod
- sic wafer
- wafer test
- slideway
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Abstract
The utility model discloses a kind of objective tables for sic wafer test, including objective table table top, distance rod, distance rod slideway, locating slot, shaft and pedestal；Multiple concentric circles are provided on objective table table top, distance rod is furnished with fixed screw, and distance rod can slide on corresponding distance rod slideway, position to sic wafer, indicate scale on distance rod slideway；The locating slot is carved with plurality of parallel lines section, positions for placing, clamping sic wafer, while to the positioning side of sic wafer；It connect, gone up and down by motor driven objective table table top and rotates with objective table table top back center at the top of shaft, shaft bottom is connect with pedestal.The utility model can accurately position SiC wafer, and location error caused by avoiding because of manual film releasing helps to improve the accuracy of SiC wafer test.
Description
Technical field
The utility model belongs to technical field of semiconductor, and in particular to a kind of loading for sic wafer test
Platform.
Background technique
In recent years, IC industry rapidly developed, and the wafer throughput of a variety of materials increasingly increases severely.To wafer quality and property
The test of energy is essential link in IC industrial chain.With the promotion of technological level, device performance is constantly promoted,
Requirement to device index is also higher and higher.Correspondingly, also higher and higher to the requirement of test equipment, and the loading of test equipment
Platform has a significant impact for the accuracy of test.
The objective table of currently used Measurement SiC wafer be two kinds, one is have on objective table one it is fixed-size recessed
Slot can just be put into the SiC wafer of one three cun, four cun or other sizes.Although this objective table can be preferably to SiC
Wafer is positioned, but can only test a kind of wafer of size, and the SiC wafer that test other sizes must replace objective table,
It operates more troublesome.In addition the edge of groove can interfere optical system for testing, influence the accuracy of marginal point test.Other one
Kind objective table is then that several concentric circles are carved on table top, to compare various sizes of wafer, it is not necessary to which replacing objective table can
To test various sizes of SiC wafer, but due to that cannot limit to wafer, and wafer is being easy sliding above,
It is difficult to ensure that crystal circle center and objective table center are overlapped when placing wafer, angle also has deviation, therefore is difficult to be accurately positioned and arrive
Some point cannot guarantee that the consistency of different wafer institute's measuring points position.
Utility model content
Surveying for sic wafer the purpose of this utility model is to provide a kind of size adjustable and with limit function
The objective table of examination.
Realize the technical solution of the utility model aim are as follows: a kind of objective table for sic wafer test, including carry
Object platform table top, distance rod, distance rod slideway, locating slot, shaft and pedestal；Multiple concentric circles are provided on objective table table top, it is fixed
It is furnished with fixed screw away from bar, distance rod can be slided on corresponding distance rod slideway, be positioned to sic wafer, distance rod
Scale is indicated on slideway；The locating slot is carved with plurality of parallel lines section；It connect, leads to objective table table top back center at the top of shaft
The lifting of motor driven objective table table top and rotation are crossed, shaft bottom is connect with pedestal.
Compared with prior art, the remarkable advantage of the utility model are as follows: (1) the utility model can be accurately to SiC crystalline substance
Circle is positioned, location error caused by avoiding because of manual film releasing；Not only it can ensure that the accuracy of the coordinate of institute's measuring point, but also can determine that
With the consistency of batch sample test point；(2) the utility model is simple and easy, helps to improve the accurate of SiC wafer test
Property, it is suitble to large-scale production.
Detailed description of the invention
Fig. 1 is the objective table top view for sic wafer test of the utility model.
Fig. 2 is the objective table front view for sic wafer test of the utility model.
Fig. 3 is the objective table side view for sic wafer test of the utility model.
Fig. 4 is the top view of spacing bar part in the utility model.
Fig. 5 is the cross-section diagram of spacing bar part in the utility model.
Specific embodiment
The utility model relates to a kind of objective tables for sic wafer test, mainly in ellipsometer, mercury probe test
It is used in the test equipments such as instrument.
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of objective table for sic wafer test, including objective table table top 1, spacing
Bar 2, distance rod slideway 3, locating slot 4, shaft 6 and pedestal 7；Multiple concentric circles 8 are provided on objective table table top 1, distance rod 2 is matched
There is fixed screw 5, distance rod can be slided on corresponding distance rod slideway 3, be positioned to sic wafer, distance rod slideway
Graduation mark 10 is indicated on 3；The locating slot 4 is carved with plurality of parallel lines section 9, for placing, clamping sic wafer, while to carbon
The positioning side of SiClx wafer is positioned；6 top of shaft is connect with 1 back center of objective table table top, passes through motor driven loading
The lifting of platform table top 1 and rotation, 6 bottom of shaft is connect with pedestal 7.
