CN102517540A - Passivation method of excimer laser gas configuration device - Google Patents
Passivation method of excimer laser gas configuration device Download PDFInfo
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- CN102517540A CN102517540A CN2011104294123A CN201110429412A CN102517540A CN 102517540 A CN102517540 A CN 102517540A CN 2011104294123 A CN2011104294123 A CN 2011104294123A CN 201110429412 A CN201110429412 A CN 201110429412A CN 102517540 A CN102517540 A CN 102517540A
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Abstract
The invention relates to a passivation method of an excimer laser gas configuration device. The method is characterized in that the method comprises the following steps: 1, carrying out passivation preprocessing: cleaning the excimer laser gas configuration device to remove impurities therein, and blowing the excimer laser gas configuration device by N2; 2, carrying out passivation processing: inletting a mixed gas of F2 and He to the excimer laser gas configuration device, maintaining a constant temperature and a constant pressure for a period of time, and blowing the excimer laser gas configuration device by N2; and 3, inletting N2 to the excimer laser gas configuration device, and sealing to complete the passivation of the excimer laser gas configuration device. The He gas with small molecular weight and strong diffusion capability is used to substitute N2 used in the prior art, and passivation temperature conditions are changed, so an oxidation film which is stable and compact is tough and firm because of the increased penetration degree, thereby the further corrosion of a metal matrix can be effectively controlled. A configured excimer laser which has the advantages of stable output energy and uniform energy distribution can completely satisfy requirements of laser treatment for ophthalmic operations and costs low.
Description
Technical field
The present invention relates to a kind of passivating method of PRK gas inking device, particularly a kind of passivating method of argon fluoride excimer laser gas configuration device.
Background technology
PRK gas is used for the developing history that the treatment of ophthalmic diseases was had an appointment 30 years.Various to contain F2 excimer laser gas kind numerous, and wherein F2 gas is to form wherein than indispensable composition, and the main energy of laser provides the source when being operation.China is since import at beginning of the nineties excimer laser machine, and home-made model is also succeeded in developing in calendar year 2001.But it is expensive and consume extensive work source of the gas laser gas, and laser gas is dependence on import basically, though there is a small amount of state aerogenesis to throw in into market, exist energy not reliable mostly, weak points such as preservation period weak point.Analyzing its reason can know, in laser gas, F2 content is very little, and very strict again to the moity error requirements.Therefore in layoutprocedure, do not allow the content of F2 that any variation is arranged.And guarantee one of key issue of above-mentioned requirements, be that inking device needs extremely strong anti-F2 corrosive power.As everyone knows, F is the most active element in the world.Almost can react with all elements.At present, the anti-F2 corroding method of metal commonly used generally is to be matrix gas with N2, feeds the gas mixture of different F2 content, lets its spontaneous layer of metal fluorinated film that forms in the metallic surface.This method can satisfy general requirement.But, very little for F2 content, and need the extremely stable special gas of content, use aforesaid method not satisfy the demands.
Summary of the invention
The object of the present invention is to provide a kind of anti-F2 corrosive power strong, can make the passivating method of a kind of PRK gas inking device of laser output energy stabilization.
The present invention provides a kind of passivating method of PRK gas inking device, and it is characterized in that: it may further comprise the steps,
Step 1: passivation pre-treatment: the impurity in the cleaning PRK gas inking device, and with N2 blowing PRK gas inking device;
Step 2: Passivation Treatment: in PRK gas inking device, feed the mixed gas of F2 and He, constant temperature and pressure blows down PRK gas inking device with N2 after for some time;
Step 3: seal after feeding N2, accomplish the passivation of PRK gas inking device.
On the basis of technique scheme, said step 2 specifically may further comprise the steps:
A) PRK gas inking device temperature was remained on 40-60 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 2 ~ 5%, and all the other are the mixed gas of He, and wherein the content of F 2 is 2 ~ 5%; All the other are He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
B) PRK gas inking device temperature was remained on-20 ~-40 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 0.5 ~ 1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
C) PRK gas inking device was remained on normal temperature and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.1 ~ 0.2MPa, F2 is 0.05 ~ 0.1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 24 hours and blows down PRK gas inking device with N2.
On the basis of technique scheme, the N2 pressure that feeds in the said step 3 is 0.05MPa.
