CN109838686A - A kind of steel cylinder processing system and its application method and application - Google Patents

A kind of steel cylinder processing system and its application method and application Download PDF

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Publication number
CN109838686A
CN109838686A CN201910126097.3A CN201910126097A CN109838686A CN 109838686 A CN109838686 A CN 109838686A CN 201910126097 A CN201910126097 A CN 201910126097A CN 109838686 A CN109838686 A CN 109838686A
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China
Prior art keywords
diaphragm valve
steel cylinder
band
vacuum
program
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CN201910126097.3A
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Chinese (zh)
Inventor
李贤武
张金彪
汪建春
汤月贞
李金勇
吴旭飞
许福胜
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Haohua Gas Co.,Ltd.
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Liming Research Institute of Chemical Industry Co Ltd
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Priority to CN201910126097.3A priority Critical patent/CN109838686A/en
Publication of CN109838686A publication Critical patent/CN109838686A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a kind of steel cylinder processing system and its application method and application, including four units, first, steel cylinder unit: one or more steel cylinder, diaphragm valve, vacuum meter and the pressure sensor for being enclosed with heating blanket;Second, analytical unit: including diaphragm valve and analytical equipment;Third tests gas cell: including diaphragm valve, check valve, filter and purifier apparatus;4th, evacuate unit: including diaphragm valve and vacuum equipment;It is connected with diaphragm valve V1 in turn from the main line that steel cylinder comes out, vacuum meter, pressure sensor, analytical unit, test gas cell, evacuates unit;Vacuum meter is connected to main line by diaphragm valve V2, and pressure sensor is connected to main line by diaphragm valve V3;Analytical equipment is connected to main line by diaphragm valve V4, is connect by diaphragm valve V7 with test gas cell;Purifier apparatus passes sequentially through filter F 1, check valve C1, diaphragm valve V5 and is connected to main line;Vacuum equipment is connected to main line by diaphragm valve V6.

Description

A kind of steel cylinder processing system and its application method and application
Technical field
The present invention relates to a kind of steel cylinder processing system and its application methods, the in particular to place of high pure electronic spy gas steel cylinder Reason.
Background technique
Electronic gas is super large-scale integration (LSI), flat panel display device, compound semiconductor device, solar energy The electronics industries such as battery, optical fiber produce indispensable raw material, are widely used in film, etching, doping, vapor deposition, expansion The techniques such as scattered.With the fast development of industry, the requirement of electronics industry bound pair electronic gas purity is higher and higher, and wherein impurity is such as Moisture, oxygen, the requirement of nitrogen are more harsh, and the purity of general ultra-pure gases is 99.9999% or more, impurity moisture, oxygen Gas, nitrogen index usually require that, lower than 1ppmv, the moisture content index of portion gas is even lower than 50ppbv.As electronic gas Manufacturer, the steel cylinder processing that packing container fills gas is an important component part during gas purification, prevents steel cylinder Secondary pollution, which occurs, to be particularly important.
Steel cylinder processing mode common at present is evacuated using inert gas is filled with to steel cylinder heat temperature raising, then to steel cylinder, Impurity in repeated multiple times inflation-evacuation processing steel cylinder, but the processing system cleanliness used is low, poor air-tightness, and treated Moisture, oxygen and Nitrogen gas impurity gas content in steel cylinder is still higher, is unable to satisfy the requirement of electronics industry.
Patent application 201710060733.8 discloses a kind of steel cylinder processing system, and steel cylinder is placed in baking oven and is heated, is Under unified central planning to be equipped with nitrogen tube, exhaust pipe, vacuum pump and processing pond, this method purpose is to be filled with the steel cylinder of unknown component material Safe disposal is carried out, potential danger source is eliminated, but the requirement of treated steel cylinder is unable to satisfy electronics industry.
Patent ZL201720854287.3, which discloses the moisture content in a kind of steel cylinder, reduces device, including air displacement Device, drying mechanism, nitrogen cylinder, exhaust tube and appendix, the moisture content in the steel cylinder reduce device by heating steel cylinder, make steel Moisture on bottle inner wall becomes water vapour, and nitrogen is sufficiently mixed with water in bottle steam, is discharged outside bottle by vacuum pump, although reaching The purpose that water in bottle divides content is reduced, but does not remove the oxygen and Nitrogen gas impurity gas in steel cylinder, is also unable to satisfy electronics The requirement of industry.
