CN107287553A - Dry and pre-passivating device and method - Google Patents
Dry and pre-passivating device and method Download PDFInfo
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- CN107287553A CN107287553A CN201710371401.1A CN201710371401A CN107287553A CN 107287553 A CN107287553 A CN 107287553A CN 201710371401 A CN201710371401 A CN 201710371401A CN 107287553 A CN107287553 A CN 107287553A
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000007789 gas Substances 0.000 claims abstract description 131
- 238000002161 passivation Methods 0.000 claims abstract description 97
- 238000001035 drying Methods 0.000 claims abstract description 61
- 230000007797 corrosion Effects 0.000 claims abstract description 9
- 238000005260 corrosion Methods 0.000 claims abstract description 9
- 229910052736 halogen Inorganic materials 0.000 claims description 16
- 150000002367 halogens Chemical class 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000026030 halogenation Effects 0.000 claims description 10
- 238000005658 halogenation reaction Methods 0.000 claims description 10
- 230000000740 bleeding effect Effects 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000003672 processing method Methods 0.000 claims description 3
- 206010013786 Dry skin Diseases 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 13
- 229910052760 oxygen Inorganic materials 0.000 abstract description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 7
- 239000001301 oxygen Substances 0.000 abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052799 carbon Inorganic materials 0.000 abstract description 6
- 239000001257 hydrogen Substances 0.000 abstract description 6
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 6
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 14
- 239000010410 layer Substances 0.000 description 14
- 239000003245 coal Substances 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000011800 void material Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002421 anti-septic effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000001473 noxious effect Effects 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Solid Materials (AREA)
Abstract
A kind of drying and pre-passivating device and method, wherein device include air chamber and the master control unit, vacuum unit and the passivation gas control unit that are connected respectively with air chamber, wherein：Air chamber, which is used to hold, needs the parts of dry and pre-passivating；Vacuum unit be used for suck/discharge air, make air chamber be in vacuum/atmospheric pressure state；Passivation gas control unit is used to, when air chamber is in vacuum state, passivation gas is injected into air chamber to carry out pre-passivating to parts, is additionally operable to after the completion of pre-passivating, air chamber discharges passivation gas when being in atmospheric pressure state；Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according to the temperature information in air chamber, heat to be provided to air chamber.Handled due to being dried under vacuum simultaneously with pre-passivating, component surface is generated stabilized protection course, prevent by carbon, hydrogen, oxygen and other element pollutions during following process and use, so as to improve the resistance to corrosion and reliability of parts.
Description
Technical field
The invention belongs to parts process field, relate more specifically to a kind of drying and pre-passivating device and method.
Background technology
Excimer laser is the important laser device of ultraviolet band, by being excited the molecule of mixed gas formation to ground state
Transition produces laser, and it is usually to be made up of inert gas and halogen gas to be excited mixed gas, such as argon gas (Ar) and fluorine gas (F2)、
Krypton (Kr) and fluorine gas, xenon (Xe) and chlorine (Cl2) etc..The discharge cavity of excimer laser provides sky for gas discharge
Between, discharge cavity is made up of a variety of parts, such as electrode, cavity wall, blower fan, flow-guiding structure, radiator, contains metal, pottery
The multiple materials such as porcelain, rubber, and the halogenic medium such as fluorine, chlorine all has extremely strong corrosivity to most of materials, can cause electric discharge
The parts of intracavitary consume halogenic medium and corroded in use, noxious products are generated, so as to reduce the defeated of laser
Go out energy and stability, limit the performance and application of excimer laser.
In order to reduce the degree for being introduced into, reducing corrosion reaction in excimer laser running of harmful components, electric discharge
Each parts need to carry out ultrasonic wave cleaning, drying process before assembly in chamber, need to be passivated processing after assembling.Ultrasonic wave
Cleaning treatment is to act on straight to liquid and dirt using cavitation, acceleration effect and the straight/stream of ultrasonic wave in a liquid
Connect, indirectly act on, crud layer is disperseed, emulsified, is peeled off, reach the attachment for removing component surface and oxidation of coal reaction
The purpose of layer；Drying process be in order to thoroughly remove component surface and inside moisture；Passivation Treatment after assembling is accurate point
Important process step before sub- laser discharge cavity operation, can mitigate each parts of discharge cavity in laser running
Corrosion reaction.By being passed through rare gas and halogen gas and mixed gas in discharge cavity, and aid in the electric discharge of certain frequency,
The surface mass of each parts will fully react with halogenic medium, so that the pollutant of component surface is eliminated, generation stabilization
Halide protective layer.
