CN107297678A - 平面研磨装置 - Google Patents

平面研磨装置 Download PDF

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Publication number
CN107297678A
CN107297678A CN201710228022.7A CN201710228022A CN107297678A CN 107297678 A CN107297678 A CN 107297678A CN 201710228022 A CN201710228022 A CN 201710228022A CN 107297678 A CN107297678 A CN 107297678A
Authority
CN
China
Prior art keywords
fixed plate
thickness
workpiece
measuring device
thickness measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710228022.7A
Other languages
English (en)
Chinese (zh)
Inventor
井上裕介
吉原秀明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam C Ltd
Original Assignee
Speedfam C Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam C Ltd filed Critical Speedfam C Ltd
Publication of CN107297678A publication Critical patent/CN107297678A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/402—Chemomechanical polishing [CMP] of semiconductor materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201710228022.7A 2016-04-14 2017-04-10 平面研磨装置 Pending CN107297678A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-081116 2016-04-14
JP2016081116A JP6760638B2 (ja) 2016-04-14 2016-04-14 平面研磨装置

Publications (1)

Publication Number Publication Date
CN107297678A true CN107297678A (zh) 2017-10-27

Family

ID=60085360

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710228022.7A Pending CN107297678A (zh) 2016-04-14 2017-04-10 平面研磨装置

Country Status (4)

Country Link
JP (1) JP6760638B2 (enExample)
KR (1) KR102315142B1 (enExample)
CN (1) CN107297678A (enExample)
TW (1) TWI704613B (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110193775A (zh) * 2019-03-12 2019-09-03 上海新昇半导体科技有限公司 化学机械抛光方法以及化学抛光系统
CN110394726A (zh) * 2018-04-17 2019-11-01 创技股份有限公司 研磨装置
CN113021183A (zh) * 2019-12-25 2021-06-25 创技股份有限公司 工件孔检测装置以及工件孔检测方法
CN115297997A (zh) * 2020-03-23 2022-11-04 胜高股份有限公司 工件的双面抛光装置
IT202100022463A1 (it) * 2021-08-27 2023-02-27 Biesse Spa Metodo per controllare la lavorazione di pannelli di forma sostanzialmente parallelepipeda e macchina per la lavorazione di pannelli di forma sostanzialmente parallelepipeda, in particolare macchina levigatrice per la levigatura/satinatura di pannelli di legno, metallo, o simili
CN117300886A (zh) * 2022-06-27 2023-12-29 不二越机械工业株式会社 双面研磨装置
CN117359435A (zh) * 2023-12-05 2024-01-09 福建荣德光电科技有限公司 一种光学镜片加工用的数控平面精密铣磨机

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022254856A1 (ja) * 2021-06-04 2022-12-08 株式会社Sumco ワークの両面研磨装置および両面研磨方法
CN113245973B (zh) * 2021-06-08 2022-07-22 唐山国芯晶源电子有限公司 一种石英晶片抛光游轮修磨厚度检测方法
CN117583975B (zh) * 2024-01-18 2024-03-19 山西日盛达太阳能科技股份有限公司 一种光伏玻璃抛光装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107160288A (zh) * 2016-03-08 2017-09-15 快递股份有限公司 平面研磨装置及游星轮

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0740233A (ja) * 1993-07-27 1995-02-10 Speedfam Co Ltd ワークの厚さ測定装置
JP2888339B1 (ja) * 1998-03-27 1999-05-10 直江津電子工業株式会社 被加工物保持プレート
JP4324933B2 (ja) 2000-08-23 2009-09-02 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 平面研磨装置
JP4202841B2 (ja) * 2003-06-30 2008-12-24 株式会社Ｓｕｍｃｏ 表面研磨装置
JP2008227393A (ja) * 2007-03-15 2008-09-25 Fujikoshi Mach Corp ウェーハの両面研磨装置
JP2010023167A (ja) * 2008-07-18 2010-02-04 Epson Toyocom Corp 砥粒加工装置およびそれを用いた砥粒加工方法
JP4955624B2 (ja) 2008-07-31 2012-06-20 信越半導体株式会社 両面研磨装置
KR20100079199A (ko) * 2008-12-30 2010-07-08 주식회사 동부하이텍 화학적 기계 연마 장치 및 방법
US20120276662A1 (en) * 2011-04-27 2012-11-01 Iravani Hassan G Eddy current monitoring of metal features
JP5917994B2 (ja) * 2012-04-23 2016-05-18 スピードファム株式会社 研磨装置の計測用窓構造
JP6146213B2 (ja) * 2013-08-30 2017-06-14 株式会社Sumco ワークの両面研磨装置及び両面研磨方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107160288A (zh) * 2016-03-08 2017-09-15 快递股份有限公司 平面研磨装置及游星轮

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110394726A (zh) * 2018-04-17 2019-11-01 创技股份有限公司 研磨装置
CN110193775A (zh) * 2019-03-12 2019-09-03 上海新昇半导体科技有限公司 化学机械抛光方法以及化学抛光系统
CN113021183A (zh) * 2019-12-25 2021-06-25 创技股份有限公司 工件孔检测装置以及工件孔检测方法
CN115297997A (zh) * 2020-03-23 2022-11-04 胜高股份有限公司 工件的双面抛光装置
IT202100022463A1 (it) * 2021-08-27 2023-02-27 Biesse Spa Metodo per controllare la lavorazione di pannelli di forma sostanzialmente parallelepipeda e macchina per la lavorazione di pannelli di forma sostanzialmente parallelepipeda, in particolare macchina levigatrice per la levigatura/satinatura di pannelli di legno, metallo, o simili
EP4140645A1 (en) 2021-08-27 2023-03-01 BIESSE S.p.A. Method for controlling the machining of panels with a substantially parallelepiped-like shape and machine for machining panels with a substantially parallelepiped-like shape, in particular sanding machine for sanding/finishing panels made of wood, metal or the like
CN117300886A (zh) * 2022-06-27 2023-12-29 不二越机械工业株式会社 双面研磨装置
CN117300886B (zh) * 2022-06-27 2024-04-26 不二越机械工业株式会社 双面研磨装置
CN117359435A (zh) * 2023-12-05 2024-01-09 福建荣德光电科技有限公司 一种光学镜片加工用的数控平面精密铣磨机
CN117359435B (zh) * 2023-12-05 2024-03-05 福建荣德光电科技有限公司 一种光学镜片加工用的数控平面精密铣磨机

Also Published As

Publication number Publication date
KR102315142B1 (ko) 2021-10-20
TW201737336A (zh) 2017-10-16
KR20170117878A (ko) 2017-10-24
JP6760638B2 (ja) 2020-09-23
TWI704613B (zh) 2020-09-11
JP2017189849A (ja) 2017-10-19

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WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20171027

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