CN1367395A - Near-field optical virtual optic probe - Google Patents
Near-field optical virtual optic probe Download PDFInfo
- Publication number
- CN1367395A CN1367395A CN 02104075 CN02104075A CN1367395A CN 1367395 A CN1367395 A CN 1367395A CN 02104075 CN02104075 CN 02104075 CN 02104075 A CN02104075 A CN 02104075A CN 1367395 A CN1367395 A CN 1367395A
- Authority
- CN
- China
- Prior art keywords
- diaphragm
- field
- aperture
- optical
- field optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The present invention relates to a near field optical virtual probe, and is characterized by that a small-hole diaphragm is set at interface place of two media with different refractivities so as to make the evanscent field interferences produced when the incident beam whose in incident angle is greater than critical angle produces total reflection overlap to form constrained optical field, and the central peak of said constrained optical field can be formed into near field optical virtual probe. Its light-flux efficiency is high, and is 10 to the power 2-10 to the power 4 times that of general nano aperture optical fibre probe, and the half-peak value width of middle pek of its optical field distribution (i.e. size is virtual optical probe) can be basically retained and unchanged in the wavelength depth space range. It can be used in near-field optical spectral detectino, near-field optical storage, nano p hotoetching and near-field optical operation, etc.
Description
Technical field
The invention belongs near field optic, nanocomposite optical technical field, particularly the interference of evanscent field stack forms the design of constraint light field and nanoscale near-field optical virtual optic probe.
Background technology
The light source that obtains nanoscale is one of gordian technique near field optic imaging, detection, nano-photoetching and the near field of light storage system.The metal-coated membrane optical fiber probe that has nano aperture over past ten years is widely used, and still, the logical optical efficiency of optical fiber probe is very low, is generally 10
-4～10
-5Afterwards, near field optic imaging, near field optic field of storage, (Solid Immersion Lens, use SIL) made logical optical efficiency be greatly improved to solid immersion lens.Yet, it is the bottom surface of SIL or the distance between optical fiber probe and observation or recording medium must be controlled at near-field region that this method and optical fiber probe have a common shortcoming, be approximately about 50 nanometers, this makes spacing control very difficult, be easy to cause the collision between SIL or probe and medium, cause damage.
Summary of the invention
It is low to the objective of the invention is to overcome the logical optical efficiency of existing optical fiber probe, and harsh shortcomings such as spacing control requirement in it and the SIL system, proposes a kind of near-field optical virtual optic probe and its implementation.
The present invention proposes also to have designed a kind of near-field optical virtual optic probe, and it comprises two kinds of media with different refractivity and at the aperture that is provided with at the interface of this two media.Utilize incident angle greater than two bundles of critical angle or the directional light of multi beam finite size, it also can be the hollow cone light beam, the total reflection of generation at the interface at two media, interference stack between consequent evanscent field forms the constraint light field, the central peak of this constraint light field can outwards not dispersed in wavelength deep space scope, form the nanometer light beam, become the nanoscale near-field optical virtual optic probe.
Said aperture is directional light or the hollow cone light beam that is used to produce finite size, and the shape of diaphragm can be the aperture of circular, square, annular or other special shape, as Contraband shape, worker's shape, semi-round ring shape, C shape etc.The aperture outline range of size of diaphragm is 0.5 μ m～3 μ m.The material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5nm～200nm.
Said hollow cone light beam can focus on the interface of two media through the focusing objective len of large-numerical aperture by annular beam, forms the hollow cone light beam that satisfies total reflection condition at the interface at two media.Used annular beam can be by acquisitions such as annular diaphragm, the reflection of bipyramid face, the refraction of bipyramid face, holographic method.
Said evanscent field is produced in the total reflection that takes place at the interface of two media by the directional light or the hollow cone light beam of two bundles, multi beam finite size, is present in the wavelength coverage of near interface of two media.These interference stacks that have between the evanscent field of different directions have formed the constraint light field.
