CN107287553B - Drying and pre-passivating device and method - Google Patents
Drying and pre-passivating device and method Download PDFInfo
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- CN107287553B CN107287553B CN201710371401.1A CN201710371401A CN107287553B CN 107287553 B CN107287553 B CN 107287553B CN 201710371401 A CN201710371401 A CN 201710371401A CN 107287553 B CN107287553 B CN 107287553B
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- 238000001035 drying Methods 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title claims abstract description 46
- 238000002161 passivation Methods 0.000 claims abstract description 141
- 239000007789 gas Substances 0.000 claims abstract description 139
- 238000012545 processing Methods 0.000 claims abstract description 17
- 230000007797 corrosion Effects 0.000 claims abstract description 13
- 238000005260 corrosion Methods 0.000 claims abstract description 13
- 238000007599 discharging Methods 0.000 claims abstract description 9
- 229910052736 halogen Inorganic materials 0.000 claims description 24
- 150000002367 halogens Chemical class 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000005086 pumping Methods 0.000 claims description 11
- 238000005658 halogenation reaction Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 9
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 230000017525 heat dissipation Effects 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000005536 corrosion prevention Methods 0.000 claims description 2
- 238000004321 preservation Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052799 carbon Inorganic materials 0.000 abstract description 15
- 239000001257 hydrogen Substances 0.000 abstract description 7
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 6
- 239000001301 oxygen Substances 0.000 abstract description 6
- 229910052760 oxygen Inorganic materials 0.000 abstract description 6
- 239000011241 protective layer Substances 0.000 abstract description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910002090 carbon oxide Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The device comprises an air chamber, a total control unit, a vacuumizing unit and a passivation gas control unit which are respectively connected with the air chamber, wherein: the air chamber is used for accommodating parts needing drying and pre-passivation; the vacuumizing unit is used for sucking/exhausting air so that the air chamber is in a vacuum/normal pressure state; the passivation gas control unit is used for injecting passivation gas into the air chamber to pre-passivate the parts when the air chamber is in a vacuum state, and discharging the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is completed; and the total control unit is used for providing heat for the air chamber according to the temperature information in the air chamber when the passivation gas is injected into the air chamber to pre-passivate the parts. Because the drying and pre-passivation treatment are carried out simultaneously under the vacuum condition, a stable protective layer is generated on the surface of the part, and the part is prevented from being polluted by carbon, hydrogen, oxygen and other elements in the subsequent processing and using processes, so that the corrosion resistance and the reliability of the part are improved.
Description
Technical Field
The invention belongs to the field of part treatment, and particularly relates to a drying and pre-passivating device and method.
Background
Excimer lasers are important laser devices in the ultraviolet band and generate laser light by means of transitions of molecules formed from excited mixed gases, typically composed of inert gases and halogen gases, such as argon (Ar) and fluorine (F) 2 ) Krypton (Kr) and fluorine, xenon (Xe) and chlorine (Cl) 2 ) Etc. The discharge cavity of the excimer laser provides space for gas discharge, and the discharge cavity is composed of various parts, such as an electrode, a cavity wall, a fan, a flow guiding structure, a radiator and the like, and comprises various materials such as metal, ceramic, rubber and the like, and halogen mediums such as fluorine, chlorine and the like have extremely strong corrosiveness to most materials, so thatThe parts in the discharge cavity consume halogen medium to generate corrosion in the use process, and harmful products are generated, so that the output energy and stability of the laser are reduced, and the usability and application range of the excimer laser are limited.
In order to reduce the introduction of harmful components and reduce the corrosion reaction degree in the operation process of the excimer laser, each part in the discharge cavity needs to be subjected to ultrasonic cleaning and drying treatment before assembly, and passivation treatment is required after assembly. The ultrasonic cleaning treatment is to utilize cavitation, acceleration and direct/flow action of ultrasonic wave in liquid to directly and indirectly act on the liquid and dirt, so that the dirt layer is dispersed, emulsified and peeled off, and the purpose of removing attachments and carbon oxidation reaction layers on the surfaces of parts is achieved; the drying treatment is to thoroughly remove the moisture on the surface and the inside of the parts; the passivation treatment after assembly is an important process step before the operation of the excimer laser discharge cavity, and can reduce the corrosion reaction of each part of the discharge cavity in the operation process of the laser. Rare gas, halogen gas and mixed gas are introduced into the discharge cavity, and discharge with a certain frequency is assisted, so that surface substances of each part fully react with a halogen medium, pollutants on the surfaces of the parts are eliminated, and a stable halide protective layer is generated.