However, after ultrasonic wave cleaning removes oxidation of coal conversion zone, each parts are in the processes such as drying, assembling and its centre
Transfer process can be exposed in atmospheric environment, and oxidation of coal reaction inevitably will occur again for its surface.Research shows, golden
Category material, which directly contacts halogenic medium, can generate halogenation layer, and conversion zone is basicly stable after exposing in an atmosphere, but if
The material surfaces such as Al, Cu are present after oxidation of coal conversion zone, enter back into the environment containing halogenic medium, it is anti-that oxycarbide will suppress halogenation
Each component surface layer will (be probably one or more of, also may be used by halide and oxycarbide after the progress answered, Passivation Treatment
Can the compound that exists jointly of hydrocarbon oxygen and halogen) collectively constitute.Under the conditions of this, this each zero in laser running
Parts surface layer slowly can still react with halogenic medium, further consume halogenic medium and generate pernicious gas.And due to
HF, O of 10ppm magnitudes2、CF4It can significantly affect the power output of laser Deng gas, therefore this each component surface layer
In the presence of the major issue by energy is exported as influence laser.
The content of the invention
Based on problem above, it is a primary object of the present invention to propose a kind of drying and pre-passivating device and method, it is used for
Solve at least one of above technical problem.
To achieve these goals, as one aspect of the present invention, the present invention proposes a kind of drying and pre-passivating device,
Master control unit, vacuum unit and the passivation gas control unit being connected including air chamber and respectively with air chamber, wherein：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for sucking/air is discharged, the air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for when air chamber is in vacuum state, passivation gas to be injected into air chamber with to zero
Part carries out pre-passivating, is additionally operable to after the completion of pre-passivating, and air chamber discharges passivation gas when being in atmospheric pressure state；
Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according in air chamber
Temperature information, heat is provided to air chamber.
In some embodiments of the invention, above-mentioned drying and pre-passivating device are used in dry and pre-passivating discharge cavity
Parts.
In some embodiments of the invention, above-mentioned passivation gas is the mixed gas of inert gas and halogen gas, with
Make the component surface formation halogenation layer in discharge cavity.
In some embodiments of the invention, above-mentioned master control unit includes temperature sensor, signal transacting and controller
Part and heating element heater, wherein：
Temperature sensor, for detecting the temperature information in air chamber, and will detect that obtained temperature information is transmitted to signal
Processing and control device；
Signal transacting and control device, are connected with heating element heater, for according to temperature information, sending and controlling to heating element heater
Signal makes the temperature in air chamber constant to provide heat to air chamber.
In some embodiments of the invention, above-mentioned vacuum unit includes：
Device is vacuumized, for sucking/air is discharged, so that air chamber is in vacuum/atmospheric pressure state；
Vacuum detecting device, the vacuum for monitoring air chamber in real time；
In some embodiments of the invention, the above-mentioned device that vacuumizes includes vavuum pump or vacuum valve.
In some embodiments of the invention, above-mentioned passivation gas control unit includes：
Intake valve, it is pre- to be carried out to parts for when air chamber is in vacuum state, injecting passivation gas into air chamber
Passivation；
Air bleeding valve, for after the completion of pre-passivating, air chamber to discharge passivation gas when being in atmospheric pressure state.
In some embodiments of the invention, above-mentioned master control unit includes gas circulation device, for homogenizing in air chamber
Gas and temperature；When passivation gas is injected in air chamber to parts progress pre-passivating, the temperature range in air chamber is 100 DEG C
~150 DEG C.
In some embodiments of the invention, above-mentioned drying and pre-passivating device also include be located at air chamber in sample stage,
Sample platform bracket and the moving guide rail for being embedded in gas chamber outer wall, sample stage are placed on moving guide rail by sample platform bracket.