The present invention is based on the near field optic evanscent field and interferes superposition principle to design and produce.The formation of near-field optical virtual optic probe can be divided into following process and understand: (one) at two kinds of media with different refractivity at the interface, when incident angle greater than the light beam of critical angle when optically denser medium is injected optically thinner medium, total reflection is taking place at the interface, produce evanscent field, wherein the interference of capable ripple evanscent field stack makes the light field redistribution in opposite directions, and this light field has multilevel multi-peak feature.(2) at the aperture that appropriate size is set at the interface, form the constraint light field, very big enhanced field appears in its symcenter place, form central peak, it is not outwards dispersed in wavelength distance and forms the nanometer light beam, promptly the halfwidth of the central peak of optical field distribution (Full Width at Half Maximum, FWHM) in the wavelength deep space not the variation with distance change, but energy will be decayed with the increase of distance, becomes near-field optical virtual optic probe.Its principle schematic as shown in Figure 1,1 for refractive index is 1 air, 2 for refractive index is the medium of n (n＞1), 3 is incident angle θ
iGreater than critical angle θ
c(θ
c=arcsin (1/n)) the limited incident light of two bundles, 4 is the optical field distribution of interfering stack to produce by the evanscent field that total internal reflection excites.The halfwidth of this optical field distribution does not change with the variation of distance Z within the specific limits.Wherein, the relative value of secondary lobe and central peak is subjected to the influence of the factors such as relative index of refraction of the aperture size of aperture and shape, two media in the optical field distribution.In addition, the constraint optical field distribution is subjected to the influence of the factors such as refringence of the shape of effective numerical aperture, aperture of incident light wave length, polarization state, incident angle, system and size, two media.
This near-field optical virtual optic probe of the present invention, its logical optical efficiency is 10
-2Magnitude, be common nano aperture optical fiber probe logical optical efficiency 10
2～10
4Doubly; The half-peak value width of the middle crest of its optical field distribution (being the size of virtual light probe) remains unchanged in wavelength deep space scope substantially, and its scope is 100nm～300nm.Compare with general near-field optical systems, this near-field optical virtual optic probe has relaxed the control requirement to the near-field nanometer spacing greatly, expands to 100～600nm from 10～50nm, is easy to control; Resolution is higher than diffraction limit; Realize easily than optical fiber type nano-probe on the technology, and logical optical efficiency has improved 10 than common nano aperture optical fiber probe
2～10
4Doubly; Be easier to be used in combination with conventional optical microscope.
Near-field optical virtual optic probe of the present invention can be applicable to fields such as near field optic spectrographic detection, near field optic data storage, near field photoetching, the operation of near field optic light.
Brief Description Of Drawings:
Fig. 1 is the principle schematic of near-field optical virtual optic probe.
Fig. 2 is a computation model synoptic diagram of the present invention.
Fig. 3 is the aperture geometric configuration figure among Fig. 2.
Fig. 4,5,6 is the optical field distribution figure of computation model of the present invention.
Fig. 7 is the diameter variation curve of the logical optical efficiency oblong aperture of computation model of the present invention.
Fig. 8 is that the halfwidth of middle crest of computation model of the present invention is with the change curve of distance.
Fig. 9 is that the peak strength of middle crest of computation model of the present invention is with the change curve of distance.
Figure 10 is the theory of constitution figure that embodiments of the invention 1 adopt the near-field optical virtual optic probe system of isosceles right triangle prism.
Figure 11 is the aperture geometric configuration figure among Figure 10.
Figure 12 is the theory of constitution figure that embodiments of the invention 2 adopt the near-field optical virtual optic probe system of hemispherical solid immersion lens.
Figure 13 is the aperture geometric configuration figure among Figure 12.
