CN113253087A

CN113253087A - Silicon carbide dynamic detection equipment

Info

Publication number: CN113253087A
Application number: CN202110677477.3A
Authority: CN
Inventors: 杜浩晨
Original assignee: Shaanxi Kelvin Measurement Control Technology Co ltd
Current assignee: Shaanxi Kelvin Measurement Control Technology Co ltd
Priority date: 2021-06-18
Filing date: 2021-06-18
Publication date: 2021-08-13
Anticipated expiration: 2041-06-18
Also published as: CN113253087B

Abstract

The invention belongs to the technical field of semiconductor detection equipment, and particularly relates to silicon carbide dynamic detection equipment which comprises a detection equipment main body and a sample introduction device, wherein the sample introduction device comprises a vertical frame and a shell, a lead connected with a silicon carbide device port and a detection equipment main body wiring port is laid on the vertical frame, one end of the lead used for being inserted into the port adopts a conductive metal column, and the top of the shell is provided with a penetrating port; a sample storage box, a sample conveying device, a sample collecting box and a controller are arranged in the shell, the sample conveying device is positioned between the conductive metal column and the sample storage box, and the sample conveying device is used for conveying the silicon carbide device to a proper position. The sample feeding device capable of continuous detection is developed and used with the silicon carbide detection equipment, all silicon carbide devices to be detected can be continuously tested, the speed is greatly increased compared with the traditional one-by-one device testing process, and the labor is saved.

Description

Silicon carbide dynamic detection equipment

Technical Field

The invention belongs to the technical field of semiconductor detection equipment, and particularly relates to silicon carbide dynamic detection equipment.

Background

Semiconductor devices such as IGBTs, silicon carbide and the like are used in many apparatuses, the most common silicon carbide semiconductor device is a transistor, and silicon carbide transistors have the advantages of high blocking voltage, low on voltage, short off time, high temperature resistance and the like, and have great advantages in the application occasions of power electronic devices. SiC BJTs have more unique advantages during silicon carbide, such as close turn-off time to SiC MOSFETs, and no need for complex gate oxide processes. Although SiC BJTs have unique advantages, they are current-controlled devices that require a continuous supply of base current during device operation, which requires that the device function be stable.

In the prior art, in order to improve various performances of a silicon carbide device, researchers have conducted various researches, developed 1200V silicon carbide bipolar transistors with fast switches and low VCESAT, developed integrated silicon carbide transistors including NPN transistors, and the like. Regardless of the direction of emphasis on the function of a transistor, it is necessary to perform a functional test before it is put into use.

Some transistor testers have been developed in my earlier work, for example, the transistor scanning test system disclosed in CN203838298U, which includes a tester for testing transistors or diodes, and further includes a relay group and a relay control unit, where the relay control unit is used to control the on/off of each relay, the relay control unit is disposed in the tester, the tester can be connected with a plurality of transistor devices simultaneously, the transistors to be tested are selected by the on/off of the relays, and programmable devices such as a matched single chip microcomputer can realize automatic testing and improve the testing efficiency. However, although the conventional transistor tester can change the inefficient detection of one sample into a continuous sample detection process, the device still needs to rely on electrical components such as relays for performing a sample replacement process, and when the number of the electrical components is limited, the number of the samples to be detected is also limited. In order to further improve the detection efficiency of the silicon carbide sample, a device capable of continuously replacing the detection sample is required to be developed, which can meet the detection requirements of a large number of samples to be detected, can automatically replace the detection sample, and reduce the workload of replacing the detection sample.

Disclosure of Invention

In order to solve the technical problem, the invention provides silicon carbide dynamic detection equipment.

The invention aims to provide silicon carbide dynamic detection equipment which comprises a detection equipment main body and a sample introduction device, wherein the sample introduction device comprises a vertical frame and a shell, a lead connected with a silicon carbide device port and a detection equipment main body wiring port is paved on the vertical frame, one end of the lead connected with the silicon carbide device port is connected with a conductive metal column, the top of the shell is provided with a penetrating port, and the conductive metal column penetrates through the penetrating port;

a sample storage box, a sample conveying device, a sample collecting box and a controller are arranged in the shell, the sample conveying device is arranged on the inner side wall of the shell and is positioned between the conductive metal column and the sample storage box, the controller is arranged on the inner wall of the shell, and the controller is connected with the sample conveying device;

the controller is used for controlling the sample conveying device to clamp the silicon carbide device in the sample storage box, convey the silicon carbide device to a position below the conductive metal column and enable the conductive metal column to be inserted into a port of the silicon carbide device;

the controller is also used for controlling the sample conveying device to transfer the detected silicon carbide devices into the sample collection box and then grab the undetected silicon carbide devices in the sample storage box;

and movable doors are arranged at the positions of the shell corresponding to the sample storage box and the sample collection box.

