CN111307924A - Detection device and method for detecting passivation degree of discharge cavity part of excimer laser - Google Patents
Detection device and method for detecting passivation degree of discharge cavity part of excimer laser Download PDFInfo
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- 238000002161 passivation Methods 0.000 title claims abstract description 219
- 238000001514 detection method Methods 0.000 title claims abstract description 41
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000012360 testing method Methods 0.000 claims abstract description 205
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000005070 sampling Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 209
- 239000010410 layer Substances 0.000 description 31
- 229910052736 halogen Inorganic materials 0.000 description 21
- 150000002367 halogens Chemical class 0.000 description 21
- 231100001261 hazardous Toxicity 0.000 description 18
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 11
- 229910052731 fluorine Inorganic materials 0.000 description 11
- 239000011737 fluorine Substances 0.000 description 11
- 229910052799 carbon Inorganic materials 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000000356 contaminant Substances 0.000 description 6
- 239000003344 environmental pollutant Substances 0.000 description 6
- 231100000719 pollutant Toxicity 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- -1 perfluoro Chemical group 0.000 description 4
- 230000035484 reaction time Effects 0.000 description 4
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 3
- 229910004014 SiF4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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Abstract
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser, relates to the field of photoelectric technology, and can judge whether passivation of a passivation layer in the discharge cavity part is finished. A detection device is used for detecting the passivation degree of a discharge cavity part of an excimer laser and comprises the excimer laser, a test cavity, a sample groove, a passivation gas cylinder and a mass spectrometer; the excimer laser comprises a discharge cavity component; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity; the sample groove is used for containing a passivation sample sampled from the discharge cavity part; the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer; and the mass spectrometer is used for detecting the content of harmful gas in the test cavity and judging whether passivation is finished or not.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser.
Background
The excimer laser is an important laser device in an ultraviolet band, and has important application value in the fields of semiconductors, liquid crystal display, solar photovoltaics, automobile manufacturing, medical treatment, scientific research, national defense and the like.
However, the working medium of the excimer laser contains a halogen medium with strong corrosiveness, and the halogen medium reacts with elements such as silicon (Si), carbon (C), hydrogen (H), oxygen (O) and the like in the discharge chamber part to generate harmful gaseous products. Research shows that harmful gases such as HF, O2, CF4 and the like in the order of 10ppm obviously affect the performance of the laser. Therefore, the excimer laser needs to be passivated before being used.
However, whether the passivation of the discharge chamber parts is completed or not still needs to be determined empirically at present, which causes two problems: 1. the discharge cavity is over-passivated or under-passivated, and the over-passivation not only causes the waste of time and energy, but also can cause excessive accumulation of internal hazardous elements to the surface; when the passivation is insufficient, a large amount of harmful gas can be generated in the operation process of the discharge cavity part, the output performance of the excimer laser is influenced, and the efficiency and the operation cost are seriously influenced. 2. The observation method or the detection method is difficult to find out the condition that a large amount of harmful gas is generated due to the diffusion of the hazardous elements to the surface after a period of time, and is not beneficial to predicting the passivation applicability of the component.
Disclosure of Invention
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser, which can judge whether the passivation of the passivation layer in the discharge cavity part is finished.
In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:
on one hand, the detection device is used for detecting the passivation degree of a discharge cavity part of an excimer laser and comprises the excimer laser, a test cavity, a sample groove, a passivation gas cylinder and a mass spectrometer; the excimer laser comprises a discharge chamber component; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity; the sample groove is used for containing a passivation sample sampled from the discharge cavity part; the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer; and the mass spectrometer is used for detecting the content of harmful gas in the test cavity and judging whether passivation is finished or not.
Optionally, the detection device is further used for detecting the passivation applicability of the discharge chamber component of the excimer laser.
