CN209400421U - A kind of device measuring Fano resonance sensor detectable limit - Google Patents
A kind of device measuring Fano resonance sensor detectable limit Download PDFInfo
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- CN209400421U CN209400421U CN201821635072.3U CN201821635072U CN209400421U CN 209400421 U CN209400421 U CN 209400421U CN 201821635072 U CN201821635072 U CN 201821635072U CN 209400421 U CN209400421 U CN 209400421U
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- fano resonance
- detectable limit
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Abstract
The utility model discloses a kind of device and methods for measuring Fano resonance sensor detectable limit, device includes laser, collimator objective, polarizer, sensor, analyzer, focusing objective len and spectrometer, and the sensor includes couple prism, Au film, Cytop film, TiO2Film and sensor information.Relative to other polarimeters, the utility model uses surface plasma polarization mode, and the slab guide Mode Coupling formed in multilayer dielectricity generates Fano resonance, further promotes the detectable limit of plasma sensor；Original two polarizers are replaced with a polarizer, structure is more simple, more importantly, using a kind of polarization of method analysis reflected light for measuring Fano resonance sensor, traditional intensity of reflected light is replaced to detect with polarization function, the detectable limit of Fano resonance sensor has to be improved significantly.
Description
Technical field
The utility model relates to optical fields, and in particular to a kind of device for measuring Fano resonance sensor detectable limit.
Background technique
Surface plasma body resonant vibration (Surface Plasma Resonance, be abbreviated as SPR) is that a kind of optical physics is existing
As, when the propagation constant of the parallel wave vector of incident light and surface plasma matches, the free electron energy of metal surface
Resonance and absorption luminous energy, so as to cause the sharp-decay of reflection light.SPR sensorgram technology, which has, to be based on facilitating detection, sensitivity
High and real-time advantage is widely used in chemistry and biomolecule detection.However insertion loss caused by metal, lead to SPR
The formant of sensor is wide, therefore limits the detection accuracy of SPR sensor.
Surface plasma polarization (SPP) mode generated on metal medium interface, and in dielectric multi-layered middle formation
Slab guide mode (PWG), by collapsing field be overlapped mutually effect can produce Fano resonance.Biography based on Fano resonance
Sensor again may be by the variations in refractive index of the position measurement sensor information of variation or the resonance of monitoring reflectivity curve, with detection
The variation of chemistry and biomolecule.Compared to traditional spr sensor, the sensor based on Fano resonance possesses more sharp
Formant, to obtain higher accuracy and lower detectable limit.But due to miniature and low cost optical spectrometer available
Property, the sensor for being mostly based on Fano resonance is concentrated mainly in intensity detection.However, phase-detection is compared to intensity detection energy
Lower detectable limit is enough provided.It is similar to traditional SPR, also there is a violent phase transformation in Fano near-resonance, this is benefit
Possibility is provided with the phase information optimizing detection limit that Fano resonates.
The detection of phase information is mainly based upon interferometry, optical heterodyne and polarimetry.Wherein, using inclined
Vibration mensuration want much simpler, measured by the reflected intensity to different polarization angle, phase information can be by signal at
It is obtained after reason.But phase information still needs through measurement luminous intensity acquisition, they are very quick to the intensity noise of incident light
Sense, to affect the detectable limit of sensor；And the intensity needs of incident light are controlled by two polarizers, measurement dress
It sets more complex.
Utility model content
In view of this, the present invention provides it is a kind of measure Fano resonance sensor detectable limit device, only with
One polarizer substitutes original two polarizers, therefore device is simpler；And based on Fano resonate, compared to surface etc. from
Daughter resonance sensor can obtain more sharp formant, to improve the performance of sensor；With polarization function substitution tradition
Intensity of reflected light detection, have lower detectable limit.
To achieve the above object, the utility model uses a kind of technical solution: a kind of measurement Fano resonance sensor inspection
The device for surveying the limit, successively includes: laser, collimator objective, polarizer, sensor, analyzer, focusing along optical propagation direction
Object lens and spectrometer, the sensor successively include couple prism, Au film, Cytop film, TiO from top to bottom2Film and sensing are situated between
Matter.