Compared with prior art; The present invention has used molecular weight is little, diffusibility is strong He gas instead N2 in the prior art; And changed the temperature condition of passivation, therefore, the formation of sull is stable and fine and close; Because of the increase of penetration degree tough and tensile firmly, effectively preventing the further corrosion of metallic matrix.The excimer laser output energy stabilization of configuration, energy distribution is even.Can meet the eye on every side the requirement of section's surgical laser treatment fully, and cost is low.
[description of drawings]
Fig. 1 is the passivating method synoptic diagram of a kind of PRK gas of the present invention inking device;
[embodiment]
Below in conjunction with accompanying drawing the present invention is done further explain.
Feelings are with reference to figure 1, the passivating method of a kind of PRK gas of the present invention inking device, and this method may further comprise the steps:
The first step: passivation pre-treatment: the impurity in the cleaning inking device, and with N2 blowing PRK gas inking device; Be specially in the cleaning inking device in the pipeline impurity such as dirt,, seal for use afterwards again with highly purified N2 blowing.
Step 2: Passivation Treatment: in PRK gas inking device, feed the mixed gas of F2 and He, constant temperature and pressure blows down PRK gas inking device with N2 after for some time; Three steps of concrete branch:
A) PRK gas inking device temperature was remained on 40-60 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 2 ~ 5%, and all the other are the mixed gas of He, and wherein the content of F 2 is 2 ~ 5%; All the other are He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
B) PRK gas inking device temperature was remained on-20 ~-40 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 0.5 ~ 1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
C) PRK gas inking device was remained on normal temperature and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.1 ~ 0.2MPa, F2 is 0.05 ~ 0.1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 24 hours and blows down PRK gas inking device with N2.
The N2 that feeds pressure at last and be 0.05MPa is as shielding gas.Sealing back is for use and accomplish whole passivating process.
Please refer again to Fig. 1; The passivating method of PRK gas inking device of the present invention comprises valve 1,10,11,12,13,14,15,16,17,18,19; Tensimeter 2, pipeline 3, vacuumometer 4; Cleaner 5 and vacuum pump 6, wherein pipeline 3 connects canned product gas, F2, Ar, He, Ne.The pipeline that is connected with N2 is provided with valve 1.Before the passivation, closed control valve 1,10,12,14,15, F2 and He gas mixture get into PRK gas inking device by valve 11,13, and after reaching specified amount, closed control valve 11,13, mixed gas are sealed in the PRK gas inking device.At this moment, PRK gas inking device is closed with the extraneous valve 1,10 that contacts.When vacuumizing, only open the valve 15,17,19 that links with vacuum pump, all the other valves 10,11,12,13,14,16,18 are closed.To install inside is evacuated.When blowing down with N2, only open the valve 15,17,18 that links with cleaner, all the other valves 10,11,12,13,14,16,19 are closed.
The present invention has used the strong He gas instead of the little diffusibility of molecular weight N2 in the prior art; And changed the temperature condition of passivation, therefore, the formation of sull is stable and fine and close; Because of the increase of penetration degree tough and tensile firmly, effectively preventing the further corrosion of metallic matrix.The excimer laser output energy stabilization of configuration, energy distribution is even.Can meet the eye on every side the requirement of section's surgical laser treatment fully, and cost is low.
The present invention not only is confined to above-mentioned preferred forms; Anyone can draw other various forms of products under enlightenment of the present invention; No matter but on its shape or structure and method, do any variation; Every have identical with a present invention or akin technical scheme, all in the scope of its protection.
Claims (3)
1. the passivating method of a PRK gas inking device, it is characterized in that: it may further comprise the steps,
Step 1: passivation pre-treatment: the impurity in the cleaning PRK gas inking device, and with N2 blowing PRK gas inking device;
Step 2: Passivation Treatment: in PRK gas inking device, feed the mixed gas of F2 and He, constant temperature and pressure blows down PRK gas inking device with N2 after for some time;
Step 3: seal after feeding N2, accomplish the passivation of PRK gas inking device.
2. the passivating method of a kind of PRK gas inking device as claimed in claim 1 is characterized in that: said step 2 specifically may further comprise the steps:
A) PRK gas inking device temperature was remained on 40-60 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 2 ~ 5%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
B) PRK gas inking device temperature was remained on-20 ~-40 ℃ and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.2 ~ 0.5MPa, F2 is 0.5 ~ 1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 8 hours and blows down PRK gas inking device with N2;
C) PRK gas inking device was remained on normal temperature and constant temperature 0.5 ~ 1 hour; Said PRK gas inking device is vacuumized; And to feed pressure be that the content of 0.1 ~ 0.2MPa, F2 is 0.05 ~ 0.1%; All the other are the mixed gas of He, and constant temperature and pressure reduces pressure after 24 hours and blows down PRK gas inking device with N2.