Embodiment
Near-field optical virtual optic probe of the present invention is described in detail as follows in conjunction with two kinds of embodiment:
For the optical field distribution of near-field optical virtual optic probe, can adopt computation model shown in Figure 2, utilize the Finite Difference-Time Domain separating method to carry out simulation calculation.Among Fig. 2, the refractive index of two media 6,8 is respectively n
1=2, n
2=1 (n
1＞n
2), two media a circular aperture diaphragm 7 is set at the interface, adopt metal material to make, thicknesses of layers is 100nm, available perfect conductor is simulated.The making of aperture 9 can be adopted method processing such as focused ion beam (FIB) etching, chemical etching, photoetching.The geometric configuration of circular aperture diaphragm as shown in Figure 3,10 is metal film, 11 is circular aperture, its diameter D is 1.5 μ m.The three dimensions of whole required calculating is divided into N uniformly
x* N
yN
zIndividual grid cell, each cell is respectively Δ x, Δ y, Δ z along the space step-length of change in coordinate axis direction.Calculate and adopt Δ x=Δ y=Δ z=50nm, N
x=N
y=N
z=100.Incident light wave length is 650nm, and along y direction polarization, two bundle incident angles are 45 ° plane wave 5 from both direction incident.As calculated, can obtain distance on the plane of two medium interface 250nm optical field distribution figure and the directions X sectional view shown in Fig. 4,5.Figure can significantly find out from this two width of cloth: light field distributes axisymmetricly along the y axle, and this is relevant with the polarization of incident light attitude, and the component of y polarization direction accounts for major part in optical field distribution, and the x that is produced by the depolarization phenomenon, z durection component are seldom; Central authorities in light field have produced a sharper peak, i.e. central peak, and there is secondary lobe in the live part of Here it is virtual light probe simultaneously in the distribution of light field.Therefore, under the effect of contraction of aperture, form the constraint light field, produced the effect of virtual light probe light beam.By symmetry principle as can be known, if incident light is the circularly polarized light of an annular, will obtain a centrosymmetric optical field distribution.Fig. 6 is the steady-state light field distribution that obtains in the xz plane.Fig. 7 is the logical optical efficiency oblong aperture diameter variation curve of near-field optical virtual optic probe.Logical as can be seen optical efficiency is roughly linear with the variation of aperture size, and its order of magnitude is 10
-2, than the logical optical efficiency (10 of common nano aperture optical fiber probe
-4～10
-6) improved 2～4 orders of magnitude, utilize this characteristics, can solve near field storage sonde-type scheme luminous flux problem of smaller.Fig. 8 is the change curve of the halfwidth of near-field optical virtual optic probe with distance (being the degree of depth of virtual light probe).As can be seen, when the diameter of aperture is 1.5 μ m and 3 μ m, the interference effect of evanscent field is apparent in view, the FWHM of virtual light probe in coverage not the variation with distance change, its coverage is respectively 150～600nm and 150～450nm when the diameter of aperture is 0.5 μ m, the evanscent field interference effect is not obvious, and the FWHM of virtual light probe increases rapidly with the increase of distance.This further illustrates near-field optical virtual optic probe is that interference owing to evanscent field produces.Fig. 9 is the change curve of the peak strength of near-field optical virtual optic probe with distance (being the degree of depth of virtual light probe).When the diameter of aperture was 1.5 μ m and 3 μ m, the peak strength maximal value of virtual light probe (being middle crest) appeared at apart from hole 250 nanometers, reduces along with the increasing of distance afterwards; But in the significant depth scope of virtual light probe, the amplitude of minimizing is little, is respectively 35% and 25%, is acceptable in actual applications.But when the diameter of aperture was 0.5 μ m, peak strength was along with the increase of distance reduces rapidly.
Embodiment 1 is for adopting the near-field optical virtual optic probe system of isosceles right triangle prism, and its theory structure as shown in figure 10.This system mainly is made up of with the square aperture diaphragm 14 that is positioned at prism and air interface place the isosceles right triangle prism 13 that is placed in the air 15 as shown in figure 10.Two acute angle theta of isosceles right triangle prism are 45 degree, and the length of hypotenuse is 1cm, and prism thickness is 0.7cm.Prism material adopts the K9 glass of refractive index n=1.5163.Plating one layer thickness is the silverskin of 100nm on the inclined-plane of prism, has square hole 16 in rete central authorities, has promptly formed square aperture diaphragm 14.Its sectional view as shown in figure 11,17 is metal film, 18 is square aperture, its long L, wide H are 1.5 μ m.When two beam diameters are that the parallel laser light beam 12 (wavelength is 690nm) of 0.5cm is during perpendicular to the right-angle side incident of prism 13, total reflection takes place in two light beams that are subjected to 14 restrictions of square aperture on the interface of the hypotenuse of prism and air 15, produce evanscent field, wherein the interference of capable ripple evanscent field stack makes the light field redistribution in opposite directions, form the constraint light field, very big enhanced field appears in its symcenter place, form central peak, it is not outwards dispersed in wavelength distance and forms the nanometer light beam, becomes near-field optical virtual optic probe.
