CN206902221U - Dry and pre-passivating device - Google Patents
Dry and pre-passivating device Download PDFInfo
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- CN206902221U CN206902221U CN201720581572.2U CN201720581572U CN206902221U CN 206902221 U CN206902221 U CN 206902221U CN 201720581572 U CN201720581572 U CN 201720581572U CN 206902221 U CN206902221 U CN 206902221U
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Abstract
A kind of drying and pre-passivating device, including air chamber and the master control unit, vacuum unit and the passivation gas control unit that are connected respectively with air chamber, wherein：Air chamber is used to hold the parts for needing dry and pre-passivating；Vacuum unit be used for suck/discharge air, air chamber is in vacuum/atmospheric pressure state；Passivation gas control unit is used for when air chamber is in vacuum state, and passivation gas is injected into air chamber to carry out pre-passivating to parts, is additionally operable to after the completion of pre-passivating, air chamber discharges passivation gas when being in atmospheric pressure state；Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according to the temperature information in air chamber, heat to be provided to air chamber.Parts can be dried simultaneously under vacuum for the device and pre-passivating is handled; so that component surface generates stabilized protection course; the pollution of parts other elements such as carbon, hydrogen, oxygen in follow-up assembling, use is prevented, improves the resistance to corrosion and reliability of parts.
Description
Technical field
The utility model belongs to parts process field, relates more specifically to a kind of drying and pre-passivating device.
Background technology
Excimer laser is the important laser device of ultraviolet band, by being excited the molecule of mixed gas formation to ground state
Transition produces laser, and it is usually to be made up of inert gas and halogen gas to be excited mixed gas, such as argon gas (Ar) and fluorine gas (F2)、
Krypton (Kr) and fluorine gas, xenon (Xe) and chlorine (Cl2) etc..The discharge cavity of excimer laser provides sky for gas discharge
Between, discharge cavity is made up of a variety of parts, such as electrode, cavity wall, blower fan, flow-guiding structure, radiator, contains metal, pottery
The multiple materials such as porcelain, rubber, and the halogenic medium such as fluorine, chlorine all has extremely strong corrosivity to most of materials, can to discharge
The parts of intracavitary consume halogenic medium and corroded in use, noxious products are generated, so as to reduce the defeated of laser
Go out energy and stability, limit the performance and application of excimer laser.
In order to reduce the degree for being introduced into, reducing corrosion reaction in excimer laser running of harmful components, electric discharge
Each parts need to carry out ultrasonic wave cleaning, drying process before assembly in chamber, need to be passivated processing after assembling.Ultrasonic wave
Cleaning treatment is straight to liquid and dirt using ultrasonic wave cavitation in a liquid, acceleration effect and straight/stream effect
Connect, indirectly act on, crud layer is disperseed, emulsified, is peeled off, reach the attachment for removing component surface and oxidation of coal reaction
The purpose of layer；Drying process is to thoroughly remove the moisture of component surface and inside；Passivation Treatment after assembling is accurate point
Important process step before sub- laser discharge cavity operation, can mitigate each parts of discharge cavity in laser running
Corrosion reaction.By being passed through rare gas and halogen gas and mixed gas in discharge cavity, and the electric discharge of certain frequency is aided in,
The surface mass of each parts will fully react with halogenic medium, so as to eliminate the pollutant of component surface, generate stabilization
Halide protective layer.
However, after ultrasonic wave cleans and removes oxidation of coal conversion zone, each parts are in processes such as drying, assemblings and among it
Transfer process can be exposed in atmospheric environment, and oxidation of coal reaction inevitably will occur again for its surface.Research shows, golden
Category material, which directly contacts halogenic medium, can generate halogenation layer, and conversion zone is basicly stable after exposing in an atmosphere, but if
After the material surfaces such as Al, Cu have oxidation of coal conversion zone, the environment containing halogenic medium is entered back into, it is anti-that oxycarbide will suppress halogenation
The progress answered, each component surface layer will (be probably one or more of, also may be used by halide and oxycarbide after Passivation Treatment
Can hydrocarbon oxygen and halogen existing compound jointly) collectively constitute.Under the conditions of this, this each zero in laser running
Parts surface layer slowly can still react with halogenic medium, further consume halogenic medium and generate pernicious gas.And due to
HF, O of 10ppm magnitudes2、CF4It can significantly affect the power output of laser Deng gas, therefore this each component surface layer
In the presence of by as the major issue of influence laser output energy.
