CN111307924B - Detection device and method for detecting passivation degree of excimer laser discharge cavity component - Google Patents
Detection device and method for detecting passivation degree of excimer laser discharge cavity component Download PDFInfo
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Abstract
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser, relates to the technical field of photoelectricity, and can judge whether a passivation layer in the discharge cavity part is passivated or not. The detection device is used for detecting the passivation degree of a discharge cavity component of the excimer laser and comprises the excimer laser, a test cavity, a sample tank, a passivation gas cylinder and a mass spectrometer; the excimer laser includes a discharge cavity member; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity; a sample cell for holding a passivation sample sampled from the discharge chamber section; the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer; and the mass spectrometer is used for detecting the content of harmful gas in the test cavity and judging whether passivation is finished or not.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to a detection device and a method for detecting passivation degree of a discharge cavity component of an excimer laser.
Background
The excimer laser is an important laser device in ultraviolet band, and has important application value in the fields of semiconductors, liquid crystal display, solar photovoltaics, automobile manufacturing, medical treatment, scientific research, national defense and the like.
However, the working medium of the excimer laser contains a halogen medium which is highly corrosive and reacts with elements such as silicon (Si), carbon (C), hydrogen (H), oxygen (O) and the like in the discharge chamber part to generate harmful gaseous products. Studies have shown that harmful gases, such as HF, O2, CF4, etc., on the order of 10ppm, significantly affect the performance of the laser. Therefore, the excimer laser requires passivation of the discharge chamber components prior to use.
However, whether passivation of the discharge chamber components is complete or not at present still requires empirical judgment, thereby causing two problems: 1. excessive passivation or insufficient passivation of the discharge cavity can not only cause waste of time and energy, but also cause excessive aggregation of internal hazardous elements to the surface; and when passivation is insufficient, a large amount of harmful gas can be generated in the operation process of the discharge cavity component, so that the output performance of the excimer laser is influenced, and the efficiency and the operation cost are seriously influenced. 2. The observation method or the detection mode is difficult to find the condition that a large amount of harmful gas is generated due to the diffusion of harmful elements to the surface after a period of time, and is not beneficial to predicting the passivation applicability of the component.
Disclosure of Invention
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser, which can judge whether a passivation layer in the discharge cavity part is passivated or not.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical scheme:
in one aspect, a detection device is provided, and is used for detecting the passivation degree of a discharge cavity component of an excimer laser, and comprises the excimer laser, a test cavity, a sample tank, a passivation gas cylinder and a mass spectrometer; the excimer laser includes a discharge cavity member; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity; the sample tank is used for containing a passivation sample sampled from the discharge cavity component; the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer; the mass spectrometer is used for detecting the content of harmful gas in the test cavity and judging whether passivation is finished or not.
Optionally, the detection device is further configured to detect passivation suitability of a discharge cavity component of the excimer laser.
Optionally, the detection device includes a mirror, a focusing lens, an adjustment translation stage, and a controller; the adjusting translation stage is used for bearing the sample tank; the controller is used for controlling and adjusting the position of the translation stage; the reflecting mirror is used for reflecting the laser emitted by the excimer laser and reflecting the laser to the focusing lens; the focusing lens is used for enabling the laser to act on the passivation sample in the sample groove and removing the passivation layer; the passivation gas cylinder is also used for inputting the passivation gas into the test cavity from which the passivation layer is removed; the mass spectrometer is also used for detecting the content of harmful gas in the test cavity from which the passivation layer is removed and judging whether the passivation sample is suitable for the discharge cavity component.
Optionally, the detection device further comprises a vacuum pump, and the vacuum pump is connected with the test cavity.
Optionally, the detecting device further comprises a heating device; the heating device is used for heating the test cavity.
Optionally, the detection device further comprises a passivation gas valve connected with the passivation gas cylinder and the test cavity, and a mass spectrometer gas valve connected with the mass spectrometer and the test cavity.