Embodiment 2 is for adopting the near-field optical virtual optic probe system of hemispherical solid immersion lens, and its theory structure as shown in figure 12.This system mainly is made up of as shown in figure 12 annular diaphragm 21, focusing objective len 22, hemispherical solid immersion lens (SIL) 23 and square aperture diaphragm 24.Hemispherical solid immersion lens employing refractive index is 1.8 ZF6 glass making, and its radius is 1mm.Plating one layer thickness is the golden film of 150nm on the bottom surface of solid immersion lens, has square hole 25 in rete central authorities, has promptly formed square aperture diaphragm 24.Its sectional view as shown in figure 13,29 is metal film, 30 is square aperture, its long L, wide H are 1.5 μ m.Before annular diaphragm 21 placed focusing objective len, its central circular part 20 that is in the light was positioned at beam center, and diameter is 2mm, will keep off by the light beam of incident angle behind the focusing objective len less than the angle of total reflection.Focusing objective len is selected the long working distance object lens (Model:LMPLFL100X) of OLYMPUS for use, and its work is apart from being 3.2mm, and numerical aperture is 0.8.Beam diameter is that the incident parallel laser light beam 19 (wavelength is 488nm) of 4～5mm is converted to annular beam behind annular diaphragm 21, focus on the bottom surface of solid immersion lens 23 again through the focusing objective len 22 of large-numerical aperture, in the bottom surface, be solid immersion lens and air 26 at the interface, the hollow cone light beam of total reflection condition is satisfied in formation, and it is subjected to the restriction of aperture 24.Therefore, the evanscent field that produces by total reflection, in the ripple evanscent field of going in opposite directions interfere stack, form the constraint light field, very big enhanced field appears in its symcenter place, forms central peak, it is not outwards dispersed in wavelength distance and forms the nanometer light beam, becomes near-field optical virtual optic probe.If recording medium 27 is placed on apart from solid immersion lens bottom surface 100～500nm (coverage of virtual probe) distance range, can realize operations such as near field optic data storage, near field photoetching.Recording medium can be photoresist, organic dyestuff, phase-change material etc.Recording materials generally will be coated in the substrates 28 such as glass, PMMA, silicon chip.
Claims (9)
1, a kind of near-field optical virtual optic probe, it is characterized in that an aperture being set at two kinds of medium interface places with different refractivity, the evanscent field that produces when making incident angle greater than the incident beam generation total reflection of critical angle interferes stack to form the constraint light field, the central peak of this constraint light field can outwards not dispersed in the wavelength deep space, form the nanometer light beam, become the nanoscale near-field optical virtual optic probe.
2, near-field optical virtual optic probe according to claim 1 is characterized in that said incident angle is the directional light of a branch of above finite size greater than the light beam of critical angle.
3, near-field optical virtual optic probe according to claim 1 is characterized in that said incident angle is the hollow cone light beam that satisfies total reflection condition greater than the light beam of critical angle.
4, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is circular, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
5, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is square, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
6, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is annular, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
7, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is a Contraband shape, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
8, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is worker's shape, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
9, near-field optical virtual optic probe according to claim 1, it is characterized in that said aperture, the shape of diaphragm is a C shape, the aperture outline range of size of diaphragm is 0.5 μ m～3 μ m, the material of diaphragm can comprise that materials such as gold, aluminium, silver or other can form the material of micropore, and thickness is 5～200nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021040753A CN1139833C (en) | 2002-03-08 | 2002-03-08 | Near-field optical virtual optic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021040753A CN1139833C (en) | 2002-03-08 | 2002-03-08 | Near-field optical virtual optic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1367395A true CN1367395A (en) | 2002-09-04 |
| CN1139833C CN1139833C (en) | 2004-02-25 |
Family