Optionally, the detection device includes a mirror, a focusing lens, an adjustment translation stage, and a controller; the adjusting translation stage is used for bearing the sample groove; the controller is used for controlling and adjusting the position of the translation table; the reflector is used for reflecting the laser emitted by the excimer laser and reflecting the laser to the focusing lens; the focusing lens is used for applying the laser to the passivated sample in the sample groove to remove the passivated layer; the passivation gas cylinder is also used for inputting the passivation gas into the test cavity for removing the passivation layer; the mass spectrometer is also used for detecting the content of harmful gas in the test cavity with the passivation layer removed and judging whether the passivation sample is suitable for the discharge cavity part.
Optionally, the detection apparatus further includes a vacuum pump, and the vacuum pump is connected to the test chamber.
Optionally, the detection device further comprises a heating device; the heating device is used for heating the test cavity.
Optionally, the detection apparatus further includes a passivation gas valve connected to the passivation gas cylinder and the test chamber, and a mass spectrometer gas valve connected to the mass spectrometer and the test chamber.
In another aspect, there is provided a method of detecting a degree of passivation of a discharge chamber component of an excimer laser, comprising: sampling a passivated sample from the discharge cavity part, and putting the passivated sample into a sample groove; the sample groove is positioned in the test cavity; inputting passivation gas into the test cavity by using a passivation gas cylinder to generate a passivation layer, and detecting the content of harmful gas generated in the test cavity by using a mass spectrometer; if the content of the harmful gas is less than a preset value, the passivation is finished; and otherwise, restoring the test cavity to a vacuum state, inputting the passivation gas into the test cavity again, and detecting the content of the harmful gas until the content of the harmful gas in the test cavity is less than the preset value.
Optionally, after the passivation is completed, the method for detecting the passivation degree of the discharge chamber component of the excimer laser further includes: the suitability of the discharge chamber component of the excimer laser for passivation is tested.
Optionally, the detecting the passivation applicability of the discharge chamber component of the excimer laser comprises: reflecting laser emitted by the excimer laser to a focusing lens by using a reflector, controlling the position of an adjusting translation table bearing a sample groove by using a controller, and applying the laser to the passivated sample in the sample groove by using the focusing lens until the passivated layer is removed; inputting passivation gas into the test cavity by using a passivation gas cylinder; detecting the content of harmful gas generated in the test cavity by using a mass spectrometer, wherein if the content of the harmful gas is less than a preset value, the passivated sample is suitable for the discharge cavity part; otherwise, it is not applicable.
Optionally, before the passivation gas is input into the test chamber, the method for detecting the passivation degree of the discharge chamber component of the excimer laser further comprises: and pumping the gas in the test cavity to a vacuum state by using a vacuum pump.
Optionally, before the passivation gas is input into the test chamber, the method for detecting the passivation degree of the discharge chamber component of the excimer laser further comprises: and heating the test cavity by using a heating device.
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser. And introducing passivation gas into the test cavity by using a passivation gas cylinder so as to ensure that halogen elements in the passivation gas fully react with hazardous elements (Si, C, H, O and the like) in the test cavity, vaporize and escape, and simultaneously generate a passivation layer capable of protecting the surface of the test cavity. On the basis, the content of harmful gas in the test cavity can be detected by a mass spectrometer so as to judge whether passivation is finished.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic flowchart of a method for detecting a passivation level of a discharge chamber component of an excimer laser according to an embodiment of the present invention.
Reference numerals:
1-a test chamber; 2-a sample tank; 3-a vacuum pump; 4-barometer; 5-a heating device; 6-passivating the gas cylinder; 7-a mass spectrometer; 8-a mirror; 9-a focusing lens; 10-adjusting the translation stage; 11-an excimer laser; 12-a controller; 13-a passivation gas valve; 14-Mass spectrometer gas valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a detection device for detecting the passivation degree of a discharge cavity part of an excimer laser, which comprises an excimer laser 11, a test cavity 1, a sample groove 2, a passivation gas cylinder 6 and a mass spectrometer 7; the excimer laser 11 comprises discharge chamber components. The sample groove 2 is positioned in the test cavity 1; the passivation gas cylinder 6 and the mass spectrometer 7 are respectively connected with the testing chamber 7.
