CN106908222A - A kind of measuring method and system of high accuracy microcobjective numerical aperture - Google Patents
A kind of measuring method and system of high accuracy microcobjective numerical aperture Download PDFInfo
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- CN106908222A CN106908222A CN201710152730.7A CN201710152730A CN106908222A CN 106908222 A CN106908222 A CN 106908222A CN 201710152730 A CN201710152730 A CN 201710152730A CN 106908222 A CN106908222 A CN 106908222A
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- microcobjective
- numerical aperture
- spr
- measuring method
- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Abstract
A kind of microcobjective numerical aperture measuring method and system based on total reflection, are related to optical field, more particularly to measure immersion and soak microcobjective numerical aperture admittedly.It is in order to solve to measure immersion at present and soak the problems such as microcobjective numerical aperture is cumbersome, and accuracy of measurement is not high enough admittedly.Methods described includes：Light beam is focused on standard sample of photo after microcobjective incidence is soaked from immersion or admittedly, and reflected light forms the collection of illustrative plates that arc is absorbed with total reflection on back focal plane, and it is circle that total reflection absorbs arc.By calculate on collection of illustrative plates be totally reflected absorb arc position and radius, it is measurable go out immersion or admittedly soak microcobjective numerical aperture.Described device sends light beam using lighting source, by immersion or soaks microcobjective admittedly and focuses on standard sample of photo, and reflected light is imaged on the detector by microcobjective outgoing, obtains the picture of back focal plane.The present invention can realize immersion or soak the high-acruracy survey of microcobjective numerical aperture admittedly by image detection and identification.
Description
Technical field
The present invention relates to optical technical field, more particularly to a kind of immersion or the measurement system of microcobjective numerical aperture is soaked admittedly
System and its measuring method.
Background technology
With the development and application of microtechnic, the application of microcobjective is more next extensively, and microcobjective numerical aperture
Accuracy of detection requirement more and more higher.
The numerical aperture for determining object lens at present is mainly and uses apertometer, is mainly seen using human eye during measurement
Examine, venter of relicle is tangent with observed round spot on regulation apertometer, then reads data.Whole operation process is all
It is that survey crew completes, comparatively the requirement to survey crew is higher, and the precision for measuring is also poor, particularly
, it is necessary to by attachment objective, operate complex, it is difficult to realize automatic detection during the object lens of measurement NA higher, to producing and make
With causing great inconvenience.
Surface plasma (Surface Plasmon, SP) is a kind of electricity propagated on metal with dielectric interface
Magnetic wave, when the component in direction of the k vector on parallel to interface of incident light is matched with the k vector of SP, occur surface etc. from
(Surface Plasmon Resonance, SPR) is resonated in daughter.SPR has Multiple Modulation pattern, when fixed incident light other
Parameter, only modulates the incident angle of incident light, then only could substantially swash when incidence angle is reached when SPR optimal excites angle
Send SPR.Because SPR is propagated in metal surface, therefore the SPR for inspiring is by Metal absorption and switchs to ohm heat, so that
The reflectance factor of reflected light reaches minimum under the angle.Excite (absorption) that can identify SPR by this characteristic is composed.It is micro-
Object lens are that a kind of conventional SPR excites work, when its numerical aperture excites angle more than SPR optimal, can be used for exciting
SPR.It is the image recognition of SPR absorption spectras by the back focal plane to microcobjective, the numerical aperture of microcobjective can be calculated.
This patent is measured based on this method to the numerical aperture of microcobjective, is realized to the automatic of microcobjective numerical aperture
Detection, reduces measurement request, improves certainty of measurement, and assessment is detected and used to the production of microcobjective both provides greatly
Facility.
The content of the invention
(1) technical problem to be solved
The numerical aperture for determining object lens at present is mainly artificial operand value apertometer, and the requirement to survey crew is higher,
And complex operation, precision are difficult to ensure that, to solve this problem, this patent proposes a kind of new numerical aperture measuring method.
(2) technical scheme
In order to solve the above-mentioned technical problem, the invention provides a kind of on-mechanical of high-precision microcobjective numerical aperture
Formula detecting system, it is characterised in that including：
Lighting source, spectroscope, microcobjective, SPR standard sample of photo, the launch hole central axis of the lighting source and aobvious
Speck mirror central axis is conllinear；And
The imaging optical path on the downside of spectroscope is arranged on, the imaging optical path includes lens, No. two lens and a detector, institute
State a lens, No. two lens coaxial, the distance between a lens and No. two lens are both focal length sums, described one
Number lens, plane where the central axis and spectroscope of No. two lens into 45 degree, the microcobjective back focal plane and detector sense
Smooth surface is on a lens and No. two lens conjugation.