ID=4739985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021040753A Expired - Fee Related CN1139833C (en) | 2002-03-08 | 2002-03-08 | Near-field optical virtual optic probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1139833C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100448592C (en) * | 2006-06-12 | 2009-01-07 | 江苏大学 | Selective micro processing method and system for near field optic virtual light probe |
| CN101324759B (en) * | 2007-06-14 | 2010-04-14 | 财团法人工业技术研究院 | Optical head and optical etching apparatus |
| CN102707342A (en) * | 2012-06-20 | 2012-10-03 | 北京大学 | Surface plasmon lens integrated with metal nano-cavity |
| CN103198994A (en) * | 2013-03-17 | 2013-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transmission electron microscope objective lens diaphragm |
| CN105588954A (en) * | 2016-03-23 | 2016-05-18 | 上海理工大学 | Near-field polarized light scanning probe microscope |
| CN106908222A (en) * | 2017-03-15 | 2017-06-30 | 北京航空航天大学 | A kind of measuring method and system of high accuracy microcobjective numerical aperture |
-
2002
- 2002-03-08 CN CNB021040753A patent/CN1139833C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100448592C (en) * | 2006-06-12 | 2009-01-07 | 江苏大学 | Selective micro processing method and system for near field optic virtual light probe |
| CN101324759B (en) * | 2007-06-14 | 2010-04-14 | 财团法人工业技术研究院 | Optical head and optical etching apparatus |
| CN102707342A (en) * | 2012-06-20 | 2012-10-03 | 北京大学 | Surface plasmon lens integrated with metal nano-cavity |
| CN102707342B (en) * | 2012-06-20 | 2013-12-25 | 北京大学 | Surface plasmon lens integrated with metal nano-cavity |
| CN103198994A (en) * | 2013-03-17 | 2013-07-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | Transmission electron microscope objective lens diaphragm |
| CN103198994B (en) * | 2013-03-17 | 2016-06-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Objective lens of the transmission electron microscope diaphragm |
| CN105588954A (en) * | 2016-03-23 | 2016-05-18 | 上海理工大学 | Near-field polarized light scanning probe microscope |
| CN106908222A (en) * | 2017-03-15 | 2017-06-30 | 北京航空航天大学 | A kind of measuring method and system of high accuracy microcobjective numerical aperture |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1139833C (en) | 2004-02-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102436892B1 (en) | A device for forming, from an incident electromagnetic wave, at least one focused beam in a near-field | |
| US11573356B2 (en) | Diffraction grating comprising double-materials structures | |
| JP4250651B2 (en) | Particle arranging method and light emitting device manufacturing method | |
| CN105676314A (en) | Multi-spectral phase-type metasurface device | |
| CN101088040A (en) | Apparatus and method for enhanced optical transmission through a small aperture, using radially polarized radiation | |
| CN1139833C (en) | Near-field optical virtual optic probe | |
| US20080171192A1 (en) | Nanostructured antireflective optical coating | |
| CN107199403B (en) | By using TiO2Method for assisting femtosecond laser super-diffraction limit processing by particle array | |
| CN101217062A (en) | A metal film and its making method | |
| CN110412668B (en) | Structure for generating multiple surface lattice resonance and application thereof | |
| CN113687465B (en) | Surface plasmon near-field focusing lens based on all-dielectric super surface | |
| Kurihara et al. | Design and fabrication of microlens array for near-field vertical cavity surface emitting laser parallel optical head | |
| US7345980B2 (en) | Optically storing digital data in the form of spectrally coded particles | |
| KR101533233B1 (en) | Optical waveguide device using plasmonic coupling between nano-aperture and nano-particle | |
| US7211787B2 (en) | Particle movement device | |
| Hong et al. | Numerical simulation analysis of a near-field optical virtual probe | |
| Kumar et al. | Photonic crystal based heterostructures in the control of emission and diffraction features | |
| Takeda et al. | Subwavelength focusing technique using a plasmonic lens | |
| CN1238936C (en) | Near field optical stairstep type nanometer a perture laser | |
| CN220271679U (en) | Device for super-resolution focusing of circularly polarized light and optical system comprising same | |
| CN114839164B (en) | Sensor based on gold micro-nano conical array structure and preparation method and application thereof | |
| Katayama et al. | Microholographic recording using single-sided optics with electrical beam control | |
| Dmitruk et al. | Synthesis of 1D regular arrays of gold nanoparticles and modeling of their optical properties | |
| CN106324753B (en) | A kind of smooth focusing structure | |
| Ghanei et al. | Conversion of Linear Polarized Light-to-Orbital Angular Momentum with Variable Topological Charges, Using the Surface Plasmons of Elliptical Holes Etched in a Gold Layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |