CN106802232B - A kind of microcobjective numerical aperture measurement method and system based on total reflection - Google Patents
A kind of microcobjective numerical aperture measurement method and system based on total reflection Download PDFInfo
- Publication number
- CN106802232B CN106802232B CN201710156194.8A CN201710156194A CN106802232B CN 106802232 B CN106802232 B CN 106802232B CN 201710156194 A CN201710156194 A CN 201710156194A CN 106802232 B CN106802232 B CN 106802232B
- Authority
- CN
- China
- Prior art keywords
- microcobjective
- numerical aperture
- total reflection
- photo
- standard sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
Abstract
A kind of microcobjective numerical aperture measurement method and system based on total reflection is related to optical field, more particularly to measurement liquid soaks and soak admittedly microcobjective numerical aperture.It soaks and soaks admittedly the problems such as microcobjective numerical aperture is cumbersome, and accuracy of measurement is not high enough to solve to measure liquid at present.The described method includes: light beam is soaked from liquid or focused on standard sample of photo after the incidence of leaching microcobjective admittedly, reflected light forms the map that arc is absorbed with total reflection on back focal plane, and total reflection absorption arc is circle.Position and the radius that arc is absorbed by calculating total reflection on map can measure liquid leaching or soak the numerical aperture of microcobjective admittedly.Described device issues light beam using lighting source, is soaked by liquid or leaching microcobjective focuses on standard sample of photo admittedly, reflected light is emitted by microcobjective, is imaged on the detector, is obtained the picture of back focal plane.The present invention can be realized liquid leaching or soak the high-acruracy survey of microcobjective numerical aperture admittedly by image detection and identification.
Description
Technical field
The measurement system of microcobjective numerical aperture is soaked and soaked admittedly the present invention relates to optical technical field more particularly to a kind of liquid
System and its measurement method.
Background technique
With the development and application of microtechnic, the application of microcobjective is more next extensively, and microcobjective numerical aperture
Detection accuracy requires higher and higher.
The numerical aperture of measurement object lens mainly uses apertometer at present, and when measurement is mainly seen using human eye
It examines, venter of relicle and observed round spot are tangent on adjusting apertometer, then read data.Whole operation process is all
It is that survey crew completes, it is in contrast relatively high to the requirement of survey crew, and the precision measured is also poor, especially
It when measuring the object lens of higher NA, needs by attachment objective, complicated operation, it is difficult to automatic detection is realized, to producing and make
With causing great inconvenience.
The present invention proposes the numerical aperture that microcobjective is measured using total reflection, can by the laser after microcobjective
Standard sample of photo surface is focused on, when laser light incident angle is smaller, is not totally reflected, reflection light amplitude is smaller, works as laser light incident
It when angle is greater than certain angle, is totally reflected, reflection light amplitude is larger.Maximum can be obtained on the picture obtained to back focal plane imaging
Iris radius and the iris radius being totally reflected, it is possible thereby to calculate the numerical aperture of microcobjective.This is significantly reduced
To manually-operated dependence, measurement request is reduced, measurement accuracy is improved, the production of microcobjective is detected and used and is commented
Estimate and both provides great convenience.
Summary of the invention
(1) technical problems to be solved
The numerical aperture of measurement object lens is mainly manual operation apertometer at present, to the more demanding of survey crew,
And complicated for operation, precision is difficult to ensure, to solve this problem, this patent proposes a kind of new numerical aperture measurement method.
(2) technical solution
In order to solve the above-mentioned technical problems, the present invention provides a kind of on-mechanicals of high-precision microcobjective numerical aperture
Formula detection system characterized by comprising
Lighting source, spectroscope, microcobjective, standard sample of photo, the launch hole central axis of the lighting source and micro-
Object lens central axis is conllinear；And
Imaging optical path on the downside of spectroscope is set, which includes No.1 lens, No. two lens and detector, institute
It is coaxial to state No.1 lens, No. two lens, the distance between the No.1 lens and No. two lens both are the sum of focal lengths, described one
Number lens, No. two lens central axis and spectroscope where plane at 45 degree, the microcobjective back focal plane and detector sense
Smooth surface is about No.1 lens and No. two lens conjugation.