And the sample groove 2 is used for containing a passivation sample sampled from the discharge cavity part. And the passivation gas cylinder 6 is used for inputting passivation gas into the test cavity 1 to obtain a passivation layer. And the mass spectrometer 7 is used for detecting the content of harmful gas in the test cavity 1 and judging whether passivation is finished or not.
In some embodiments, the connection of the passivated gas cylinder 6 to the test chamber 1 means: the passivation gas cylinder 6 can directly input passivation gas into the test chamber 1.
The mass spectrometer 7 is connected with the test cavity 1, and means that: the mass spectrometer 7 may be used directly to detect the gas within the test chamber 1.
In some embodiments, the connection pipeline between the passivated gas cylinder 6 and the test chamber 1 and the connection pipeline between the mass spectrometer 6 and the test chamber 1 may be made of passivated perfluoro rubber to improve the fluorine resistance of the connection pipelines.
In some embodiments, the material of the inner surface of the test chamber 1 may also be perfluorinated rubber which is passivated to improve the fluorine resistance of the test chamber 1.
In some embodiments, the passivation samples may be part of the discharge chamber components, and these passivation samples may be placed entirely within the test chamber 1 for testing or partially within the test chamber 1 for testing.
In some embodiments, the process of creating the passivation layer is: passivation gas (including rare gas and halogen gas in a certain proportion) is introduced into the test cavity 1 by using a passivation gas bottle 6, discharge with a certain frequency is assisted, so that surface pollutants and surface layer hazardous elements (Si, C, H, O and the like) of a passivation sample fully react with the halogen gas and are vaporized to generate harmful gas, the harmful gas escapes into the test cavity 1 from a reaction interface, and a stable halide passivation layer is generated on the surface of the passivation sample.
Here, since a certain amount of halogen medium is inherently present in the discharge chamber part of the excimer laser 11, a certain amount of halogen element may be included in the passivation gas to simulate the discharge chamber part with the test chamber 1 for testing.
Illustratively, the main component of the discharge chamber part 1 includes aluminum (Al), i.e., the main component of the passivation sample includes Al, the material of the passivation layer may include aluminum fluoride (AlF)3)。
In some embodiments, the surface contaminants and surface hazardous elements (Si, C, H, O, etc.) of the passivated sample react with the halogen gas sufficiently (the reaction time may be 10min ± 20s) to generate a large amount of harmful gas (N)2、O2、CO2、CF4HF), some of the hazardous gas escapes into the test chamber 1 and remains in the test chamber 1, while the remaining passivation gas is also included in the test chamber 1.
Based on this, the mass spectrometer 7 can determine whether the passivation is completed by detecting the content of the harmful gas in the test chamber 1 to obtain the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1.
A preset value can be preset, and if the percentage of harmful gas in the test chamber 1 to all gas in the test chamber 1 is lower than the preset value, passivation is completed; otherwise, the test chamber is restored to a vacuum state after passivation is not completed, passivation gas is introduced into the test chamber 1 again, and halogen elements in the newly introduced passivation gas and residual surface layer hazardous elements in the test chamber 1 continue to react (the reaction time can be 30min), vaporize and escape; secondly, detecting the content of harmful gas in the test cavity 1 by using a mass spectrometer, and if the percentage of the harmful gas in the test cavity 1 to all the gas in the test cavity 1 is lower than a preset value, completing passivation; otherwise, the steps are repeated until the percentage of the harmful gas in the test chamber 1 to all the gas in the test chamber 1 is lower than the preset value.
Here, whether passivation is completed may be judged manually or by means of another machine.
The harmful gas may include a plurality of gases, each of which may be set to a preset value, and if the percentage of all the gases in the harmful gas is lower than the preset value, the passivation is completed.
The embodiment of the invention provides a detection device which comprises an excimer laser 11, a test cavity 1, a sample groove 2, a passivation gas cylinder 6 and a mass spectrometer 7. And (3) introducing passivation gas into the test chamber by using a passivation gas cylinder 6, so that halogen elements in the passivation gas fully react with surface pollutants and hazardous elements (Si, C, H, O and the like) of the passivation sample, vaporize and escape, and meanwhile, a passivation layer capable of protecting the surface of the test sample is generated. On the basis, the content of harmful gas escaping into the test cavity 1 can be detected by a mass spectrometer to judge whether passivation is finished.