In some embodiments of the invention, above-mentioned sample stage is net structure, and the net structure includes mesh-density not
Equal some units；
In some embodiments of the invention, the madial wall of above-mentioned air chamber includes insulation and anticorrosive coat, for preventing heat
Scatter and disappear and corrosion of the passivation gas to gas chamber sidewall.
In some embodiments of the invention, the side wall of above-mentioned air chamber is provided with a hermatic door, places/takes by hermatic door
Go out parts.
To achieve these goals, as another aspect of the present invention, the present invention proposes a kind of drying and pre-passivating side
Method, using above-mentioned drying and pre-passivating device, comprises the following steps：
Step 1, placement cleaned through ultrasonic wave after parts into air chamber；
Step 2, using vacuum unit air chamber is vacuumized, air chamber is in vacuum state；
Step 3, use passivation gas control unit injected into air chamber passivation gas with to parts carry out pre-passivating, together
When master control unit to injection passivation gas after air chamber provide heat；
Step 4, after a period of time, master control unit stop to air chamber provide heat, treat that the temperature in air chamber is down to room temperature
Afterwards, passivation gas control unit discharges the passivation gas in air chamber, completes drying and the pre-passivating of parts.
To achieve these goals, as another aspect of the invention, the present invention proposes parts in a kind of discharge cavity
Processing method, using above-mentioned drying and pre-passivation method, also include after step 4：
Step 5, taking-up parts, the Passivation Treatment after being assembled and being assembled.
Drying proposed by the present invention and pre-passivating device and method, have the advantages that：
1st, parts are dried under vacuum and pre- blunt using drying proposed by the present invention and pre-passivating device
Change handle so that component surface generate stabilized protection course, prevent parts during following process and use by carbon, hydrogen,
Oxygen and other element pollutions, so as to improve the resistance to corrosion and reliability of parts, the service life of elongated component；
2nd, the parts in excimer laser discharge cavity are handled using dry and pre-passivating device so that zero
Part surface forms halogenation layer, this halogenation layer basicly stable after air, therefore can be prevented effectively from it is generally right
During the processing of parts, oxidation of coal reaction occurs when parts are exposed to air during assembling process and its intermediate transfer；From
And can reduce the parts in excimer laser discharge cavity in assembling process and excimer laser running carbon, hydrogen,
The introducing of the harmful constituents such as oxygen, it is ensured that the surface of each parts can generate stable halogen passivation protection layer in discharge cavity；
3rd, due to proposition drying and pre-passivating device carries out pre-passivating to the parts in excimer laser discharge cavity
And the drying of drying process, i.e. parts and pre-passivating processing simultaneously progress, therefore can avoid parts in the drying process with
The contact of air, so as to further avoid occurring oxidation of coal reaction when parts are exposed to air during dry heat；And
When being passivated processing due to the parts in discharge cavity, pre-passivating processing has been carried out in parts, therefore can reduce
The time of Passivation Treatment, is favorably improved the efficiency of assembling of equipment before laser operation；
4th, because the device is configured with gas circulation device, and drying and the temperature perseverance during pre-passivating in air chamber
It is fixed, therefore can ensure that all parts can quickly and sufficiently complete pre-passivating processing, the pre-passivating layer of pre-passivating generation
Composition, structure, thickness etc. are identical；
5th, device and method proposed by the present invention, available for processing any need be dried and/or pre-passivating processing
Parts.
Brief description of the drawings
Fig. 1 is the structural representation of the drying that one embodiment of the invention is proposed and pre-passivating device；
Fig. 2 is the structural representation of sample stage in the drying that one embodiment of the invention is proposed and pre-passivating device；
Fig. 3 is the operational flowchart of the drying that one embodiment of the invention is proposed and pre-passivation method；
Fig. 4 is the detail flowchart of the drying that one embodiment of the invention is proposed and pre-passivation method.
Embodiment
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
The invention discloses a kind of drying and pre-passivating device, including air chamber and the master control list that is connected respectively with air chamber
Member, vacuum unit and passivation gas control unit, wherein：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for sucking/air is discharged, the air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for when air chamber is in vacuum state, passivation gas to be injected into air chamber with to zero
Part carries out pre-passivating, is additionally operable to after the completion of pre-passivating, and air chamber discharges passivation gas when being in atmospheric pressure state；
Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according in air chamber
Temperature information, heat is provided to air chamber.
