CN109405971A - A kind of micro- polarization spectrum analysis system and method - Google Patents
A kind of micro- polarization spectrum analysis system and method Download PDFInfo
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- CN109405971A CN109405971A CN201811213379.9A CN201811213379A CN109405971A CN 109405971 A CN109405971 A CN 109405971A CN 201811213379 A CN201811213379 A CN 201811213379A CN 109405971 A CN109405971 A CN 109405971A
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- 230000010287 polarization Effects 0.000 title claims abstract description 92
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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Abstract
The invention proposes a kind of micro- polarization spectrum analysis system, including white light source, it is polarized system, polarization analysis system and micro imaging system, described be polarized between system and polarization analysis system is provided with sample；It is described be polarized system include one can be around the optical polariser of center axis rotation；The polarization analysis system includes polarization beam apparatus and the first spectrometer and the second spectrometer, and the polarization beam apparatus passes through optical fiber respectively and connect with the first spectrometer and the second spectrometer；The micro imaging system includes object lens before being placed in sample and the imaging len being placed in front of camera.System of the invention is suitable for the entire SPECTRAL REGION from ultraviolet to infrared, and simple structure can measure the magneto-optical property of entire spectrum.
Description
Technical field
The present invention relates to a kind of structural analyses that can be used for material and optical absorption and polarization spectrum technology, specifically
Say it is a kind of micro- polarization spectrum analysis system and method, belongs to light polarization analysis technical field.
Background technique
1845, when faraday has found that linearly polarized photon is propagated in magnetic field by glass, plane of polarization was rotated；
Subsequent Ke Er has also discovered similar result in reflective devices.This phenomenon be called magneto-optic (magneto-optical,
MO) effect has nowadays been widely used in magnetizing the fields such as imaging, magnetic optical disc, telecommunications and current sensor.
In general, MO activity be it is very small, normally behave as Faraday rotation angle less than 1 °, since modulation amplitude depends on
The size of wavelength, traditional system is based on monochromatic modulator approach using a kind of, in order to obtain the active spectral information of MO, needs
To change optical wavelength by monochromator.Therefore, these systems take greatly for the active high sensitivity of the MO for improving very little
The time of amount.The active fast spectrum characterization of MO is waited in expectation by people always.
Summary of the invention
A kind of micro- polarization spectrum point is provided the technical problem to be solved by the present invention is to, overcome the deficiencies in the prior art
Analysis system, while giving micro- polarization spectrum analysis method, can quickly, neatly to UV(ultraviolet light) arrive IR(infrared ray)
Full spectral region carry out MO spectrum evaluation.
The present invention provides a kind of micro- polarization spectrum analysis system, including white light source, is polarized system, polarization analysis system
And micro imaging system, described be polarized between system and polarization analysis system is provided with sample S；The system that is polarized includes one
It is a can be around the optical polariser P of center axis rotation；The polarization analysis system includes a polarization beam apparatus PBS
(polarization beam splitter) and two identical spectrometers, respectively the first spectrometer and the second spectrum
Instrument, the polarization beam apparatus PBS pass through optical fiber respectively and connect with the first spectrometer and the second spectrometer；The micro imaging system
Including being placed in the object lens L3 before sample S and being placed in the imaging len L2 before camera CCD.
It is reported that natural light is by just becoming linearly polarized light after polarizer.The fact that property conclusion is by as a Xiang Ji
Plinth technology is widely used in polarizing in tomography.Linearly polarized light can be indicated that linear optical element can be by Jones by Jones vector
Matrix indicates.When light passes through optical element, by obtaining the product of the Jones matrix of optical element and the Jones vector of incident light,
The gained of available emergent light polarizes.The present invention is based on this simple ideas to devise a kind of polarization analysis spectrometer system
And method, it is measured in parallel using white light source and to its wavelength, the measurement entire spectrum MO active time is greatly saved.
Of the invention is polarized system for changing the polarization direction of light beam, and polarization analysis system is for generating polarised light and analyzing received
Polarised light, micro imaging system are used for collimated light beam and imaging.