Preferably, in the above dynamic silicon carbide detection apparatus, the sample transfer device is a gripper, and the controller is connected to the gripper.

Preferably, in the above silicon carbide dynamic testing apparatus, the sample conveying device comprises an eccentric wheel, a non-eccentric conveying wheel, a conveying belt, a sample clamping member, a sample unlocking member and a rotating motor;

the connecting shaft of the eccentric wheel and the connecting shaft of the conveying wheel are rotatably installed in the shell, the connecting shaft of the eccentric wheel, the center line of the sample storage box and the center line of the conductive metal column are positioned on the same vertical line, the eccentric wheel is positioned between the sample storage box and the conductive metal column, the conveying wheel is positioned on the side of the eccentric wheel, the conveying belt is in transmission connection between the eccentric wheel and the conveying wheel, and a plurality of sample clamping pieces are dispersedly and uniformly distributed on the conveying belt along the transmission direction of the conveying belt;

the bottom in the sample storage box is provided with a lifting device, the silicon carbide devices are stacked on the lifting device, and the silicon carbide device positioned at the topmost part can be clamped by the sample clamping piece on the conveyor belt;

the sample unlocking piece is installed on the inner wall of the shell and is positioned on the side of the sample conveying device, the sample unlocking piece and the conveying wheel are respectively positioned on two sides of the eccentric wheel, the sample unlocking piece is positioned right above the sample collecting box, and the sample unlocking piece can be opened close to the sample clamping piece on the silicon carbide device.

Preferably, in the above dynamic silicon carbide detection apparatus, the sample holder includes two insulated clamp arms disposed on the conveyor belt, and preferably, the clamp arms are elastic clamp arms or are connected to the conveyor belt through elastic members;

sample unlocking piece includes two back timber slashes, every back timber slash is rather than the homonymy the arm lock position is relative, works as the eccentric wheel is rotatory to lowest department and is passed through from the highest point during sample unlocking piece, back timber slash and its homonymy the arm lock butt gradually, and will the arm lock is to keeping away from the direction top of carborundum device is from, continues to be rotatory to lowest when the eccentric wheel, then the back timber slash gradually with the arm lock separation.

Preferably, in the above dynamic silicon carbide detection apparatus, an inclined edge is provided on a surface of each of the clamp arms, the inclined edge is connected to one end of an elastic member, and the other end of the elastic member is connected to the conveyor belt; preferably, the inclined edge is in a shape of a semicircular truncated cone or a shape smaller than the semicircular truncated cone, one surface of the inclined edge close to the conveyor belt is a plane, and the plane is not in contact with the conveyor belt;

the back timber down tube orientation the one side of eccentric wheel is the cambered surface, just the radian of cambered surface with the eccentric wheel is rotatory to lowest from the highest point and is passed through marginal orbit phase-match during sample unlocking spare.

Preferably, in the above dynamic silicon carbide detection device, the two top beam diagonal rods are connected through a baffle, a distance is reserved between the baffle and the eccentric wheel, and the thickness of the sample holder is smaller than that of the silicon carbide device.

Preferably, in the above silicon carbide dynamic detection apparatus, the elastic member is a spring or an elastic air bag, and the elastic member is movable with respect to the conveyor belt.

Preferably, in the above silicon carbide dynamic testing apparatus, flanges are provided along both edges of the conveyor belt, and the elastic member is connected to the flanges.

Preferably, in the above dynamic silicon carbide inspection apparatus, the vertical frame is an electric telescopic frame, and the electric telescopic frame is connected to the controller.

Preferably, in the above dynamic silicon carbide detection apparatus, the lifting device is an electric lifting table, and an upper surface of the lifting device is an inclined surface, and the inclined surface is parallel to the sample holder located directly above the lifting device. Preferably, a pressure sensor is arranged at the top of the lifting device, and the controller is connected with the pressure sensor.

Compared with the prior art, the invention has the following beneficial effects:

1. the invention discloses a silicon carbide device dynamic parameter test board series developed in earlier period, which is suitable for time parameter test of devices such as silicon carbide diodes, the equipment can meet the detection requirement of the market for the silicon carbide devices, in order to further improve the performance of the equipment and develop more equipment meeting the market requirement, the invention develops a sample injection device which is matched with the silicon carbide detection equipment and can carry out continuous detection, can test the continuity of all silicon carbide devices to be detected, greatly improves the test speed compared with the traditional test of one device, and saves manpower.