The invention also discloses a kind of drying and pre-passivation method, using above-mentioned drying and pre-passivating device, including with
Lower step：
Step 1, placement cleaned through ultrasonic wave after parts into air chamber；
Step 2, using vacuum unit air chamber is vacuumized, air chamber is in vacuum state；
Step 3, use passivation gas control unit injected into air chamber passivation gas with to parts carry out pre-passivating, together
When master control unit to injection passivation gas after air chamber provide heat；
Step 4, after a period of time, master control unit stop to air chamber provide heat, treat that the temperature in air chamber is down to room temperature
Afterwards, passivation gas control unit discharges the passivation gas in air chamber, completes drying and the pre-passivating of parts.
It is same to parts under vacuum after ultrasonic wave water washing using above-mentioned drying and pre-passivating device and method
When be dried with pre-passivating processing, may be such that component surface generate stabilized protection course, so as to prevent parts from subsequently filling
Match somebody with somebody, in use by carbon, hydrogen, oxygen and other element pollutions, so as to improve the resistance to corrosion and reliability of parts；
In some embodiments of the invention, it is intended to a kind of drying and pre-passivating device and method are proposed, to solve ultrasound
After ripple washing, each parts are in dry heat process, assembling process and its intermediate transfer mistake in the discharge cavity of excimer laser
When exposing in an atmosphere in journey, oxidation of coal reaction occurs again so that the Passivation Treatment before excimer laser operation is completed
Afterwards, each component surface layer, so that expected passivation effect can not be reached, significantly affects standard still comprising harmful constituents such as carbon, hydrogen, oxygen
The problem of molecular laser power output.
Therefore, each parts in the discharge cavity of excimer laser are carried out after ultrasonic wave cleaning, using disclosed above
Drying and pre-passivating device and method be dried and pre-passivating processing.Passivation gas therein uses inert gas and halogen
The mixed gas of gas, so that the component surface formation halogenation layer in discharge cavity.Due to being to add under vacuum
Pre-passivating to each parts in discharge cavity is handled so that component surface can generate halogenation layer, this halogenation
Layer is basicly stable after air；And pre-passivating process and drying process are carried out simultaneously, thus can be prevented effectively from it is usual right
During the processing of parts, occur when parts are exposed to air during dry heat process, assembling process and its intermediate transfer
Oxidation of coal reacts, and so as to reduce the introducing of the harmful constituent such as carbon, hydrogen, oxygen during excimer laser lasing, and can protect
Each parts are in follow-up Passivation Treatment in card discharge cavity, and surface can generate stable halogen passivation protection layer.
Therefore, the invention also discloses a kind of processing method of parts in discharge cavity, using above-mentioned drying and pre- blunt
Makeup is put, and is comprised the following steps：
Step 1, placement cleaned through ultrasonic wave after parts into air chamber；
Step 2, using vacuum unit air chamber is vacuumized, air chamber is in vacuum state；
Step 3, use passivation gas control unit injected into air chamber passivation gas with to parts carry out pre-passivating, together
When master control unit to injection passivation gas after air chamber provide heat；
Step 4, after a period of time, master control unit stop to air chamber provide heat, treat that the temperature in air chamber is down to room temperature
Afterwards, passivation gas control unit discharges the passivation gas in air chamber, completes drying and the pre-passivating of parts.
Step 5, taking-up parts, the Passivation Treatment after being assembled and being assembled.
In some embodiments of the invention, above-mentioned steps 4 are specially：Reaction a period of time after master control unit stop to
Air chamber provides heat, when air chamber temperature is down near room temperature, and the halogen gas in air chamber is discharged by passivation gas control unit
Body, it is to avoid halogen gas is directly arranged and caused harm to air；Then air is filled with to normal pressure into air chamber by vacuum extractor
After close；Closed after gas to the vacuum state in now air chamber is discharged again by passivation gas control unit.It is repeated several times
Aforesaid operations, about repeatedly 3~5 times, so as to ensure no longer to include halogen gas in air chamber
In some embodiments of the invention, above-mentioned master control unit includes temperature sensor, signal transacting and controller
Part and heating element heater, wherein：
Temperature sensor, for detecting the temperature information in air chamber, and will detect that obtained temperature information is transmitted to signal
Processing and control device；
Signal transacting and control device, are connected with heating element heater, for according to temperature information, sending and controlling to heating element heater
Signal makes the temperature in air chamber constant to provide heat to air chamber.