Optionally, the detection device is further used for detecting the passivation applicability of the discharge chamber component of the excimer laser.
In some embodiments, the process of forming the passivation layer on the surface of the discharge chamber portion takes a certain amount of time, and in areas where the passivation layer is not formed, surface contaminants and hazardous elements can still enter the inner surface of the discharge chamber portion.
Similarly, surface contaminants and hazardous elements can also enter the inner surface of the passivated sample.
Based on the passivation suitability, the passivation sample is also required to be tested to determine the passivation suitability of the discharge chamber component.
Alternatively, as shown in fig. 1, the detection device includes a mirror 8, a focusing lens 9, an adjustment translation stage 10, and a controller 12. The adjusting translation stage 10 is used for bearing the sample groove 2; and a controller 12 for controlling and adjusting the position of the translation stage 10.
And the reflecting mirror 8 is used for reflecting the laser light emitted by the excimer laser 11 and reflecting the laser light to the focusing lens 9.
And the focusing lens 9 is used for applying laser to the passivated sample in the sample groove 2 to remove the passivated layer.
And the passivation gas cylinder 6 is also used for inputting passivation gas into the test chamber 1 for removing the passivation layer.
And the mass spectrometer 7 is also used for detecting the content of the fluoride gas in the test cavity 1 with the passivation layer removed and judging whether the passivation sample is suitable for the discharge cavity part.
Here, the laser light emitted from the excimer laser 11 may be reflected by the mirror 8 onto the focusing lens 9, the position of the adjustment translation stage 10 carrying the sample cell 2 may be controlled by the controller 12, and the laser light may be applied to the passivated sample in the sample cell 2 by the focusing lens 9 until the passivation layer is removed. Namely, the laser emitted by the excimer laser 11 can be directly utilized to remove the passivation layer, so that the inner surface of the test cavity 1 is exposed, and the cost is saved.
Then, a passivation gas cylinder 6 is used to input passivation gas into the test chamber 1, and the passivation gas contains rare gas and halogen gas in a certain proportion.
Finally, detecting the content of harmful gas generated in the test cavity 1 by using a mass spectrometer 7, and if the content of the harmful gas is less than a preset value, passivating the sample and being suitable for a discharge cavity part; otherwise, it is not applicable.
Here, the discharge with a certain frequency is assisted, so that the pollutants and hazardous elements (Si, C, H, O, etc.) entering the passivated sample and the halogen gas fully react and vaporize to generate harmful gas, and the harmful gas escapes into the test chamber 1 from the reaction interface, and the mass spectrometer 7 can obtain the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1 by detecting the content of the harmful gas in the test chamber 1.
Here, a preset value can also be set, and if the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1 is lower than the preset value, the passivated sample is suitable for being used in a fluorine-containing medium environment for a long time; otherwise, it is not applicable.
The harmful gas can comprise a plurality of gases, each gas can be set to a preset value, and if the percentage of all the gases in the harmful gas is lower than the preset value, the passivated sample is suitable for being used in a fluorine-containing medium environment for a long time.
In the embodiment of the invention, the passivation applicability of the discharge cavity part can be detected by the detection device of the embodiment of the invention. Meanwhile, whether passivation is finished or not and the passivation applicability of the discharge cavity part can be detected by using one detection device, so that the passivation sample can be prevented from moving back and forth for multiple times, and the detection accuracy can be improved.
Optionally, as shown in fig. 1, the detection apparatus further includes a vacuum pump 3, and the vacuum pump 3 is connected to the test chamber 1.
In some embodiments, the connection pipe between the vacuum pump 3 and the test chamber 1 may be made of a passivated perfluoro rubber to improve the fluorine resistance of the connection pipe. In the embodiment of the invention, before the passivation gas is input into the test cavity 1 each time, the gas in the test cavity 1 can be pumped away by using the vacuum pump 3, so that the influence of the original gas in the test cavity 1 on the detection result is avoided.