Utility model content
Based on problem above, main purpose of the present utility model is to propose a kind of drying and pre-passivating device, for solving
Certainly at least one of above technical problem.
To achieve these goals, as one side of the present utility model, dried the utility model proposes one kind and pre-
Passivating device, including air chamber and the master control unit, vacuum unit and the passivation gas control unit that are connected respectively with air chamber, its
In：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for suck/discharge air, air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for when air chamber is in vacuum state, injecting passivation gas into air chamber with to zero
Part carries out pre-passivating, is additionally operable to after the completion of pre-passivating, air chamber discharges passivation gas when being in atmospheric pressure state；
Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according in air chamber
Temperature information, heat is provided to air chamber.
In some embodiments of the utility model, the needs held in above-mentioned air chamber are dried and the parts of pre-passivating are
Parts in discharge cavity.
In some embodiments of the utility model, above-mentioned passivation gas is the gaseous mixture of inert gas and halogen gas
Body.
In some embodiments of the utility model, above-mentioned master control unit includes temperature sensor, signal transacting and control
Device and heating element heater processed, wherein：
Temperature sensor, for detecting the temperature information in air chamber, and the temperature information that detection is obtained is transmitted to signal
Processing and control device；
Signal transacting and control device, are connected with heating element heater, for according to temperature information, sending and controlling to heating element heater
Signal makes the temperature in air chamber constant to provide heat to air chamber.
In some embodiments of the utility model, above-mentioned vacuum unit includes：
Vacuumize device, for suck/discharge air, change the air chamber and be in vacuum/atmospheric pressure state；
Vacuum detecting device, for monitoring the vacuum of air chamber in real time；
In some embodiments of the utility model, the above-mentioned device that vacuumizes includes vavuum pump or vacuum valve.
In some embodiments of the utility model, above-mentioned passivation gas control unit includes：
Intake valve, for when air chamber is in vacuum state, passivation gas to be injected into air chamber；
Air bleeding valve, for after the completion of pre-passivating, air chamber to discharge passivation gas when being in atmospheric pressure state.
In some embodiments of the utility model, above-mentioned master control unit includes gas circulation device, for homogenizing gas
Gas and temperature in room；When passivation gas is injected in air chamber to parts progress pre-passivating, the temperature range in air chamber is
100 DEG C~150 DEG C.
In some embodiments of the utility model, above-mentioned drying and pre-passivating device also include the sample in air chamber
Platform, sample platform bracket and the moving guide rail embedded in gas chamber outer wall, sample stage are placed on moving guide rail by sample platform bracket.
In some embodiments of the utility model, above-mentioned sample stage is net structure, and net structure includes mesh-density
Unequal some unit
In some embodiments of the utility model, the madial wall of above-mentioned air chamber includes insulation and anticorrosive coat, for preventing
Corrosion of the lost and passivation gas of heat to the gas chamber sidewall；The side wall of air chamber is provided with a hermatic door, passes through hermatic door
Placement/taking-up parts.
The utility model proposes drying and pre-passivating device, have the advantages that：
1st, using the utility model proposes drying and pre-passivating device parts can be dried under vacuum
With pre-passivating processing so that component surface generate protective layer, prevent parts following process and using process by carbon, hydrogen,
Oxygen and other element pollutions, so as to improve the resistance to corrosion of parts and reliability, the service life of elongated component；
2nd, the parts in excimer laser discharge cavity are handled using dry and pre-passivating device so that zero
Part surface forms halogenation layer, this halogenation layer basicly stable after air, therefore can effectively avoid it is generally right
During the processing of parts, oxidation of coal reaction occurs when parts are exposed to air during assembling process and its intermediate transfer；From
And the introducing of parts harmful constituent such as carbon, hydrogen, oxygen in assembling and the course of work in excimer laser discharge cavity can be reduced,
Ensure the stable halogen passivation protection layer of the surface energy generation of each parts in discharge cavity；
3rd, the drying due to proposition and pre-passivating device carry out pre-passivating to the parts in excimer laser discharge cavity
And drying process, i.e., the drying of parts and pre-passivating processing carry out simultaneously, therefore can avoid parts in the drying process with
The contact of air, so as to further avoid that oxidation of coal reaction occurs when parts are exposed to air during dry heat；And
When being passivated processing due to the parts in discharge cavity, pre-passivating processing has been carried out in parts, therefore can reduce
The time of Passivation Treatment before laser operation, it is favorably improved the efficiency of assembling of equipment；
4th, because the device is configured with gas circulation device, and it is permanent with the temperature during pre-passivating in air chamber drying
It is fixed, therefore can ensure that all parts can quickly and sufficiently complete pre-passivating processing, the pre-passivating layer of pre-passivating generation
Composition, structure, thickness etc. are identical；
5th, the utility model proposes device, available for processing any need be dried and/or pre-passivating processing zero
Part.
