CN107003335B - 接触测试装置 - Google Patents

接触测试装置 Download PDF

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Publication number
CN107003335B
CN107003335B CN201580060261.5A CN201580060261A CN107003335B CN 107003335 B CN107003335 B CN 107003335B CN 201580060261 A CN201580060261 A CN 201580060261A CN 107003335 B CN107003335 B CN 107003335B
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China
Prior art keywords
probe
hole
guide plate
holes
probes
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CN201580060261.5A
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Chinese (zh)
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CN107003335A (zh
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金日
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Individual
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Individual
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Priority claimed from KR1020150000357A external-priority patent/KR20160084014A/ko
Priority claimed from KR1020150003880A external-priority patent/KR101613810B1/ko
Priority claimed from KR1020150011727A external-priority patent/KR101662937B1/ko
Application filed by Individual filed Critical Individual
Publication of CN107003335A publication Critical patent/CN107003335A/zh
Application granted granted Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
CN201580060261.5A 2015-01-04 2015-12-24 接触测试装置 Active CN107003335B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
KR1020150000357A KR20160084014A (ko) 2015-01-04 2015-01-04 검사접촉장치
KR10-2015-0000357 2015-01-04
KR10-2015-0003880 2015-01-11
KR1020150003880A KR101613810B1 (ko) 2015-01-11 2015-01-11 검사접촉장치
KR1020150011727A KR101662937B1 (ko) 2015-01-25 2015-01-25 공간변형기능을 가진 검사접촉장치
KR10-2015-0011727 2015-01-25
PCT/KR2015/014262 WO2016108520A1 (fr) 2015-01-04 2015-12-24 Dispositif d'inspection de contact

Publications (2)

Publication Number Publication Date
CN107003335A CN107003335A (zh) 2017-08-01
CN107003335B true CN107003335B (zh) 2020-05-22

Family

ID=56284599

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580060261.5A Active CN107003335B (zh) 2015-01-04 2015-12-24 接触测试装置

Country Status (4)

Country Link
JP (1) JP6619014B2 (fr)
CN (1) CN107003335B (fr)
TW (1) TWI585416B (fr)
WO (1) WO2016108520A1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6855185B2 (ja) * 2016-07-27 2021-04-07 株式会社日本マイクロニクス 電気的接続装置
JP2018179721A (ja) * 2017-04-12 2018-11-15 株式会社日本マイクロニクス 電気的接続装置
TWI775836B (zh) * 2017-04-27 2022-09-01 日商日本電產理德股份有限公司 檢查治具以及基板檢查裝置
TWI620938B (zh) * 2017-07-21 2018-04-11 中華精測科技股份有限公司 探針裝置
CN110568231A (zh) * 2018-06-06 2019-12-13 中华精测科技股份有限公司 探针卡装置及其立体式信号转接结构
TWI695173B (zh) * 2018-07-04 2020-06-01 旺矽科技股份有限公司 具有線型探針之探針頭
IT201800010071A1 (it) * 2018-11-06 2020-05-06 Technoprobe Spa Testa di misura a sonde verticali con migliorate proprietà di contatto con un dispositivo di test
IT201800021253A1 (it) * 2018-12-27 2020-06-27 Technoprobe Spa Testa di misura a sonde verticali avente un contatto perfezionato con un dispositivo da testare
KR102329790B1 (ko) * 2019-12-26 2021-11-23 주식회사 에스디에이 가변형 mems 프로브 카드 및 이의 조립방법
TWI712802B (zh) * 2020-01-21 2020-12-11 中華精測科技股份有限公司 探針卡裝置及其類頸式探針
KR20210121553A (ko) * 2020-03-30 2021-10-08 (주)포인트엔지니어링 프로브 헤드 및 이를 포함하는 프로브 카드
CN111351970B (zh) * 2020-05-08 2022-05-10 沈阳圣仁电子科技有限公司 一种使多个探针具有均匀弹性的垂直探针卡
CN113707366B (zh) * 2020-05-20 2024-03-19 汉辰科技股份有限公司 馈通装置
US11493536B2 (en) * 2020-05-26 2022-11-08 Mpi Corporation Probe head with linear probe
JP7516962B2 (ja) 2020-07-31 2024-07-17 ニデックアドバンステクノロジー株式会社 検査治具、及び検査装置
JP7477393B2 (ja) * 2020-08-03 2024-05-01 株式会社日本マイクロニクス 検査用接続装置
CN113030700B (zh) * 2021-03-04 2022-03-08 强一半导体（苏州）有限公司 一种晶圆级测试探针卡及晶圆级测试探针卡装配方法
EP4261547A1 (fr) * 2022-04-12 2023-10-18 Microtest S.p.A. Tête de test avec des sondes verticales pour une carte de test et procédé d'assemblage correspondant