On this basis, as shown in fig. 1, the detection device may further comprise a barometer 4 connected to the test chamber 1. The barometer 4 is used to test the pressure in the test chamber 1, and the pressure in the test chamber 1 can be controlled within a range of 1Pa ± 0.5Pa, typically after the gas is pumped out by the vacuum pump 3.
Optionally, as shown in fig. 1, the detection device further includes a heating device 5; the heating device 5 is used to heat the test chamber 1.
In the embodiment of the present invention, before the passivation gas is input into the test chamber 1, the test chamber 1 may be heated by the heating device 5, so as to control the internal temperature of the test chamber 1 to be 45 ℃ ± 5 ℃.
Optionally, the detection apparatus further comprises a passivation gas valve 13 connected to the passivation gas cylinder 6 and the test chamber 1, and a mass spectrometer gas valve 14 connected to the mass spectrometer 7 and the test chamber 1.
In some embodiments, after the mass spectrometer 7 detects the content of the harmful gas in the test chamber 1, the gas in the pipeline connecting the mass spectrometer 7 and the test chamber 1 can be discharged, so as to avoid affecting the test result in the next test.
In the embodiment of the invention, when the passivation gas is input into the test chamber 1, the passivation gas valve 13 can be opened; when it is not necessary to input the passivation gas into the test chamber 1, the passivation gas valve 13 may be closed to avoid continuously inputting the passivation gas into the test chamber 1. When the content of harmful gas in the test cavity 1 needs to be detected, the gas valve 14 of the mass spectrometer can be opened; the mass spectrometer gas valve 14 can be closed when the harmful gas content in the test chamber 1 does not need to be detected.
The embodiment of the invention also provides a method for detecting the passivation degree of a discharge cavity part of an excimer laser, which can be realized by the following steps as shown in fig. 2:
s11, sampling a passivation sample from the discharge cavity part, and placing the passivation sample into the sample groove 2; the sample well 2 is located in the test chamber 1.
In some embodiments, the passivation samples may be part of the discharge chamber components, and these passivation samples may be placed entirely within the test chamber 1 for testing or partially within the test chamber 1 for testing.
In some embodiments, the material of the inner surface of the test chamber 1 may also be perfluorinated rubber which is passivated to improve the fluorine resistance of the test chamber 1.
S12, inputting passivation gas into the test cavity 1 by using the passivation gas bottle 6 to generate a passivation layer, and detecting the content of fluoride gas generated in the test cavity 1 by using the mass spectrometer 7; if the content of the harmful gas is less than a preset value, the passivation is finished; otherwise, the test cavity is restored to a vacuum state, the passivation gas is input into the test cavity again, and the content of the harmful gas is detected until the content of the harmful gas in the test cavity 1 is smaller than a preset value.
In some embodiments, the connection pipeline between the passivated gas cylinder 6 and the test chamber 1 and the connection pipeline between the mass spectrometer 6 and the test chamber 1 may be made of passivated perfluoro rubber to improve the fluorine resistance of the connection pipelines.
In some embodiments, the process of creating the passivation layer is: passivation gas (including rare gas and halogen gas in a certain proportion) is introduced into the test cavity 1 by using a passivation gas bottle 6, discharge with a certain frequency is assisted, so that surface pollutants and surface layer hazardous elements (Si, C, H, O and the like) of a passivation sample fully react with the halogen gas and are vaporized to generate harmful gas, the harmful gas escapes into the test cavity 1 from a reaction interface, and a stable halide passivation layer is generated on the surface of the passivation sample.
Here, since a certain amount of halogen medium is inherently present in the discharge chamber part of the excimer laser 11, a certain amount of halogen element may be included in the passivation gas to simulate the discharge chamber part with the test chamber 1 for testing.