Distance rod 2 and 3 quantity of distance rod slideway are 4, and distance rod slideway 3 is evenly distributed on objective table table top 1, phase
The angle of adjacent distance rod slideway 3 is 90 °.Under the position-limiting action of four distance rods, easily SiC wafer can be placed in
The center of objective table.
The setting of fixed screw 5 is connected in the objective table back side or side and distance rod 2.
It is furnished with conveyer belt 12 on pedestal 7, is driven by motor, shaft 6 is driven to move horizontally.
Locating slot 4 is arranged between two distance rod slideways 3.
The parallel segment of locating slot 4 is at least 5, and parallel segment interval is not more than 3mm, to meet different size wafers
Location requirement.
The width of locating slot 4 is 10-30mm, depth 5mm, space needed for meeting the clamping SiC wafer such as tweezers, sucking pen
It is required that.
The height of distance rod 2 be 2-5mm, diameter 1mm, on SiC wafer position while do not influence test and place,
Clamp the convenience of wafer.
The utility model is described in detail below with reference to embodiment.
Embodiment
The utility model adds four slidable distance rods on objective table, and is labeled on the slideway of each distance rod
Scale.The objective table includes objective table table top 1, distance rod 2, the slideway 3 of distance rod, locating slot 4, shaft 6 and pedestal 7；Wherein
Distance rod is furnished with fixed screw 5, and fixed screw 5 is located at the back side of objective table, and fixed screw 5 is slided with distance rod, according to
The position of the size adjusting distance rod of SiC wafer to be measured is simultaneously fixed with fixed screw, as long as wafer is put into four in this way
The position that distance rod limits can guarantee that crystal circle center and objective table center are overlapped.
Four distance rod slideways are respectively distributed on the radius that four mutual angles of objective table are 90 °.On slideway
Scale precision in 1mm or less.The diameter of distance rod is 1mm, highly between 2-5mm.
Locating slot is located between two slideways, width 10-30mm, depth 5mm.In addition, including at least 5 on locating slot
The line segment that item is parallel to each other respectively corresponds the positioning side of 2 cun, 3 cun, 4 cun, 6 cun, 8 cun SiC wafers, for adjusting different sizes
The position on the positioning side of SiC wafer.In conjunction with the position-limiting action of distance rod, the point of coordinate to be surveyed can be accurately tested.Locating slot energy
Enough increase places, clamps the convenience of SiC, while positioning to the positioning side of SiC wafer.
There are several concentric circles 8 on objective table table top, be used for the various sizes of wafer of coarse localization, includes at least 5, point
It Dui Ying not 2 cun, 3 cun, 4 cun, 6 cun, 8 cun of SiC wafers.Surveyed SiC wafer size with wherein some justify it is consistent when, can be quick
Distance rod is slided into required position and is fixed.1 radius of objective table table top is 110mm in the present embodiment, is covered within 8 cun
SiC wafer size.
The shaft of objective table controls the lifting and rotation of objective table by two motor drivens respectively.Its lift in height model
It encloses for 0-20mm, lifting precision is 0.001mm, and rotating range is 0- ± 360 °, and rotation precision is 0.001 degree.Below shaft and
Pedestal is connected, and pedestal is mobile with dynamic object stage by conveyer belt 12 under motor driven, allow objective table along pedestal ±
It is moved within the scope of 110mm, precision 0.001mm.It is determined the transmission range of objective table by the size of objective table, guarantees moving
On dynamic direction, each point of objective table can be detected.
As shown in Figure 4, Figure 5, distance rod is connected with fixed screw, and coupling part 11 passes through objective table, coupling part width
For 2mm.There is the slit of a 1.2mm wide on slideway, allows the slit sliding of distance rod and fixed screw on slideway.
The utility model positions the point of sample using polar coordinates, in conjunction with the lifting of shaft, rotation and pedestal
Transmission, can position any point on objective table.