However, after the carbon oxidation reaction layer is removed by ultrasonic cleaning, all parts are exposed to the atmosphere in the processes of drying, assembling and the like and the intermediate transfer process, and the surface of the parts inevitably undergoes carbon oxidation reaction again. Researches show that a halogenation reaction layer is generated when a metal material is directly contacted with a halogen medium, the reaction layer is basically stable after being exposed in the atmosphere, but if a carbon oxidation reaction layer exists on the surfaces of materials such as Al, cu and the like, and then the materials enter the environment of the halogen-containing medium, the carbon oxide can inhibit the halogenation reaction, and the surface layer of each part after passivation treatment is formed by the halide and the carbon oxide (possibly one or more, or possibly a compound in which carbon, hydrogen and halogen coexist). Under such conditions, the surface layers of the components still react slowly with the halogen medium during operation of the laser, further consuming the halogen medium and generating harmful gases. And due to 10ppHF, O of m-order 2 、CF 4 The presence of such a surface layer of each component becomes an important problem for affecting the laser output energy, since the output power of the laser can be significantly affected by the gas.
Disclosure of Invention
Based on the above problems, a main objective of the present invention is to provide a drying and pre-passivation device and method for solving at least one of the above problems.
In order to achieve the above object, as one aspect of the present invention, the present invention provides a drying and pre-passivating apparatus, comprising a gas chamber, and a main control unit, a vacuum pumping unit and a passivating gas control unit respectively connected with the gas chamber, wherein:
the air chamber is used for accommodating parts needing drying and pre-passivation;
the vacuumizing unit is used for sucking/exhausting air and enabling the air chamber to be in a vacuum/normal pressure state;
the passivation gas control unit is used for injecting passivation gas into the air chamber to pre-passivate the parts when the air chamber is in a vacuum state, and discharging the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is completed, wherein the passivation gas is mixed gas of inert gas and halogen gas so as to form a halogenation reaction layer on the surfaces of the parts in the discharge cavity;
and the total control unit is used for providing heat for the air chamber according to the temperature information in the air chamber when the passivation gas is injected into the air chamber to pre-passivate the parts.
In some embodiments of the present invention, the drying and pre-passivation device is used to dry and pre-passivate components in the discharge chamber.
In some embodiments of the invention, the above-mentioned overall control unit comprises a temperature sensor, a signal processing and control device and a heating element, wherein:
the temperature sensor is used for detecting temperature information in the air chamber and transmitting the detected temperature information to the signal processing and controlling device;
and the signal processing and controlling device is connected with the heating element and is used for sending a control signal to the heating element according to the temperature information so as to provide heat for the air chamber, so that the temperature in the air chamber is constant.
In some embodiments of the present invention, the vacuum pumping unit includes:
a vacuum pumping device for sucking/exhausting air so that the air chamber is in a vacuum/normal pressure state;
the vacuum detection device is used for monitoring the vacuum degree of the air chamber in real time;
in some embodiments of the invention, the vacuum pumping means comprises a vacuum pump or a vacuum valve.
In some embodiments of the present invention, the passivation gas control unit includes:
the air inlet valve is used for injecting passivation gas into the air chamber when the air chamber is in a vacuum state so as to pre-passivate the parts;
and the exhaust valve is used for exhausting the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is finished.
In some embodiments of the invention, the above-described overall control unit includes a gas circulation means for homogenizing the gas and temperature in the gas chamber; when the passivation gas is injected into the air chamber to pre-passivate the parts, the temperature in the air chamber ranges from 100 ℃ to 150 ℃.
In some embodiments of the present invention, the drying and pre-passivation device further includes a sample stage disposed in the air chamber, a sample stage support, and a moving rail embedded in an outer wall of the air chamber, wherein the sample stage is disposed on the moving rail through the sample stage support.