The laser output laser exports directional light after the collimator objective, and the directional light passes through the polarizer
After obtain elliptically polarized light, the elliptically polarized light is irradiated on the couple prism of the sensor, through couple prism
The plane of incidence enters the Au film reflecting surface and is reflected, and is emitted after coupled prism exit facet, the p by the elliptically polarized light is inclined
Vibration with s polarized component phase difference is generated in the sensor, while on the couple prism and Au film excitating surface etc. from
Daughter resonance mode, in the Cytop film, TiO2Film and sensor information excitation plane waveguide mode, surface plasma body resonant vibration
Mode and the coupling of plane wave waveguide mode generate Fano resonance spectrum, and the elliptically polarized light comprising the Fano resonance spectrum passes through institute
It focuses after stating analyzer through the focusing objective len, is received by the spectrometer to be analyzed and processed.
Further, the couple prism is SF10 prism, and the laser uses wavelength to swash for the He-Ne of 632.8nm
Light device.
Further, the Cytop film with a thickness of 400-900nm, the TiO2Film with a thickness of 60-130 nm.
Further, the Au film with a thickness of 50nm.
The beneficial effects of the utility model are: being formed using surface plasma polarization mode, and in multilayer dielectricity
Slab guide Mode Coupling generate Fano resonance, further promoted plasma sensor detectable limit；It is polarized with one
Device substitutes original two polarizers, and structure is more simple.Importantly, using a kind of side for measuring Fano resonance sensor
Method analyzes the polarization of reflected light, replaces traditional intensity of reflected light to detect with polarization function, compared with traditional scheme, Fano
The detectable limit of resonance sensor has to be improved significantly.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other drawings may be obtained according to these drawings without any creative labor.
Fig. 1 is the utility model embodiment structural schematic diagram；
Fig. 2 is the curve synoptic diagram that the first polarization function cos Δ of the utility model embodiment changes with incident angle；
Fig. 3 is the curve synoptic diagram that the second polarization function tan ψ of the utility model embodiment changes with incident angle；
Fig. 4 be the utility model embodiment the first polarization function cos Δ and the second polarization function tan ψ noise with entering
Penetrate the curve synoptic diagram of angle change；
Fig. 5 is that the detectable limit of the first polarization function cos Δ of the utility model embodiment changes with waveguide layer thickness
Curve synoptic diagram；
Fig. 6 is the song that the detectable limit of the second polarization function tan ψ of the utility model embodiment changes with waveguide layer thickness
Line schematic diagram.
Fig. 7 is the measuring method flow chart of the utility model embodiment.
Wherein: 1- laser, 2- collimator objective, 3- polarizer, 4- sensor, 40- couple prism, 401- couple prism
The plane of incidence, 402- couple prism exit facet, 41-Au film, 410-Au film reflecting surface, 42-Cytop film, 43-TiO2Film, 44- are passed
Feel medium, 5- analyzer, 6- focusing objective len, 7- spectrometer.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, all other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
It is practical new to this below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer
Type embodiment is further described.
