CN107226452B - 共面键合结构及其制备方法 - Google Patents
共面键合结构及其制备方法 Download PDFInfo
- Publication number
- CN107226452B CN107226452B CN201710371231.7A CN201710371231A CN107226452B CN 107226452 B CN107226452 B CN 107226452B CN 201710371231 A CN201710371231 A CN 201710371231A CN 107226452 B CN107226452 B CN 107226452B
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- Prior art keywords
- metal layer
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- functional
- electrode lead
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- 238000002360 preparation method Methods 0.000 title abstract description 14
- 229910052751 metal Inorganic materials 0.000 claims abstract description 327
- 239000002184 metal Substances 0.000 claims abstract description 327
- 238000000034 method Methods 0.000 claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 claims abstract description 19
- 230000008569 process Effects 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims description 89
- 238000005530 etching Methods 0.000 claims description 65
- 238000000151 deposition Methods 0.000 claims description 59
- 238000009413 insulation Methods 0.000 abstract description 9
- 230000002459 sustained effect Effects 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 238000004806 packaging method and process Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000005496 eutectics Effects 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012536 packaging technology Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Wire Bonding (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710371231.7A CN107226452B (zh) | 2017-05-24 | 2017-05-24 | 共面键合结构及其制备方法 |
Applications Claiming Priority (1)
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CN201710371231.7A CN107226452B (zh) | 2017-05-24 | 2017-05-24 | 共面键合结构及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN107226452A CN107226452A (zh) | 2017-10-03 |
CN107226452B true CN107226452B (zh) | 2019-05-31 |
Family
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Family Applications (1)
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CN201710371231.7A Active CN107226452B (zh) | 2017-05-24 | 2017-05-24 | 共面键合结构及其制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN107226452B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111413560B (zh) * | 2020-03-10 | 2022-06-10 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 圆片键合质量可靠性测试结构及可靠性测试方法 |
CN113023660B (zh) * | 2021-03-26 | 2023-06-23 | 华南农业大学 | 单板双侧布线式微机械结构及其制备方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040097078A1 (en) * | 2002-11-19 | 2004-05-20 | International Business Machines Corporation | Thin film transfer join process and multilevel thin film module |
CN101476941A (zh) * | 2008-11-04 | 2009-07-08 | 中国科学院上海微系统与信息技术研究所 | 集成微机械热电堆红外探测系统及其制作方法 |
CN103922273A (zh) * | 2014-04-30 | 2014-07-16 | 安徽北方芯动联科微系统技术有限公司 | 叠层组合式mems芯片的制造方法及其叠层组合式mems芯片 |
US9250074B1 (en) * | 2013-04-12 | 2016-02-02 | Hrl Laboratories, Llc | Resonator assembly comprising a silicon resonator and a quartz resonator |
CN106133897A (zh) * | 2014-02-14 | 2016-11-16 | 高通股份有限公司 | 包括重分布层上的堆叠管芯的集成器件 |
CN106241726A (zh) * | 2015-06-12 | 2016-12-21 | 台湾积体电路制造股份有限公司 | Mems封装技术 |
CN106558577A (zh) * | 2015-09-30 | 2017-04-05 | 台湾积体电路制造股份有限公司 | 三维集成电路结构 |
-
2017
- 2017-05-24 CN CN201710371231.7A patent/CN107226452B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040097078A1 (en) * | 2002-11-19 | 2004-05-20 | International Business Machines Corporation | Thin film transfer join process and multilevel thin film module |
CN101476941A (zh) * | 2008-11-04 | 2009-07-08 | 中国科学院上海微系统与信息技术研究所 | 集成微机械热电堆红外探测系统及其制作方法 |
US9250074B1 (en) * | 2013-04-12 | 2016-02-02 | Hrl Laboratories, Llc | Resonator assembly comprising a silicon resonator and a quartz resonator |
CN106133897A (zh) * | 2014-02-14 | 2016-11-16 | 高通股份有限公司 | 包括重分布层上的堆叠管芯的集成器件 |
CN103922273A (zh) * | 2014-04-30 | 2014-07-16 | 安徽北方芯动联科微系统技术有限公司 | 叠层组合式mems芯片的制造方法及其叠层组合式mems芯片 |
CN106241726A (zh) * | 2015-06-12 | 2016-12-21 | 台湾积体电路制造股份有限公司 | Mems封装技术 |
CN106558577A (zh) * | 2015-09-30 | 2017-04-05 | 台湾积体电路制造股份有限公司 | 三维集成电路结构 |
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Publication number | Publication date |
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CN107226452A (zh) | 2017-10-03 |
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PB01 | Publication | ||
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GR01 | Patent grant | ||
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TR01 | Transfer of patent right |
Effective date of registration: 20201026 Address after: Room 2362, building 1392, Zhuyuan Road, Jiading, Shanghai Patentee after: SHANGHAI YEYING ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 200050 Changning Road, Shanghai, No. 865, No. Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 201800 room 236, 2 / F, building 2, 1399 Shengzhu Road, Juyuan New District, Jiading District, Shanghai Patentee after: Shanghai Yeying Microelectronics Technology Co.,Ltd. Address before: 201800 room 236, 2 / F, building 2, 1399 Shengzhu Road, Juyuan New District, Jiading District, Shanghai Patentee before: SHANGHAI YEYING ELECTRONIC TECHNOLOGY Co.,Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Coplanar bonding structures and their preparation methods Effective date of registration: 20230317 Granted publication date: 20190531 Pledgee: Industrial Bank Co.,Ltd. Shanghai Putuo sub branch Pledgor: Shanghai Yeying Microelectronics Technology Co.,Ltd. Registration number: Y2023310000070 |