In some embodiments of the present invention, the sample stage is a net structure, and the net structure includes a plurality of units with unequal grid densities;
in some embodiments of the invention, the inner sidewall of the chamber includes a thermal insulating and corrosion preventing layer for preventing heat dissipation and corrosion of the chamber sidewall by the passivation gas.
In some embodiments of the present invention, the sidewall of the air chamber is provided with a sealing door through which the components are placed/removed.
In order to achieve the above object, as another aspect of the present invention, the present invention provides a drying and pre-passivation method, which adopts the drying and pre-passivation device, comprising the following steps:
step 1, placing the parts subjected to ultrasonic cleaning into an air chamber;
step 2, vacuumizing the air chamber by adopting a vacuumizing unit to enable the air chamber to be in a vacuum state;
step 3, injecting passivation gas into the air chamber by adopting a passivation gas control unit to pre-passivate the parts, and simultaneously providing heat for the air chamber after the passivation gas is injected by the total control unit;
and 4, after a period of time, stopping the total control unit from providing heat to the air chamber, and discharging the passivation gas in the air chamber by the passivation gas control unit after the temperature in the air chamber is reduced to the room temperature, so as to finish the drying and pre-passivation of the parts.
In order to achieve the above object, as a further aspect of the present invention, the present invention provides a method for processing a part in a discharge chamber, which adopts the above drying and pre-passivation method, and further includes, after step 4:
and 5, taking out the parts and performing assembly and passivation treatment after assembly.
The drying and pre-passivating device and method provided by the invention have the following beneficial effects:
1. the drying and pre-passivating device provided by the invention is used for drying and pre-passivating the parts under the vacuum condition, so that a stable protective layer is generated on the surfaces of the parts, and the parts are prevented from being polluted by carbon, hydrogen, oxygen and other elements in the subsequent processing and using processes, thereby improving the corrosion resistance and reliability of the parts and prolonging the service life of the parts;
2. the parts in the discharge cavity of the excimer laser are treated by adopting a drying and pre-passivating device, so that a halogenation reaction layer is formed on the surfaces of the parts, and the halogenation reaction layer is basically stable after being exposed to the atmosphere, thereby effectively avoiding carbon oxidation reaction when the parts are exposed to the air in the assembly process and the intermediate transfer process during the normal treatment of the parts; thereby reducing the introduction of harmful components such as carbon, hydrogen, oxygen and the like in the assembly process and the operation process of the excimer laser, and ensuring that the surface of each part in the discharge cavity can generate a stable halogen passivation protection layer;
3. because the provided drying and pre-passivating device performs pre-passivating and drying treatment on the parts in the discharge cavity of the excimer laser, namely the drying and pre-passivating treatment of the parts are performed simultaneously, the parts can be prevented from being contacted with air in the drying process, and further, carbon oxidation reaction can be prevented from occurring when the parts are exposed to the air in the drying and heating process; in addition, as the parts in the discharge cavity are subjected to pre-passivation treatment when being subjected to passivation treatment, the time of passivation treatment before operation of the laser can be reduced, and the assembly efficiency of equipment can be improved;
4. the device is provided with the gas circulation device, and the temperature in the gas chamber is constant in the drying and pre-passivating process, so that all parts can be guaranteed to be rapidly and fully subjected to pre-passivating treatment, and the components, the structures, the thicknesses and the like of the pre-passivating layer generated by pre-passivating are the same;
5. the device and the method provided by the invention can be used for processing any parts needing drying and/or pre-passivation.
Drawings
FIG. 1 is a schematic diagram of a drying and pre-passivation apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of a sample stage in a drying and pre-passivation apparatus according to an embodiment of the present invention;
FIG. 3 is a flow chart illustrating the operation of the drying and pre-passivation method according to an embodiment of the present invention;
fig. 4 is a detailed flow chart of a drying and pre-passivation method according to an embodiment of the invention.
Detailed Description
The present invention will be further described in detail below with reference to specific embodiments and with reference to the accompanying drawings, in order to make the objects, technical solutions and advantages of the present invention more apparent.