Summary of the invention
The invention solves first technical problem be to provide a kind of steel cylinder processing system, may be implemented by the system The removal and detection of trace impurity moisture, oxygen, nitrogen, meet the requirement of electronics industry.
The invention solves second technical problem be to provide the application method of the system.
To solve first technical problem, the technical scheme is that a kind of steel cylinder processing system, including four lists Member, first, steel cylinder unit: one or more steel cylinder, diaphragm valve, vacuum meter and the pressure sensor for being enclosed with heating blanket;Second, Analytical unit: including diaphragm valve and analytical equipment;Third tests gas cell: including diaphragm valve, check valve, filter and pure Change equipment;4th, evacuate unit: including diaphragm valve and vacuum equipment;Diaphragm is connected in turn from the main line that steel cylinder 1 comes out Valve V1, vacuum meter 3, pressure sensor 4, analytical unit, test gas cell, unit is evacuated;Vacuum meter 3 is connected by diaphragm valve V2 It is connected to main line, pressure sensor 4 is connected to main line by diaphragm valve V3;Analytical equipment 5 is connected to master by diaphragm valve V4 Pipeline is connect by diaphragm valve V7 with test gas cell;Purifier apparatus 6 passes sequentially through filter F 1, check valve C1, diaphragm valve V5 is connected to main line;Vacuum equipment 7 is connected to main line by diaphragm valve V6.The preferred cold-cathode ionization gauge of vacuum meter.
Further, which introduces PLC control cabinet 8, may be implemented to automatically control, PLC control cabinet 8 includes The temperature control modules of steel cylinder processing routine, heating blanket 2;Heating blanket 2, vacuum meter 3 and pressure sensor 4 access PLC control cabinet 8, PLC control cabinet 8 controls the opening and closing of steel cylinder temperature and diaphragm valve, and diaphragm valve is the diaphragm valve that band remotely controls.
Analytical equipment 5 is used to complete the detection of traces of moisture and trace oxygen, nitrogen in steel cylinder in gas.Moisture is minimum Detection limit is not more than 2ppbv, and the minimum detection limit of oxygen is not more than 0.01ppmv, and the minimum detection limit of nitrogen is not more than 0.01ppmv。
Purifier apparatus 6 is used for purification assays gas, and detection gas include helium, argon gas and its gaseous mixture, inspection after purification It surveys gas and is used to detect the impurity content in steel cylinder, moisture, oxygen, nitrogen content should be lower than in detection gas after purification 10ppbv。
The vacuum equipment 7 is made of two-stage (two-speed) pump, and fore pump is lobe pump, and secondary pumps are turbomolecular pump, and vacuum degree can Up to 10-8Pa。
Connect each unit, the pipeline of equipment is EP grade stainless steel tubes, filter is high-precision ultraclean filters, and check valve is EP grades, pipeline uses metal face seal (VCR) connector and rail mounted automatic welding using EP grades of welding point connections, whole system Technology (TIG) is attached.
To solve second technical problem, the present invention provides a kind of application method of system, comprising the following steps:
(1) detection gas are tested: analyzing the detection gas of purified equipment after purification, analysis detection gas with analytical equipment In moisture, oxygen, nitrogen content be below 10ppbv as qualification.
(2) vacuum test: test steel cylinder vacuum degree, the registration to cold-cathode ionization gauge 3 is up to 10-8After Pa, disconnect true Null device keeps 30min vacuum degree not reduce, and vacuum degree is qualification.
(3) steel cylinder heats up: steel cylinder the heating of (3) steel cylinder: being warming up to set temperature, steel cylinder temperature control range by heating blanket 2 It is preferred that at 100~120 DEG C.
(4) it evacuates: steel cylinder is connected into vacuum equipment, the registration to vacuum meter 3 is up to 10-8Pa keeps 4h, closes vacuum and sets It is standby.
(5) steel cylinder is tested: the test gas from purifier apparatus is introduced into steel cylinder, the pressure of pressure sensor to 50~ When 100psi, stop air inlet, the moisture tested in steel cylinder is analyzed with analytical equipment and oxygen, nitrogen content, moisture are lower than 50ppbv, oxygen are " qualification " lower than 0.10ppmv lower than 0.10ppmv, nitrogen, close test equipment, connect evacuating equipment, to The registration of vacuum meter is up to 10-8When Pa, cylinder valve is closed, steel cylinder processing is completed.If moisture, oxygen and nitrogen test value are unqualified, Return step (4) is handled again.