Because during pre-passivating, the temperature in air chamber is constant, therefore it can ensure that all parts can in air chamber
The quick and sufficient pre-passivating that completes is handled, therefore when can ensure that parts react with passivation gas, course of reaction is abundant and steady
It is fixed, so that the uniform and stable protective layer of component surface generation.
In some embodiments of the invention, above-mentioned vacuum unit includes：
Device is vacuumized, for sucking/air is discharged, so that air chamber is in vacuum/atmospheric pressure state；
Vacuum detecting device, the vacuum for monitoring air chamber in real time；
The device therein that vacuumizes includes vavuum pump or vacuum valve etc..
In vacuum is carried out to air chamber, according to the vacuum of the air chamber monitored in real time, decide whether that completion is taken out very
Sky, generally, the vacuum in air chamber should ensure that the preset value less than 100Pa, so as to avoid parts during pre-passivating
Contact with air.
In some embodiments of the invention, above-mentioned passivation gas control unit of stating includes：
Intake valve, it is pre- to be carried out to parts for when air chamber is in vacuum state, injecting passivation gas into air chamber
Passivation；
Air bleeding valve, for after the completion of pre-passivating, air chamber to discharge passivation gas when being in atmospheric pressure state.
In some embodiments of the invention, above-mentioned passivation gas is the mixed gas of inert gas and halogen gas.
In some embodiments of the invention, when passivation gas is injected in air chamber to parts progress pre-passivating, air chamber
Interior temperature range is 100 DEG C~150 DEG C.
In some embodiments of the invention, above-mentioned master control unit also includes gas circulation unit, described for homogenizing
Gas and temperature in air chamber.
By homogenizing after gas and temperature in air chamber, the passivation gas in air chamber can be made to keep certain uniformity, from
And the uniform progress of pre-passivating process and drying process can be ensured so that the halogenation layer uniformity of generation is high, and parts fill
Divide drying.
In some embodiments of the invention, above-mentioned drying and pre-passivating device also include be located at air chamber in sample stage,
Sample platform bracket and the moving guide rail for being embedded in gas chamber outer wall, the sample stage are placed on moving guide rail by sample platform bracket.Wherein,
Sample stage can be moved by the control of master control unit on moving guide rail, to facilitate putting for the parts to be dried with pre-passivating
Put and take out.
In some embodiments of the invention, above-mentioned sample stage is net structure, and the sample stage of the net structure includes net
The unequal some units of lattice density.
Why it is net structure, is to increase the contact of passivation gas and parts ground, it is to avoid local pre-passivating
Not enough defect；And due to including the unequal some units of mesh-density, therefore the different parts of size can be placed sample
On the unit of the different mesh-densities of sample platform, various sizes can be applied to the drying and pre-passivating device that cause the present embodiment
The drying of parts and pre-passivating.Wherein, sample stage can according to need to dry and pre-passivating parts size, be arranged to phase
Some units matched somebody with somebody, or it is replaced by the sample stage matched.
In some embodiments of the invention, the madial wall of above-mentioned air chamber includes insulation and anticorrosive coat, for preventing heat
Scatter and disappear and corrosion of the passivation gas to gas chamber sidewall.
In some embodiments of the invention, the side wall of above-mentioned air chamber is provided with a hermatic door, places/takes by hermatic door
Go out parts.
In some embodiments of the invention, in vacuum unit and passivation gas control unit it is various enter escape pipe it is equal
The material corroded using halogen resistant, thus extend dry and pre-passivating device service life, it is to avoid during pre-passivating other
The introducing of material.
In some embodiments of the invention, master control unit is embedded in the lateral wall of air chamber, and is communicated with air chamber；Vacuumize
Various air valves and tracheae in unit, passivation gas control unit are communicated with air chamber, to realize gas house vacuum/atmospheric pressure state
Change, injection/discharge of passivation gas.
In some embodiments of the invention, metal shell is installed outside whole drying and pre-passivating device to be fixed and protect
Shield.
It should be noted that drying disclosed by the invention and pre-passivating device and method can be used for drying any need
And/or the parts of pre-passivating processing, it is dried and/or pre-passivating.
Below by taking the parts in ArF excimer laser discharge cavities as an example, in conjunction with the drawings and the specific embodiments, to this hair
The drying of bright proposition and pre-passivating device and method are further described in detail.
Embodiment
The present embodiment proposes a kind of drying and pre-passivating device and method, in ArF excimer laser discharge cavities
Parts be dried and pre-passivating.
As shown in figure 1, wherein dry and pre-passivating device includes air chamber 1, vacuum unit 2, passivation gas control unit
3rd, master control unit 4, sample stage 5, sample platform bracket 6, moving guide rail 7, hermatic door 8 and metal shell 9；
The madial wall of wherein air chamber 1 has insulation antiseptic layer 11, to prevent corrosion and heat of the halogenic medium to air chamber wall
Scatter and disappear.
Vacuum unit include air valve 21, air hose 22 and vacuum inspective meter 23, passivation gas control unit 3 include into
Air valve 31, air inlet pipe 32, air bleeding valve 33 and blast pipe 34；Air hose 22, air inlet pipe 32 and blast pipe 34 are rotten using halogen resistant
The material polytetrafluoroethylene (PTFE) of erosion.Air hose 22 injects empty when air valve 21 is opened and is in injection gaseous state into air chamber 1
Gas；When air valve 21 is opened and is in discharge gaseous state, the air extracted from air chamber 1 is discharged.Air inlet pipe 32 is in intake valve
During 31 opening, passivation gas is injected into air chamber 1；Blast pipe 34 is when air bleeding valve 33 is opened, and it is blunt that discharge is extracted from air chamber 1
Change gas.Air valve 21, intake valve 31 and air bleeding valve 33 are used to realize reaction different phase to pre-passivating, vacuum in air chamber 1 and broken
The requirement of vacuum.
Master control unit 4 includes temperature sensor 41, signal transacting and control device 42, heating element heater 43 and gas circulation
Device 44.Temperature sensor 41 is used for the temperature for detecting air chamber 1, and testing result is output into signal transacting and control unit
42, to control heating element heater 43 to provide heat into air chamber 1, so that the control of temperature in air chamber 1 is realized, the temperature control of air chamber 1
System is in the range of 100 DEG C~110 DEG C；Gas circulation device 44 is used to realize temperature and the homogenization of gas content in air chamber 1.
Wherein, sample stage 5 is net structure, as shown in Fig. 2 the subelement with two kinds of different void levels, space is close
The small part 51 of degree can place the larger parts of electrode in discharge cavity, cavity wall, deflector equidimension, the big portion of void level
Divide 52 can place the less parts of standard component equidimension.
Sample platform bracket 6 and the sample stage of net structure 5, can be real by moving guide rail 7 under the control of master control unit 4
Motion in present air chamber, so that the parts of the discharge cavity before and after convenient handling reaction.
Each is needed to dry and the parts of pre-passivating are positioned on sample stage 5 by hermatic door 8, to be dried and pretreatment
After the completion of, then taken away from sample stage 5 by hermatic door 8.
Wherein, passivation gas is the mixed gas of neon and fluorine gas, its constitute the gas that is passivated with excimer laser into
Divide same or like with ratio.
Metal shell 9 is used to the other components of dry and pretreatment unit are fixed and protected.
The parts in discharge cavity are dried using above-mentioned drying and pre-passivating device and during pre-passivating, such as Fig. 3
Shown in~4, following steps are specifically included：
Step 1, placement cleaned through ultrasonic wave after parts into air chamber 1；
Specifically, open hermatic door 8, by the parts electrode of the discharge cavity after abundant ultrasonic wave water washing, ceramic deflector,
Standard component etc. loads on the sample stage 5 such as Fig. 1, and the wherein larger parts of electrode, deflector equidimension are placed on as shown in Figure 2
The small part 51 of void level on, less standard component of size etc. is placed on the big part 52 of void level.