The invention discloses a drying and pre-passivating device, which comprises an air chamber, and a total control unit, a vacuumizing unit and a passivating gas control unit which are respectively connected with the air chamber, wherein:
the air chamber is used for accommodating parts needing drying and pre-passivation;
the vacuumizing unit is used for sucking/exhausting air and enabling the air chamber to be in a vacuum/normal pressure state;
the passivation gas control unit is used for injecting passivation gas into the air chamber to pre-passivate the parts when the air chamber is in a vacuum state and discharging the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is completed;
and the total control unit is used for providing heat for the air chamber according to the temperature information in the air chamber when the passivation gas is injected into the air chamber to pre-passivate the parts.
The invention also discloses a drying and pre-passivating method, which adopts the drying and pre-passivating device and comprises the following steps:
step 1, placing the parts subjected to ultrasonic cleaning into an air chamber;
step 2, vacuumizing the air chamber by adopting a vacuumizing unit to enable the air chamber to be in a vacuum state;
step 3, injecting passivation gas into the air chamber by adopting a passivation gas control unit to pre-passivate the parts, and simultaneously providing heat for the air chamber after the passivation gas is injected by the total control unit;
and 4, after a period of time, stopping the total control unit from providing heat to the air chamber, and discharging the passivation gas in the air chamber by the passivation gas control unit after the temperature in the air chamber is reduced to the room temperature, so as to finish the drying and pre-passivation of the parts.
By adopting the drying and pre-passivating device and the method, after ultrasonic washing, the parts are simultaneously dried and pre-passivated under the vacuum condition, so that a stable protective layer is generated on the surfaces of the parts, the parts are prevented from being polluted by carbon, hydrogen, oxygen and other elements in the subsequent assembly and use, and the corrosion resistance and reliability of the parts are improved;
in some embodiments of the present invention, a drying and pre-passivation apparatus and method are provided to solve the problem that after ultrasonic washing, when each part in a discharge cavity of an excimer laser is exposed to the atmosphere in a drying and heating process, an assembling process and an intermediate transfer process, a carbon oxidation reaction occurs again, so that after passivation treatment before operation of the excimer laser is completed, the surface layer of each part still contains harmful components such as carbon, hydrogen, oxygen, etc., so that an expected passivation effect cannot be achieved, and the output power of the excimer laser is significantly affected.
Therefore, after each part in the discharge cavity of the excimer laser is cleaned by ultrasonic, the drying and pre-passivation treatment is carried out by adopting the drying and pre-passivation device and method disclosed above. The passivation gas adopts mixed gas of inert gas and halogen gas so as to form a halogenation reaction layer on the surfaces of the parts in the discharge cavity. The pre-passivation treatment of each part in the discharge cavity is added under the vacuum condition, so that a halogenation reaction layer can be generated on the surface of the part, and the halogenation reaction layer is basically stable after being exposed to the atmosphere; and the pre-passivation process and the drying process are carried out simultaneously, so that the carbon oxidization reaction generated when the parts are exposed to air in the drying and heating process, the assembling process and the intermediate transfer process can be effectively avoided when the parts are usually treated, the introduction of harmful components such as carbon, hydrogen, oxygen and the like in the excimer laser lasing process can be reduced, and the stable halogen passivation protection layer can be ensured to be generated on the surface of each part in the discharge cavity during the subsequent passivation treatment.
Therefore, the invention also discloses a processing method of the parts in the discharge cavity, which adopts the drying and pre-passivating device and comprises the following steps:
step 1, placing the parts subjected to ultrasonic cleaning into an air chamber;
step 2, vacuumizing the air chamber by adopting a vacuumizing unit to enable the air chamber to be in a vacuum state;
step 3, injecting passivation gas into the air chamber by adopting a passivation gas control unit to pre-passivate the parts, and simultaneously providing heat for the air chamber after the passivation gas is injected by the total control unit;
and 4, after a period of time, stopping the total control unit from providing heat to the air chamber, and discharging the passivation gas in the air chamber by the passivation gas control unit after the temperature in the air chamber is reduced to the room temperature, so as to finish the drying and pre-passivation of the parts.