Illustratively, the main component of the discharge chamber part 1 includes Al, i.e., the main component of the passivation sample includes Al, the material of the passivation layer may include AlF3。
In some embodiments, the surface contaminants and surface hazardous elements (Si, C, H, O, etc.) of the passivated sample react with the halogen gas sufficiently (the reaction time may be 10min ± 20s) to generate a large amount of harmful gas (N)2、O2、CO2、CF4HF), some of the harmful gases remain in the chamber 1 that escapes into the chamber 1 and the chamber 1, while the remaining passivation gas is also contained in the chamber 1.
Based on this, the mass spectrometer 7 can determine whether the passivation is completed by detecting the content of the harmful gas in the test chamber 1 to obtain the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1.
A preset value can be preset, and if the percentage of harmful gas in the test chamber 1 to all gas in the test chamber 1 is lower than the preset value, passivation is completed; otherwise, the test chamber is restored to a vacuum state after passivation is not completed, passivation gas is introduced into the test chamber 1 again, and halogen elements in the newly introduced passivation gas and residual surface layer hazardous elements in the test chamber 1 continue to react (the reaction time can be 30min), vaporize and escape; secondly, detecting the content of harmful gas in the test cavity 1 by using a mass spectrometer, and if the percentage of the harmful gas in the test cavity 1 to all the gas in the test cavity 1 is lower than a preset value, completing passivation; otherwise, the steps are repeated until the percentage of the harmful gas in the test chamber 1 to all the gas in the test chamber 1 is lower than the preset value.
Here, whether passivation is completed may be judged manually or by means of another machine.
The harmful gas may include a plurality of gases, each of which may be set to a preset value, and if the percentage of all the gases in the harmful gas is lower than the preset value, the passivation is completed.
In some embodiments, the preset value may be set according to actual conditions. Illustratively, a certain harmful gas in the test chamber 1 is reduced to 10% of the original value, and a preset value is set accordingly.
That is, in the case where the passivation layer is not formed, a certain harmful gas is generated to account for 10% of all the gases in the test chamber 1; in the case of the passivation layer, the harmful gas generated accounts for 9% of all the gas in the test chamber 1.
By way of example, taking the discharge chamber component 1 as an example, the main component of which includes Al, the gas component in the test chamber 1 detected by the mass spectrometer 7 and the preset value of the gas are shown in table 1 below:
| gas (es) | N2 | O2 | CO2 | CF4 | SiF4 | HF |
| Preset value miM | 25 | 5 | 5 | 35 | 10 | 10 |
| mi | <D.L. | 1 | 3 | 2 | 5 | 14 |
TABLE 1
In Table 1, N2、O2、CO2、CF4、SiF4The percentage of HF is less than its own preset value, and thus, passivation is complete. Wherein,<(detection limit) D.L means below the lower detection limit of the device.
The embodiment of the invention provides a method for detecting the passivation degree of a discharge cavity part of an excimer laser, which comprises the steps of introducing passivation gas into a test cavity by using a passivation gas cylinder 6, so that halogen elements in the passivation gas fully react with surface pollutants and hazardous elements (Si, C, H, O and the like) of a passivation sample, vaporize and escape, and generating a passivation layer capable of protecting the surface of the test sample. On the basis, the content of harmful gas escaping into the test cavity 1 can be detected by the mass spectrometer 7 to judge whether passivation is finished.
Optionally, after the passivation is completed, the method for detecting the passivation degree of the discharge chamber component of the excimer laser 11 further includes: the suitability of the discharge chamber component of the excimer laser 11 for passivation is examined.
In some embodiments, the process of forming the passivation layer on the surface of the discharge chamber portion takes a certain amount of time, and in the areas where the passivation layer is not formed, surface contaminants and hazardous elemental harmful gases can still enter the inner surface of the discharge chamber portion.
Similarly, surface contaminants and hazardous elements can also enter the inner surface of the passivated sample.
Based on the passivation suitability, the passivation sample is also required to be tested to determine the passivation suitability of the discharge chamber component.
Alternatively, as shown in fig. 1, the laser emitted from the excimer laser 11 may be reflected by the mirror 8 onto the focusing lens 9, the position of the adjustment translation stage 10 carrying the sample tank 2 is controlled by the controller 12, and the laser is applied to the passivated sample in the sample tank 2 by the focusing lens 9 until the passivation layer is removed. Namely, the laser emitted by the excimer laser 11 can be directly utilized to remove the passivation layer, so that the inner surface of the test cavity 1 is exposed, and the cost is saved.
