CN107884318A - 一种平板颗粒度检测方法 - Google Patents

一种平板颗粒度检测方法 Download PDF

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CN107884318A
CN107884318A CN201610877673.4A CN201610877673A CN107884318A CN 107884318 A CN107884318 A CN 107884318A CN 201610877673 A CN201610877673 A CN 201610877673A CN 107884318 A CN107884318 A CN 107884318A
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韩雪山
申永强
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

本发明提供了一种平板颗粒度检测方法，该方法主要包括以下步骤：通过光源模块照射待检测平板，产生照明视场；调节照明视场半宽；调节照明视场中心光强和照明视场半宽边缘处光强；接着，调整光源强度、位置以及探测器的位置；通过探测器获取平板异物信号。本发明极大的降低了颗粒镜像以及平板下表面图案串扰，提高信噪比，进而可以提高平板异物检测的准确性。

Description

一种平板颗粒度检测方法
技术领域
本发明涉及颗粒度检测技术，特别涉及一种平板颗粒度检测方法。
背景技术
在半导体集成电路或平板显示的制备工艺中，为提高产品良率，污染控制是一个至关重要的环节。掩模板、硅片或玻璃基板等在进行曝光前，都需要进行异物检测，例如外来颗粒、指纹、划痕、针孔等异物。
一般集成在光刻设备中的颗粒检测装置通常采用暗场散射测量技术，其检测原理如图1所示。辐射光源10发出的光线101被待检测平板40上的异物散射，被散射的信号光102进入探测单元20。但这种检测装置结构会受到颗粒镜像串扰，当检测平板是下表面为铬的掩模时，这种情况尤为严重，同时平板下表面图案30串扰也会严重影响探测信号的信噪比，进而影响检测准确性。
发明内容
本发明为了克服现有的问题，提供了一种平板颗粒度检测方法，极大的降低了颗粒镜像以及平板下表面图案串扰，提高信噪比，进而可以提高检测的准确性。
为实现上述目的，本发明的技术方案如下：
一种平板颗粒度检测方法，主要包括以下步骤：
通过光源模块照射待检测平板，产生照明视场；
调节照明视场半宽；
调节照明视场中心强度和照明视场半宽边缘处的强度；
接着，调整光源模块的光源强度、位置以及探测器的位置；
通过探测器获取平板异物信号。
可选地，所述调节照明视场半宽满足s<＝2h*tanθ-0.5w，其中s为照明视场半宽，h为待检平板的厚度，θ为探测接收角度在待测平板中的折射角，w为成像视场的宽度。
可选地，所述调节照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p1/i_max p1_mir)*snr1，所述i_center为照明视场中心光强，i_edge为照明视场半宽边缘处的光强，i_min p1为待检测最小颗粒的接收信号，i_max p1_mir为待检测最大颗粒的镜像串扰信号，snr1为抑制颗粒串扰需要满足的信噪比。
可选地，所述调节照明视场半宽满足s<＝h*(tanθ+tanγ)，其中s为照明视场半宽，h为待检平板的厚度，θ为探测接收角度在平板中的折射角，γ为入射角度在平板中的折射角。
可选地，所述调节照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p2/i_max p2)*snr2，所述i_center为照明视场中心光源强度，i_edge为照明视场半宽边缘处的光源强度，i_min p2为待检测最小平板图像的接收信号，i_max p2为平板图像串扰的最大信号，snr2为抑制平板图像串扰需要满足的信噪比。
可选地，所述探测单元采用面阵相机、线阵相机或者线阵TDI相机。
可选地，所述光源模块为激光或LED光。
为了达到上述目的，本发明还提出一种平板颗粒度检测方法，通过仿真软件选取光源的入射角和探测器的接收角，并在根据该入射角和接收角，设置光源模块和探测器。
本发明提供了一种平板颗粒度检测方法，通过调节照明视场半宽、照明视场中心光强以及照明视场半宽边缘处光强，来调整光源模块强度、位置以及探测器的位置，极大的降低了颗粒镜像以及平板下表面图案串扰，提高信噪比，进而可以提高平板异物检测的准确性。
附图说明
图1为现有技术平板异物检测系统结构示意图；
图2为本发明实施例异物检测系统结构示意图；
图3为本发明实施例抑制颗粒镜像串扰示意图；
图4为本发明实施例抑制平板图像串扰示意图。
具体实施方式
为使本发明的目的、技术方案更加清楚明白，以下结合附图和具体实施例对本发明的方法作进一步详细说明。
如图2至图4所示，本发明提供一种平板颗粒度检测方法，包括：
通过光源模块10照射待检测平板40，产生照明视场101。具体地，将光源模块10放置于待测平板40上方，光源模块10照射待检测平板40，产生照明视场101，并且形成入射角α。将探测单元20放置于待检测平板40上方光源模块10相对位置，形成探测接收角度β。探测单元20可以采用面阵相机、线阵相机或者线阵TDI相机，本实施例优选探测单元20为CCD相机。光源模块10为激光或LED光，本实施例优选光源模块10为LED灯。
接着，调节可以抑制颗粒镜像串扰的照明视场半宽，具体地，根据抑制颗粒镜像串扰需要满足照明视场半宽s<＝2h*tanθ-0.5w，其中h为待检平板的厚度，θ为探测接收角度在平板中的折射角，w为成像视场的宽度。
接着，调节可以抑制颗粒镜像串扰的照明视场中心光强与照明视场半宽边缘处的光强，具体地，照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p1/i_max p1_mir)*snr1，其中i_center为照明视场中心光强，i_edge为抑制颗粒串扰的照明视场半宽边缘处的光强，i_min p1为待检测最小颗粒的接收信号，i_max p1_mir为待检测最大颗粒的镜像串扰信号，snr1为抑制颗粒串扰需要满足的信噪比。
调节抑制平板图像串扰的照明视场半宽，具体地，根据抑制平板图像串扰需要满足照明视场半宽s<＝h*(tanθ+tanγ)，其中h为待检平板的厚度，θ为探测接收角度在平板中的折射角，γ为入射角度在平板中的折射角。
调节抑制平板图像串扰的照明视场中心光强与照明视场半宽边缘处的光强，具体地，照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p2/i_max p2)*snr2，其中所述i_center为照明视场中心光源强度，i_edge为抑制图像串扰的照明视场半宽边缘处的光源强度，i_min p2为待检测最小图像的接收信号，i_max p2为平板图像串扰的最大信号，snr2为抑制平板图像串扰需要满足的信噪比。
接着，调整光源模块的光源强度、位置以及探测器的位置；
通过探测器获取平板异物信号。
下面通过一组数据来说明本发明的平板颗粒度检测方法：检测颗粒p1动态范围为5-1000μm，平板图像间距范围为80nm-1μm，成像视场宽度w为1mm，平板折射率1.46，平板厚度h为3mm，光源入射角度α为75°-80°，探测装置接收角度β为55°-60°，抑制颗粒串扰需要满足的信噪比为5，抑制平板图像串扰需要满足的信噪比为2。
由上可知：
抑制颗粒镜像串扰和平板图像串扰需要同时满足：照明视场宽度7.5mm处光强需小于照明视场中心光强的1/2000；照明视场宽度8.8mm处光强需小于照明视场中心光强的1/5000。
上述描述仅是对本发明较佳实施例的描述，并非对本发明范围的任何限定，本发明领域的普通技术人员根据上述揭示内容做的任何变更、修饰，均属于权利要求书的保护范围。

Claims (8)

1.一种平板颗粒度检测方法，其特征在于，包括以下步骤：
通过光源模块照射待检测平板，产生照明视场；
调节照明视场半宽；
调节照明视场中心光强和照明视场半宽边缘处光强；
接着，调整光源模块的光源强度、位置以及探测器的位置；
通过探测器获取平板异物信号。
2.根据权利要求1所述的一种平板颗粒度检测方法，其特征在于，所述调节照明视场半宽满足s<＝2h*tanθ-0.5w，其中s为照明视场半宽，h为待检平板的厚度，θ为探测接收角度在待测平板中的折射角，w为成像视场的宽度。
3.根据权利要求1或2所述的一种平板颗粒度检测方法，其特征在于，所述调节照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p1/i_max p1_mir)*snr1，所述i_center为照明视场中心光强，i_edge为照明视场半宽边缘处的光强，i_min p1为待检测最小颗粒的接收信号，i_max p1_mir为待检测最大颗粒的镜像串扰信号，snr1为抑制颗粒串扰需要满足的信噪比。
4.根据权利要求1所述的一种平板颗粒度检测方法，其特征在于，所述调节照明视场半宽满足s<＝h*(tanθ+tanγ)，其中s为照明视场半宽，h为待检平板的厚度，θ为探测接收角度在平板中的折射角，γ为入射角度在平板中的折射角。
5.根据权利要求1或4所述的一种平板颗粒度检测方法，其特征在于，所述调节照明视场中心光强与照明视场半宽边缘处的光强满足i_center/i_edge>(i_min p2/i_max p2)*snr2，所述i_center为照明视场中心光源强度，i_edge为照明视场半宽边缘处的光源强度，i_min p2为待检测最小平板图像的接收信号，i_max p2为平板图像串扰的最大信号，snr2为抑制平板图像串扰需要满足的信噪比。
6.根据权利要求1所述的一种平板颗粒度检测方法，其特征在于，所述探测单元采用面阵相机、线阵相机或者线阵TDI相机。
7.根据权利要求1所述的一种平板颗粒度检测方法，其特征在于，所述光源模块为激光或LED光。
8.一种平板颗粒度检测方法，其特征在于，包括如下步骤：通过仿真软件选取光源的入射角和探测器的接收角，并根据该入射角和接收角，设置光源模块和探测器。
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