2. The invention also provides a sample conveying device with a special structure, which comprises an eccentric wheel (a connecting shaft of the eccentric wheel is positioned at a non-circle center), a non-eccentric conveying wheel (a connecting shaft of the non-eccentric conveying wheel is positioned at a circle center), a conveying belt, a sample clamping piece, a sample unlocking piece and a rotating motor, wherein the sample clamping piece is used for clamping a silicon carbide device; the sample unlocking piece can open the sample clamping piece on the silicon carbide device close to the sample unlocking piece and release the silicon carbide device into the sample collecting box; when the eccentric wheel rotated to the lower and through the sample unlocking piece from the highest, the back timber down tube was rather than the arm lock of homonymy butt gradually to push away from its orientation to keeping away from the carborundum device, at this moment, the carborundum device had lacked the clamping-force and dropped, continued to rotate to the lower when the eccentric wheel, then the back timber down tube was separated with the arm lock gradually. The structure is matched with the conveying belt for use, and the conveying belt can sequentially bear a plurality of silicon carbide devices, so that the streamlined sample conveying process is realized, the time is saved compared with a mechanical claw, and the detection efficiency is further improved.

3. According to the invention, the inclined edge with a special shape is arranged on one surface of each clamping arm far away from the silicon carbide device, the inclined edge is matched with the work of the eccentric wheel, the top beam inclined rod is continuously contacted with the clamping arm, the unlocking state of the sample clamping piece is always maintained in the process, and the unlocking smoothness is good.

Drawings

Fig. 1 is a schematic front view of a silicon carbide dynamic testing apparatus according to embodiment 1 of the present invention;

FIG. 2 is a side view of a first embodiment of a sample transfer device according to the present invention;

FIG. 3 is a side view of a second embodiment of the sample transfer device of example 2 of the present invention;

FIG. 4 is a side view of a sample transfer device according to example 2 of the present invention in a third operating state;

FIG. 5 is a schematic top view of a sample transfer device according to example 2 of the present invention;

FIG. 6 is a graph of the angle between the conductive metal pillar and the SiC device of example 2 of the present invention;

FIG. 7 is a schematic top view showing the connection between the sample-transferring device and the unlocking device in example 3;

fig. 8 is a schematic top front view of the sample transfer device and the unlocking device according to embodiment 3.

Detailed Description

In order that those skilled in the art will better understand the technical solutions of the present invention to be implemented, the present invention will be further described with reference to the following specific embodiments and accompanying drawings.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

Example 1

A dynamic detection device for silicon carbide comprises a detection device main body 1, wherein the detection device main body 1 is used for generating different currents, voltages, pulse signals and the like and is used for testing the electrical performance of a silicon carbide device 101, for example, the detection device main body 1 can adopt a dynamic and static test integrated machine of a power device of a KEW6400 model of my department (Kelvin measurement and control technology Limited, Shanxi), and can also adopt a bronze sword pulse signal generator IGBT to test a SiC test power device PSG-06. The silicon carbide test equipment in the prior art generally has a wiring port, different interface ends of the silicon carbide device 101 are connected with different wiring ports of the test equipment, pulse signals and the like generated by the test equipment are transmitted to the silicon carbide device 101 to be tested, and then the test equipment reflects test results according to test conditions. The invention develops a sample introduction device matched with a detection equipment main body 1 to realize continuous sample introduction of a silicon carbide device 101, so that batch automatic detection of the silicon carbide device 101 detection equipment is realized.