Then, a passivation gas cylinder 6 is used to input passivation gas into the test chamber 1, and the passivation gas contains rare gas and halogen gas in a certain proportion.
Finally, detecting the content of harmful gas generated in the test cavity 1 by using a mass spectrometer 7, and if the content of the harmful gas is less than a preset value, passivating the sample and being suitable for a discharge cavity part; otherwise, it is not applicable.
Here, the discharge with a certain frequency is assisted, so that the pollutants and surface layer hazardous elements (Si, C, H, O, etc.) entering the inner surface of the passivated sample fully react with the halogen gas, are vaporized to generate harmful gas, and escape from the reaction interface into the test chamber 1, and the mass spectrometer 7 can obtain the percentage of the harmful gas in the test chamber 1 in all the gases in the test chamber 1 by detecting the content of the harmful gas in the test chamber 1.
Here, a preset value can also be set, and if the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1 is lower than the preset value, the passivated sample is suitable for being used in a fluorine-containing medium environment for a long time; otherwise, it is not applicable.
The harmful gas can comprise a plurality of gases, each gas can be set to a preset value, and if the percentage of all the gases in the harmful gas is lower than the preset value, the passivated sample is suitable for being used in a fluorine-containing medium environment for a long time.
For example, taking the example that the main component of the discharge chamber component 1 includes Al, the gas component in the test chamber 1 detected by the mass spectrometer 7 and the preset value of the gas are shown in table 2 below:
TABLE 2
In Table 2, N2、O2、CO2、CF4、SiF4And the percentage of HF is less than the preset value of HF, so that the discharge chamber aluminum component is suitable for being used in a fluorine-containing medium environment for a long time.
In the embodiment of the invention, the passivation applicability of the discharge cavity part can be detected by the detection device of the embodiment of the invention. Meanwhile, whether passivation is finished or not and the passivation applicability of the discharge cavity part can be detected by using one detection device, so that the passivation sample can be prevented from moving back and forth for multiple times, and the detection accuracy can be improved.
Optionally, as shown in fig. 1, before the passivation gas is input into the test chamber 1, the gas in the test chamber 1 may be pumped away by using the vacuum pump 3, so as to avoid the influence of the original gas in the test chamber 1 on the detection result.
In some embodiments, the connection pipe between the vacuum pump 3 and the test chamber 1 may be made of a passivated perfluoro rubber to improve the fluorine resistance of the connection pipe.
On this basis, as shown in fig. 1, the detection device may further comprise a barometer 4 connected to the test chamber 1. The barometer 4 is used to test the pressure in the test chamber 1, and the pressure in the test chamber 1 can be controlled within a range of 1Pa ± 0.5Pa, typically after the gas is pumped out by the vacuum pump 3.
Optionally, as shown in fig. 1, the detection device further includes a heating device 5; the heating device 5 is used to heat the test chamber 1.
In the embodiment of the present invention, before the passivation gas is input into the test chamber 1, the test chamber 1 may be heated by the heating device 5, so as to control the internal temperature of the test chamber 1 to be 45 ℃ ± 5 ℃.
Optionally, the detection apparatus further comprises a passivation gas valve 13 connected to the passivation gas cylinder 6 and the test chamber 1, and a mass spectrometer gas valve 14 connected to the mass spectrometer 7 and the test chamber 1.
In some embodiments, after the mass spectrometer 7 detects the content of the harmful gas in the test chamber 1, the gas in the pipeline connecting the mass spectrometer 7 and the test chamber 1 can be discharged, so as to avoid affecting the test result in the next test.
In the embodiment of the invention, when the passivation gas is input into the test chamber 1, the passivation gas valve 13 can be opened; when it is not necessary to input the passivation gas into the test chamber 1, the passivation gas valve 13 may be closed to avoid continuously inputting the passivation gas into the test chamber 1. When the content of harmful gas in the test cavity 1 needs to be detected, the gas valve 14 of the mass spectrometer can be opened; the mass spectrometer gas valve 14 can be closed when the harmful gas content in the test chamber 1 does not need to be detected.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (11)
1. A detection device is used for detecting the passivation degree of a discharge cavity component of an excimer laser and is characterized by comprising the excimer laser, a test cavity, a sample groove, a passivation gas cylinder and a mass spectrometer;
the excimer laser comprises a discharge chamber component; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity;
the sample groove is used for containing a passivation sample sampled from the discharge cavity part;
the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer;
and the mass spectrometer is used for detecting the content of harmful gas in the test cavity and judging whether passivation is finished or not.
2. The detection apparatus according to claim 1, wherein the detection apparatus is further configured to detect the suitability of the discharge chamber component of the excimer laser for passivation.
3. The inspection device of claim 2, wherein the inspection device comprises a mirror, a focusing lens, an adjustment translation stage, and a controller;
the adjusting translation stage is used for bearing the sample groove;
the controller is used for controlling and adjusting the position of the translation table;
the reflector is used for reflecting the laser emitted by the excimer laser and reflecting the laser to the focusing lens;
the focusing lens is used for applying the laser to the passivated sample in the sample groove to remove the passivated layer;
the passivation gas cylinder is also used for inputting the passivation gas into the test cavity for removing the passivation layer;
the mass spectrometer is also used for detecting the content of harmful gas in the test cavity with the passivation layer removed and judging whether the passivation sample is suitable for the discharge cavity part.
4. The test device of any one of claims 1-3, further comprising a vacuum pump coupled to the test chamber.
5. The detection device according to claim 4, wherein the detection device further comprises a heating device;
the heating device is used for heating the test cavity.
6. The test device of claim 5, further comprising a passivation gas valve connected to the passivated gas cylinder and the test chamber, a mass spectrometer gas valve connected to the mass spectrometer and the test chamber.
7. A method of detecting a degree of passivation of a discharge chamber component of an excimer laser, comprising:
sampling a passivated sample from the discharge cavity part, and putting the passivated sample into a sample groove; the sample groove is positioned in the test cavity;
inputting passivation gas into the test cavity by using a passivation gas cylinder to generate a passivation layer, and detecting the content of harmful gas generated in the test cavity by using a mass spectrometer; if the content of the harmful gas is less than a preset value, the passivation is finished; and otherwise, restoring the test cavity to a vacuum state, inputting the passivation gas into the test cavity again, and detecting the content of the harmful gas until the content of the harmful gas in the test cavity is less than the preset value.
8. The method of detecting the degree of passivation of a discharge chamber component of an excimer laser as set forth in claim 7, wherein the method of detecting the degree of passivation of a discharge chamber component of an excimer laser after passivation is completed further comprises:
the suitability of the discharge chamber component of the excimer laser for passivation is tested.
9. The method of claim 8, wherein detecting the suitability of the discharge chamber component of the excimer laser for passivation comprises:
reflecting laser emitted by the excimer laser to a focusing lens by using a reflector, controlling the position of an adjusting translation table bearing a sample groove by using a controller, and applying the laser to the passivated sample in the sample groove by using the focusing lens until the passivated layer is removed;
inputting passivation gas into the test cavity by using a passivation gas cylinder;
detecting the content of harmful gas generated in the test cavity by using a mass spectrometer, wherein if the content of the harmful gas is less than a preset value, the passivated sample is suitable for the discharge cavity part; otherwise, it is not applicable.
10. The method of detecting the degree of passivation of a discharge chamber component of an excimer laser as claimed in any one of claims 7 to 9, wherein the method of detecting the degree of passivation of a discharge chamber component of an excimer laser further comprises, prior to the input of the passivation gas into the test chamber:
and pumping the gas in the test cavity to a vacuum state by using a vacuum pump.
11. The method of claim 10, wherein prior to introducing the passivating gas into the test chamber, the method further comprises:
and heating the test cavity by using a heating device.
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