In another aspect, a method for detecting a degree of passivation of a discharge chamber component of an excimer laser is provided, comprising: sampling a passivation sample from the discharge chamber component and placing the passivation sample into the sample cell; the sample groove is positioned in the test cavity; inputting passivation gas into the test cavity by using a passivation gas bottle to generate a passivation layer, and detecting the content of harmful gas generated in the test cavity by using a mass spectrometer; if the content of the harmful gas is smaller than a preset value, passivation is completed; otherwise, the testing cavity is restored to a vacuum state, passivation gas is input into the testing cavity again, and the content of the harmful gas is detected until the content of the harmful gas in the testing cavity is smaller than the preset value.
Optionally, after passivation is completed, the method for detecting the passivation degree of the discharge cavity component of the excimer laser further includes: the suitability of the excimer laser for passivation of the discharge chamber components is examined.
Optionally, detecting passivation suitability of a discharge chamber component of an excimer laser includes: reflecting laser emitted by the excimer laser to a focusing lens by utilizing a reflector, controlling the position of an adjusting translation stage carrying a sample groove by utilizing a controller, and applying the laser to the passivation sample in the sample groove by utilizing the focusing lens until the passivation layer is removed; inputting passivation gas into the test cavity by using a passivation gas cylinder; detecting the content of harmful gas generated in the test cavity by using a mass spectrometer, and if the content of the harmful gas is smaller than a preset value, applying the passivation sample to the discharge cavity component; otherwise, it is not applicable.
Optionally, before the passivation gas is input into the test cavity, the method for detecting the passivation degree of the discharge cavity component of the excimer laser further comprises: and vacuumizing the gas in the test cavity by using a vacuum pump.
Optionally, before the passivation gas is input into the test cavity, the method for detecting the passivation degree of the discharge cavity component of the excimer laser further comprises: and heating the test cavity by using a heating device.
The embodiment of the invention provides a detection device and a method for detecting the passivation degree of a discharge cavity part of an excimer laser. And (3) introducing passivation gas into the test cavity by using the passivation gas cylinder so as to enable halogen elements in the passivation gas to fully react with hazardous elements (Si, C, H, O and the like) in the test cavity, vaporize and escape, and simultaneously generate a passivation layer capable of protecting the surface of the test cavity. On the basis, the mass spectrometer can be used for detecting the content of harmful gas in the test cavity so as to judge whether passivation is finished or not.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a detection device according to an embodiment of the present invention;
fig. 2 is a flow chart of a method for detecting passivation degree of a discharge cavity component of an excimer laser according to an embodiment of the present invention.
Reference numerals:
1-a test chamber; 2-a sample tank; 3-a vacuum pump; 4-barometer; 5-a heating device; 6-passivating the gas cylinder; 7-mass spectrometer; 8-a mirror; 9-focusing lens; 10-adjusting a translation stage; 11-excimer laser; 12-a controller; 13-a passivation gas valve; 14-mass spectrometer air valve.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention provides a detection device which is used for detecting the passivation degree of a discharge cavity part of an excimer laser, and comprises the excimer laser 11, a test cavity 1, a sample tank 2, a passivation gas cylinder 6 and a mass spectrometer 7; the excimer laser 11 comprises a discharge chamber component. The sample groove 2 is positioned in the test cavity 1; the passivated gas cylinder 6 and the mass spectrometer 7 are connected with the test cavity 7 respectively.
A sample cell 2 for holding a passivation sample sampled from the discharge chamber section. And the passivation gas cylinder 6 is used for inputting passivation gas into the test cavity 1 to obtain a passivation layer. And the mass spectrometer 7 is used for detecting the content of harmful gas in the test cavity 1 and judging whether passivation is finished or not.
In some embodiments, the passivating gas cylinder 6 is connected to the test chamber 1, meaning: the passivating gas cylinder 6 may directly feed passivating gas into the test chamber 1.
The mass spectrometer 7 is connected to the test chamber 1, which means: the mass spectrometer 7 may be used directly to detect gas within the test chamber 1.
