CN109373910A - A kind of surface nanometer-displacement device and method based on the asymmetric excitation of surface phasmon - Google Patents
A kind of surface nanometer-displacement device and method based on the asymmetric excitation of surface phasmon Download PDFInfo
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- CN109373910A CN109373910A CN201811466247.7A CN201811466247A CN109373910A CN 109373910 A CN109373910 A CN 109373910A CN 201811466247 A CN201811466247 A CN 201811466247A CN 109373910 A CN109373910 A CN 109373910A
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- 239000002184 metal Substances 0.000 claims abstract description 24
- 239000002086 nanomaterial Substances 0.000 claims abstract description 20
- 238000003384 imaging method Methods 0.000 claims abstract description 11
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- 238000011549 displacement method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 16
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of surface nanometer-displacement device and method based on the asymmetric excitation of surface phasmon, including He-Ne laser, (1,0) mould Hermite-Gaussian photogenerated device, focusing objective len, metal Nano structure, oil immersion objective, the image forming tube mirror, light barrier, imaging len, ccd detector being arranged successively；(1,0) mould Hermite-Gaussian photogenerated device includes a polarizer, a S wave plate and an analyzer；Metal Nano structure includes the nanometer grade thickness film processed using precious metal material, and the groove array of nano-precision is processed on film.(1,0) mould Hermite-Gaussian light is utilized to realize the asymmetric excitation of SPPs, measurement sensitivity is high；It can be obtained displacement in Fourier plane is Polaroid, signal-to-noise ratio is high, without tracking scanning and complicated calculations, realizes the Real-time Feedback that signal is quickly handled and is displaced.
Description
Technical field
The present invention relates to a kind of technology of surface nanometer-displacement, more particularly to one kind are asymmetric sharp based on surface phasmon
The surface nanometer-displacement device and method of hair.
Background technique
Photoelectric device miniaturization, to micro-nano technology, assembly precision, more stringent requirements are proposed for integrated development.Development is received
The displacement measurement and collimation technique of meter Jing Du is for preparing qualified micro-nano photoelectric device, it is ensured that the performance of device has important meaning
Justice.Common surface nanometer-displacement method mainly has: interference fringe method (A nanometric displacement
measurement method using the detection of fringe peak movement[J].Measurement
Science and Technology, 2000,11 (9): 1352.), pin hole method (Direct measurement of
nanometric displacement under an optical microscope[J].Applied optics,1987,26
(16): 3425-3427.), piezoelectric ceramics method etc..Wherein interference fringe method uses interferometer, passes through the movement of interference fringe
Calculate amount of displacement, magnitude (Displacement measurements using of the measurement accuracy in 1/2 to 1/20 wavelength
a self-mixing laser diode under moderate feedback[J].IEEE Transactions on
Instrumentation and Measurement, 2006,55 (4): 1101-1105.), it is difficult to realize the position of several Nano grades
Shift measurement, spatial resolution is poor, while interferometry is very high to environmental stability requirement, and system structure is also very complicated.Due to dry
It is larger to relate to calculation amount needed for method, causes its temporal resolution lower, has an impact to the response speed of measuring system.Piezoelectric ceramics method
It is fast to measure velocity of displacement, but needs to carry out contact type measurement, the measurement linearity is also bad, and application scenarios are limited
(Piezoelectric ceramics characterization[R].INSTITUTE FOR COMPUTER
APPLICATIONS IN SCIENCE AND ENGINEERING HAMPTON VA,2001.)。
Summary of the invention
The object of the present invention is to provide a kind of contactless high s/n ratio, rapid survey nanometer displacement based on surface etc. from
The surface nanometer-displacement device and method of the asymmetric excitation of excimer.
The purpose of the present invention is what is be achieved through the following technical solutions:
Surface nanometer-displacement device based on the asymmetric excitation of surface phasmon of the invention, including what is be arranged successively
He-Ne laser, (1,0) mould Hermite-Gaussian photogenerated device, focusing objective len, metal Nano structure, oil immersion objective, image forming tube
Mirror, light barrier, imaging len, ccd detector.