Further, PLC control of the steel cylinder processing system access equipped with steel cylinder processing routine, heating blanket temperature control modules Cabinet processed contains following steps, it can be achieved that automatically process:
(1) gas test: steel cylinder processing routine in starting PLC control cabinet 8, system automatically turn on the diaphragm that band remotely controls Moisture, oxygen, nitrogen content in valve V7 analysis test gas, assay value are below 10ppbv as qualification, and program is automatically closed The diaphragm valve V7 that band remotely controls, into vacuum test program.
(2) vacuum test: program successively automatically turns on the diaphragm valve that diaphragm valve V6, the band that band remotely controls remotely control The diaphragm valve V1 that V2, band remotely control, test macro vacuum degree, the registration to vacuum meter 3 is up to 10-8After Pa, program is automatically closed The diaphragm valve V6 that band remotely controls keeps 30min, and vacuum degree does not reduce, and clicks " test passes " key, into steel cylinder heating journey Sequence.If vacuum degree declines in test process, program alarm reinstalls cylinder joint, then click " return ", process repeats steps (2)。
(3) steel cylinder heats up: the temperature control modules of the heating blanket 2 in starting PLC, steel cylinder automatic heating to set temperature Afterwards, into evacuation program.
(4) it evacuates: clicking " evacuation " key, open cylinder valve, program automatically turns on the diaphragm valve V6 that band remotely controls, to true The registration of sky meter 3 is up to 10-8Pa, keeps 4h, program be successively automatically closed that diaphragm valve V1, the band that band remotely controls remotely control every The diaphragm valve V6 that film valve V2, band remotely control, into steel cylinder test program.
(5) steel cylinder is tested: clicking " test " key, it is long-range that program successively automatically turns on diaphragm valve V5, band that band remotely controls The diaphragm valve V3 of control, the diaphragm valve V1 that band remotely controls, pressure sensor 4 pressure to 50~100psi, program are automatically closed The diaphragm valve V5 that band remotely controls opens the diaphragm valve V4 that band remotely controls, and tests moisture and oxygen, nitrogen in steel cylinder, water Divide and be lower than 50ppbv, oxygen is lower than 0.10ppmv, after nitrogen is lower than 0.10ppmv, clicks " qualification " key, program is successively closed automatically The diaphragm valve V4 that diaphragm valve V3, the band that band remotely controls remotely control is closed, diaphragm valve V6 and band that band remotely controls are automatically turned on The diaphragm valve V2 remotely controlled, the registration to vacuum meter 3 is up to 10-8Pa, program prompt processing are completed, close cylinder valve, clicked The diaphragm valve that diaphragm valve V2, the band that diaphragm valve V6, the band that band remotely controls remotely control remotely control is automatically closed in bonding, program Heating blanket power supply is automatically closed in V1, program, retracts PLC main interface.If moisture, oxygen and nitrogen test value are unqualified, program report It is alert, " unqualified " key is clicked, program auto-returned step (4) is handled again.
Compared with prior art, of the invention a kind of steel cylinder processing system and its application method, may be implemented steel water in bottle Point, the removal of the impurity such as oxygen, nitrogen it is integrated with detection, automatically process and measure steel cylinder treatment effect, avoid because at steel cylinder Unqualified caused contamination accident is managed, treatment process is simple, efficient, meets the requirement of electronics industry gas.This method can Directly apply to the electronic gas such as high-purity sulfur hexafluoride, electron level carbon tetrafluoride, electron level Nitrogen trifluoride, electron level tungsten hexafluoride Steel cylinder processing.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of steel cylinder processing system of the present invention.
In figure: 1 be steel cylinder, 2 be heating blanket, 3 be vacuum meter, 4 be pressure sensor, 5 be analytical equipment, 6 be purifying set It is standby, 7 be vacuum equipment, 8 be PLC control cabinet, V1, V2, V3, V4, V5, V6, V7 are diaphragm valve, and F1 is the ultrapure filtering of high-precision Device, C1 are check valve.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.Purifier 6 used in embodiment is partly led to be first general The 7NG060R-2 type purifier of body technique (Shanghai) Co., Ltd. production.Vacuum is calculated as cold-cathode ionization gauge, and diaphragm valve is The diaphragm valve that band remotely controls.