And 5, taking out the parts and performing assembly and passivation treatment after assembly.
In some embodiments of the present invention, the step 4 specifically includes: after a period of reaction, the total control unit stops providing heat for the air chamber, and when the temperature of the air chamber is reduced to the vicinity of the room temperature, halogen gas in the air chamber is discharged through the passivation gas control unit, so that the harm caused by directly discharging the halogen gas to the atmosphere is avoided; then air is filled into the air chamber through the vacuumizing device to normal pressure and then the air chamber is closed; the gas in the gas chamber is exhausted to a vacuum state again through the passivation gas control unit and then is closed. Repeating the above operation for about 3-5 times to ensure that the gas chamber no longer contains halogen gas
In some embodiments of the invention, the above-mentioned overall control unit comprises a temperature sensor, a signal processing and control device and a heating element, wherein:
the temperature sensor is used for detecting temperature information in the air chamber and transmitting the detected temperature information to the signal processing and controlling device;
and the signal processing and controlling device is connected with the heating element and is used for sending a control signal to the heating element according to the temperature information so as to provide heat for the air chamber, so that the temperature in the air chamber is constant.
In the pre-passivation process, the temperature in the air chamber is constant, so that all parts in the air chamber can be guaranteed to be subjected to pre-passivation treatment rapidly and fully, and the reaction process is guaranteed to be fully and stably carried out when the parts react with passivation gas, so that a uniform and stable protective layer is generated on the surfaces of the parts.
In some embodiments of the present invention, the vacuum pumping unit includes:
a vacuum pumping device for sucking/exhausting air so that the air chamber is in a vacuum/normal pressure state;
the vacuum detection device is used for monitoring the vacuum degree of the air chamber in real time;
the vacuum pumping device comprises a vacuum pump or a vacuum valve and the like.
In the process of vacuumizing the air chamber, whether the vacuumizing is finished is determined according to the vacuum degree of the air chamber monitored in real time, and normally, the vacuum degree in the air chamber is ensured to be lower than a preset value of 100Pa, so that the contact between parts and air in the pre-passivation process is avoided.
In some embodiments of the present invention, the passivation gas control unit includes:
the air inlet valve is used for injecting passivation gas into the air chamber when the air chamber is in a vacuum state so as to pre-passivate the parts;
and the exhaust valve is used for exhausting the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is finished.
In some embodiments of the present invention, the passivation gas is a mixture of an inert gas and a halogen gas.
In some embodiments of the present invention, the temperature in the chamber ranges from 100 ℃ to 150 ℃ when the passivation gas is injected into the chamber to pre-passivate the component.
In some embodiments of the invention, the overall control unit further comprises a gas circulation unit, for homogenizing the gas and temperature in the chamber.
After homogenizing the gas and temperature in the gas chamber, the passivation gas in the gas chamber can keep certain uniformity, so that the uniform progress of the pre-passivation process and the drying process can be ensured, the uniformity of the generated halogenation reaction layer is high, and the parts are fully dried.
In some embodiments of the present invention, the drying and pre-passivation device further includes a sample stage disposed in the air chamber, a sample stage support, and a moving rail embedded in an outer wall of the air chamber, wherein the sample stage is disposed on the moving rail through the sample stage support. The sample stage can move on the moving guide rail under the control of the main control unit so as to facilitate the placement and the taking out of the parts to be dried and pre-passivated.
In some embodiments of the present invention, the sample stage is a net structure, and the sample stage of the net structure includes a plurality of cells with unequal grid densities.
The basketball net structure is used for increasing the contact between passivation gas and the ground of parts and avoiding the defect of insufficient local pre-passivation; and because the device comprises a plurality of units with unequal grid densities, the parts with different sizes can be placed on the units with different grid densities of the sample table, so that the drying and pre-passivating device of the embodiment can be applied to the drying and pre-passivating of the parts with various sizes. The sample stage can be arranged into a plurality of matched units or replaced by the matched sample stage according to the sizes of parts to be dried and pre-passivated.
In some embodiments of the invention, the inner sidewall of the chamber includes a thermal insulating and corrosion preventing layer for preventing heat dissipation and corrosion of the chamber sidewall by the passivation gas.