As further technical solution of the present invention, further, by light beam, at this, to be polarized the direction of propagation in system (horizontal
To) be defined as z-axis, with direction of beam propagation it is perpendicular be vertically defined as y-axis, it is fixed with the perpendicular longitudinal direction in light velocity propagation direction
Justice is x-axis；The optical polariser P is set on electric platforms, between the polarization direction and x-axis of the optical polariser P
Angle is 45 °.
Further, the light inlet of the white light source towards the first optical fiber is arranged, the light-emitting window court of first optical fiber
Arranged to the first collimation lens L1, be provided with spectroscope BS(beam splitter below the first collimation lens L1), it is described
Be provided with optical polariser P in front of spectroscope BS, the rear the spectroscope BS is provided with camera, the optical polariser P with
Imaging len L2, sample S and object lens L3 are disposed in connection optical path between polarization beam apparatus PBS.
In above structure, imaging len L2, object lens L3 form micro imaging system, by the micro imaging system in sample
Upper selected analyzed area, carries out polarization microscopic analysis to sample；Camera is used to be imaged and detect the focused condition of imaging len L2；
The micro imaging system can also be used in the pattern to material, size is observed and analyzed, at the same to the anisotropy of material into
Row measurement analysis etc..
Further, optical filter ND is provided in the connection optical path between the first collimation lens L1 and spectroscope BS
(the neutral density filter).
Further, the connection optical path between the first collimation lens L1 and spectroscope BS is arranged along the x-axis direction, described
Connection optical path between spectroscope BS and polarization beam apparatus PBS is arranged along the z-axis direction.
Further, there is the polarization beam apparatus PBS perpendicular light beam transmission output end and light beam to reflect output end,
The light beam transmission output end of the polarization beam apparatus PBS is arranged along the z-axis direction, and the light beam of the polarization beam apparatus PBS is saturating
It penetrates output end and is provided with the 4th collimation lens L4, the 4th collimation lens L4 is connected by the second optical fiber with the first spectrometer；
The light beam reflection output end of the polarization beam apparatus PBS is arranged along the x-axis direction, and the light beam of the polarization beam apparatus PBS is anti-
It penetrates output end and is provided with the 5th collimation lens L5, the 5th collimation lens L5 is connected by third optical fiber with the second spectrometer.
In this way, incident beam is after polarization beam apparatus PBS respectively through collimation lens again through fiber coupling entering light spectrometer.
Further, the spectroscope BS reflects output end with the light beam of arrangement in the z-axis direction and light beam transmission is defeated
The light beam reflection output end of outlet, the spectroscope BS is provided with optical polariser P, and the light beam of the spectroscope BS transmits output
End is provided with camera.
Further, the sample S is set to along the magnetic field that optical propagation direction (Z axis) applies.
Further, the white light source, be polarized system, polarization analysis system and micro imaging system and be installed in damping
Damping optical platform (platform is for placing all optical elements).
The present invention also provides a kind of micro- polarization spectrum analysis methods, method includes the following steps:
The first step, when the polarization direction of optical polariser P and x-axis are in 45 ° of angles, incident beam warp that spectroscope BS is reflected
Become linearly polarized light after crossing optical polariser P, which is expressed as using Jones vector；
After sample S, the plane of polarization of emergent light rotates by a certain angle for second step, linearly polarized light, then the emergent light uses
Jones vector is expressed as
；
Third step, incident beam continue to propagate after polarized systems, and it is mutual to be divided into polarization state by polarization beam apparatus PBS
Vertical two light beams, wherein a branch of light beam propagated along the z-axis direction through after the 4th collimation lens L4 through the second fiber coupling
Enter the first spectrometer to be analyzed, obtains the luminous intensity size of the Shu Guang, be denoted as；The light beam that another beam is propagated along the x-axis direction
It is analyzed through the second spectrometer is entered through third fiber coupling after the 5th collimation lens L5, the luminous intensity for obtaining the Shu Guang is big
It is small, it is denoted as；
4th step calculates faraday rotation angle according to the following formula,
。
The present invention inhibits common-mode noise using two general spectrometer Differential Detections, increases signal-to-noise ratio.