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4837507A (en) * 1984-06-08 1989-06-06 American Telephone And Telegraph Company At&T Technologies, Inc. High frequency in-circuit test fixture
JP2004347427A (ja) * 2003-05-21 2004-12-09 Innotech Corp プローブカード装置及びその製造方法
CN1580787A (zh) * 2003-08-06 2005-02-16 株式会社东京阴极研究所 平板显示器检查用探针装置
EP1512977A2 (fr) * 1996-10-29 2005-03-09 Agilent Technologies Inc. (a Delaware Corporation) Dispositif de test de circuits imprimés avec guidage des pointes de test
CN1681101A (zh) * 2004-04-09 2005-10-12 矽统科技股份有限公司 测试装置的探测头
KR20080100601A (ko) * 2007-05-14 2008-11-19 정영석 반도체 소자 테스트용 프로브 카드
CN101609105A (zh) * 2008-06-20 2009-12-23 东京毅力科创株式会社 探针装置
JP2010281583A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp 検査用治具
EP2511710B1 (fr) * 2011-04-12 2013-11-13 Technoprobe S.p.A Tête de test pour équipement de test de dispositifs électroniques

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622514A (en) * 1984-06-15 1986-11-11 Ibm Multiple mode buckling beam probe assembly
US4963822A (en) * 1988-06-01 1990-10-16 Manfred Prokopp Method of testing circuit boards and the like
DE3909284A1 (de) * 1989-03-21 1990-09-27 Nixdorf Computer Ag Steckkontaktanordnung
JP2972595B2 (ja) * 1996-09-25 1999-11-08 日本電気ファクトリエンジニアリング株式会社 プローブカード
EP0915344B1 (fr) * 1997-11-05 2004-02-25 Feinmetall GmbH Tête de sonde pour microstructures avec interface
JP2002202337A (ja) * 2001-01-04 2002-07-19 Takashi Nansai ファインピッチ基板検査用治具
JP2005055368A (ja) * 2003-08-06 2005-03-03 Nidec-Read Corp 基板検査用治具及びこれを用いた基板検査装置
TW200636250A (en) * 2003-10-13 2006-10-16 Technoprobe Spa Contact probe for a testing head having vertical probes for semiconductor integrated electronic devices
DE102006005522A1 (de) * 2006-02-07 2007-08-16 Feinmetall Gmbh Elektrische Kontaktiervorrichtung sowie elektrisches Kontaktierverfahren
KR101306654B1 (ko) * 2006-12-11 2013-09-10 (주) 미코에스앤피 프로브 모듈 및 그 제조 방법, 상기 프로브 모듈을 갖는프로브 카드 및 그 제조 방법
JP4965341B2 (ja) * 2007-05-31 2012-07-04 日置電機株式会社 プローブユニットおよび回路基板検査装置
JP5323741B2 (ja) * 2010-02-19 2013-10-23 日置電機株式会社 プローブユニットおよび回路基板検査装置
JP5530312B2 (ja) * 2010-09-03 2014-06-25 株式会社エンプラス 電気部品用ソケット
KR101187421B1 (ko) * 2010-09-27 2012-10-02 주식회사 알에스에프 니들모듈 및 이를 포함하는 프로브카드
US8723538B2 (en) * 2011-06-17 2014-05-13 Taiwan Semiconductor Manufacturing Company, Ltd. Probe head formation methods employing guide plate raising assembly mechanism
KR101199016B1 (ko) * 2011-06-29 2012-11-08 주식회사 엔아이씨테크 엘이디 검사용 프로브 카드
KR101299715B1 (ko) * 2012-06-22 2013-08-28 디플러스(주) 양방향 좌굴핀을 이용한 검사용 소켓

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4837507A (en) * 1984-06-08 1989-06-06 American Telephone And Telegraph Company At&T Technologies, Inc. High frequency in-circuit test fixture
EP1512977A2 (fr) * 1996-10-29 2005-03-09 Agilent Technologies Inc. (a Delaware Corporation) Dispositif de test de circuits imprimés avec guidage des pointes de test
JP2004347427A (ja) * 2003-05-21 2004-12-09 Innotech Corp プローブカード装置及びその製造方法
CN1580787A (zh) * 2003-08-06 2005-02-16 株式会社东京阴极研究所 平板显示器检查用探针装置
CN1681101A (zh) * 2004-04-09 2005-10-12 矽统科技股份有限公司 测试装置的探测头
KR20080100601A (ko) * 2007-05-14 2008-11-19 정영석 반도체 소자 테스트용 프로브 카드
CN101609105A (zh) * 2008-06-20 2009-12-23 东京毅力科创株式会社 探针装置
JP2010281583A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp 検査用治具
EP2511710B1 (fr) * 2011-04-12 2013-11-13 Technoprobe S.p.A Tête de test pour équipement de test de dispositifs électroniques

Also Published As

Publication number Publication date
TWI585416B (zh) 2017-06-01
WO2016108520A1 (fr) 2016-07-07
JP2017533446A (ja) 2017-11-09
TW201629498A (zh) 2016-08-16
JP6619014B2 (ja) 2019-12-11
CN107003335A (zh) 2017-08-01

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