In some embodiments, the connecting pipe between the passivated gas cylinder 6 and the test cavity 1 and the connecting pipe between the mass spectrometer 6 and the test cavity 1 may be made of perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the connecting pipe.
In some embodiments, the material of the inner surface of the test chamber 1 may be perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the test chamber 1.
In some embodiments, the passivation samples may be part of the discharge chamber components, either entirely placed into the test chamber 1 for testing or partially placed into the test chamber 1 for testing.
In some embodiments, the process of generating the passivation layer is: the passivation gas cylinder 6 is utilized to introduce passivation gas (comprising rare gas and halogen gas in a certain proportion) into the test cavity 1, and discharge with a certain frequency is assisted, so that surface pollutants and surface layer harmful elements (Si, C, H, O and the like) of the passivation sample fully react with the halogen gas, are vaporized to generate harmful gas, escape from a reaction interface into the test cavity 1, and meanwhile, a stable halide passivation layer is generated on the surface of the passivation sample, the passivation layer can protect the passivation sample, and the part of the passivation sample covered by the passivation layer can not react with the halogen gas any more to generate harmful gas.
Here, since a certain amount of halogen medium exists in the discharge chamber part of the excimer laser 11 itself, a certain amount of halogen element may be included in the passivation gas to simulate the discharge chamber part by using the test chamber 1, thereby playing a test role.
By way of example, the main component of the discharge chamber part 1 comprises aluminum (Al), i.e. the main component of the passivation sample comprises Al, the material of the passivation layer may comprise aluminum fluoride (AlF) 3 )。
In some embodiments, after the surface contaminants and surface layer hazardous elements (Si, C, H, O, etc.) of the passivated sample are sufficiently reacted with the halogen gas (the reaction time may be 10 min.+ -. 20 s), a large amount of harmful gas (N 2 、O 2 、CO 2 、CF 4 HF), part of the harmful gases escapes into the test chamber 1 and remains in the test chamber 1, while the test chamber 1 also contains the remaining passivation gas.
Based on this, the mass spectrometer 7 can determine whether passivation is completed by detecting the content of the harmful gas in the test chamber 1 to obtain the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1.
Wherein, a preset value can be preset, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value, the passivation is completed; otherwise, if passivation is not completed, the test cavity is restored to a vacuum state, passivation gas is again introduced into the test cavity 1, and halogen elements in the newly introduced passivation gas continuously react with residual surface layer harmful elements in the test cavity 1 (the reaction time can be 30 min), and are vaporized and escape; then, detecting the content of harmful gas in the test cavity 1 by using a mass spectrometer, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than a preset value, completing passivation; otherwise, repeating the steps until the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value.
Here, whether passivation is completed may be determined manually, or may be determined by other machines.
The harmful gas may include a plurality of gases, each of which may be set to a preset value, and passivation is completed if the percentage of all gases in the harmful gas is lower than the preset value.
The embodiment of the invention provides a detection device which comprises an excimer laser 11, a test cavity 1, a sample tank 2, a passivated gas cylinder 6 and a mass spectrometer 7. And introducing passivation gas into the test cavity by using the passivation gas cylinder 6 so that halogen elements in the passivation gas fully react with surface pollutants and harmful elements (Si, C, H, O and the like) of the passivation sample, evaporate and escape, and simultaneously generate a passivation layer capable of protecting the surface of the test sample. On this basis, the content of harmful gases escaping into the test chamber 1 can also be detected by a mass spectrometer to determine whether passivation is completed.
Optionally, the detection device is further configured to detect a passivation suitability of a discharge chamber component of the excimer laser.
In some embodiments, the process of forming the passivation layer on the surface of the discharge chamber portion requires a certain time, and in the area where the passivation layer is not formed, surface contaminants and hazardous elements may still enter the inner surface of the discharge chamber part.
In a similar manner, surface contaminants and hazardous elements may also enter the interior surface of the passivated sample.