Brief description of the drawings
Fig. 1 is the structural representation of the drying that the embodiment of the utility model one proposes and pre-passivating device；
Fig. 2 is the structural representation of sample stage in the drying that the embodiment of the utility model one proposes and pre-passivating device；
Fig. 3, which is the embodiment of the utility model one, parts to be dried using Fig. 1 drying and pre-passivating device and in advance
The operational flowchart of Passivation Treatment；
Fig. 4, which is the embodiment of the utility model one, parts to be dried using Fig. 1 drying and pre-passivating device and in advance
The detail flowchart of Passivation Treatment.
Embodiment
For the purpose of this utility model, technical scheme and advantage is more clearly understood, below in conjunction with specific embodiment, and
Referring to the drawings, the utility model is described in further detail.
The utility model discloses a kind of drying and pre-passivating device, including air chamber and the master control that is connected respectively with air chamber
Unit, vacuum unit and passivation gas control unit, wherein：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for suck/discharge air, air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for when air chamber is in vacuum state, injecting passivation gas into air chamber with to zero
Part carries out pre-passivating, is additionally operable to after the completion of pre-passivating, air chamber discharges passivation gas when being in atmospheric pressure state；
Master control unit, when passivation gas is injected in air chamber to parts progress pre-passivating, for according in air chamber
Temperature information, heat is provided to air chamber.
Parts are dried simultaneously under vacuum using above-mentioned drying and pre-passivating device and pre-passivating is handled,
So that the protective layer that component surface generation is stable, prevent parts during follow-up assembling, use carbon, hydrogen, oxygen etc. other
The pollution of element, so as to elongated component service life, improve parts resistance to corrosion and；
In some embodiments of the utility model, it is intended to a kind of drying and pre-passivating device are proposed, to solve ultrasonic wave
After washing, each parts are in dry heat process, assembling process and its intermediate transfer process in the discharge cavity of excimer laser
Middle exposure in an atmosphere when, again occur oxidation of coal reaction so that complete excimer laser operation before Passivation Treatment after,
Each component surface layer still comprising harmful constituents such as carbon, hydrogen, oxygen, so as to reach expected passivation effect, significantly affects accurate point
The problem of sub- laser output power.
Therefore, after each parts in the discharge cavity of excimer laser being carried out into ultrasonic wave cleaning, use is disclosed above
Drying and pre-passivating device be dried and pre-passivating processing.Passivation gas therein is using inert gas and halogen gas
Mixed gas, so that the component surface in discharge cavity forms halogenation layer.Due to being added under vacuum to putting
The pre-passivating processing of each parts in electric chamber so that component surface can generate halogenation layer, and this halogenation layer is sudden and violent
It is exposed to basicly stable after air；And pre-passivating process is carried out with drying process simultaneously, therefore can effectively avoid generally to parts
Processing when, oxidation of coal occurs when parts are exposed to air during dry heat process, assembling process and its intermediate transfer
Reaction, so as to reduce the introducing of the harmful constituent such as carbon, hydrogen, oxygen during excimer laser lasing, and it can ensure to discharge
Each parts are in follow-up Passivation Treatment in chamber, the stable halogen passivation protection layer of surface energy generation.