The structure of the sample introduction device is shown in figure 1, and comprises a vertical frame 2 and a shell 3, wherein the vertical frame 2 is used for supporting a lead connected with a port of a silicon carbide device 101 and a wiring port of a detection equipment main body 1, one end of the lead connected with the port of the silicon carbide device 101 is of a conductive metal column 21 structure, the structure has rigidity and conductivity, the lead is conveniently connected to the port of the silicon carbide device 101 and conducts electricity, the lead is laid on the top of the vertical frame 2, and the conductive metal column 21 is fixed at the bottom of the vertical frame 2; preferably, the stand 2 may be a T-shaped stand as shown in fig. 1, or may be an inverted L-shaped stand, an i-shaped stand or a square stand. The top of shell 3 is equipped with the interface, and electrically conductive metal post 21 runs through the interface setting. When the number of the conductive metal posts 21 is plural, the number of the through holes is matched with that of the conductive metal posts, and the positions are arranged in one-to-one correspondence. The sample storage box 4, the sample conveying device 5, the sample collection box 6 and the controller are arranged in the shell 3, the sample storage box 4 and the sample collection box 6 are installed in the shell 3, the sample conveying device 5 is installed on the inner side wall of the shell 3 and located between the conductive metal column 21 and the sample storage box 4, and the controller is installed on the inner wall of the shell 3. The sample storage box 4 is used for stacking silicon carbide devices 101 to be tested, such as silicon carbide transistors, etc., and the sample conveying device 5 is used for clamping the silicon carbide devices 101 in the sample storage box 4 and conveying the silicon carbide devices to a position close to the conductive metal columns 21 in the casing 3, so that the conductive metal columns 21 are inserted into corresponding ports of the silicon carbide devices 101, and then the testing equipment main body 1 performs different testing items. It should be noted that the position of the through-interface on the housing 3 should correspond to the position of the port of the silicon carbide device 101, so as to ensure that all the conductive metal posts 21 can be inserted into the corresponding ports of the silicon carbide device 101 in a matching manner. After the detection is finished, the sample conveying device 5 transfers the detected silicon carbide devices 101 into the sample collection box 6, and then grabs new undetected silicon carbide devices 101 in the sample storage box 4.

In this embodiment, the inner bottom surface of the sample storage box 4 is an inclined surface or a horizontal surface, and the size of the sample storage box 4 is close to that of the silicon carbide device 101, so that the silicon carbide device 101 can be placed in the sample storage box 4, and the silicon carbide device 101 can be stacked in the sample storage box 4. The sample transfer device 5 is a gripper having a gripping portion for gripping the silicon carbide device 101, a power portion for controlling the moving direction of the gripping portion, and a load bearing portion for supporting the power portion and the gripping portion, for example, with reference to the CN212706773U gripper structure. It should be noted that, in this embodiment, only the function of the gripper to grab and put down is utilized, and all the grippers in the prior art can be used as long as the volume size is within 1 cubic meter, and the gripper in a suitable volume range, for example, 1 to 10 cubic decimeters, is selected according to the size of the silicon carbide device 101 to be detected.

The controller adopts 89C51 series singlechip or STM32 series controller of prior art, and it is connected with the gripper electricity, and indoor power or battery are connected to the controller, and check out test set's work flow is as follows: firstly, the silicon carbide devices 101 to be detected are stacked in the sample storage box 4, then the switch of the detection equipment main body 1 is turned on to enable the silicon carbide devices to be in a state to be detected, the detection time of the silicon carbide devices 101 and the detection interval time of the adjacent silicon carbide devices 101 are preset in the controller, then the controller controls the mechanical gripper to grab and move the silicon carbide device 101, finally the silicon carbide device 101 is moved to be connected with the conductive metal column 21, then the silicon carbide device 101 is detected by the detection device main body 1, after the detection of the silicon carbide device 101 is finished, the detection result is recorded, then the controller controls the mechanical gripper to place the silicon carbide device 101 into the sample collection box 6, the controller then controls the gripper to grasp the next silicon carbide device 101 and perform inspection and record the inspection results, the above steps are repeated until all the silicon carbide devices 101 are detected, and the detection apparatus main body 1 is closed.

Preferably, in this embodiment, in order to prevent different silicon carbide devices 101 from being scratched and damaged before detection, an anti-collision pad is placed between adjacent silicon carbide devices 101, after the controller controls the gripper to grasp a previous silicon carbide device 101 and place the previous silicon carbide device in the sample collection box 6 after detection is completed, the controller continues to control the gripper to grasp the anti-collision pad located on a next silicon carbide device 101 and place the previous silicon carbide device in the sample collection box 6, then the controller continues to control the gripper to grasp a new undetected silicon carbide device 101 for detection, and the controller continues to control the gripper to grasp a new undetected silicon carbide device 101 and place the new undetected silicon carbide device in the sample collection box 6 after detection is completed; and circulating the steps until all the silicon carbide devices 101 are detected, and closing the detection equipment main body 1.

Preferably, in order to facilitate the placement and recovery of the silicon carbide devices 101, a movable door is provided on the housing 3 at a position corresponding to the sample storage case 4 and the sample collection case 6, and the movable door can be opened and closed.