Based on this, the passivation applicability of the passivation sample is also tested to determine the passivation applicability of the discharge chamber components.
Alternatively, as shown in fig. 1, the detection means includes a mirror 8, a focusing lens 9, an adjustment translation stage 10, and a controller 12. An adjustment translation stage 10 for carrying the sample cell 2; a controller 12 for controlling the adjustment of the position of the translation stage 10.
And a reflecting mirror 8 for reflecting the laser light emitted from the excimer laser 11 and reflecting the laser light onto a focusing lens 9.
A focusing lens 9 for applying laser light to the passivated sample in the sample cell 2 to remove the passivation layer.
The passivating gas cylinder 6 is also used for inputting passivating gas into the test cavity 1 from which the passivating layer is removed.
The mass spectrometer 7 is also used for detecting the content of fluoride gas in the test cavity 1 from which the passivation layer is removed and judging whether the passivation sample is suitable for the discharge cavity component.
Here, the laser light emitted from the excimer laser 11 can be reflected by the mirror 8 onto the focusing lens 9, and the position of the adjustment translation stage 10 carrying the sample cell 2 can be controlled by the controller 12, and the laser light can be applied to the passivation sample in the sample cell 2 by the focusing lens 9 until the passivation layer is removed. That is, the passivation layer can be removed directly by using the laser emitted from the excimer laser 11 to expose the inner surface of the test cavity 1, thereby saving the cost.
Then, a passivation gas is input into the test chamber 1 by using the passivation gas bottle 6, and the passivation gas contains a certain proportion of rare gas and halogen gas.
Finally, detecting the content of harmful gas generated in the test cavity 1 by using a mass spectrometer 7, and if the content of the harmful gas is smaller than a preset value, passivating the sample to be suitable for the discharge cavity component; otherwise, it is not applicable.
Here, the discharge with a certain frequency is assisted, so that pollutants and harmful elements (Si, C, H, O, etc.) entering the passivation sample fully react with halogen gas, vaporize to generate harmful gas, and escape from a reaction interface into the test cavity 1, and the mass spectrometer 7 can obtain the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 by detecting the content of the harmful gas in the test cavity 1.
Here, a preset value can also be set, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value, the passivation sample is suitable for being used in the environment of the fluorine-containing medium for a long time; otherwise, it is not applicable.
The harmful gas may include a plurality of gases, each of which may be set to a predetermined value, and the passivation sample is suitable for use in a fluorine-containing medium environment for a long time if the percentage of all gases in the harmful gas is lower than the predetermined value.
In the embodiment of the invention, the passivation applicability of the discharge cavity component can also be detected by the detection device of the embodiment of the invention. Meanwhile, a detection device can be used for detecting whether passivation is finished or not and the passivation applicability of the discharge cavity component, so that the passivation sample can be prevented from moving back and forth for a plurality of times, and the detection accuracy is improved.
Optionally, as shown in fig. 1, the detection device further comprises a vacuum pump 3, and the vacuum pump 3 is connected with the test cavity 1.
In some embodiments, the material of the connecting pipe between the vacuum pump 3 and the test chamber 1 may be perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the connecting pipe. In the embodiment of the invention, before the passivation gas is input into the test cavity 1 each time, the vacuum pump 3 can be used for pumping the gas in the test cavity 1, so that the original gas in the test cavity 1 is prevented from influencing the detection result.
On this basis, as shown in fig. 1, the detection device may further comprise a barometer 4 connected to the test chamber 1. The barometer 4 is used for testing the pressure in the test chamber 1, and the pressure in the test chamber 1 can be controlled within a range of 1Pa + -0.5 Pa after the gas is pumped by the vacuum pump 3.
Optionally, as shown in fig. 1, the detection device further comprises a heating device 5; the heating device 5 is used for heating the test chamber 1.
In the embodiment of the invention, before the passivation gas is input into the test cavity 1, the test cavity 1 can be heated by the heating device 5 to control the internal temperature of the test cavity 1 to be 45+/-5 ℃.