Step 2, using vacuum unit 2 air chamber 1 is vacuumized, air chamber 1 is in vacuum state；
Specifically, hermatic door 8 is closed, air valve 21 is opened and is placed on discharge gaseous state, air chamber 1 is evacuated to and set
Closed after definite value 100Pa.
Step 3, use passivation gas control unit 3 injected into air chamber 1 passivation gas with to parts carry out pre-passivating,
Master control unit 4 provides heat to the air chamber 1 after injection passivation gas simultaneously, and controls the temperature in air chamber 1 in constant range
It is interior；
Specifically, intake valve 31 is opened, Ne and F are filled with into air chamber 1 by air inlet pipe 322Mixed gas, in air chamber 1
The middle passivation atmosphere for forming setting, starts heating element heater 43, is adjusted by temperature sensor 41 and signal transacting with control device 42
The temperature of solar term room 1 is constant in the range of 100 DEG C~110 DEG C, ensures what temperature and gas were distributed by gas circulation device 44
Uniformity.
Step 4, after a period of time, master control unit 4 stop to air chamber 1 provide heat, treat that the temperature in air chamber 1 is down to room
Wen Hou, passivation gas control unit 3 discharges the passivation gas in air chamber；
React and heating element heater 43 is closed after a period of time, treat that the temperature of air chamber 1 is down near room temperature and opens air bleeding valve 33, pass through
Blast pipe 34 is extracted the passivation gas in air chamber 1 out and handled, it is to avoid halogen gas is directly arranged and caused harm to air, then
Open air valve 21 and be placed on injection gaseous state, be filled with after air to normal pressure and closed into air chamber 1 by air hose 22；Again
Secondary open after air bleeding valve 33 extracts gas to the vacuum state in now air chamber 1 out is closed.Aforesaid operations are repeated several times, about repeat
After 3~5 times, it is ensured that halogen gas is no longer included in air chamber 1
Step 5, taking-up parts, complete drying and the pre-passivating of parts.
Specifically, when air chamber 1 recovers atmospheric pressure state, open and carry hermatic door 8, take out the parts for completing pre-passivating.
The parts for completing pre-passivating are that can mount to discharge cavity to be assembled, for the follow-up blunt of excimer laser
Change processing and run.
It should be noted that the position of each part is not limited in the drying of the present embodiment proposition and pre-passivating device
Position as shown in Figure 1, each part, which can be placed in, can guarantee that any position for realizing its function.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention
Within the scope of.
Claims (10)
1. a kind of drying and pre-passivating device, including air chamber and be connected respectively with the air chamber master control unit, vacuumize list
Member and passivation gas control unit, wherein：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for sucking/air is discharged, the air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for the air chamber be in vacuum state when, into the air chamber inject passivation gas with
Pre-passivating is carried out to parts, is additionally operable to after the completion of pre-passivating, by the passivation gas when air chamber is in atmospheric pressure state
Discharge；
Master control unit, when passivation gas is injected in the air chamber to parts progress pre-passivating, for according to the air chamber
Interior temperature information, heat is provided to the air chamber.
2. drying as claimed in claim 1 and pre-passivating device, wherein, the drying and pre-passivating device are used to dry and pre-
It is passivated the parts in discharge cavity.
3. drying as claimed in claim 2 and pre-passivating device, wherein, the passivation gas is inert gas and halogen gas
Mixed gas so that in the discharge cavity component surface formation halogenation layer.
4. drying as claimed in claim 1 and pre-passivating device, wherein, the master control unit includes temperature sensor, letter
Number processing and control device and heating element heater, wherein：
Temperature sensor, for detecting the temperature information in the air chamber, and will detect the obtained temperature information transmit to
Signal transacting and control device；
Signal transacting and control device, are connected with the heating element heater, for according to the temperature information, to the heating element heater
Control signal is sent to provide heat to the air chamber, so that the temperature in the air chamber is constant.
5. drying as claimed in claim 1 and pre-passivating device, wherein, the vacuum unit includes：
Device is vacuumized, for sucking/air is discharged, so that the air chamber is in vacuum/atmospheric pressure state；
Vacuum detecting device, the vacuum for monitoring the air chamber in real time；
The device that vacuumizes includes vavuum pump or vacuum valve.