Example 2

A silicon carbide dynamic testing apparatus, having substantially the same structure as that of embodiment 1, except that this embodiment is not provided with a crash pad structure, and a sample transfer device 5 is not provided with a gripper, but with the following structure:

referring to fig. 2 to 6, the sample-transferring device 5 of the present embodiment includes an eccentric wheel 51, a non-eccentric transfer wheel 52, a transfer belt 53, a sample-holding member 54, a sample-unlocking member 55, and a rotary motor; the rotating shafts of the eccentric wheel 51 and the transmission wheel 52 are rotatably connected with the inner side wall of the shell 3, or the rotating shafts of the eccentric wheel 51 and the transmission wheel 52 are rotatably connected with the upright post 31 arranged in the shell 3, the sample storage box 4 and the sample collection box 6 are arranged in the shell 3, and the controller is arranged on the inner wall of the shell 3; the sample conveying device 5 is arranged on the inner side wall of the shell 3 and is positioned between the conductive metal column 21 and the sample storage box 4, specifically, a rotating shaft of an eccentric wheel 51 of the sample conveying device 5, a central line of the sample storage box 4 and a central line of the conductive metal column 21 are positioned on the same vertical line, the eccentric wheel 51 is positioned between the sample storage box 4 and the conductive metal column 21, a conveying wheel 52 is positioned on the side of the eccentric wheel 51, the rotating shaft of the eccentric wheel 51 and the rotating shaft of the conveying wheel 52 are positioned on the same horizontal line, or the distance between the rotating shafts of the eccentric wheel 51 and the conveying wheel 52 is 1-3 cm, and a conveying belt 53 is wrapped and in transmission connection between the eccentric wheel 51 and the conveying wheel 52; a plurality of sample clamping pieces 54 are dispersedly and uniformly distributed on the conveyor belt 53 along the transmission direction of the conveyor belt, and the sample clamping pieces 54 are used for clamping the silicon carbide devices 101; the lifting device 41 is arranged at the bottom in the sample storage box 4, the silicon carbide devices 101 are stacked on the lifting device 41, and the silicon carbide device 101 at the topmost part can be clamped by the sample clamping piece 54 on the conveyor belt 53; the sample unlocking piece 55 is installed on the inner wall of the housing 3 and is positioned on the side of the sample conveying device 5, the sample unlocking piece 55 and the conveying wheel 52 are respectively positioned on two sides of the eccentric wheel 51, and the sample unlocking piece 55 is positioned right above the sample collection box 6, and the sample unlocking piece 55 can open the sample clamping piece 54 on the silicon carbide device 101 close to the sample unlocking piece 55 and release the silicon carbide device 101 into the sample collection box 6. In this embodiment, the controller is connected to a rotating electrical machine, the fixed base of which is mounted on the housing 3, and the output shaft of which is mounted on the output shaft of the eccentric 51 or the output shaft of the transmission wheel 52.

In this embodiment, referring to fig. 5, the sample holder 54 includes two insulating clamp arms 541 disposed on the conveyor belt 53, where the clamp arms 541 are elastic clamp arms, or the clamp arms 541 and the conveyor belt 53 are connected by an elastic member 542, and the elastic member 542 is a spring or an elastic airbag; one end of the elastic piece 542 is connected with the clamping arm 541, and the other end is connected with the edge of the conveyor belt 53 on the same side as the elastic piece; the middle part of the elastic member 542 is in contact connection with the conveyor belt 53, or the middle part of the elastic member 542 is not in contact with the conveyor belt 53, so that when the clamping arm 541 moves towards the direction close to the edge of the conveyor belt 53, the elastic member 542 on the same side as the clamping arm 541 can be gradually compressed; the sample unlocking piece 55 comprises two top beam inclined rods 551, each top beam inclined rod 551 is opposite to the clamping arm 541 on the same side, when the eccentric wheel 51 rotates from the highest position to the lowest position and passes through the sample unlocking piece 55, the top beam inclined rods 551 are gradually abutted with the clamping arms 541 on the same side, and the clamping arms 541 are pushed away in the direction away from the silicon carbide device 101, at the moment, the silicon carbide device 101 lacks clamping force and falls off, when the eccentric wheel 51 continues to rotate to the lowest position, the top beam inclined rods 551 are gradually separated from the clamping arms 541. Note that the length and angle of the top beam diagonal member 551 are set to ensure that it does not block the rotation of the eccentric wheel 51, and can abut against the clamping arm 541 when the eccentric wheel 51 rotates from the highest position to the lowest position (not including the lowest position and the highest position). In this embodiment, in order to facilitate the installation of the elastic member 542, flanges 531 are provided along both edges of the conveyor belt 53, and the elastic member 542 is attached to the flanges 531.

The working principle of the embodiment is as follows: firstly, superposing and placing silicon carbide devices 101 to be detected in a sample storage box 4, then starting a switch of a detection device main body 1 to enable the silicon carbide devices to be detected to be in a state to be detected, then controlling a rotating motor to rotate by a controller, starting transmission by a conveyor belt 53, passing a sample clamping piece 54 from right above the sample storage box 4 and passing a sample clamping piece 54 from right below a conductive metal column 21 at intervals of t1 in the transmission process, and setting the diameter of an eccentric wheel 51, the diameter of a conveying wheel 52 and the distance between adjacent sample clamping pieces 54 according to the requirement when the eccentric wheel 51 rotates one circle; the controller controls the rotating motor to alternately rotate and temporarily operate at a specific frequency such that when the eccentric 51 is rotated to the uppermost position, exactly one silicon carbide device 101 is positioned directly above it and is connected to the conductive metal column 21, referring to fig. 2, when the eccentric 51 is rotated from the uppermost position to the lowermost position, exactly one silicon carbide device 101 passes between the eccentric 51 and the sample unlocking member 55, the sample unlocking member 55 opens the sample holding member 54, the silicon carbide device 101 falls into the sample collection container 6, referring to fig. 3, when the eccentric 51 is rotated to the lowermost position, exactly one silicon carbide device 101 is positioned directly below it, and the sample holding member 54 holds the uppermost silicon carbide device 101 positioned in the sample storage container 4, referring to fig. 4. For example, if the detection time of the silicon carbide device 101 is t1, the pause time of the rotating motor is t1, the time required for the subsequent silicon carbide device 101 to be transferred to the previous silicon carbide device 101 is t2, and the rotation time of the rotating motor is t2, by setting the frequency, the silicon carbide device 101 can be ensured to be regularly and alternately connected with the conductive metal column 21 and be regularly recycled by the sample collection box 6, and a new undetected silicon carbide device 101 is regularly grabbed, so that the continuous detection of the silicon carbide device 101 is realized, the detection samples do not need to be manually replaced one by one, and the detection efficiency is improved; when all the silicon carbide devices 101 are tested, the testing apparatus main body 1 is turned off. The conveyor belt 53 can sequentially bear a plurality of silicon carbide devices 101, so that the flow of sample conveying is realized, the time is saved compared with that of a mechanical claw, and the detection efficiency is further improved.

Preferably, in order to make the connection between the conductive metal pillar 21 and the silicon carbide device 101 smoother, the bottom end of the conductive metal pillar 21 is tapered with a larger top and a smaller bottom, and since the motion track of the silicon carbide device 101 is constant, the port of the silicon carbide device 101 is positioned in a direction toward the conductive metal pillar 21, so that an obtuse angle is formed between the port of the silicon carbide device 101 and the conductive metal pillar 21 when the eccentric 51 rotates, as shown in fig. 6, and then becomes vertical slowly, and then becomes an obtuse angle again to separate.

In this embodiment, for the lifting requirement, the lifting device 41 is an electric lifting platform, which is connected with the controller, the lifting frequency of the electric lifting platform is preset, for example, the interval time from the conductive metal column 21 contacting one silicon carbide device 101 to another new undetected silicon carbide device 101 is t3, the lifting device 41 raises the position of the height of one silicon carbide device 101 every t3 time, and the interval time from the grabbing of one silicon carbide device 101 to another new undetected silicon carbide device 101 on the sample conveying device 5 is also t3, so that the detection and grabbing of the samples of the silicon carbide devices 101 can be performed regularly and orderly.

Example 3

A silicon carbide dynamic testing apparatus having substantially the same structure as that of example 2, except that, referring to fig. 7 to 8, in this example, the sample holder 54 comprises insulated gripper arms 541 arranged on the conveyor belt 53, a surface of each gripper arm 541 remote from the silicon carbide device 101 being provided with a slanted edge 5411, the slanted edge 5411 being in the shape of a half-truncated cone or less than a half-truncated cone, the side of the belt 53 is flat and does not contact with the belt 53, and because the eccentric wheel 51 is arranged, during the rotation and the movement of the inclined edge 5411, the inclined edge 5411 is blocked by the top beam diagonal bars 551 and moves away from the silicon carbide device 101, and the more the movement distance is, the greater the resistance, the greater the distance the beveled edge 5411 is blocked by the cap diagonal 551 from moving away from the silicon carbide device 101.