The above-mentioned surface nanometer-displacement device based on the asymmetric excitation of surface phasmon of the invention realizes nanometer position
The method of shift measurement, comprising steps of
The light beam of He-Ne laser emitting generates (1,0) mould Hermitian height after (1,0) mould Hermite-Gaussian photogenerated device
This light field；
It is somebody's turn to do (1,0) mould Hermite-Gaussian light field and metallic nanostructured surface is coupled to by focusing objective len；
The SPPs signal collection for being generated metal Nano structure using oil immersion objective, then pass through image forming tube mirror and imaging len
It couples SPPs signal on the ccd detector for being placed in Fourier plane, and filters out direct current signal using light barrier, obtain SPPs
Spectrum intensity distributed image；
Image when again using pre-recorded no incident light is deducted as noise background, is eliminated the influence of environment light, is obtained
Ideal SPPs spectral image；
The intensity that region corresponding to SPPs is extracted from gained image, is calculated intensity rate.
As seen from the above technical solution provided by the invention, provided in an embodiment of the present invention to be based on surface phasmon
The surface nanometer-displacement device and method of asymmetric excitation are based on the asymmetric excitation SPPs characteristic of Hermite-Gaussian light, pass through Fourier
Blade face imaging, realizes the contactless rapid survey to nanometer displacement.This method has high sensitivity, and measuring speed is fast, non-
The features such as contact.It is able to achieve the contactless rapid survey to nanometer displacement.
Detailed description of the invention
Fig. 1 is the surface nanometer-displacement device provided in an embodiment of the present invention based on the asymmetric excitation of surface phasmon
Structural schematic diagram；
Fig. 2 is the schematic diagram (a) and stereoscan photograph (b) of metal Nano structure used in the embodiment of the present invention；
Fig. 3 is the surface of intensity distribution of excitation light field (1,0) mould Hermite-Gaussian light used of the embodiment of the present invention；
Fig. 4 is the Fourier blade face image of CCD of embodiment of the present invention acquisition；
Fig. 5 is intensity rate-displacement curve that the embodiment of the present invention measures linear region.
Specific embodiment
The embodiment of the present invention will be described in further detail below.What is be not described in detail in the embodiment of the present invention is interior
Appearance belongs to the prior art well known to professional and technical personnel in the field.
Surface nanometer-displacement device based on the asymmetric excitation of surface phasmon of the invention is preferably embodied
Mode is:
Including He-Ne laser, (1,0) mould Hermite-Gaussian photogenerated device, focusing objective len, metal nano being arranged successively
Structure, oil immersion objective, image forming tube mirror, light barrier, imaging len, ccd detector
(1,0) mould Hermite-Gaussian photogenerated device includes a polarizer, a S wave plate and an analyzer
The metal Nano structure includes the nanometer grade thickness film processed using precious metal material, and is added on film
Work goes out the groove array of nano-precision.
(1,0) mould Hermite-Gaussian photogenerated device obtains linearly polarized light through the polarizer, converts later by S wave plate
For radial polarisation light, after through analyzer obtain (1,0) mould Hermite-Gaussian light；
The light beam of the He-Ne laser emitting generates (1,0) mould strategic point after (1,0) mould Hermite-Gaussian photogenerated device
Meter Gao Si light field；
Metallic nanostructured surface is couple by (1,0) mould Hermite-Gaussian light field using focusing objective len；
The metal Nano structure supports SPPs surface wave using the nanometer grade thickness film that precious metal material processes；
The SPPs signal leakage for being generated metal Nano structure using oil immersion objective is collected；
It is coupled SPPs signal on the ccd detector for being placed in Fourier plane using image forming tube mirror and imaging len, and
Direct current signal is filtered out using light barrier, obtains SPPs spectrum intensity distributed image；
The intensity that region corresponding to SPPs is extracted from gained frequency spectrum picture, is calculated intensity rate, obtains relative to being
The displacement at system center.
The above-mentioned surface nanometer-displacement device based on the asymmetric excitation of surface phasmon of the invention realizes nanometer position
The method of shift measurement, preferable specific embodiment is:
Comprising steps of
The light beam of He-Ne laser emitting generates (1,0) mould Hermitian height after (1,0) mould Hermite-Gaussian photogenerated device
This light field；
It is somebody's turn to do (1,0) mould Hermite-Gaussian light field and metallic nanostructured surface is coupled to by focusing objective len；
The SPPs signal collection for being generated metal Nano structure using oil immersion objective, then pass through image forming tube mirror and imaging len
It couples SPPs signal on the ccd detector for being placed in Fourier plane, and filters out direct current signal using light barrier, obtain SPPs
Spectrum intensity distributed image；
Image when again using pre-recorded no incident light is deducted as noise background, is eliminated the influence of environment light, is obtained
Ideal SPPs spectral image；
The intensity that region corresponding to SPPs is extracted from gained image, is calculated intensity rate.
It is Polaroid to SPPs frequency spectrum that intensity rate can be obtained, which is substituted into intensity rate-displacement curve and is searched, is obtained
Obtain displacement of the metal Nano structure relative to system centre.
Surface phasmon (Surface Plasmon Polaritons:SPPs) is electromagnetic field and metal surface freely electricity
Sub-resonance couples a kind of electromagnetic field mode propagated in metal surface to be formed.SPPs has compression optical wavelength and enhancing local electricity
The effect of magnetic field strength, to be widely applied in multiple fields such as integrated optoelectronics, biology, nonlinear optics.
Due to the peculiar property of SPPs, it is made to sense (Nanostructured plasmonic sensors [J] in high sensitivity
.Chemical reviews, 2008,108 (2): 494-521.), radiation direction regulate and control (Unidirectional emission
of a quantum dot coupled to a nanoantenna[J].Science,2010,329(5994):930-933.)
Equal directions are widely used.
The present invention utilizes metal surface using the light field (such as Hermite-Gaussian light) with strong phase gradient as exciting field
SPPs asymmetry scattering properties caused by interacting between groove array antenna induced dipole, and be imaged by Fourier blade face,
A kind of high s/n ratio, nanoscale accurate displacement new method of measuring are invented.
Surface nanometer-displacement device and method based on the asymmetric excitation of surface phasmon of the invention are high based on Hermitian
The asymmetric excitation SPPs characteristic of this light, is imaged by Fourier blade face, realizes the contactless rapid survey to nanometer displacement.It should
The features such as method has high sensitivity, and measuring speed is fast, non-contact.It is able to achieve the contactless rapid survey to nanometer displacement.
The advantages of the present invention over the prior art are that:
(1) rapid survey, one time accurate displacement can be obtained in spectral imaging.Compared to the measurement based on interference fringe
Device greatly improves the acquisition speed of signal without complicated calculating without continuous measurement.
(2) measurement accuracy can be promoted to better than 5nm compared to the measuring device based on interference fringe by measurement accuracy
Nano grade.
Specific embodiment:
As shown in Figures 1 to 5, He-Ne laser 1 is emitted wavelength 632.8nm laser by the Hermite-Gaussian photoproduction of (1,0) mould
At device 2, it is converted into (1,0) mould Hermite-Gaussian light, line focus object lens 3 make light field be coupled to 4 surface of metal Nano structure, swash
SPPs is sent out, and the field SPPs generated is collected by oil immersion objective 5.The imaged pipe mirror 6 of the light field that oil immersion objective 5 is collected and imaging are saturating
Mirror 8 converts, and back focal plane image is imaged on ccd detector 9, wherein filtering out the incident light of transmission using light barrier 7.Use CCD
Detector 9 carries out Image Acquisition in 8 back focal plane of imaging len, obtains intensity distribution image.When by pre-recorded no incident light
Image as noise background deduct, eliminate environment light influence, obtain ideal image.It extracts from gained image along two
The intensity of circular arc sector corresponding to the SPPs that direction is propagated obtains I1And I2, operation obtains the intensity rate r (r of asymmetric excitation
=I1/I2), r value is substituted into intensity rate-displacement curve and is searched, can be obtained at this time metal Nano structure relative to system centre
The displacement of (when r=1).
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (6)
1. a kind of surface nanometer-displacement device based on the asymmetric excitation of surface phasmon, which is characterized in that including successively arranging
The He-Ne lasers (1) of column, (1,0) mould Hermite-Gaussian photogenerated device (2), focusing objective len (3), metal Nano structure (4),
Oil immersion objective (5), image forming tube mirror (6), light barrier (7), imaging len (8), ccd detector (9).
2. the surface nanometer-displacement device according to claim 1 based on the asymmetric excitation of surface phasmon, feature
It is, (1,0) mould Hermite-Gaussian photogenerated device (2) includes a polarizer, a S wave plate and an analyzer.
3. the surface nanometer-displacement device according to claim 2 based on the asymmetric excitation of surface phasmon, feature
It is, the metal Nano structure (4) includes the nanometer grade thickness film processed using precious metal material, and is added on film
Work goes out the groove array of nano-precision.
4. the surface nanometer-displacement device according to claim 3 based on the asymmetric excitation of surface phasmon, feature
It is:
(1,0) mould Hermite-Gaussian photogenerated device (2) obtains linearly polarized light through the polarizer, converts later by S wave plate
For radial polarisation light, after through analyzer obtain (1,0) mould Hermite-Gaussian light；
The light beam of He-Ne laser (1) outgoing generates (1,0) mould after (1,0) mould Hermite-Gaussian photogenerated device (2)
Hermite-Gaussian light field；
Metal Nano structure (4) surface is couple by (1,0) mould Hermite-Gaussian light field using focusing objective len (3)；
The metal Nano structure (4) supports SPPs surface wave using the nanometer grade thickness film that precious metal material processes；
The SPPs signal leakage for being generated metal Nano structure (4) using oil immersion objective (5) is collected；
SPPs signal is coupled to using image forming tube mirror (6) and imaging len (8) ccd detector (9) for being placed in Fourier plane
On, and direct current signal is filtered out using light barrier (7), obtain SPPs spectrum intensity distributed image；
The intensity that region corresponding to SPPs is extracted from gained frequency spectrum picture, is calculated intensity rate, obtains relative in system
The displacement of the heart.
5. a kind of described in any item surface nanometer-displacement dresses based on the asymmetric excitation of surface phasmon of Claims 1-4
Set the method for realizing surface nanometer-displacement, which is characterized in that comprising steps of
The light beam of He-Ne laser (1) outgoing generates (1,0) mould Hermitian after (1,0) mould Hermite-Gaussian photogenerated device (2)
Gauss light field；
It is somebody's turn to do (1,0) mould Hermite-Gaussian light field and metal Nano structure (4) surface is coupled to by focusing objective len (3)；
The SPPs signal collection for being generated metal Nano structure (4) using oil immersion objective (5), then by image forming tube mirror (6) and at
Picture lens (8) couples SPPs signal on the ccd detector (9) for being placed in Fourier plane, and is filtered out directly using light barrier (7)
Signal is flowed, SPPs spectrum intensity distributed image is obtained；
Image when again using pre-recorded no incident light is deducted as noise background, is eliminated the influence of environment light, is obtained ideal
SPPs spectral image；
The intensity that region corresponding to SPPs is extracted from gained image, is calculated intensity rate.
6. the surface nanometer-displacement method according to claim 5 based on the asymmetric excitation of surface phasmon, feature
It is, it is Polaroid to SPPs frequency spectrum that intensity rate can be obtained, which is substituted into intensity rate-displacement curve and is searched, is obtained
Displacement of the metal Nano structure relative to system centre.
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Cited By (6)
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| CN110879205A (en) * | 2019-11-08 | 2020-03-13 | 西湖大学 | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band |
| CN110879204A (en) * | 2019-11-08 | 2020-03-13 | 西湖大学 | Polarization-resolved surface plasmon resonance optical measurement system |
| CN113031242A (en) * | 2021-03-10 | 2021-06-25 | 上海交通大学 | Short-exposure high-speed surface scanning rigid splicing microscopic imaging system and method |
| CN113043582A (en) * | 2019-12-26 | 2021-06-29 | 中国科学技术大学 | Method for improving piezoelectric response of polymer material |
| CN113405471A (en) * | 2021-07-14 | 2021-09-17 | 西安电子科技大学 | Optical displacement sensor and optical displacement detection system |
| CN114577121A (en) * | 2022-05-09 | 2022-06-03 | 中国科学技术大学 | Detection device for detecting morphology of sub-wavelength medium nanowire based on surface wave directionality |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110879205A (en) * | 2019-11-08 | 2020-03-13 | 西湖大学 | Spectrum measuring and imaging optical system for surface plasmon resonance of invisible light wave band |
| CN110879204A (en) * | 2019-11-08 | 2020-03-13 | 西湖大学 | Polarization-resolved surface plasmon resonance optical measurement system |
| CN113043582A (en) * | 2019-12-26 | 2021-06-29 | 中国科学技术大学 | Method for improving piezoelectric response of polymer material |
| CN113043582B (en) * | 2019-12-26 | 2023-03-31 | 中国科学技术大学 | Method for improving piezoelectric response of polymer material |
| CN113031242A (en) * | 2021-03-10 | 2021-06-25 | 上海交通大学 | Short-exposure high-speed surface scanning rigid splicing microscopic imaging system and method |
| CN113405471A (en) * | 2021-07-14 | 2021-09-17 | 西安电子科技大学 | Optical displacement sensor and optical displacement detection system |
| CN114577121A (en) * | 2022-05-09 | 2022-06-03 | 中国科学技术大学 | Detection device for detecting morphology of sub-wavelength medium nanowire based on surface wave directionality |
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