Optionally, the detection device further comprises a passivating gas valve 13 connected to the passivating gas cylinder 6 and the test chamber 1, a mass spectrometer gas valve 14 connected to the mass spectrometer 7 and the test chamber 1.
In some embodiments, after the mass spectrometer 7 is used to detect the content of the harmful gas in the test chamber 1, the gas in the pipeline connecting the mass spectrometer 7 and the test chamber 1 can be exhausted, so as to avoid affecting the test result in the next test.
In the embodiment of the invention, when the passivation gas is input into the test chamber 1, the passivation gas valve 13 can be opened; when the passivation gas is not required to be supplied into the test chamber 1, the passivation gas valve 13 may be closed to avoid continuous supply of the passivation gas into the test chamber 1. When it is desired to detect the content of harmful gases in the test chamber 1, the mass spectrometer gas valve 14 can be opened; the mass spectrometer gas valve 14 may be closed without detecting the harmful gas content within the test chamber 1.
The embodiment of the invention also provides a method for detecting the passivation degree of the discharge cavity component of the excimer laser, which can be realized by the following steps as shown in fig. 2:
s11, sampling a passivation sample from the discharge cavity part, and placing the passivation sample into the sample groove 2; the sample well 2 is located within the test chamber 1.
In some embodiments, the passivation samples may be part of the discharge chamber components, either entirely placed into the test chamber 1 for testing or partially placed into the test chamber 1 for testing.
In some embodiments, the material of the inner surface of the test chamber 1 may be perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the test chamber 1.
S12, inputting passivation gas into the test cavity 1 by using the passivation gas cylinder 6 to generate a passivation layer, and detecting the content of fluoride gas generated in the test cavity 1 by using the mass spectrometer 7; if the content of the harmful gas is smaller than the preset value, passivation is completed; otherwise, the testing cavity is restored to the vacuum state, passivation gas is input into the testing cavity again, and the content of harmful gas is detected until the content of the harmful gas in the testing cavity 1 is smaller than a preset value.
In some embodiments, the connecting pipe between the passivated gas cylinder 6 and the test cavity 1 and the connecting pipe between the mass spectrometer 6 and the test cavity 1 may be made of perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the connecting pipe.
In some embodiments, the process of generating the passivation layer is: the passivation gas cylinder 6 is utilized to introduce passivation gas (comprising rare gas and halogen gas in a certain proportion) into the test cavity 1, and discharge with a certain frequency is assisted, so that surface pollutants and surface layer harmful elements (Si, C, H, O and the like) of the passivation sample fully react with the halogen gas, are vaporized to generate harmful gas, escape from a reaction interface into the test cavity 1, and meanwhile, a stable halide passivation layer is generated on the surface of the passivation sample, the passivation layer can protect the passivation sample, and the part of the passivation sample covered by the passivation layer can not react with the halogen gas any more to generate harmful gas.
Here, since a certain amount of halogen medium exists in the discharge chamber part of the excimer laser 11 itself, a certain amount of halogen element may be included in the passivation gas to simulate the discharge chamber part by using the test chamber 1, thereby playing a test role.
By way of example, the main component of the discharge chamber part 1 comprises Al, i.e. the main component of the passivation sample comprises Al, the material of the passivation layer may comprise AlF 3 。
In some embodiments, after the surface contaminants and surface layer hazardous elements (Si, C, H, O, etc.) of the passivated sample are sufficiently reacted with the halogen gas (the reaction time may be 10 min.+ -. 20 s), a large amount of harmful gas (N 2 、O 2 、CO 2 、CF 4 HF), part of the harmful gases remains escaping into the test chamber 1 and into the test chamber 1, while the test chamber 1 also contains the remaining passivation gas.
Based on this, the mass spectrometer 7 can determine whether passivation is completed by detecting the content of the harmful gas in the test chamber 1 to obtain the percentage of the harmful gas in the test chamber 1 to all the gases in the test chamber 1.
Wherein, a preset value can be preset, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value, the passivation is completed; otherwise, if passivation is not completed, the test cavity is restored to a vacuum state, passivation gas is again introduced into the test cavity 1, and halogen elements in the newly introduced passivation gas continuously react with residual surface layer harmful elements in the test cavity 1 (the reaction time can be 30 min), and are vaporized and escape; then, detecting the content of harmful gas in the test cavity 1 by using a mass spectrometer, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than a preset value, completing passivation; otherwise, repeating the steps until the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value.
Here, whether passivation is completed may be determined manually, or may be determined by other machines.
The harmful gas may include a plurality of gases, each of which may be set to a preset value, and passivation is completed if the percentage of all gases in the harmful gas is lower than the preset value.
In some embodiments, the preset value may be set according to the actual situation. By way of example, a certain harmful gas in the test chamber 1 is reduced to 10% of the original value, and a preset value is set accordingly.
That is, in the case where the passivation layer is not formed, a certain harmful gas is generated to account for 10% of all the gases in the test chamber 1; in the case of the passivation layer being generated, the harmful gas generated accounts for 9% of all gases in the test chamber 1.
Taking the example that the main component of the discharge chamber part 1 includes Al as an example, the gas composition in the test chamber 1 detected by the mass spectrometer 7 and the preset value of the gas are shown in the following table 1:
| gas and its preparation method | N 2 | O 2 | CO 2 | CF 4 | SiF 4 | HF |
| Preset value m iM | 25 | 5 | 5 | 35 | 10 | 10 |
| m i | <D.L. | 1 | 3 | 2 | 5 | 14 |
TABLE 1
In Table 1, N 2 、O 2 、CO 2 、CF 4 、SiF 4 The percentage of HF is less than its own preset value and therefore passivation is complete. Wherein, the liquid crystal display device comprises a liquid crystal display device,<d.l. (detect limitation) refers to below the detection limit of the device.
The embodiment of the invention provides a method for detecting the passivation degree of a discharge cavity part of an excimer laser, which utilizes a passivation gas cylinder 6 to introduce passivation gas into a test cavity so as to enable halogen elements in the passivation gas to fully react with surface pollutants and hazardous elements (Si, C, H, O and the like) of a passivation sample, vaporize and escape, and simultaneously generate a passivation layer capable of protecting the surface of the test sample. On this basis, the mass spectrometer 7 can also be used to detect the content of harmful gases escaping into the test chamber 1 to determine whether passivation is complete.
Optionally, after passivation is completed, the method for detecting the passivation degree of the discharge cavity component of the excimer laser 11 further includes: the suitability of the excimer laser 11 for passivation of the discharge chamber components was examined.
In some embodiments, the process of forming the passivation layer on the surface of the discharge chamber part requires a certain time, and in the area where the passivation layer is not formed, surface contaminants and harmful gases of harmful elements may still enter the inner surface of the discharge chamber part.
In a similar manner, surface contaminants and hazardous elements may also enter the interior surface of the passivated sample.
Based on this, the passivation applicability of the passivation sample is also tested to determine the passivation applicability of the discharge chamber components.
Alternatively, as shown in fig. 1, the laser light emitted from the excimer laser 11 may be reflected onto the focusing lens 9 by the mirror 8, and the position of the adjustment translation stage 10 carrying the sample cell 2 may be controlled by the controller 12, and the laser light may be applied onto the passivation sample in the sample cell 2 by the focusing lens 9 until the passivation layer is removed. That is, the passivation layer can be removed directly by using the laser emitted from the excimer laser 11 to expose the inner surface of the test cavity 1, thereby saving the cost.
Then, a passivation gas is input into the test chamber 1 by using the passivation gas bottle 6, and the passivation gas contains a certain proportion of rare gas and halogen gas.
Finally, detecting the content of harmful gas generated in the test cavity 1 by using a mass spectrometer 7, and if the content of the harmful gas is smaller than a preset value, passivating the sample to be suitable for the discharge cavity component; otherwise, it is not applicable.
Here, the discharge with a certain frequency is assisted, so that pollutants and surface layer harmful elements (Si, C, H, O, etc.) entering the inner surface of the passivated sample fully react with halogen gas, are vaporized to generate harmful gas, and escape from a reaction interface into the test cavity 1, and the mass spectrometer 7 can obtain the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 by detecting the content of the harmful gas in the test cavity 1.
Here, a preset value can also be set, and if the percentage of the harmful gas in the test cavity 1 to all the gases in the test cavity 1 is lower than the preset value, the passivation sample is suitable for being used in the environment of the fluorine-containing medium for a long time; otherwise, it is not applicable.
The harmful gas may include a plurality of gases, each of which may be set to a predetermined value, and the passivation sample is suitable for use in a fluorine-containing medium environment for a long time if the percentage of all gases in the harmful gas is lower than the predetermined value.
Taking the example that the main component of the discharge chamber part 1 includes Al as an example, the gas composition in the test chamber 1 detected by the mass spectrometer 7 and the preset value of the gas are shown in the following table 2:
TABLE 2
In Table 2, N 2 、O 2 、CO 2 、CF 4 、SiF 4 The percentages of HF are smaller than the preset value, so that the aluminum part of the discharge cavity is suitable for being used in the environment of fluorine-containing medium for a long time.
In the embodiment of the invention, the passivation applicability of the discharge cavity component can also be detected by the detection device of the embodiment of the invention. Meanwhile, a detection device can be used for detecting whether passivation is finished or not and the passivation applicability of the discharge cavity component, so that the passivation sample can be prevented from moving back and forth for a plurality of times, and the detection accuracy is improved.
Optionally, as shown in fig. 1, before the passivation gas is input into the test chamber 1, the vacuum pump 3 may be further used to pump the gas in the test chamber 1, so as to avoid that the original gas in the test chamber 1 affects the detection result.
In some embodiments, the material of the connecting pipe between the vacuum pump 3 and the test chamber 1 may be perfluorinated rubber after passivation treatment, so as to improve the fluorine resistance of the connecting pipe.
On this basis, as shown in fig. 1, the detection device may further comprise a barometer 4 connected to the test chamber 1. The barometer 4 is used for testing the pressure in the test chamber 1, and the pressure in the test chamber 1 can be controlled within a range of 1Pa + -0.5 Pa after the gas is pumped by the vacuum pump 3.
Optionally, as shown in fig. 1, the detection device further comprises a heating device 5; the heating device 5 is used for heating the test chamber 1.
In the embodiment of the invention, before the passivation gas is input into the test cavity 1, the test cavity 1 can be heated by the heating device 5 to control the internal temperature of the test cavity 1 to be 45+/-5 ℃.
Optionally, the detection device further comprises a passivating gas valve 13 connected to the passivating gas cylinder 6 and the test chamber 1, a mass spectrometer gas valve 14 connected to the mass spectrometer 7 and the test chamber 1.
In some embodiments, after the mass spectrometer 7 is used to detect the content of the harmful gas in the test chamber 1, the gas in the pipeline connecting the mass spectrometer 7 and the test chamber 1 can be exhausted, so as to avoid affecting the test result in the next test.
In the embodiment of the invention, when the passivation gas is input into the test chamber 1, the passivation gas valve 13 can be opened; when the passivation gas is not required to be supplied into the test chamber 1, the passivation gas valve 13 may be closed to avoid continuous supply of the passivation gas into the test chamber 1. When it is desired to detect the content of harmful gases in the test chamber 1, the mass spectrometer gas valve 14 can be opened; the mass spectrometer gas valve 14 may be closed without detecting the harmful gas content within the test chamber 1.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. The detection device is used for detecting the passivation degree of a discharge cavity component of the excimer laser and is characterized by comprising the excimer laser, a test cavity, a sample groove, a passivation gas cylinder and a mass spectrometer;
the excimer laser includes a discharge cavity member; the sample groove is positioned in the test cavity; the passivated gas cylinder and the mass spectrometer are respectively connected with the test cavity; the connecting pipeline between the passivated gas cylinder and the testing cavity and the connecting pipeline between the mass spectrometer and the testing cavity are made of perfluorinated rubber after passivation treatment; the material of the inner surface of the test cavity is perfluorinated rubber after passivation treatment;
the sample tank is used for containing a passivation sample sampled from the discharge cavity component;
the passivation gas cylinder is used for inputting passivation gas into the test cavity to obtain a passivation layer;
the mass spectrometer is used for detecting and removing the content of harmful gas in the test cavity and judging whether passivation is finished or not and whether the passivated sample is suitable for the discharge cavity component or not; the detection device is also used for detecting the passivation applicability of the discharge cavity component of the excimer laser;
the detection device comprises a reflecting mirror, a focusing lens, an adjusting translation stage and a controller;
the adjusting translation stage is used for bearing the sample tank; the controller is used for controlling and adjusting the position of the translation stage; the reflecting mirror is used for reflecting the laser emitted by the excimer laser and reflecting the laser to the focusing lens; and the focusing lens is used for enabling the laser to act on the passivation sample in the sample groove and removing the passivation layer.
2. The test device of claim 1, further comprising a vacuum pump coupled to the test chamber.
3. The detection device of claim 2, wherein the detection device further comprises a heating device;
the heating device is used for heating the test cavity.
4. A test device according to claim 3, further comprising a passivating gas valve connected to the passivating gas cylinder and the test chamber, a mass spectrometer gas valve connected to the mass spectrometer and the test chamber.
5. A method of detecting the degree of passivation of a discharge chamber component of an excimer laser, comprising:
sampling a passivation sample from the discharge chamber component and placing the passivation sample into the sample cell; the sample groove is positioned in the test cavity;
inputting passivation gas into the test cavity by using a passivation gas bottle to generate a passivation layer, and detecting the content of harmful gas generated in the test cavity by using a mass spectrometer; if the content of the harmful gas is smaller than a preset value, passivation is completed; otherwise, the testing cavity is restored to a vacuum state, passivation gas is input into the testing cavity again, and the content of the harmful gas is detected until the content of the harmful gas in the testing cavity is smaller than the preset value; the connecting pipeline between the passivated gas cylinder and the testing cavity and the connecting pipeline between the mass spectrometer and the testing cavity are made of perfluorinated rubber after passivation treatment; the material of the inner surface of the test cavity is perfluorinated rubber after passivation treatment; after passivation is completed, the method for detecting the passivation degree of the discharge cavity component of the excimer laser further comprises the following steps:
detecting passivation applicability of a discharge cavity component of the excimer laser;
detecting passivation suitability of a discharge chamber component of an excimer laser, comprising:
reflecting laser emitted by the excimer laser to a focusing lens by utilizing a reflector, controlling the position of an adjusting translation stage carrying a sample groove by utilizing a controller, and applying the laser to the passivation sample in the sample groove by utilizing the focusing lens until the passivation layer is removed;
inputting passivation gas into the test cavity by using a passivation gas cylinder;
detecting the content of harmful gas generated in the test cavity by using a mass spectrometer, and if the content of the harmful gas is smaller than a preset value, applying the passivation sample to the discharge cavity component; otherwise, it is not applicable.
6. The method of detecting the degree of passivation of a discharge chamber component of an excimer laser of claim 5, wherein the method of detecting the degree of passivation of a discharge chamber component of an excimer laser further comprises, prior to inputting a passivation gas into the test chamber:
and vacuumizing the gas in the test cavity by using a vacuum pump.
7. The method of detecting the degree of passivation of a discharge chamber component of an excimer laser of claim 6, wherein the method of detecting the degree of passivation of a discharge chamber component of an excimer laser further comprises, prior to inputting a passivation gas into the test chamber:
and heating the test cavity by using a heating device.
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