As shown in Figure 1, the utility model embodiment provides a kind of device for measuring Fano resonance sensor detectable limit,
It successively include laser 1, collimator objective 2, polarizer 3, sensor 4, analyzer 5, focusing objective len 6 and light along optical propagation direction
Spectrometer 7.The sensor 4 successively includes couple prism 40, Au film 41, Cytop film 42, TiO from top to bottom2Film 43 and sensing
Medium 44, the couple prism 40 and Au film 41 are used for excitating surface plasma polarization mode, the Cytop film 42, TiO2
Film 43 and sensor information 44 are used for excitation plane waveguide mode, and surface plasma polarization mode and plane wave waveguide mode are mutual
Coupling generates Fano resonance.The laser 1 exports laser and exports directional light after the collimator objective 2, and the directional light is logical
Elliptically polarized light is obtained after crossing the polarizer 3, the elliptically polarized light is irradiated to the couple prism of the sensor 4
On 40, enters the Au film reflecting surface 410 through the couple prism plane of incidence 401 and reflected, after coupled prism exit facet 402
Outgoing, by the p-polarization component and s polarized component of the elliptically polarized light (when light penetrates with non-perpendicular angle the table of optical element
When face, transmission and reflection characteristic all relies on polarization phenomena, and in this case, the coordinate system used is with containing input and reflection
That plane definition of light, if the polarization vector of light in this plane, referred to as p-polarization, if the polarization vector of light
Perpendicular to this plane, then referred to as s is polarized) phase difference that is generated in the sensor 4, while in 40 He of couple prism
Excitating surface plasma resonance mode on Au film 41, in the Cytop film 42, TiO244 excitation plane of film 43 and sensor information
Waveguide mode, surface plasma body resonant vibration mode and the coupling of plane wave waveguide mode generate Fano resonance spectrum, resonate comprising Fano
The elliptically polarized light of spectrum pass through the analyzer 5 after through the focusing objective len 6 focus, by the spectrometer 7 receive with
It is analyzed and processed.
Preferably, the sensor 4 is multi-layer film structure, and the couple prism 40 is SF10 prism.
Preferably, the Cytop film 42 with a thickness of 400-900nm, the TiO2Film 43 with a thickness of 60-130nm.
Preferably, the Au film 41 with a thickness of 50nm.
Preferably, the laser 1 uses wavelength for the He-Ne laser of 632.8nm.
The invention also discloses a kind of methods for measuring Fano resonance sensor detectable limit, based on one kind described above
The device of measurement Fano resonance sensor detectable limit is studied.
Referring to Fig. 7, the process for obtaining Fano resonance sensor detectable limit is illustrated by taking Fig. 1 as an example: specifically include with
Lower step:
Step 1: setting the ranges of incidence angles of the couple prism plane of incidence 401 as 0-90 °, the output of the laser 1
Light is incident at an angle in the ranges of incidence angles, will be described by axis of the p polarized component of 1 output light of laser
Polarizer 3 rotates B degree (for example, B=45 °), and the spectrometer 7 receives output optical signal；
Step 2: based on the received output optical signal of spectrometer 7 described in step 1, obtaining 5 output light of the analyzer letter
Number intensity；
Step 3: based on, using the polarization direction of the polarizer 3 as axis, the analyzer 5 being rotated a, b respectively in step 1
Or c degree (for example, a=-45 °, b=0 °, c=45 °), the laser 1 is rotated in the ranges of incidence angles changes the coupling
The incidence angle for closing the incident light in prism incidence face 401, obtains corresponding 5 output optical signal of the analyzer based on step 2
Intensity Ia、IBOr Ic；
Step 4: the output optical signal intensity I based on three directions in step 3a, IbAnd Ic, the first polarization is calculated
Function cos Δ and the second polarization function tan ψ；
Step 5: based on the first polarization function cos Δ described in step 4 and the second polarization function tan ψ, Fano is calculated
Resonance sensor detectable limit<Δ n>min。
The step 2 specifically includes:
Based on the received output optical signal of spectrometer 7 described in step 1, based on the received output light of spectrometer 7 described in step 1
Signal indicates the polarization state of complete polarized light by Jones's calculus, obtains the analyzer output optical signal intensity I
Are as follows:
Wherein, I0For the output light intensity of the laser 1, A is the polarization side of the analyzer 5 and the polarizer 3
To relevant rotation angle, Δ is the phase difference of p and s polarized component, and ψ is the emergent light and polarization ellipse long axis of the sensor 4
Angle；
The step 3 specifically includes:
Output optical signal intensity when the rotation angle A of the analyzer 5 is respectively a, b, c is Ia, IbAnd Ic, pass through formula
(2), (3) and (4) respectively indicate:
Wherein, cos Δ is the first polarization function, and tan ψ is the second polarization function；
The step 4 specifically includes the following steps:
Step 401: the output optical signal intensity I based on step 3 three obtained directiona, IbAnd Ic, calculate described second
Polarize function tan ψ:
Step 402: the output optical signal intensity I based on step 3 three obtained directiona, Ib, IcFunction is polarized with second,
Calculate the first polarization function cos Δ:
The step 5 specifically includes the following steps:
Step 501: the first polarization function cos Δ being obtained based on step 4, calculates the first polarization function cos Δ
Noise<Δ cos Δ>min:
In view of the influence of detected intensity fluctuation and 5 running accuracy of analyzer, the noise of the first polarization function cos Δ
<ΔcosΔ>minIt is calculated by formula (7):
Wherein, Δ I is the fluctuation for detecting light signal strength, and Δ A is the accuracy of 5 rotatable phase of analyzer, < Δ
cosΔ>minThe noise for polarizing function cos Δ for described first, < Δ A |A=-a>min,,<ΔA|A=b>min, and < Δ A |A=c>min
For the noise figure of 5 running accuracy of analyzer described on three direction of rotation, < Δ Ia>min, <ΔIb>min, and < Δ Ic>minFor institute
The average noise in three directions between polarizer 3 and analyzer 5 is stated,
Step 502: the second polarization function tan ψ being obtained based on step 4, calculates the second polarization function tan ψ's
Noise<Δ tan ψ>min:
Step 503: the calculated result based on step 501 and 502 calculates the first polarization function cos Δ and second partially
The detectable limit<Δ n>of vibration function tan ψmin:
Wherein, FOM is the quality factor that function is polarized described in measure spectrum, YmaxAnd YminIt is inclined described in measure spectrum
The maximum and minimum value of vibration function,<Δ Y>minIt is the noise figure of the polarization function；
The quality factor FOM is described by formula (10):
Wherein, SL is the slope near the polarization extreme value of a function point, SθIt is that the angle for polarizing extreme value of a function point is sensitive
Degree.
Referring to Fig. 2 and Fig. 3, meet the first polarization function cos Δ described in embodiment and the second polarization function tan based on above-mentioned
There is an asymmetric sharp formant, folding of the sharp formant to sample near Fano resonance angle in ψ
It is sensitive to penetrate rate variation, and provides narrower formant compared to traditional plasma sensor, reduces plasma biography
The loss of sensor, therefore the detectable limit of plasma sensor can be further improved.
Referring to Fig. 4, solid line and dotted line, which respectively represent, above-mentioned meets the first polarization function cos Δ and second described in embodiment partially
The detection noise<Δ cos Δ>of vibration function tan ψmin<Δ tan ψ>min.The detection noise<Δ cos Δ>min< Δ tan ψ
>minSize affect the performance of sensor, function noise is smaller, and the detectable limit of acquisition is lower.Detection noise curve exists
Nearby equally there is an asymmetric sharp formant in Fano resonance angle, compared to the first polarization function cos
The minimum point of Δ and the second polarization function tan ψ, the corresponding noise figure of maximum point is smaller, therefore can obtain lower inspection
Survey the limit.
Referring to figure 5 and figure 6, the detectable limit of the provided Fano resonance sensor device of the utility model embodiment is with described
TiO2The variation of 43 thickness of film, by changing the TiO2The thickness of film 43 adjusts the strength of resonance, to obtain corresponding detection
Intensity.Preferably, the Cytop film 42 with a thickness of 700nm；Fano resonance sensor is under the premise of considering noise at this time,
By the method for the measurement Fano resonance sensor detectable limit, detectable limit reaches 6.20 × 10-9RIU, compared to based on strong
The measurement method of detection is spent, detectable limit improves an order of magnitude.
In order to be best understood from the utility model, the parameter for illustrating each main device of the utility model and method is as follows,
But it should be noted that following parameter is the proposed parameter that the utility model provides, design parameter can be carried out according to actual requirement
Change, should be included within the scope of protection of this utility model.