Using above-mentioned drying and pre-passivating device, parts in discharge cavity are dried and pre-passivating, including it is following
Step：
Step 1, the parts after ultrasonic wave cleans are placed into air chamber；
Step 2, using vacuum unit air chamber is vacuumized, air chamber is in vacuum state；
Step 3, passivation gas control unit is used to inject passivation gas into air chamber to carry out pre-passivating to parts, together
When master control unit to injection passivation gas after air chamber provide heat；
Step 4, after a period of time, master control unit stop to air chamber provide heat, treat that the temperature in air chamber is down to room temperature
Afterwards, passivation gas control unit discharges the passivation gas in air chamber, completes drying and the pre-passivating of parts.
In some embodiments of the utility model, above-mentioned steps 4 are specially：Master control unit stops after reaction a period of time
Heat only is provided to air chamber, when air chamber temperature is down near room temperature, the halogen in air chamber is discharged by passivation gas control unit
Plain gas, avoid halogen gas from directly arranging and damaged to air；Then air is filled with extremely into air chamber by vacuum extractor
Closed after normal pressure；Closed after discharging gas to the vacuum state in now air chamber again by passivation gas control unit.Repeatedly
Repetition aforesaid operations, about repeatedly 3~5 times, so as to ensure that halogen gas is no longer included in air chamber
In some embodiments of the utility model, above-mentioned master control unit includes temperature sensor, signal transacting and control
Device and heating element heater processed, wherein：
Temperature sensor, for detecting the temperature information in air chamber, and the temperature information that detection is obtained is transmitted to signal
Processing and control device；
Signal transacting and control device, are connected with heating element heater, for according to temperature information, sending and controlling to heating element heater
Signal makes the temperature in air chamber constant to provide heat to air chamber.
Due to the drying using the present embodiment and pre-passivating device, during pre-passivating, the temperature in air chamber is constant, because
This can ensure in air chamber that all parts can quickly and sufficiently complete pre-passivating processing, thus can ensure parts with it is blunt
When changing gas reaction, course of reaction fully and stably so that the protective layer that component surface generation is uniform and stable.
In some embodiments of the utility model, above-mentioned vacuum unit includes：
Vacuumize device, for suck/discharge air, change the air chamber and be in vacuum/atmospheric pressure state；
Vacuum detecting device, for monitoring the vacuum of air chamber in real time；
The device therein that vacuumizes includes vavuum pump or vacuum valve etc..
In vacuum is carried out to air chamber, according to the vacuum of the air chamber monitored in real time, decide whether that completion is taken out very
Sky, generally, the vacuum in air chamber should ensure that the preset value less than 100Pa, so as to avoid parts during pre-passivating
Contact with air.
In some embodiments of the utility model, above-mentioned passivation gas control unit of stating includes：
Intake valve, for when air chamber is in vacuum state, passivation gas to be injected into air chamber；
Air bleeding valve, for after the completion of pre-passivating, air chamber to discharge passivation gas when being in atmospheric pressure state.
In some embodiments of the utility model, above-mentioned passivation gas is the gaseous mixture of inert gas and halogen gas
Body.
In some embodiments of the utility model, when passivation gas is injected in air chamber to parts progress pre-passivating,
Temperature range in air chamber is 100 DEG C~150 DEG C.
In some embodiments of the utility model, above-mentioned master control unit also includes gas circulation unit, for homogenizing
Gas and temperature in the air chamber.
After homogenizing gas and temperature in air chamber, the passivation gas in air chamber can be made to keep certain uniformity, from
And the uniform progress of pre-passivating process and drying process can be ensured so that the halogenation layer uniformity of generation is high, and parts fill
Divide drying.
In some embodiments of the utility model, above-mentioned drying and pre-passivating device also include the sample in air chamber
Platform, sample platform bracket and the moving guide rail embedded in gas chamber outer wall, the sample stage are placed on moving guide rail by sample platform bracket.Its
In, sample stage can be moved by the control of master control unit on moving guide rail, to facilitate to be dried and pre-passivating parts
Placement and taking-up.
In some embodiments of the utility model, above-mentioned sample stage is net structure, the sample stage bag of the net structure
Include the unequal some units of mesh-density.
Why it is net structure, is the contact in order to increase passivation gas with parts ground, avoids local pre-passivating
The defects of insufficient；And due to including the unequal some units of mesh-density, therefore the different parts of size can be placed sample
On the unit of the different mesh-densities of sample platform, to cause the drying of the present embodiment and pre-passivating device to can be applied to various sizes
The drying of parts and pre-passivating.Wherein, sample stage can be arranged to phase according to that need to dry and the size of the parts of pre-passivating
Some units matched somebody with somebody, or it is replaced by the sample stage to match.
In some embodiments of the utility model, the madial wall of above-mentioned air chamber includes insulation and anticorrosive coat, for preventing
Corrosion of the lost and passivation gas of heat to gas chamber sidewall.
In some embodiments of the utility model, the side wall of above-mentioned air chamber is provided with a hermatic door, is put by hermatic door
Put/take out parts.
In some embodiments of the utility model, in vacuum unit and passivation gas control unit it is various enter outlet
Guan Jun uses the material of halogen resistant corrosion, is dried and the service life of pre-passivating device so as to extend, during avoiding pre-passivating
The introducing of other materials.
In some embodiments of the utility model, master control unit is embedded in the lateral wall of air chamber, and is communicated with air chamber；Take out
Various air valves and tracheae in vacuum unit, passivation gas control unit communicate with air chamber, to realize gas house vacuum/normal pressure shape
The change of state, injection/discharge of passivation gas.
Metal shell is installed in some embodiments of the utility model, outside whole drying and pre-passivating device to be fixed
And protection.
It should be noted that dry and pre-passivating device and method disclosed in the utility model can be used for doing any need
The parts of dry and/or pre-passivating processing, are dried and/or pre-passivating.
Below by taking the parts in ArF excimer laser discharge cavities as an example, in conjunction with the drawings and the specific embodiments, to this reality
It is further described in detail with the drying and pre-passivating device of new proposition.
Embodiment
The present embodiment proposes a kind of drying and pre-passivating device, for zero in ArF excimer laser discharge cavities
Part is dried and pre-passivating.
As shown in figure 1, wherein dry and pre-passivating device includes air chamber 1, vacuum unit 2, passivation gas control unit
3rd, master control unit 4, sample stage 5, sample platform bracket 6, moving guide rail 7, hermatic door 8 and metal shell 9；
The madial wall of wherein air chamber 1 has insulation antiseptic layer 11, to prevent corrosion and heat of the halogenic medium to air chamber wall
Scatter and disappear.
Vacuum unit includes air valve 21, air hose 22 and vacuum inspective meter 23, passivation gas control unit 3 include into
Air valve 31, air inlet pipe 32, air bleeding valve 33 and blast pipe 34；Air hose 22, air inlet pipe 32 and blast pipe 34 are rotten using halogen resistant
The material polytetrafluoroethylene (PTFE) of erosion.Air hose 22 injects empty when air valve 21 is opened and is in injection gaseous state into air chamber 1
Gas；When air valve 21 is opened and is in discharge gaseous state, the air extracted from air chamber 1 is discharged.Air inlet pipe 32 is in intake valve
During 31 opening, passivation gas is injected into air chamber 1；Blast pipe 34 when air bleeding valve 33 is opened, discharge extracted from air chamber 1 it is blunt
Change gas.Air valve 21, intake valve 31 and air bleeding valve 33 are used to realize reaction different phase to pre-passivating, vacuum in air chamber 1 and broken
The requirement of vacuum.
Master control unit 4 includes temperature sensor 41, signal transacting and control device 42, heating element heater 43 and gas circulation
Device 44.Temperature sensor 41 is used for the temperature for detecting air chamber 1, and testing result is output into signal transacting and control unit
42, to control heating element heater 43 to provide heat into air chamber 1, so as to realize the control of temperature in air chamber 1, the temperature control of air chamber 1
System is in the range of 100 DEG C~110 DEG C；Gas circulation device 44 is used to realize temperature and the homogenization of gas content in air chamber 1.
Wherein, sample stage 5 is net structure, as shown in Fig. 2 the subelement with two kinds of different void levels, space are close
The larger parts of electrode in discharge cavity, cavity wall, deflector equidimension, the big portion of void level can be placed by spending small part 51
Divide 52 can place the less parts of standard component equidimension.
Sample platform bracket 6 and the sample stage of net structure 5, can be real by moving guide rail 7 under the control of master control unit 4
Motion in present air chamber, so as to the parts of the front and rear discharge cavity of convenient handling reaction.