Embodiment 1
Steel cylinder steel seal number to be processed is 1502207, volume 450L, and steel cylinder valve-type is CGA716, and gas to be filled is height Pure sulfur hexafluoride.Test gas uses helium.
Start steel cylinder processing routine in PLC, step 1: detection gas are tested, program prompt installation steel cylinder is clicked for entrance " confirmation installation ", system automatically turn on the diaphragm valve V7 that band remotely controls, and moisture, oxygen, the nitrogen in analysis test gas contain Amount, after tested, moisture 4ppbv, oxygen content 0.05ppmv, nitrogen content 0.05ppbv are clicked " test passes ", journey The diaphragm valve V7 that band remotely controls is automatically closed in sequence, prompts to enter in next step: vacuum test;It is long-range that program successively automatically turns on band The diaphragm valve V1 that diaphragm valve V2, the band that diaphragm valve V6, the band of control remotely control remotely control, test macro vacuum degree, to true The registration of sky meter 3 is up to 10-8After Pa, the diaphragm valve V6 that band remotely controls is automatically closed in program, keeps 30min, and vacuum degree does not reduce, It clicks " test passes ", carries out in next step: steel cylinder heating;Start the temperature control modules of the steel cylinder heating blanket 2 in PLC, steel cylinder Automatic heating is to after 120 DEG C, and program is automatically into next step: evacuating;It clicks " evacuation ", opens cylinder valve, program automatically turns on The diaphragm valve V6 that band remotely controls, the registration to vacuum meter 3 is up to 10-8Pa, keeps 4h, program be automatically closed that band remotely controls every The diaphragm valve V6 that diaphragm valve V2, the band that film valve V1, band remotely control remotely control is prompted to carry out in next step: steel cylinder test;It clicks " test ", program automatically turn on the diaphragm valve V3 that diaphragm valve V5, the band that band remotely controls remotely control, the diaphragm that band remotely controls Valve V1, for 4 pressure of pressure sensor to 55psi, the diaphragm valve V5 that band remotely controls is automatically closed in program, opens what band remotely controlled Diaphragm valve V4 tests moisture and oxygen, nitrogen in steel cylinder, and the moisture in steel cylinder is 39ppbv after tested, and oxygen is 0.06ppmv, nitrogen 0.08ppmv are clicked " qualification ", and the long-range control of diaphragm valve V3, band that band remotely controls is automatically closed in program The diaphragm valve V4 of system, automatically turns on the diaphragm valve V6 that remotely controls of band and with the diaphragm valve V2 remotely controlled, to showing for vacuum meter 3 It counts up to 10-8Pa, program prompt processing are completed, and cylinder valve is closed, and click " completion " key, program be automatically closed that band remotely controls every The diaphragm valve V1 that diaphragm valve V2, the band that film valve V6, band remotely control remotely control, program are automatically closed heating blanket power supply, retract Main interface, disassembly steel cylinder are spare.
Embodiment 2
Steel cylinder steel seal number to be processed is 16B90125, and volume 47L, steel cylinder valve-type is CGA580, and gas to be filled is electricity Sub- grade carbon tetrafluoride.Test gas part uses helium.
Rate-determining steps test gas analysis, moisture 2ppbv, oxygen content 0.05ppmv with embodiment 1, and nitrogen contains Amount is 0.05ppbv.Steel cylinder processing is qualified.
Embodiment 3
Steel cylinder steel seal number to be processed is D2931107, and volume 44L, steel cylinder valve-type is CGA640, and gas to be filled is electricity Sub- grade Nitrogen trifluoride.Test gas part uses argon gas.
Operating procedure tests gas test analysis: moisture 6ppbv, oxygen content 0.03ppmv, nitrogen with embodiment 1 Gas content is 0.06ppbv.Steel cylinder processing is qualified.
Embodiment 4
Steel cylinder steel seal number to be processed is B07008, and volume 40L, steel cylinder valve-type is CGA638, and gas to be filled is electronics Grade tungsten hexafluoride.Gas part uses argon gas.