It is describedWithIn a
Respectively by formula (11) when=- 45 °, b=0 °, c=45 °, (12), (13), (14), (15) and (16) are indicated:
It is describedWithIn a=-
Respectively by formula (17) when 45 °, b=0 °, c=45 °, (18), (19), (20), (21) and (22) are indicated:
The rotation angle A of the analyzer 5 output optical signal intensity at a=-45 °, b=0 °, c=45 ° respectively are as follows:
Ib=I0tan2ψ (24)
It is worth noting that: in the description of the present invention, unless otherwise clearly defined and limited, term " peace
The terms such as dress ", " connected ", " connection ", " fixation " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to detachable
Connection, or be integrally connected, it can be mechanical connection, it for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
Herein, the nouns of locality such as related front, rear, top, and bottom are to be located in figure with components in attached drawing and zero
Part mutual position defines, only for the purpose of expressing the technical solution clearly and conveniently.It should be appreciated that the noun of locality
Use should not limit the claimed range of the application.
In the absence of conflict, the feature in embodiment and embodiment herein-above set forth can be combined with each other.
Above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；Although referring to aforementioned reality
Example is applied the utility model is described in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
It modifies or replaces, the spirit and model of various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (4)
1. a kind of device for measuring Fano resonance sensor detectable limit, it is characterised in that: the measurement Fano resonance sensor
The device of detectable limit successively includes: laser along optical propagation direction, collimator objective, polarizer, sensor, analyzer, gathers
Focus objective lens and spectrometer, the sensor successively include couple prism, Au film, Cytop film, TiO from top to bottom2Film and sensing are situated between
Matter；
The laser output laser exports directional light after the collimator objective, and the directional light obtains after passing through the polarizer
To elliptically polarized light, the elliptically polarized light is irradiated on the couple prism of the sensor, through couple prism incidence
Face, which enters, the Au film reflecting surface and to be reflected, and is emitted after coupled prism exit facet, by the elliptically polarized light p-polarization with
S polarized component generates phase difference, while the excitating surface plasma on the couple prism and Au film in the sensor
Resonance mode, in the Cytop film, TiO2Film and sensor information excitation plane waveguide mode, surface plasma body resonant vibration mode
It is coupled with plane wave waveguide mode and generates Fano resonance spectrum, the elliptically polarized light comprising the Fano resonance spectrum passes through the inspection
It focuses after inclined device through the focusing objective len, is received by the spectrometer to be analyzed and processed.
2. the device of measurement Fano resonance sensor detectable limit according to claim 1, it is characterised in that: the coupling
Prism is SF10 prism, and the laser uses wavelength for the He-Ne laser of 632.8nm.
3. the device of measurement Fano resonance sensor detectable limit according to claim 1, it is characterised in that: described
Cytop film with a thickness of 400-900nm, the TiO2Film with a thickness of 60-130nm.
4. the device of measurement Fano resonance sensor detectable limit according to claim 1, it is characterised in that: the Au film
With a thickness of 50nm.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297934A (en) * | 2018-10-09 | 2019-02-01 | 中国地质大学（武汉） | A kind of device and method measuring Fano resonance sensor detectable limit |
| CN113418893A (en) * | 2021-05-11 | 2021-09-21 | 山西恒光微电子集成科技有限公司 | Ultra-sensitive refractive index optical biosensor based on sub-wavelength grating |
-
2018
- 2018-10-09 CN CN201821635072.3U patent/CN209400421U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297934A (en) * | 2018-10-09 | 2019-02-01 | 中国地质大学（武汉） | A kind of device and method measuring Fano resonance sensor detectable limit |
| CN109297934B (en) * | 2018-10-09 | 2023-05-26 | 中国地质大学（武汉） | Device and method for measuring detection limit of Fano resonance sensor |
| CN113418893A (en) * | 2021-05-11 | 2021-09-21 | 山西恒光微电子集成科技有限公司 | Ultra-sensitive refractive index optical biosensor based on sub-wavelength grating |
| CN113418893B (en) * | 2021-05-11 | 2022-10-04 | 山西恒光微电子集成科技有限公司 | Ultra-sensitive refractive index optical biosensor based on sub-wavelength grating |
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