In some embodiments of the present invention, the sidewall of the air chamber is provided with a sealing door through which the components are placed/removed.
In some embodiments of the invention, various gas inlet and outlet pipes in the vacuumizing unit and the passivation gas control unit are made of halogen corrosion resistant materials, so that the service life of the drying and pre-passivation device is prolonged, and introduction of other substances in the pre-passivation process is avoided.
In some embodiments of the invention, the overall control unit is embedded in the outer side wall of the air chamber and is communicated with the air chamber; various air valves and air pipes in the vacuumizing unit and the passivation gas control unit are communicated with the air chamber to realize the change of the vacuum/normal pressure state in the air chamber and the injection/discharge of the passivation gas.
In some embodiments of the invention, the entire drying and pre-passivation apparatus is secured and protected by mounting a metal housing.
It should be noted that the drying and pre-passivating device and method disclosed by the invention can be used for any parts requiring drying and/or pre-passivating treatment, drying and/or pre-passivation is performed.
The drying and pre-passivation device and method according to the present invention will be described in further detail below with reference to the accompanying drawings and examples, using the parts in the discharge chamber of an ArF excimer laser as an example.
Examples
The embodiment provides a drying and pre-passivating device and method for drying and pre-passivating parts in an ArF excimer laser discharge cavity.
As shown in fig. 1, the drying and pre-passivating device comprises a gas chamber 1, a vacuumizing unit 2, a passivating gas control unit 3, a total control unit 4, a sample table 5, a sample table bracket 6, a movable guide rail 7, a sealing door 8 and a metal shell 9;
wherein, the inner side wall of the air chamber 1 is provided with a heat preservation and corrosion prevention layer 11 to prevent the halogen medium from corroding the wall of the air chamber and prevent heat dissipation.
The vacuumizing unit comprises an air valve 21, an air pipe 22 and a vacuum degree detector 23, and the passivation gas control unit 3 comprises an air inlet valve 31, an air inlet pipe 32, an air outlet valve 33 and an air outlet pipe 34; the air pipe 22, the air inlet pipe 32 and the air outlet pipe 34 are made of polytetrafluoroethylene which is resistant to halogen corrosion. When the air valve 21 is opened and in the state of injecting the gas, injecting air into the air chamber 1; when the air valve 21 is opened and in the exhaust gas state, the air extracted from the air chamber 1 is exhausted. The intake pipe 32 injects a passivation gas into the gas chamber 1 when the intake valve 31 is opened; the exhaust pipe 34 discharges the passivation gas extracted from the gas chamber 1 when the exhaust valve 33 is opened. The air valve 21, the air inlet valve 31 and the air outlet valve 33 are used for meeting the requirements of pre-passivation, vacuum and vacuum breaking in the air chamber 1 at different stages of reaction.
The overall control unit 4 comprises a temperature sensor 41, a signal processing and control device 42, a heating element 43 and a gas circulation device 44. The temperature sensor 41 is used for detecting the temperature of the air chamber 1 and outputting the detection result to the signal processing and control unit 42 so as to control the heating element 43 to provide heat to the air chamber 1, thereby realizing the control of the temperature in the air chamber 1, and controlling the temperature of the air chamber 1 within the range of 100-110 ℃; the gas circulation means 44 is used to achieve homogenization of the temperature and gas content in the gas chamber 1.
The sample stage 5 is in a basket structure, as shown in fig. 2, and has two subunits with different void densities, the portion 51 with small void densities can be used for placing components with larger sizes, such as electrodes, chamber walls, deflectors, etc., in the discharge chamber, and the portion 52 with large void densities can be used for placing components with smaller sizes, such as standard components, etc.
Under the control of the general control unit 4, the sample stage support 6 and the sample stage 5 with the basket structure can move in the air chamber through the movable guide rail 7, so that the parts of the discharge chamber before and after the reaction can be conveniently assembled and disassembled.
The parts to be dried and pre-passivated are placed on the sample stage 5 through the sealing door 8, and are taken out from the sample stage 5 through the sealing door 8 after the drying and pre-treatment are completed.
The passivation gas is a mixed gas of neon gas and fluorine gas, and the composition of the passivation gas is the same as or similar to the composition and proportion of the passivation gas of the excimer laser.
The metal casing 9 is used for fixing and protecting other components of the drying and pretreatment device.
When the drying and pre-passivating device is adopted to dry and pre-passivate the parts in the discharge cavity, as shown in fig. 3-4, the method specifically comprises the following steps:
step 1, placing the parts subjected to ultrasonic cleaning into an air chamber 1;
specifically, the sealing door 8 is opened, and the electrode, ceramic baffle, standard component, etc. of the discharge chamber after the sufficient ultrasonic washing are mounted on the sample stage 5 of fig. 1, wherein the electrode, baffle, etc. of the larger-sized component is placed on the portion 51 with the small void density as shown in fig. 2, and the smaller-sized standard component, etc. is placed on the portion 52 with the large void density.
Step 2, vacuumizing the air chamber 1 by adopting a vacuumizing unit 2 to enable the air chamber 1 to be in a vacuum state;
specifically, the sealing door 8 is closed, the gas valve 21 is opened and placed in a state of exhausting gas, and the gas chamber 1 is evacuated to a set value of 100Pa and then closed.
Step 3, injecting passivation gas into the air chamber 1 by adopting the passivation gas control unit 3 to pre-passivate parts, and simultaneously providing heat for the air chamber 1 injected with the passivation gas by the total control unit 4 and controlling the temperature in the air chamber 1 within a constant range;
specifically, the intake valve 31 is opened, and Ne and F are charged into the air chamber 1 through the intake pipe 32 2 A set passivation atmosphere is formed in the air chamber 1, the heating element 43 is started, the temperature of the air chamber 1 is regulated to be constant within the range of 100-110 ℃ through the temperature sensor 41 and the signal processing and control device 42, and the uniformity of temperature and gas distribution is ensured through the gas circulation device 44.
Step 4, after a period of time, the total control unit 4 stops providing heat to the air chamber 1, and after the temperature in the air chamber 1 is reduced to room temperature, the passivation gas control unit 3 discharges the passivation gas in the air chamber;
after a period of reaction, closing the heating element 43, opening the exhaust valve 33 when the temperature of the air chamber 1 is reduced to the vicinity of the room temperature, pumping out passivation gas in the air chamber 1 through the exhaust pipe 34 for treatment to avoid harm caused by directly exhausting halogen gas to the atmosphere, opening the air valve 21 and placing the air valve in an injected gas state, and closing after air is filled into the air chamber 1 to normal pressure through the air pipe 22; the exhaust valve 33 is opened again to draw out the gas in the gas chamber 1 at this time to a vacuum state, and then closed. Repeating the above operation for 3-5 times, to ensure that the gas chamber 1 no longer contains halogen gas
And 5, taking out the parts, and finishing the drying and pre-passivation of the parts.
Specifically, when the air chamber 1 is restored to the normal pressure state, the sealing door 8 is opened, and the pre-passivated part is taken out.
The pre-passivated components can be mounted to the discharge chamber for assembly for subsequent passivation and operation of the excimer laser.
It should be noted that the positions of the components in the drying and pre-passivation device according to the present embodiment are not limited to the positions shown in fig. 1, and the components may be located at any positions that can ensure the functions thereof.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the invention thereto, but to limit the invention thereto, and any modifications, equivalents, improvements and equivalents thereof may be made without departing from the spirit and principles of the invention.
Claims (9)
1. The drying and pre-passivating device comprises an air chamber, and a total control unit, a vacuumizing unit and a passivating gas control unit which are respectively connected with the air chamber, wherein:
the air chamber is used for accommodating parts needing drying and pre-passivation;
the vacuumizing unit is used for sucking/exhausting air and enabling the air chamber to be in a vacuum/normal pressure state;
the passivation gas control unit is used for injecting passivation gas into the air chamber to pre-passivate the parts when the air chamber is in a vacuum state, and discharging the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is completed, wherein the passivation gas is mixed gas of inert gas and halogen gas so as to enable the surfaces of the parts in the discharge cavity to form a halogenation reaction layer;
and the total control unit is used for providing heat for the air chamber according to the temperature information in the air chamber when the passivation gas is injected into the air chamber to pre-passivate the parts, and comprises a gas circulation device for homogenizing the gas and the temperature in the air chamber.