The beam cross-section diameter that the lighting source issues is greater than or equal to the clear aperature of microcobjective；The illumination
Plane is at 45 degree where light beam and spectroscope that light source issues；The beam center axis and microcobjective that the lighting source issues
Central axis is conllinear；The light beam that the lighting source issues is after standard sample of photo reflects, after reflecting using spectroscope, by one
The central axis of number lens and No. two lens, is finally vertically penetrated on detector photosurface.
The present invention also provides a kind of automatic testing methods of high-precision microcobjective numerical aperture comprising:
Light beam focuses on standard sample of photo after microcobjective incidence, and reflected light is imaged in microcobjective back focal plane, image
It can get the maximum ring radius r of picture on back focal plane on sensormax, total reflection absorb iris radius rTIR:
Wherein, NA indicates the numerical aperture of microcobjective；n0Indicate the refractive index of medium between microcobjective and standard sample of photo,
n1Indicate the refractive index of standard sample of photo；rTIRIndicate that the total reflection being imaged on microcobjective back focal plane absorbs the radius of arc；rmaxTable
Show the radius for the maximum ring being imaged on microcobjective back focal plane；θTIRIt is complete in air to indicate that laser is incident on from standard sample of photo
Angle of reflection.
(3) beneficial effect
Above-mentioned technical proposal of the invention has the advantages that the requirement for reducing detection microcobjective NA numerical value, can
More accurate obtains the numerical value of microcobjective NA, and can realize automatic measurement, and assessment is detected and used to production and all provides
Great convenience.
Detailed description of the invention
Fig. 1 is a kind of principle of microcobjective numerical aperture measurement method and system based on total reflection of the present invention
Figure.
Fig. 2 is a kind of structure of microcobjective numerical aperture measurement method and system based on total reflection of the present invention
Schematic diagram.
Fig. 3 is shown in a kind of microcobjective numerical aperture measurement method and system based on total reflection of the present invention
The light of speck mirror back focal plane focuses on the optical path on detector.
Fig. 4 is a kind of microcobjective numerical aperture measurement method and system based on total reflection of the present invention, is occurred
The analogous diagram of total reflection.
1 in figure: lighting source；2: light splitting piece；3: microcobjective；4: standard sample of photo；5: No.1 lens；6: No. two lens；
7: detector.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Following instance
For illustrating the present invention, but it is not intended to limit the scope of the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " axial direction ", " radial direction ", " circumferential direction ", etc. instructions orientation or positional relationship be orientation based on the figure or position
Relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
There is specific orientation, be constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.In the description of the present invention, the meaning of " plurality " is at least two, such as two, three
It is a etc., unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term imaging optical path is when saturating using one two, lens
Mirror or multiple lens belong to the scope of the present invention when microcobjective back focal plane is imaged in it
For the ordinary skill in the art, it can understand above-mentioned term in the present invention as the case may be
Concrete meaning.
It is a kind of based on total reflection described in present embodiment specific embodiment 1: embodiment is described with reference to Fig. 2
Microcobjective numerical aperture measurement method and system, it is therefore intended that it is incident using different angle light, total reflection aperture is found, it is wrapped
Include lighting source (1), spectroscope (2), microcobjective (3), standard sample of photo (4), No.1 lens (5), No. two lens (6) and detection
The light that device (7) lighting source (1) issues is transmitted through spectroscope (2), is incident to microcobjective (3), and through microcobjective
(3) surface for focusing on standard sample of photo (4), reflects, and reflected light is reflected by microcobjective (3) by spectroscope (2),
It is imaged in detector (7) through No.1 lens (5) and No. two lens (6)；
The No.1 lens (5), No. two lens (6) and detector (7) are coaxial, plane where optical path and spectroscope (2) at
45 degree, the distance between the No.1 lens (5) and No. two lens (6) mirror surfaces are the sum of focal lengths of both, detector (7)
The back focal plane of photosurface and microcobjective (3) conjugation, the focus of the microcobjective (3) is on standard sample of photo (4) surface
Light beam focuses on standard sample of photo (4) after microcobjective (3) incidence, and reflected light is in microcobjective (3) back focal plane
It is imaged, can get the maximum ring radius r of picture on back focal plane on imaging sensormax, total reflection absorb radius of circle rTIR:
Wherein, NA indicates the numerical aperture of microcobjective；n0Indicate the refractive index of medium between microcobjective and standard sample of photo,
n1Indicate the refractive index of standard sample of photo；rtrIndicate that the total reflection being imaged on microcobjective back focal plane absorbs the radius of arc；rmaxIt indicates
The radius for the maximum ring being imaged on microcobjective back focal plane；θTIRIndicate Jie of the laser between microcobjective and standard sample of photo
Angle of total reflection when matter is incident on standard sample of photo.
Specific embodiment 2: the cross-sectional diameter for the light beam that lighting source (1) issues is greater than or equal to microcobjective (3)
Clear aperature, when lighting source (1) issue light beam cross-sectional diameter be less than microcobjective (3) clear aperature when, can
Addition expands the cross-sectional diameter for the light beam that optical path issues lighting source (1) between lighting source (1) and microcobjective (3)
More than or equal to the clear aperature of microcobjective (3).
Claims (1)
1. a kind of microcobjective numerical aperture measurement method based on total reflection, which is characterized in that using injection device progress of being all-trans
The measurement of numerical aperture, described be all-trans includes: that lighting source, spectroscope, microcobjective, standard sample of photo, No.1 are saturating in injection device
Mirror, No. two lens, detectors；
The numerical aperture measurement method, it is further characterized in that, the injection device Plays print that is all-trans is total reflection standard sample of photo, entirely
The Refractive Index of Material n of reflectance standard print1It is known that penetrating in standard sample of photo by the segment beam of microcobjective far from microcobjective
Total reflection phenomenon can occur on the surface of side；Described to be all-trans in injection device, lighting source and microcobjective are coaxial, the No.1
Lens, No. two lens and detector are coaxial, and plane is at 45 degree where optical path and spectroscope, the No.1 lens and No. two lens mirrors
The distance between face is the sum of focal length of both, and the photosurface of detector and the back focal plane of microcobjective are conjugated, described micro-
The focus of object lens is on total reflection surface of the standard sample of photo far from microcobjective side, the beam cross section of the lighting source sending
Face diameter is greater than or equal to the clear aperature of microcobjective；
The numerical aperture measurement method, it is further characterized in that: light beam focuses on total reflection standard sample after microcobjective incidence
On piece, reflected light are imaged in microcobjective back focal plane, can get the maximum ring radius of picture on back focal plane on imaging sensor
rmax, total reflection absorb arc radius rTIR, the specific value of numerical aperture is obtained using following formula:
In formula, NA indicates the numerical aperture of microcobjective, n0Indicate the refractive index of medium between microcobjective and standard sample of photo, n1Table
Show the refractive index of standard sample of photo.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710156194.8A CN106802232B (en) | 2017-03-16 | 2017-03-16 | A kind of microcobjective numerical aperture measurement method and system based on total reflection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710156194.8A CN106802232B (en) | 2017-03-16 | 2017-03-16 | A kind of microcobjective numerical aperture measurement method and system based on total reflection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106802232A CN106802232A (en) | 2017-06-06 |
| CN106802232B true CN106802232B (en) | 2019-04-30 |
Family
ID=58987958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710156194.8A Expired - Fee Related CN106802232B (en) | 2017-03-16 | 2017-03-16 | A kind of microcobjective numerical aperture measurement method and system based on total reflection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106802232B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643268A (en) * | 2017-09-15 | 2018-01-30 | 北京航空航天大学 | A kind of surface plasma nano sensing device excited using microcobjective |
| CN109916598A (en) * | 2019-04-26 | 2019-06-21 | 北京航空航天大学 | A kind of microcobjective numerical aperture measurement method based on diffraction grating |
| CN114726995B (en) * | 2022-06-09 | 2022-11-08 | 深圳中科飞测科技股份有限公司 | Detection method and detection system |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102116706B (en) * | 2010-01-04 | 2012-08-29 | 上海微电子装备有限公司 | Measurement device and method for numerical aperture of projection objective |
| CN102426093B (en) * | 2011-11-03 | 2014-02-12 | 中国科学技术大学 | Microscopic imaging-based polymer planar waveguide optical parameter measuring apparatus |
| CN103105511B (en) * | 2012-12-28 | 2016-01-13 | 南开大学 | Surface plasma longitudinal field optical microscope for scanning near field device and detection method |
| CN103439294B (en) * | 2013-09-09 | 2015-05-13 | 黑龙江大学 | Angle modulation and wavelength modulation surface plasmon resonance (SPR) sharing system |
| CN103472576B (en) * | 2013-09-12 | 2016-05-18 | 北京信息科技大学 | Surface plasma strengthens total internal reflection fluorescent micro imaging method and device |
| CN103558011B (en) * | 2013-10-23 | 2015-11-04 | 国家电网公司 | A kind of experimental facilities measuring fibre-optic numerical aperture and attenuation coefficient |
| CN104198159B (en) * | 2014-07-31 | 2017-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of large-numerical aperture objective wave aberration detection means and method |
| CN105181652B (en) * | 2015-07-16 | 2019-01-18 | 深圳市深光谷科技有限公司 | Optical field imaging system based on surface plasmon-coupled emission effect |
| CN105628655B (en) * | 2015-12-24 | 2019-05-07 | 温州生物材料与工程研究所 | A kind of optical microscopy based on surface plasma body resonant vibration |
| CN106908222A (en) * | 2017-03-15 | 2017-06-30 | 北京航空航天大学 | A kind of measuring method and system of high accuracy microcobjective numerical aperture |
-
2017
- 2017-03-16 CN CN201710156194.8A patent/CN106802232B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN106802232A (en) | 2017-06-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101210806B (en) | measuring method of angle deviation along azimuth axis direction and pitching angle deviation of laser emission axis and mechanical base level normal based on secondary light source | |
| CN106802232B (en) | A kind of microcobjective numerical aperture measurement method and system based on total reflection | |
| CN100487369C (en) | Optical displacement measuring apparatus | |
| JP2007526468A (en) | Optical measuring head | |
| CN105992929B (en) | Device for non-contact optical ranging | |
| CN106908222A (en) | A kind of measuring method and system of high accuracy microcobjective numerical aperture | |
| JP2004513363A (en) | Especially for plasma resonance sensors for biosensor technology | |
| CN112556991A (en) | Lens refractive index measuring device and measuring method thereof | |
| JP5252641B2 (en) | Hole shape measurement method | |
| CN107782697B (en) | Method and device for measuring refractive index of broadband confocal infrared lens element | |
| JP2021043181A (en) | Lens refractive index measuring device and method for measurement by the same | |
| US20080137061A1 (en) | Displacement Measurement Sensor Using the Confocal Principle | |
| CN110736721A (en) | Glass plate refractive index uniformity detection device and detection method based on diffraction grating | |
| CN110836642A (en) | Color triangular displacement sensor based on triangulation method and measuring method thereof | |
| CN111238408A (en) | Device and method for rapidly measuring parallelism of parallel flat plate | |
| CN210863101U (en) | Lens refractive index measuring device | |
| CN101750020A (en) | Detection apparatus and toner detection apparatus using the same | |
| CN110986836B (en) | High-precision roughness measuring device based on annular core optical fiber | |
| CN209802633U (en) | Optical detection device | |
| CN116047707A (en) | Non-vertical autofocus system and corresponding optical instrument | |
| US20120316830A1 (en) | Coupled multi-wavelength confocal systems for distance measurements | |
| US10384152B2 (en) | Backscatter reductant anamorphic beam sampler | |
| JP2010216922A (en) | Optical displacement meter and optical displacement measurement method | |
| TWI770182B (en) | Measurement system and measurement method | |
| EP2103899A2 (en) | Optical displacement measuring apparatus and multifunctional optical displacement measuring apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190430 Termination date: 20200316 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |