CN106893980A - 一种低温真空镀膜方法 - Google Patents
一种低温真空镀膜方法 Download PDFInfo
- Publication number
- CN106893980A CN106893980A CN201710192914.6A CN201710192914A CN106893980A CN 106893980 A CN106893980 A CN 106893980A CN 201710192914 A CN201710192914 A CN 201710192914A CN 106893980 A CN106893980 A CN 106893980A
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- China
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- base material
- plating process
- vacuum
- film plating
- temperature
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/584—Non-reactive treatment
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/83—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with metals; with metal-generating compounds, e.g. metal carbonyls; Reduction of metal compounds on textiles
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Textile Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710192914.6A CN106893980B (zh) | 2017-03-28 | 2017-03-28 | 一种低温真空镀膜方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710192914.6A CN106893980B (zh) | 2017-03-28 | 2017-03-28 | 一种低温真空镀膜方法 |
Publications (2)
Publication Number | Publication Date |
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CN106893980A true CN106893980A (zh) | 2017-06-27 |
CN106893980B CN106893980B (zh) | 2019-06-14 |
Family
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Family Applications (1)
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CN201710192914.6A Active CN106893980B (zh) | 2017-03-28 | 2017-03-28 | 一种低温真空镀膜方法 |
Country Status (1)
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CN (1) | CN106893980B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019223798A1 (zh) * | 2018-05-25 | 2019-11-28 | 东莞超盈纺织有限公司 | 真空热蒸镀技术制备导电纱线的方法 |
CN113249688A (zh) * | 2021-04-16 | 2021-08-13 | 杭州电子科技大学 | 一种适用于真空环境下的金属纳米材料蒸着装置及方法 |
CN116641035A (zh) * | 2023-07-26 | 2023-08-25 | 南京诺源医疗器械有限公司 | 一种用于腹腔镜光学件的镀膜方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101676436A (zh) * | 2008-09-19 | 2010-03-24 | 深圳富泰宏精密工业有限公司 | 表面处理方法 |
CN103031524A (zh) * | 2012-12-14 | 2013-04-10 | 中国船舶重工集团公司第七二五研究所 | 一种离子沉积实现ito靶材背面金属化的方法 |
CN105647131A (zh) * | 2016-01-28 | 2016-06-08 | 嘉兴鹏翔包装材料有限公司 | 一种超低温cpp镀铝膜的生产方法 |
US20160230265A1 (en) * | 2013-02-14 | 2016-08-11 | Dillard University | Multiple Beam Pulsed Laser Deposition Of Composite Films |
-
2017
- 2017-03-28 CN CN201710192914.6A patent/CN106893980B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101676436A (zh) * | 2008-09-19 | 2010-03-24 | 深圳富泰宏精密工业有限公司 | 表面处理方法 |
CN103031524A (zh) * | 2012-12-14 | 2013-04-10 | 中国船舶重工集团公司第七二五研究所 | 一种离子沉积实现ito靶材背面金属化的方法 |
US20160230265A1 (en) * | 2013-02-14 | 2016-08-11 | Dillard University | Multiple Beam Pulsed Laser Deposition Of Composite Films |
CN105647131A (zh) * | 2016-01-28 | 2016-06-08 | 嘉兴鹏翔包装材料有限公司 | 一种超低温cpp镀铝膜的生产方法 |
Non-Patent Citations (1)
Title |
---|
张凯等: "真空蒸镀法制备锡薄膜及其嵌锂电化学性能", 《应用化学》 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019223798A1 (zh) * | 2018-05-25 | 2019-11-28 | 东莞超盈纺织有限公司 | 真空热蒸镀技术制备导电纱线的方法 |
CN113249688A (zh) * | 2021-04-16 | 2021-08-13 | 杭州电子科技大学 | 一种适用于真空环境下的金属纳米材料蒸着装置及方法 |
CN113249688B (zh) * | 2021-04-16 | 2024-03-22 | 杭州电子科技大学 | 一种适用于真空环境下的金属纳米材料蒸着装置及方法 |
CN116641035A (zh) * | 2023-07-26 | 2023-08-25 | 南京诺源医疗器械有限公司 | 一种用于腹腔镜光学件的镀膜方法 |
CN116641035B (zh) * | 2023-07-26 | 2023-10-13 | 南京诺源医疗器械有限公司 | 一种用于腹腔镜光学件的镀膜方法 |
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Publication number | Publication date |
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CN106893980B (zh) | 2019-06-14 |
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Effective date of registration: 20190521 Address after: 213000 Xishou of Xiaoyejia Group, Chenxiang Village Committee, Benniu Town, Xinbei District, Changzhou City, Jiangsu Province Applicant after: Changzhou Aihua Vacuum Equipment Co., Ltd. Address before: 362141 Tonggang Road, Huidong industrial area, Dongling Town, Huian, Quanzhou, Fujian, 6 Applicant before: Quanzhou Mdt InfoTech Ltd |
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Effective date of registration: 20220517 Address after: 213000 No. 388-16, Huanghe West Road, Xinbei District, Changzhou City, Jiangsu Province Patentee after: Laisi vacuum technology (Changzhou) Co.,Ltd. Address before: 213000 Xishou of Xiaoyejia Group, Chenxiang Village Committee, Benniu Town, Xinbei District, Changzhou City, Jiangsu Province Patentee before: Changzhou Aihua Vacuum Equipment Co.,Ltd. |
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