2. The drying and pre-passivating apparatus of claim 1, wherein the drying and pre-passivating apparatus is used to dry and pre-passivate components in a discharge chamber.
3. The drying and pre-passivation apparatus according to claim 1, wherein the overall control unit comprises a temperature sensor, a signal processing and control device and a heating element, wherein:
the temperature sensor is used for detecting temperature information in the air chamber and transmitting the detected temperature information to the signal processing and controlling device;
and the signal processing and controlling device is connected with the heating element and is used for sending a control signal to the heating element according to the temperature information so as to provide heat for the air chamber, so that the temperature in the air chamber is constant.
4. The drying and pre-passivation device according to claim 1, wherein the vacuum pumping unit comprises:
a vacuum pumping device for sucking/exhausting air so that the air chamber is in a vacuum/normal pressure state;
the vacuum detection device is used for monitoring the vacuum degree of the air chamber in real time;
the vacuum pumping device comprises a vacuum pump or a vacuum valve.
5. The drying and pre-passivation device of claim 1, wherein the passivation gas control unit comprises:
the air inlet valve is used for injecting passivation gas into the air chamber when the air chamber is in a vacuum state so as to pre-passivate parts;
and the exhaust valve is used for exhausting the passivation gas when the air chamber is in a normal pressure state after the pre-passivation is finished.
6. The drying and pre-passivating apparatus as set forth in claim 1, wherein a temperature in the air chamber ranges from 100 ℃ to 150 ℃ when the passivating gas is injected into the air chamber to pre-passivate the parts.
7. The drying and pre-passivating apparatus of claim 1, further comprising a sample stage positioned in the air chamber, a sample stage support, and a moving rail embedded in an outer wall of the air chamber, the sample stage being positioned on the moving rail by the sample stage support; the sample stage is of a net structure, and the net structure comprises a plurality of units with unequal grid densities; the inner side wall of the air chamber comprises a heat preservation and corrosion prevention layer which is used for preventing heat dissipation and corrosion of the passivation gas to the side wall of the air chamber; the side wall of the air chamber is provided with a sealing door through which components are placed/taken out.
8. A drying and pre-passivating method employing a drying and pre-passivating apparatus as defined in any one of claims 1-7, comprising the steps of:
step 1, placing the parts subjected to ultrasonic cleaning into the air chamber;
step 2, vacuumizing the air chamber by adopting a vacuumizing unit to enable the air chamber to be in a vacuum state;
step 3, injecting passivation gas into the air chamber by adopting a passivation gas control unit to pre-passivate the parts, and simultaneously providing heat for the air chamber after the passivation gas is injected by the total control unit;
and 4, after a period of time, stopping the total control unit from providing heat to the air chamber, and discharging the passivation gas in the air chamber by the passivation gas control unit after the temperature in the air chamber is reduced to the room temperature, so as to finish the drying and pre-passivation of the parts.
9. A method for processing components in a discharge chamber, which adopts the drying and pre-passivation method as shown in claim 8, further comprising, after the step 4:
and 5, taking out the parts and performing assembly and passivation treatment after assembly.
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| CN108183382B (en) * | 2018-01-25 | 2019-11-08 | 中国科学院光电研究院 | The more changing device and replacing options of excimer laser window |
| CN108414612A (en) * | 2018-01-25 | 2018-08-17 | 中国科学院光电研究院 | A kind of detection method and module of excimer laser discharge cavity gas |
| CN109888599A (en) * | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
| CN110947951A (en) * | 2019-11-11 | 2020-04-03 | 山西中磁尚善科技有限公司 | Vacuum insulation passivation process for magnetic powder |
| CN111307924B (en) * | 2020-02-24 | 2023-05-12 | 中国科学院微电子研究所 | Detection device and method for detecting passivation degree of excimer laser discharge cavity component |
| CN112210775B (en) * | 2020-10-09 | 2022-12-02 | 中国科学院微电子研究所 | Part coating preparation device, part coating preparation method and terminal device |
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