The beam cross-section that the lighting source sends with diameter greater than or equal to microcobjective clear aperature, the illumination
When the light that light source sends is linearly polarized light, SPR can directly be excited by linearly polarized light；The light that the lighting source sends is radially inclined
Shake light when, SPR can directly be excited by radial polarisation light；The light beam that the lighting source sends and plane where spectroscope into 45
Degree；The beam center axis that the lighting source sends is conllinear with microcobjective central axis；The light that the lighting source sends
After beam reflects through SPR prints, then by after dichroic mirror, by a lens and the central axis of No. two lens, finally hanging down
Direct projection is on detector photosurface.
The SPR standard sample of photo is made up of three-decker, is respectively high refractive index material layer, and adhesion layer can excite SPR's
Metal level, high refractive index material layer thickness is less than the operating distance of microcobjective, and adhesion layer thickness can swash at 0nm-5nm nanometers
The metal layer thickness of SPR is sent out between 30nm-60nm, light beam is incident from high refractive index material layer.The SPR standard sample of photo folding high
Rate material layer facing illumination light source is penetrated, the focus of the microcobjective is on SPR standard sample of photo high refractive index material layers surface.
Present invention also offers a kind of automatic testing method of high accuracy microcobjective numerical aperture, it includes：
Light beam is focused on SPR standard sample of photo from after microcobjective incidence, and reflected light is imaged in microcobjective back focal plane, figure
Maximum ring radius r as picture on back focal plane can be obtained on sensormax, SPR absorb arc radius rSP：
Wherein, NA represents the numerical aperture of microcobjective；n0Represent the refraction of medium between microcobjective and SPR standard sample of photo
Rate；rSPRepresent that the SPR being imaged on microcobjective back focal plane absorbs the radius of arc；rmaxRepresent what is be imaged on microcobjective back focal plane
The radius of maximum ring；θspRepresent that the SPR of SPR standard sample of photo excites angle.
(3) beneficial effect
Above-mentioned technical proposal of the invention has the following advantages that：The requirement of detection microcobjective NA numerical value is reduced, can
The numerical value of microcobjective NA is more accurately obtained, and automatic measurement can be realized, assessment is detected and used to production all provides
Great convenience.
Brief description of the drawings
Fig. 1 is a kind of method of high-precision automatic measuring microcobjective numerical aperture of the present invention, and incident light is line
Schematic diagram during polarised light.
Fig. 2 is a kind of method of high-precision automatic measuring microcobjective numerical aperture of the present invention, and incident light is footpath
Schematic diagram during to polarised light.
Fig. 3 is the structural representation of the measuring method and system of a kind of high accuracy microcobjective numerical aperture of the present invention
Figure.
During Fig. 4 is the measuring method and system of a kind of high accuracy microcobjective numerical aperture of the present invention, micro- thing
The light of mirror back focal plane focuses on the light path on detector.
During Fig. 5 in a kind of device of high-precision automatic measuring microcobjective NA of the present invention, SPR standard sample of photo is illustrated
Figure.
Fig. 6 is the measuring method and system of a kind of high accuracy microcobjective numerical aperture of the present invention, and incident light is
The analogous diagram of linearly polarized light.
Fig. 7 is the measuring method and system of a kind of high accuracy microcobjective numerical aperture of the present invention, and incident light is
Radially shake the analogous diagram of light.
1 in figure：Lighting source；2：Light splitting piece；3：Microcobjective；4：SPR materials；5：A number lens；6：No. two lens；7：
Detector.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the invention is described in further detail.Following instance
For illustrating the present invention, but it is not limited to the scope of the present invention.
In the description of the invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " axial direction ", " radial direction ", " circumference ", etc. instruction orientation or position relationship be based on orientation shown in the drawings or position
Relation, is for only for ease of the description present invention and simplifies description, must have rather than the device or element for indicating or imply meaning
Have specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.In the description of the invention, " multiple " is meant that at least two, such as two, three
It is individual etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term imaging optical path is when saturating using two, a lens
Mirror or multiple lens, when it is imaged to microcobjective back focal plane, belong to the scope of the present invention general for this area
For logical technical staff, above-mentioned term concrete meaning in the present invention can be as the case may be understood.
Specific embodiment one：Present embodiment, the micro- thing of a kind of high accuracy described in present embodiment are illustrated with reference to Fig. 2
The measuring method and system of mirror numerical aperture, it is therefore intended that incident using polarised light, excites SPR, it include lighting source (1),
Spectroscope (2), microcobjective (3), SPR standard sample of photo (4), lens (5), No. two lens (6) and detector (7) photograph
The light that Mingguang City source (1) sends is transmitted through spectroscope (2), is incident to microcobjective (3), and focus on SPR through microcobjective (3)
The surface of standard sample of photo (4), is reflected, and reflected light is reflected, through a lens by microcobjective (3) by spectroscope (2)
(5) and during No. two lens (6) image in detector (7)；
Wherein SPR standard sample of photo (4) is triple layer designs, is respectively high refractive index material layer, and adhesion layer can excite SPR's
Metal level, light beam is incident from high refractive index material layer, and metal level can be using metals such as gold, silver, and adhesion layer typically uses Cr or Ti；
A number lens (5), No. two lens (6) and detector (7) are coaxial, plane where light path and spectroscope (2) into
45 degree, the distance between a lens (5) and No. two lens (6) minute surfaces are the focal length sums of both, detector (7)
The back focal plane conjugation of photosurface and microcobjective (3), the focus of the microcobjective (3) is on SPR standard sample of photo (4) surface
Light beam is focused on SPR standard sample of photo (4) from after microcobjective (3) incidence, and reflected light is burnt afterwards in microcobjective (3)
Face is imaged, and the maximum ring radius r of picture on back focal plane can be obtained on imageing sensormax, SPR absorb arc radius rSP：
Wherein, NA represents the numerical aperture of microcobjective (3)；n0Represent between microcobjective (3) and SPR standard sample of photo (4)
The refractive index of medium；rSPRepresent that the SPR being imaged on microcobjective back focal plane absorbs the radius of arc；rmaxRepresent Jiao after microcobjective
The radius of the maximum ring being imaged on face；θspRepresent that the SPR of SPR standard sample of photo excites angle.
Specific embodiment two：The cross-sectional diameter of the light beam that lighting source (1) sends is more than or equal to microcobjective (3)
Clear aperature, when the light beam that lighting source (1) sends cross-sectional diameter less than microcobjective (3) clear aperature when, can
Addition expands the cross-sectional diameter of the light beam that light path sends lighting source (1) between lighting source (1) and microcobjective (3)
More than or equal to the clear aperature of microcobjective (3).
Specific embodiment three：
When the light that lighting source (1) sends is linearly polarized light, SPR can directly be excited by linearly polarized light；
When the light that lighting source (1) sends is radial polarisation light, SPR can directly be excited by radial polarisation light；
When the light that lighting source (1) sends is linearly polarized light, can be added between lighting source (1) and microcobjective (3)
Half-wave plate and radial polarisation piece, can be converted into radial polarisation light by the linearly polarized light that lighting source (1) sends, so as to excite SPR,
The light beam that the central axis of half-wave plate and radial polarisation piece is sent with lighting source (1) overlaps, when by other approach that line is inclined
The light that shakes is converted into radial polarisation light and excites SPR and falls within this patent protection domain calculating microcobjective numerical aperture.
Claims (9)
1. a kind of measuring method and system of high accuracy microcobjective numerical aperture, it is characterised in that including：Lighting source, point
Light microscopic, microcobjective, SPR standard sample of photo, lens, No. two lens, a detectors；
Wherein, the lighting source and microcobjective are coaxial, and a lens, No. two lens and detector are coaxial, light path and
Into 45 degree, the distance between a lens and No. two lens mirrors are the focal length sums of both to plane where spectroscope,
The photosurface of detector and the back focal plane conjugation of microcobjective, the focus of the microcobjective is on SPR standard sample of photo surface.
2. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, its feature exists
In：When light source is linear polarization light source, SPR can be excited with linearly polarized light.
3. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, its feature exists
In：When light source is radial polarisation light source, available radial polarised light excites SPR.
4. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, its feature exists
In：The beam cross-section that the light source sends with diameter greater than or equal to microcobjective clear aperature.
5. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, the SPR marks
Quasi- print is made up of materials at two layers, is respectively high refractive index material layer, can excite the metal level of SPR, and light beam is from high index of refraction material
The bed of material is incident.
6. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, the SPR marks
Quasi- print is made up of trilaminate material, is respectively high refractive index material layer, and adhesion layer can excite the metal level of SPR, light beam to be rolled over from height
Penetrate rate material layer incident.
7. a kind of measuring method and system of high accuracy microcobjective numerical aperture, it is characterised in that methods described includes：Light beam
Focused on SPR standard sample of photo from after microcobjective incidence, reflected light is imaged in microcobjective back focal plane, can on imageing sensor
Obtain the maximum ring radius r of picture on back focal planemax, SPR absorb arc radius rSP。
8. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 7, its feature exists
In using the concrete numerical value of below equation acquisition NA：
In formula, NA represents the numerical aperture of microcobjective；n0Represent the refractive index of medium between microcobjective and SPR standard sample of photo；
rSPRepresent that the SPR being imaged on microcobjective back focal plane absorbs the radius of arc；rmaxRepresent the maximum being imaged on microcobjective back focal plane
The radius of aperture；θspRepresent that the SPR of SPR standard sample of photo excites angle.
9. the measuring method and system of a kind of high accuracy microcobjective numerical aperture according to claim 1, its feature exists
In methods described is applied to immersion microcobjective and soaks the measurement of microcobjective numerical aperture admittedly.
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| CN111397861A (en) * | 2020-04-17 | 2020-07-10 | 复旦大学 | Micro lens detection system and detection method thereof |
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Application publication date: 20170630 |