Rate-determining steps test gas analysis, moisture 7ppbv, oxygen content 0.04ppmv with embodiment 1, and nitrogen contains Amount is 0.05ppbv.Steel cylinder processing is qualified.
Each embodiment steel cylinder processing result is shown in Table 1.
1 embodiment steel cylinder processing result of table

Claims (10)

1. a kind of steel cylinder processing system, including four units, first, steel cylinder unit: one or more is enclosed with the steel of heating blanket Bottle, diaphragm valve, vacuum meter and pressure sensor;Second, analytical unit: including diaphragm valve and analytical equipment;Third tests gas Unit: including diaphragm valve, check valve, filter and purifier apparatus;4th, evacuate unit: including diaphragm valve and vacuum equipment;From Diaphragm valve V1, vacuum meter (3), pressure sensor (4), analytical unit, test are connected in turn on the main line that steel cylinder (1) comes out Gas cell evacuates unit;Vacuum meter (3) is connected to main line by diaphragm valve V2, and pressure sensor (4) passes through diaphragm valve V3 It is connected to main line;Analytical equipment (5) is connected to main line by diaphragm valve V4, is connected by diaphragm valve V7 and test gas cell It connects;Purifier apparatus (6) passes sequentially through filter F 1, check valve C1, diaphragm valve V5 and is connected to main line;Vacuum equipment (7) passes through Diaphragm valve V6 is connected to main line.
2. steel cylinder processing system according to claim 1, vacuum are calculated as cold-cathode ionization gauge.
3. steel cylinder processing system according to claim 2, which also includes PLC control cabinet (8), PLC Control cabinet (8) includes the temperature control modules of steel cylinder processing routine, heating blanket (2), and heating blanket (2), vacuum meter (3) and pressure pass Sensor (4) accesses in PLC control cabinet 8, and PLC control cabinet 8 controls the opening and closing of steel cylinder temperature and diaphragm valve, and diaphragm valve is the long-range control of band The diaphragm valve of system.
4. steel cylinder processing system according to claim 2, the minimum detection limit of analytical equipment (5) moisture is not more than 2ppbv, The minimum detection limit of oxygen is not more than 0.01ppmv, and the minimum detection limit of nitrogen is not more than 0.01ppmv.
5. steel cylinder processing system according to claim 2, moisture in the detection gas of purifier apparatus (6) after purification, oxygen, Nitrogen content is lower than 10ppbv.
6. steel cylinder processing system according to claim 2, the vacuum equipment (7) is made of two-stage (two-speed) pump, and fore pump is sieve Thatch pump, secondary pumps are turbomolecular pump, and vacuum degree reaches 10-8Pa。
7. steel cylinder processing system according to claim 2 connects each unit, the pipeline of equipment is EP grades of stainless steel tubes, mistake Filter is high-precision ultraclean filters, and check valve is EP grades, and pipeline uses metal using EP grades of welding point connections, whole system Face sealing (VCR) connector and rail mounted automatic welding technique (TIG) are attached.
8. the application method of steel cylinder processing system described in a kind of claim 2, comprising the following steps:
(1) detection gas are tested: the detection gas of purified equipment after purification are analyzed with analytical equipment, in analysis detection gas Moisture, oxygen, nitrogen content are below 10ppbv as qualification;
(2) vacuum test: test steel cylinder vacuum degree, the registration to vacuum meter 3 is up to 10-8After Pa, vacuum equipment is disconnected, is kept 30min vacuum degree does not reduce, and vacuum degree is qualification;
(3) steel cylinder heats up: steel cylinder being warming up to set temperature by heating blanket 2, steel cylinder temperature control range is preferably at 100~120 DEG C;
(4) it evacuates: steel cylinder is connected into vacuum equipment, the registration to vacuum meter 3 is up to 10-8Pa keeps 4h, closes vacuum equipment;
(5) steel cylinder is tested: the test gas from purifier apparatus is introduced steel cylinder, the pressure of pressure sensor to 50~100psi When, stop air inlet, the moisture and oxygen, nitrogen content in test steel cylinder is analyzed with analytical equipment, moisture is lower than 50ppbv, oxygen Being lower than 0.10ppmv lower than 0.10ppmv, nitrogen is " qualification ", closes test equipment, evacuating equipment is connected, to showing for vacuum meter It counts up to 10-8When Pa, cylinder valve and heating blanket are closed, steel cylinder processing is completed;If moisture, oxygen and nitrogen test value are unqualified, return Step (4) are gone back to handle again.