Claims (8)
1. it is a kind of for sic wafer test objective table, which is characterized in that including objective table table top (1), distance rod (2),
Distance rod slideway (3), locating slot (4), shaft (6) and pedestal (7)；Objective table table top is provided with multiple concentric circles, spacing on (1)
Bar (2) is furnished with fixed screw (5), and distance rod can slide on corresponding distance rod slideway (3), determine sic wafer
Position, distance rod slideway indicate scale on (3)；The locating slot (4) is carved with plurality of parallel lines section；Shaft (6) top and objective table
The connection of table top (1) back center, is gone up and down and is rotated by motor driven objective table table top (1), shaft (6) bottom and pedestal (7)
Connection.
2. it is according to claim 1 for sic wafer test objective table, which is characterized in that distance rod (2) and calmly
It is 4 away from bar slideway (3) quantity, distance rod slideway (3) is evenly distributed on objective table table top (1), adjacent distance rod slideway
(3) angle is 90 °.
3. the objective table according to claim 1 or 2 for sic wafer test, which is characterized in that fixed screw (5)
Setting is connected in the objective table back side or side and distance rod (2).
4. the objective table according to claim 1 for sic wafer test, which is characterized in that pedestal is furnished on (7)
Conveyer belt (12), is driven by motor, and drives shaft (6) mobile.
5. the objective table according to claim 1 for sic wafer test, which is characterized in that shown locating slot (4)
It is arranged between two distance rod slideways (3).
6. the objective table according to claim 5 for sic wafer test, which is characterized in that locating slot (4) is put down
Line section is at least 5, and parallel segment interval is not more than 3mm.
7. the according to claim 1, objective table described in 5 or 6 for sic wafer test, which is characterized in that locating slot (4)
Width be 10-30mm, depth 5mm.
8. the objective table according to claim 1 for sic wafer test, which is characterized in that the height of distance rod (2)
Degree is 2-5mm, diameter 1mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920400600.5U CN209471932U (en) | 2019-03-27 | 2019-03-27 | A kind of objective table for sic wafer test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920400600.5U CN209471932U (en) | 2019-03-27 | 2019-03-27 | A kind of objective table for sic wafer test |
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| Publication Number | Publication Date |
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| CN209471932U true CN209471932U (en) | 2019-10-08 |
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| CN201920400600.5U Active CN209471932U (en) | 2019-03-27 | 2019-03-27 | A kind of objective table for sic wafer test |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820686A (en) * | 2021-03-09 | 2021-05-18 | 上海广川科技有限公司 | Wafer teaching device and teaching method |
| CN112864071A (en) * | 2021-01-18 | 2021-05-28 | 长鑫存储技术有限公司 | Tool and method for correcting wafer position in semiconductor manufacturing machine |
| CN113155745A (en) * | 2020-01-07 | 2021-07-23 | 江苏鲁汶仪器有限公司 | Wafer parameter measuring device based on ellipsometer |
| CN113253087A (en) * | 2021-06-18 | 2021-08-13 | 陕西开尔文测控技术有限公司 | Silicon carbide dynamic detection equipment |
| WO2022205496A1 (en) * | 2021-04-02 | 2022-10-06 | 台湾积体电路制造股份有限公司 | Wafer washing apparatus and positioning jig |
| WO2023197113A1 (en) * | 2022-04-11 | 2023-10-19 | 华为技术有限公司 | Wafer positioning method, positioning apparatus, and wafer manufacturing system |
-
2019
- 2019-03-27 CN CN201920400600.5U patent/CN209471932U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113155745A (en) * | 2020-01-07 | 2021-07-23 | 江苏鲁汶仪器有限公司 | Wafer parameter measuring device based on ellipsometer |
| CN112864071A (en) * | 2021-01-18 | 2021-05-28 | 长鑫存储技术有限公司 | Tool and method for correcting wafer position in semiconductor manufacturing machine |
| CN112864071B (en) * | 2021-01-18 | 2022-04-01 | 长鑫存储技术有限公司 | Tool and method for correcting wafer position in semiconductor manufacturing machine |
| CN112820686A (en) * | 2021-03-09 | 2021-05-18 | 上海广川科技有限公司 | Wafer teaching device and teaching method |
| WO2022205496A1 (en) * | 2021-04-02 | 2022-10-06 | 台湾积体电路制造股份有限公司 | Wafer washing apparatus and positioning jig |
| CN113253087A (en) * | 2021-06-18 | 2021-08-13 | 陕西开尔文测控技术有限公司 | Silicon carbide dynamic detection equipment |
| WO2023197113A1 (en) * | 2022-04-11 | 2023-10-19 | 华为技术有限公司 | Wafer positioning method, positioning apparatus, and wafer manufacturing system |
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