It is each to need dry and pre-passivating parts to be positioned over by hermatic door 8 on sample stage 5, to be dried and pretreatment
After the completion of, then taken away from sample stage 5 by hermatic door 8.
Wherein, passivation gas is the mixed gas of neon and fluorine gas, its form with the gas of excimer laser passivation into
Divide same or like with ratio.
Metal shell 9 is used to dry and pretreatment unit other components are fixed and protected.
The parts in discharge cavity are dried using above-mentioned drying and pre-passivating device and during pre-passivating, such as Fig. 3
Shown in~4, following steps are specifically included：
Step 1, the parts after ultrasonic wave cleans are placed into air chamber 1；
Specifically, open hermatic door 8, by the parts electrode of the discharge cavity after abundant ultrasonic wave water washing, ceramic deflector,
On the loadings such as standard component such as Fig. 1 sample stage 5, the wherein larger parts of electrode, deflector equidimension are placed on as shown in Figure 2
The small part 51 of void level on, less standard component of size etc. is placed on the big part 52 of void level.
Step 2, using vacuum unit 2 air chamber 1 is vacuumized, air chamber 1 is in vacuum state；
Specifically, hermatic door 8 is closed, air valve 21 is opened and is placed on discharge gaseous state, air chamber 1 is evacuated to and set
Closed after definite value 100Pa.
Step 3, passivation gas control unit 3 is used to inject passivation gas into air chamber 1 to carry out pre-passivating to parts,
Master control unit 4 provides heat to the air chamber 1 after injection passivation gas simultaneously, and controls the temperature in air chamber 1 in constant range
It is interior；
Specifically, intake valve 31 is opened, Ne and F are filled with into air chamber 1 by air inlet pipe 322Mixed gas, in air chamber 1
The middle passivation atmosphere for forming setting, starts heating element heater 43, is adjusted by temperature sensor 41 and signal transacting with control device 42
The temperature of solar term room 1 is constant in the range of 100 DEG C~110 DEG C, is distributed by the guarantee temperature of gas circulation device 44 and gas
Uniformity.
Step 4, after a period of time, master control unit 4 stop to air chamber 1 provide heat, treat that the temperature in air chamber 1 is down to room
Wen Hou, passivation gas control unit 3 discharge the passivation gas in air chamber；
Heating element heater 43 is closed after reacting a period of time, treats that the temperature of air chamber 1 is down near room temperature and opens air bleeding valve 33, passes through
Blast pipe 34 is extracted the passivation gas in air chamber 1 out and handled, and avoids halogen gas from directly arranging and is damaged to air, then
Open air valve 21 and be placed on injection gaseous state, closed after being filled with air to normal pressure into air chamber 1 by air hose 22；Again
Secondary opening air bleeding valve 33 is closed after extracting gas to the vacuum state in now air chamber 1 out.Aforesaid operations are repeated several times, about repeat
After 3~5 times, ensure no longer to include halogen gas in air chamber 1
Step 5, parts are taken out, complete drying and the pre-passivating of parts.
Specifically, when air chamber 1 recovers atmospheric pressure state, opening carries hermatic door 8, takes out the parts for completing pre-passivating.
The parts for completing pre-passivating can mount to discharge cavity and be assembled, for follow-up blunt of excimer laser
Change processing and operation.
It should be noted that the position of each part is not limited in the drying of the present embodiment proposition and pre-passivating device
Position as shown in Figure 1, each part, which can be placed in, can guarantee that any position for realizing its function.
Particular embodiments described above, the purpose of this utility model, technical scheme and beneficial effect are carried out to enter one
Step describes in detail, it should be understood that the foregoing is only specific embodiment of the utility model, is not limited to this reality
It is all within the spirit and principles of the utility model with new, any modification, equivalent substitution and improvements done etc., it all should include
Within the scope of protection of the utility model.