The invention adopts the above technical scheme compared with prior art, has following technical effect that
(1) system of the invention only need the spectroscopic light source of a steady and continuous, a polarizer, two general spectrometers and
Some optical element compositions, system cost are low；
(2) system and method for the invention are flexible, are suitable for from ultraviolet to infrared, or even the full spectrum model in Terahertz application
It encloses；
(3) due to using spectrometer and continuous spectrum light source, the testing time that analysis method of the invention composes magneto-optic is greatly shortened,
Spectrum analysis, so that it may obtain full wave magneto-optic spectral property.
In short, system of the invention is suitable for the entire SPECTRAL REGION from ultraviolet to infrared, simple structure can be measured whole
The magneto-optical property of a spectrum.Micro- polarization spectrum analysis system of the invention is widely used in the neck such as material, chemistry, biology, medicine
Domain.
Detailed description of the invention
Fig. 1 is the hardware frame and structural schematic diagram of present system.
Fig. 2 is that (illustration shows that belt edge is attached for the Faraday rotation angle that sample is monocrystalline GaAs in the present invention and transmittance figure
Close enlarged view).
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawing:
The present embodiment proposes a kind of micro- polarization spectrum analysis system, as shown in Figure 1, including white light source, being polarized system, is inclined
Vibration analysis system and micro imaging system, white light source are polarized system, polarization analysis system and micro imaging system and are installed in
Damping shock absorption optical platform, is provided with sample S between the system that is polarized and polarization analysis system, and sample S is set to along light propagation
In the magnetic field that direction (Z axis) applies.The system of being polarized include one can be around the optical polariser P of center axis rotation, by light beam at this
The direction of propagation (transverse direction) being polarized in system is defined as z-axis, with direction of beam propagation it is perpendicular vertically be defined as y-axis, with light
The perpendicular longitudinal direction in the fast direction of propagation is defined as x-axis, and optical polariser P is set on electric platforms, the polarization of optical polariser P
Angle between direction and x-axis is 45 °.Polarization analysis system includes a polarization beam apparatus PBS and two identical spectrum
Instrument, respectively the first spectrometer and the second spectrometer, polarization beam apparatus PBS pass through optical fiber and the first spectrometer and the second light respectively
Spectrometer connection.Micro imaging system includes object lens L3 before the being placed in sample S and imaging len L2 being placed in front of camera CCD.
In detail, the light inlet of white light source towards the first optical fiber is arranged, the light-emitting window of the first optical fiber is collimated towards first
Lens L1 arrangement, the first lower section collimation lens L1 is provided with spectroscope BS, between the first collimation lens L1 and spectroscope BS
It is provided with neutral-density filter ND in connection optical path, the connection optical path between the first collimation lens L1 and spectroscope BS is along x-axis
Direction arrangement.It is provided with optical polariser P in front of spectroscope BS, the rear spectroscope BS is provided with camera CCD, in optical polariser
Be disposed with imaging len L2, sample S and object lens L3 in connection optical path between P and polarization beam apparatus PBS, spectroscope BS with
Connection optical path between polarization beam apparatus PBS is arranged along the z-axis direction.
In addition, there is polarization beam apparatus PBS perpendicular light beam transmission output end and light beam to reflect output end, polarization beam splitting
The light beam transmission output end of device PBS is arranged along the z-axis direction, and the light beam transmission output end of polarization beam apparatus PBS is provided with the
Four collimation lens L4, the 4th collimation lens L4 are connected by the second optical fiber with the first spectrometer；The light beam of polarization beam apparatus PBS is anti-
It penetrates output end to arrange along the x-axis direction, and the light beam reflection output end of polarization beam apparatus PBS is provided with the 5th collimation lens L5,
5th collimation lens L5 is connected by third optical fiber with the second spectrometer.Spectroscope BS has the light beam of arrangement in the z-axis direction
It reflects output end and light beam transmits output end, the light beam reflection output end of spectroscope BS is provided with optical polariser P, spectroscope BS
Light beam transmission output end be provided with camera.