3. the passivating method of a kind of PRK gas inking device as claimed in claim 1 is characterized in that: the N2 pressure that feeds in the said step 3 is 0.05MPa.
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| CN2011104294123A CN102517540B (en) | 2011-12-20 | 2011-12-20 | Passivation method of excimer laser gas configuration device |
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| CN2011104294123A CN102517540B (en) | 2011-12-20 | 2011-12-20 | Passivation method of excimer laser gas configuration device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106065459A (en) * | 2016-07-01 | 2016-11-02 | 兴化东华齿轮有限公司 | A kind of engine gear soft-nitriding process |
| CN107287553A (en) * | 2017-05-23 | 2017-10-24 | 中国科学院光电研究院 | Dry and pre-passivating device and method |
| CN109888599A (en) * | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
| CN110832106A (en) * | 2017-08-01 | 2020-02-21 | 中央硝子株式会社 | Method for producing filled container and filled container |
| CN111041403A (en) * | 2019-12-29 | 2020-04-21 | 中船重工（邯郸）派瑞特种气体有限公司 | Processing method of steel cylinder for electronic gas storage |
| CN111139428A (en) * | 2019-12-30 | 2020-05-12 | 中船重工（邯郸）派瑞特种气体有限公司 | Passivation treatment method for steel cylinder for storing fluorine-containing compound electronic grade gas |
| CN112342489A (en) * | 2020-10-08 | 2021-02-09 | 中船重工（邯郸）派瑞特种气体有限公司 | Passivation treatment method for iron container for storing electronic-grade carbon monoxide gas |
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| JP2008169448A (en) * | 2007-01-12 | 2008-07-24 | Stella Chemifa Corp | Carbon steel or special steel with fluorinated passive film formed, and method for forming the same |
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| CN1067929A (en) * | 1991-06-04 | 1993-01-13 | 大同酸素株式会社 | The nitriding method of steel |
| EP0794598A1 (en) * | 1996-03-07 | 1997-09-10 | Canon Kabushiki Kaisha | An excimer laser generator, blowers and heat exchangers for use therein, and an exposure apparatus including the same |
| CN101038330A (en) * | 2006-12-27 | 2007-09-19 | 中国科学院物理研究所 | Quasi-continuous or continuous laser spin resolution photoelectron spectrum analysis device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106065459A (en) * | 2016-07-01 | 2016-11-02 | 兴化东华齿轮有限公司 | A kind of engine gear soft-nitriding process |
| CN106065459B (en) * | 2016-07-01 | 2018-03-09 | 兴化东华齿轮有限公司 | A kind of engine gear soft-nitriding process |
| CN107287553A (en) * | 2017-05-23 | 2017-10-24 | 中国科学院光电研究院 | Dry and pre-passivating device and method |
| CN107287553B (en) * | 2017-05-23 | 2024-02-06 | 中国科学院微电子研究所 | Drying and pre-passivating device and method |
| CN110832106A (en) * | 2017-08-01 | 2020-02-21 | 中央硝子株式会社 | Method for producing filled container and filled container |
| CN110832106B (en) * | 2017-08-01 | 2022-04-15 | 中央硝子株式会社 | Method for producing filled container and filled container |
| US11519557B2 (en) | 2017-08-01 | 2022-12-06 | Central Glass Company, Limited | Method for manufacturing filled container, and filled container |
| CN109888599A (en) * | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
| WO2020192217A1 (en) * | 2019-03-25 | 2020-10-01 | 北京科益虹源光电技术有限公司 | Passivating method and passivating apparatus applicable to laser discharge chamber |
| CN111041403A (en) * | 2019-12-29 | 2020-04-21 | 中船重工（邯郸）派瑞特种气体有限公司 | Processing method of steel cylinder for electronic gas storage |
| CN111139428A (en) * | 2019-12-30 | 2020-05-12 | 中船重工（邯郸）派瑞特种气体有限公司 | Passivation treatment method for steel cylinder for storing fluorine-containing compound electronic grade gas |
| CN112342489A (en) * | 2020-10-08 | 2021-02-09 | 中船重工（邯郸）派瑞特种气体有限公司 | Passivation treatment method for iron container for storing electronic-grade carbon monoxide gas |
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