Claims (10)
1. a kind of drying and pre-passivating device, including air chamber and be connected respectively with the air chamber master control unit, vacuumize list
Member and passivation gas control unit, wherein：
Air chamber, the parts of dry and pre-passivating are needed for holding；
Vacuum unit, for suck/discharge air, the air chamber is in vacuum/atmospheric pressure state；
Passivation gas control unit, for when the air chamber is in vacuum state, injected into the air chamber passivation gas with
Pre-passivating is carried out to parts, is additionally operable to after the completion of pre-passivating, by the passivation gas when air chamber is in atmospheric pressure state
Discharge；
Master control unit, when passivation gas is injected in the air chamber to parts progress pre-passivating, for according to the air chamber
Interior temperature information, heat is provided to the air chamber.
2. drying as claimed in claim 1 and pre-passivating device, wherein, the needs drying held in the air chamber and pre-passivating
Parts be discharge cavity in parts.
3. drying as claimed in claim 2 and pre-passivating device, wherein, the passivation gas is inert gas and halogen gas
Mixed gas.
4. drying as claimed in claim 1 and pre-passivating device, wherein, the master control unit includes temperature sensor, letter
Number processing and control device and heating element heater, wherein：
Temperature sensor, for detecting the temperature information in the air chamber, and will detect the obtained temperature information transmit to
Signal transacting and control device；
Signal transacting and control device, it is connected with the heating element heater, for according to the temperature information, to the heating element heater
Control signal is sent to provide heat to the air chamber, so that the temperature in the air chamber is constant.
5. drying as claimed in claim 1 and pre-passivating device, wherein, the vacuum unit includes：
Vacuumize device, for suck/discharge air, change the air chamber and be in vacuum/atmospheric pressure state；
Vacuum detecting device, for monitoring the vacuum of the air chamber in real time；
The device that vacuumizes includes vavuum pump or vacuum valve.
6. drying as claimed in claim 1 and pre-passivating device, wherein, the passivation gas control unit includes：
Intake valve, for when the air chamber is in vacuum state, injecting passivation gas into the air chamber；
Air bleeding valve, for after the completion of pre-passivating, the air chamber to discharge the passivation gas when being in atmospheric pressure state.
7. drying as claimed in claim 1 and pre-passivating device, wherein, the master control unit includes gas circulation device,
For homogenizing gas and temperature in the air chamber；When passivation gas is injected in the air chamber to parts progress pre-passivating,
Temperature range in the air chamber is 100 DEG C~150 DEG C.
8. drying as claimed in claim 1 and pre-passivating device, wherein, the drying and pre-passivating device also include being located at gas
Sample stage, sample platform bracket in room and the moving guide rail embedded in the gas chamber outer wall, the sample stage pass through sample platform bracket
It is placed on the moving guide rail.
9. drying as claimed in claim 8 and pre-passivating device, wherein, the sample stage is net structure, the net knot
Structure includes the unequal some units of mesh-density.
10. drying as claimed in claim 1 and pre-passivating device, wherein, the madial wall of the air chamber includes insulation and anti-corrosion
Layer, for preventing corrosion of the lost and described passivation gas of heat to the gas chamber sidewall；The side wall of the air chamber is provided with
One hermatic door, placed by the hermatic door/take out parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720581572.2U CN206902221U (en) | 2017-05-23 | 2017-05-23 | Dry and pre-passivating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720581572.2U CN206902221U (en) | 2017-05-23 | 2017-05-23 | Dry and pre-passivating device |
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| CN206902221U true CN206902221U (en) | 2018-01-19 |
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| CN201720581572.2U Expired - Fee Related CN206902221U (en) | 2017-05-23 | 2017-05-23 | Dry and pre-passivating device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107287553A (en) * | 2017-05-23 | 2017-10-24 | 中国科学院光电研究院 | Dry and pre-passivating device and method |
| CN108414612A (en) * | 2018-01-25 | 2018-08-17 | 中国科学院光电研究院 | A kind of detection method and module of excimer laser discharge cavity gas |
-
2017
- 2017-05-23 CN CN201720581572.2U patent/CN206902221U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107287553A (en) * | 2017-05-23 | 2017-10-24 | 中国科学院光电研究院 | Dry and pre-passivating device and method |
| CN107287553B (en) * | 2017-05-23 | 2024-02-06 | 中国科学院微电子研究所 | Drying and pre-passivating device and method |
| CN108414612A (en) * | 2018-01-25 | 2018-08-17 | 中国科学院光电研究院 | A kind of detection method and module of excimer laser discharge cavity gas |
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