The system of the present embodiment will measure optics and magneto-optic spectral property of the visible light near infrared band monocrystalline GaAs.White light
Light source uses halogen tungsten lamp light source (Halogen), and halogen tungsten lamp light source chooses the HL-2000 for coming from marine optics (O.O.), power
For 7 W, stability 0.5% was drifted about less than 0.3%/hour；Two spectrometer (Spectrometer) smooth widths are set
It is 5, the time of integration is set as 100 milliseconds；First collimation lens L1 choose from Mitutoyo Mplan Apo 2 ×,
Focal length is 100mm, numerical aperture 0.055；Second collimation lens (imaging len) L2 and third collimation lens (object lens) L3 choosing
Take from M Plan Apo NIR 20 ×, focal length 10mm, numerical aperture 0.40；4th collimation lens L4 is used
O.O. UV-74 collimation lens.All optical elements are installed on damping shock absorption optical platform.Optical polariser P is pacified
On electronic article carrying platform, polarization direction is at 45 ° with x-axis.The first collimation lens L1 and the second collimation lens L2 are adjusted,
The circle for being 40 microns until occurring a diameter in CCD camera.Object lens L3 and other collimation lenses are adjusted, and pass through two spectrum
The luminous intensity of instrument measurement two-beamWith, until the luminous intensity of two-beam is equal.
Firstly, monocrystalline GaAs sample S is placed between object lens L3 and optical polariser P, sample S with a thickness of 0.625
mm.Then, apply the magnetic field for being up to 1T along z-axis using double yoke electromagnet with through-hole.Finally, passing through two spectrometer measurements
The luminous intensity of two-beam after PBSWith, faraday rotation angle is calculated using (1) formula.If Fig. 2 is its wavelength from 880
The faraday rotation angle and transmissivity of nm to 1600 nm.Illustration is the enlarged view near belt edge.
A kind of micro- polarization spectrum analysis method, method includes the following steps:
The first step, when the polarization direction of optical polariser P and x-axis are in 45 ° of angles, incident beam warp that spectroscope BS is reflected
Become linearly polarized light after crossing optical polariser P, which is expressed as using Jones vector；
After sample S, the plane of polarization of emergent light rotates by a certain angle for second step, linearly polarized light, then the emergent light uses
Jones vector is expressed as
；
Third step, incident beam continue to propagate after polarized systems, and it is mutual to be divided into polarization state by polarization beam apparatus PBS
Vertical two light beams, wherein a branch of light beam propagated along the z-axis direction through after the 4th collimation lens L4 through the second fiber coupling
Enter the first spectrometer to be analyzed, obtains the luminous intensity size of the Shu Guang, be denoted as；The light beam that another beam is propagated along the x-axis direction
It is analyzed through the second spectrometer is entered through third fiber coupling after the 5th collimation lens L5, the luminous intensity for obtaining the Shu Guang is big
It is small, it is denoted as；
4th step calculates faraday rotation angle according to the following formula,
(1).
The above, the only specific embodiment in the present invention, but scope of protection of the present invention is not limited thereto, appoints
What is familiar with the people of the technology within the technical scope disclosed by the invention, it will be appreciated that expects transforms or replaces, and should all cover
Within scope of the invention, therefore, the scope of protection of the invention shall be subject to the scope of protection specified in the patent claim.It is worth
One is mentioned that, the polarization analysis system that the present invention mentions, be applicable not only to sample it is magnetic caused by magneto-optic effect, be also applied for by
The variation of the sample polarization state of the generations such as any other outfield such as temperature, electric field, pressure, these variations can also be using this
System carries out micro- polarization Spectral structure.
Claims (10)
1. a kind of micro- polarization spectrum analysis system, it is characterised in that: including white light source, be polarized system, polarization analysis system
And micro imaging system, described be polarized between system and polarization analysis system is provided with sample；The system that is polarized includes one
It is a can be around the optical polariser of center axis rotation；The polarization analysis system includes polarization beam apparatus and the first spectrometer and
Two spectrometers, the polarization beam apparatus pass through optical fiber respectively and connect with the first spectrometer and the second spectrometer；The micro-imaging
System includes object lens before being placed in sample and the imaging len being placed in front of camera.
2. a kind of micro- polarization spectrum analysis system according to claim 1, it is characterised in that: by light beam in being polarized system
The direction of propagation be defined as z-axis, with direction of beam propagation it is perpendicular vertically be defined as y-axis, it is perpendicular with light velocity propagation direction
Longitudinal direction be defined as x-axis；The optical polariser is set on electric platforms, the polarization direction of the optical polariser and x-axis
Between angle be 45 °.
3. a kind of micro- polarization spectrum analysis system according to claim 2, it is characterised in that: the white light source is towards the
The light inlet of one optical fiber, towards the first collimation lens, the first collimation lens lower section is arranged the light-emitting window of first optical fiber
There is spectroscope, be provided with optical polariser in front of the spectroscope, the spectroscope rear is provided with camera, rises in the optics
Imaging len, sample and object lens are disposed in connection optical path between inclined device and polarization beam apparatus.
4. a kind of micro- polarization spectrum analysis system according to claim 3, it is characterised in that: in first collimation lens
Optical filter is provided in connection optical path between spectroscope.
5. a kind of micro- polarization spectrum analysis system according to claim 4, it is characterised in that: first collimation lens with
Connection optical path between spectroscope arranges that the connection optical path between the spectroscope and polarization beam apparatus is along z-axis side along the x-axis direction
To arrangement.
6. a kind of micro- polarization spectrum analysis system according to claim 5, it is characterised in that: the polarization beam apparatus has
Perpendicular light beam transmission output end and light beam reflect output end, and the light beam transmission output end of the polarization beam apparatus is along z-axis side
The light beam transmission output end of arrangement, and the polarization beam apparatus is provided with the 4th collimation lens, the 4th collimation lens
It is connected by the second optical fiber with the first spectrometer；The light beam of the polarization beam apparatus reflects output end to be arranged along the x-axis direction, and
The light beam reflection output end of the polarization beam apparatus is provided with the 5th collimation lens, and the 5th collimation lens passes through third optical fiber
It is connected with the second spectrometer.
7. a kind of micro- polarization spectrum analysis system according to claim 6, it is characterised in that: the spectroscope has arrangement
Light beam reflection output end and light beam in the z-axis direction transmits output end, and spectroscopical light beam reflection output end is provided with
Optical polariser, spectroscopical light beam transmission output end are provided with camera.
8. a kind of micro- polarization spectrum analysis system according to claim 7, it is characterised in that: the sample is set to along light
In the magnetic field that the direction of propagation applies.
9. a kind of micro- polarization spectrum analysis system according to claim 8, it is characterised in that: the white light source is polarized
System, polarization analysis system and micro imaging system are installed in damping shock absorption optical platform.
10. a kind of micro- polarization spectrum analysis method, which comprises the following steps:
The first step, when the polarization direction of optical polariser and x-axis are in 45 ° of angles, the incident beam that spectroscope reflects passes through
Become linearly polarized light after optical polariser, which is expressed as using Jones vector；
After sample, the plane of polarization of emergent light rotates by a certain angle for second step, linearly polarized light, then the emergent light uses fine jade
This vector representation is
；
Third step, incident beam continue to propagate, and are divided into the orthogonal two light beams of polarization state by polarization beam apparatus, wherein
A branch of light beam propagated along the z-axis direction enters the first spectrometer through the second fiber coupling and is analyzed after penetrating the 4th collimation lens,
The luminous intensity size of the Shu Guang is obtained, is denoted as；The light beam that another beam is propagated along the x-axis direction penetrates after the 5th collimation lens through the
Three fiber couplings enter the second spectrometer and are analyzed, and obtain the luminous intensity size of the Shu Guang, are denoted as；
4th step calculates faraday rotation angle according to the following formula,
。
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| CN110132852A (en) * | 2019-04-23 | 2019-08-16 | 上海大学 | A kind of Transflective Mueller matrix polarization micro imaging system |
| CN110715732A (en) * | 2019-10-17 | 2020-01-21 | 北京理工大学 | Multifunctional Stokes-Mueller imaging and spectrum detection system and detection method |
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