6. drying as claimed in claim 1 and pre-passivating device, wherein, the passivation gas control unit includes：
Intake valve, for when the air chamber is in vacuum state, passivation gas being injected into the air chamber to enter parts
Row pre-passivating；
Air bleeding valve, for after the completion of pre-passivating, the air chamber to discharge the passivation gas when being in atmospheric pressure state.
7. drying as claimed in claim 1 and pre-passivating device, wherein, the master control unit includes gas circulation device,
For homogenizing gas and temperature in the air chamber；When passivation gas is injected in the air chamber to parts progress pre-passivating,
Temperature range in the air chamber is 100 DEG C~150 DEG C.
8. drying as claimed in claim 1 and pre-passivating device, wherein, the drying and pre-passivating device also include being located at gas
Sample stage, sample platform bracket in room and the moving guide rail for being embedded in the gas chamber outer wall, the sample stage pass through sample platform bracket
It is placed on the moving guide rail；The sample stage is net structure, and it is unequal some that the net structure includes mesh-density
Unit；The madial wall of the air chamber includes insulation and anticorrosive coat, for preventing the lost and described passivation gas of heat to described
The corrosion of gas chamber sidewall；The side wall of the air chamber is provided with a hermatic door, placed by the hermatic door/take out parts.
9. a kind of drying and pre-passivation method, using the drying as any one of claim 1 to 8 and pre-passivating device,
Comprise the following steps：
Step 1, placement cleaned through ultrasonic wave after parts into the air chamber；
Step 2, using vacuum unit the air chamber is vacuumized, the air chamber is in vacuum state；
Step 3, use passivation gas control unit injected into the air chamber passivation gas with to the parts carry out it is pre- blunt
Change, while master control unit provides heat to the air chamber after injection passivation gas；
Step 4, after a period of time, master control unit stop to the air chamber provide heat, treat that the temperature in the air chamber is down to
After room temperature, passivation gas control unit discharges the passivation gas in the air chamber, completes the dryings of the parts and pre- blunt
Change.
10. the processing method of parts in a kind of discharge cavity, using the drying as shown in claim 9 and pre-passivation method,
Also include after the step 4：
Step 5, taking-up parts, the Passivation Treatment after being assembled and being assembled.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108183382A (en) * | 2018-01-25 | 2018-06-19 | 中国科学院光电研究院 | The more changing device and replacing options of excimer laser window |
| CN108414612A (en) * | 2018-01-25 | 2018-08-17 | 中国科学院光电研究院 | A kind of detection method and module of excimer laser discharge cavity gas |
| CN109888599A (en) * | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
| CN110947951A (en) * | 2019-11-11 | 2020-04-03 | 山西中磁尚善科技有限公司 | Vacuum insulation passivation process for magnetic powder |
| CN111307924A (en) * | 2020-02-24 | 2020-06-19 | 中国科学院微电子研究所 | Detection device and method for detecting passivation degree of discharge cavity part of excimer laser |
| CN112210775A (en) * | 2020-10-09 | 2021-01-12 | 中国科学院微电子研究所 | Part coating preparation device, part coating preparation method and terminal device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108183382A (en) * | 2018-01-25 | 2018-06-19 | 中国科学院光电研究院 | The more changing device and replacing options of excimer laser window |
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| CN109888599A (en) * | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
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| CN110947951A (en) * | 2019-11-11 | 2020-04-03 | 山西中磁尚善科技有限公司 | Vacuum insulation passivation process for magnetic powder |
| CN111307924A (en) * | 2020-02-24 | 2020-06-19 | 中国科学院微电子研究所 | Detection device and method for detecting passivation degree of discharge cavity part of excimer laser |
| CN111307924B (en) * | 2020-02-24 | 2023-05-12 | 中国科学院微电子研究所 | Detection device and method for detecting passivation degree of excimer laser discharge cavity component |
| CN112210775A (en) * | 2020-10-09 | 2021-01-12 | 中国科学院微电子研究所 | Part coating preparation device, part coating preparation method and terminal device |
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