The inclined edge 5411 is connected with one end of the elastic member 542, and the other end of the elastic member 542 is fixedly connected with the conveyor belt 53; the sample unlocking part 55 comprises two top beam inclined rods 551, the two top beam inclined rods 551 are connected through a baffle 552, each top beam inclined rod 551 is opposite to the clamping arm 541 on the same side, the top beam inclined rods 551 are in a bent shape, and the bent radian is consistent with or close to the track of the edge (the edge of the eccentric wheel 51 close to the sample unlocking part 55) when the eccentric wheel 51 rotates from the highest position to the lowest position and passes through the sample unlocking part 55, so that in the process, the top beam inclined rods 551 are continuously contacted with the clamping arms 541, the unlocking state of the sample clamping part 54 is always maintained in the process, and the unlocking smoothness is good. When the sample holder 54 is moved to match the position of a new undetected silicon carbide device 101 in the sample storage tank 4, the sample unlocking member 55 is just separated from the sample holder 54, and the sample holder 54 just grips the silicon carbide device 101.

Preferably, the baffle 552 is spaced from the eccentric wheel 51, and the thickness of the sample holder 54 is less than the thickness of the silicon carbide device 101, for example, the thickness of the sample holder 54 is 0.3-0.5cm, then when the silicon carbide device 101 passes through the baffle 552, it contacts the baffle 552, but the sample holder 54 does not contact the baffle, then the baffle 552 can scrape the silicon carbide device 101 to help the silicon carbide device 101 fall off.

To better match the angle of the sample holder 54, the upper surface of the lifting device 41 is a slope, and the slope is parallel to the sample holder 54 when the sample holder 54 is located directly above the lifting device 41. This embodiment can set up the crashproof pad structure, and sample storage box 4 sets up adjacent with sample collection box 6, and the top of the two adjacent wall is equipped with the breach that supplies the crashproof pad to flow, and elevating gear 41's inclined plane lower extreme is located near the breach or adjacent with the breach, elevating gear 41 at every turn the rising position with and the breach lower limb flushes or is a little higher than the breach lower limb, then the crashproof pad on the carborundum device 101 flows into in sample collection box 6 under the action of gravity. The sample holder 54, by virtue of its thickness, can hold the silicon carbide device 101 up.

Example 4

A silicon carbide dynamic detection device is basically the same as the structure of embodiment 2, and is different in that a conductive metal column 21 can move up and down at a penetrating joint of a shell 3, a vertical frame 2 is arranged to be an electric telescopic frame, the electric telescopic frame is connected with a controller, the movement frequency of the vertical frame 2 is preset in the controller, the height of the vertical frame 2 is controlled firstly, so that the conductive metal column 21 is positioned above the shell 3, then when an eccentric wheel 51 rotates to the highest position, exactly one silicon carbide device 101 is positioned right above the eccentric wheel and is positioned horizontally, at the moment, a rotating motor stops rotating, then the controller controls the vertical frame 2 to move downwards, further drives the conductive metal column 21 to move downwards and is vertically inserted into a port of the silicon carbide device 101, after the detection of the silicon carbide device 101 is finished, the controller controls the vertical frame 2 to move upwards and further drives the conductive metal column 21 to move upwards, and separated from the ports of the silicon carbide devices 101, and then the rotating motor is controlled to continue rotating, and the process is repeated until all the silicon carbide devices 101 are detected.

Example 5

A silicon carbide dynamic testing device has a structure basically the same as that of embodiment 2, except that a pressure sensor is arranged on the top of a lifting device 41, a controller is connected with the pressure sensor, the pressure sensor can sense the pressure generated by the stacking of silicon carbide devices 101 on the lifting device 41, when a sample conveying device 5 grabs one silicon carbide device 101, the signal of the pressure sensor is greatly changed once, and the controller controls the lifting device 41 to rise by the distance of the thickness of one silicon carbide device 101, and when the pressure sensor is arranged, the time t3 of embodiment 2 is not preset.

It should be noted that, the connection relation of the components not specifically mentioned in the present invention is the default of the prior art, and the connection relation of the structures is not described in detail since it does not relate to the invention point and is a common application of the prior art.