9. the application method of steel cylinder processing system described in a kind of claim 3, comprising the following steps:
(1) detection gas test: starting PLC control cabinet (8) in steel cylinder processing routine, system automatically turn on band remotely control every Moisture, oxygen, nitrogen content in film valve V7 analysis test gas, assay value are below 10ppbv as qualification, and program is closed automatically The diaphragm valve V7 that band remotely controls is closed, into vacuum test program;
(2) vacuum test: program successively automatically turns on diaphragm valve V2, the band that diaphragm valve V6, the band that band remotely controls remotely control The diaphragm valve V1 remotely controlled, test macro vacuum degree, the registration to vacuum meter (3) is up to 10-8After Pa, it is remote that band is automatically closed in program The diaphragm valve V6 of process control keeps 30min, and vacuum degree does not reduce, and " test passes " key is clicked, into steel cylinder temperature program;It surveys If vacuum degree declines during examination, program alarm reinstalls cylinder joint, then click " return ", process repeats steps (2);
(3) steel cylinder heats up: the temperature control modules of the heating blanket (2) in starting PLC, after steel cylinder automatic heating to set temperature, Into evacuation program;
(4) it evacuates: clicking " evacuation " key, open cylinder valve, program automatically turns on the diaphragm valve V6 that band remotely controls, to vacuum meter (3) registration is up to 10-8Pa, keeps 4h, and the diaphragm that diaphragm valve V1, the band that band remotely controls remotely control successively is automatically closed in program The diaphragm valve V6 that valve V2, band remotely control, into steel cylinder test program;
(5) steel cylinder is tested: clicking " test " key, program successively automatically turns on the long-range control of diaphragm valve V5, band that band remotely controls Diaphragm valve V3, the diaphragm valve V1 that band remotely controls, pressure sensor 4 pressure to 50~100psi, it is remote that band is automatically closed in program The diaphragm valve V5 of process control opens the diaphragm valve V4 that band remotely controls, and the moisture and oxygen, nitrogen, moisture in test steel cylinder are low In 50ppbv, oxygen is lower than 0.10ppmv, after nitrogen is lower than 0.10ppmv, clicks " qualification " key, band is successively automatically closed in program The diaphragm valve V4 that diaphragm valve V3, the band remotely controlled remotely controls automatically turns on the diaphragm valve V6 that remotely controls of band and with long-range The diaphragm valve V2 of control, the registration to vacuum meter (3) is up to 10-8Pa, program prompt processing are completed, close cylinder valve, click and complete The diaphragm valve that diaphragm valve V2, the band that diaphragm valve V6, the band that band remotely controls remotely control remotely control is automatically closed in key, program Heating blanket power supply is automatically closed in V1, program, retracts PLC main interface;If moisture, oxygen and nitrogen test value are unqualified, program report It is alert, " unqualified " key is clicked, program auto-returned step (4) is handled again.
10. a kind of application of steel cylinder handled according to application method described in claim 8 or 9 in electronic gas.
CN201910126097.3A 2019-02-14 2019-02-14 A kind of steel cylinder processing system and its application method and application Pending CN109838686A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110966518A (en) * 2019-12-25 2020-04-07 苏州焜原光电有限公司 Gas filling system and filling method
CN111111387A (en) * 2019-12-25 2020-05-08 中船重工(邯郸)派瑞特种气体有限公司 Method for removing water in hydrogen fluoride steel cylinder
CN112557130A (en) * 2021-02-28 2021-03-26 中国工程物理研究院核物理与化学研究所 Method for filling gas into gas detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110966518A (en) * 2019-12-25 2020-04-07 苏州焜原光电有限公司 Gas filling system and filling method
CN111111387A (en) * 2019-12-25 2020-05-08 中船重工(邯郸)派瑞特种气体有限公司 Method for removing water in hydrogen fluoride steel cylinder
CN112557130A (en) * 2021-02-28 2021-03-26 中国工程物理研究院核物理与化学研究所 Method for filling gas into gas detector
CN112557130B (en) * 2021-02-28 2021-04-30 中国工程物理研究院核物理与化学研究所 Method for filling gas into gas detector

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