It should be noted that, when the present invention relates to a numerical range, it should be understood that two endpoints of each numerical range and any value between the two endpoints can be selected, and since the steps and methods adopted are the same as those in the embodiment, in order to prevent redundancy, the present invention describes a preferred embodiment. While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. The dynamic detection equipment for the silicon carbide comprises a detection equipment main body (1) and is characterized by further comprising a sample introduction device, wherein the sample introduction device comprises a vertical frame (2) and a shell (3), a lead connected with a port of a silicon carbide device (101) and a wiring port of the detection equipment main body (1) is paved on the vertical frame (2), one end of the lead connected with the port of the silicon carbide device (101) is connected with a conductive metal column (21), a penetrating port is arranged at the top of the shell (3), and the conductive metal column (21) penetrates through the penetrating port;

a sample storage box (4), a sample conveying device (5), a sample collecting box (6) and a controller are arranged in the shell (3), the sample conveying device (5) is installed on the inner side wall of the shell (3) and is located between the conductive metal column (21) and the sample storage box (4), the controller is installed on the inner wall of the shell (3), and the controller is connected with the sample conveying device (5);

and movable doors are arranged at the positions, corresponding to the sample storage box (4) and the sample collection box (6), on the shell (3).

2. The silicon carbide dynamic testing apparatus according to claim 1, wherein the sample transfer device (5) is a gripper, and the controller is connected to the gripper.

3. The silicon carbide dynamic detection apparatus according to claim 1, wherein the sample transfer device (5) comprises an eccentric wheel (51), a transfer wheel (52), a transfer belt (53), a sample holder (54), a sample unlocking member (55) and a rotating motor;

the connecting shafts of the eccentric wheel (51) and the conveying wheel (52) are rotatably mounted in the shell (3), the connecting shaft of the eccentric wheel (51), the central line of the sample storage box (4) and the central line of the conductive metal column (21) are positioned on the same vertical line, the eccentric wheel (51) is positioned between the sample storage box (4) and the conductive metal column (21), the conveying wheel (52) is positioned on the side of the eccentric wheel (51), the conveying belt (53) is in transmission connection between the eccentric wheel (51) and the conveying wheel (52), and a plurality of sample clamping pieces (54) are dispersedly and uniformly distributed on the conveying belt (53) along the transmission direction;

the bottom in the sample storage box (4) is provided with a lifting device (41), and the silicon carbide device (101) is superposed on the lifting device (41);

the sample unlocking piece (55) is arranged on the inner wall of the shell (3) and is positioned on the side of the sample conveying device (5), the sample unlocking piece (55) and the conveying wheel (52) are respectively positioned on two sides of the eccentric wheel (51), and the sample unlocking piece (55) is positioned right above the sample collecting box (6).

4. A silicon carbide dynamic detection apparatus as claimed in claim 3, wherein said sample holder (54) comprises two insulated clamp arms (541) disposed on said conveyor belt (53);

the sample unlocking piece (55) comprises two top beam inclined rods (551), each top beam inclined rod (551) is opposite to the clamping arm (541) on the same side, when the eccentric wheel (51) rotates to the lowest position from the highest position and passes through the sample unlocking piece (55), the top beam inclined rods (551) are abutted to the clamping arms (541) on the same side, the clamping arms (541) are ejected away from the silicon carbide device (101), and when the eccentric wheel (51) continues to rotate to the lowest position, the top beam inclined rods (551) are separated from the clamping arms (541).

5. The silicon carbide dynamic detection equipment according to claim 4, characterized in that the surface of each clamping arm (541) is provided with an inclined edge (5411), the inclined edge (5411) is connected with one end of an elastic member (542), and the other end of the elastic member (542) is connected with the conveyor belt (53);

one surface of the top beam inclined rod (551) facing the eccentric wheel (51) is an arc surface, and the radian of the arc surface is matched with the edge track of the eccentric wheel (51) when the eccentric wheel rotates from the highest position to the lowest position and passes through the sample unlocking piece (55).

6. The silicon carbide dynamic detection equipment as claimed in claim 4 or 5, wherein the two top beam diagonal rods (551) are connected through a baffle plate (552), the baffle plate (552) is spaced from the eccentric wheel (51), and the thickness of the sample holder (54) is smaller than that of the silicon carbide device (101).

7. The silicon carbide dynamic detection device according to claim 5, wherein the elastic member (542) is a spring or an elastic air bag.

8. An apparatus for the dynamic inspection of silicon carbide according to claim 5, wherein a flange (531) is provided along both edges of the conveyor belt (53), and the elastic member (542) is attached to the flange (531).

9. The silicon carbide dynamic detection equipment according to claim 3, wherein the vertical frame (2) is an electric telescopic frame, and the electric telescopic frame is connected with the controller.

10. The silicon carbide dynamic detection apparatus according to claim 1, wherein the lifting device (41) is a motorized lifting table, and the upper surface of the lifting device (41) is a slope parallel to the sample holder (54) directly above the lifting device (41).