CN106868476A - 一种在钒合金基底上制备Er2O3涂层的方法 - Google Patents

一种在钒合金基底上制备Er2O3涂层的方法 Download PDF

Info

Publication number
CN106868476A
CN106868476A CN201710126624.1A CN201710126624A CN106868476A CN 106868476 A CN106868476 A CN 106868476A CN 201710126624 A CN201710126624 A CN 201710126624A CN 106868476 A CN106868476 A CN 106868476A
Authority
CN
China
Prior art keywords
coating
vanadium alloy
spin
alloy substrate
colloidal sol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710126624.1A
Other languages
English (en)
Other versions
CN106868476B (zh
Inventor
常永勤
李吴铭
迟于喆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Science and Technology Beijing USTB
Original Assignee
University of Science and Technology Beijing USTB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Science and Technology Beijing USTB filed Critical University of Science and Technology Beijing USTB
Priority to CN201710126624.1A priority Critical patent/CN106868476B/zh
Publication of CN106868476A publication Critical patent/CN106868476A/zh
Application granted granted Critical
Publication of CN106868476B publication Critical patent/CN106868476B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208Oxides, e.g. ceramics
    • C23C18/1216Metal oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229Composition of the substrate
    • C23C18/1241Metallic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1254Sol or sol-gel processing
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1295Process of deposition of the inorganic material with after-treatment of the deposited inorganic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Chemical Treatment Of Metals (AREA)
  • Chemically Coating (AREA)

Abstract

本发明属于涂层制备技术领域,涉及一种在钒合金基底上制备Er2O3涂层的方法。首先将Er(NO3)3·5H2O溶于无水乙醇中,并加入一定体积的火棉胶,经磁力搅拌后制成溶胶。通过旋涂法将溶胶均匀的涂覆在钒合金表面。然后在真空干燥箱中干燥,随后炉冷。最后在管式炉中热处理获得Er2O3涂层。本发明选择溶胶‑凝胶法结合旋涂法在钒合金基底上制备Er2O3涂层,制备的涂层均匀,无裂纹,厚度可控且具有操作简便快捷,成本低廉,反应温度低以及涂层成分单一等明显的优势,能够实现对Er2O3涂层厚度的控制。

Description

一种在钒合金基底上制备Er2O3涂层的方法
技术领域
本发明属于涂层制备技术领域,特别涉及一种在钒合金基底上制备Er2O3涂层的方法。
背景技术
随着人类社会的发展,人们对于能源的需求越来越大,据专家预测储存量有限的化石能源在未来几十年内将陆续消耗完毕。核聚变能源具有以下独特的优点:(1)海水中蕴含极为丰富的氘,燃料资源丰富;(2)燃料系统安全、易防护;(3)热公害小;(4)燃料废料少。因此,核聚变能也被称为人类未来的永久能源。但是,核聚变能源的开发也面临着一系列的问题,其中之一便是产氚包层中的渗氚问题。目前,产氚包层的设计方案有两种,一种是低活钢铁素体/马氏体和固态锂组合,一种是钒合金和液态锂组合,后者的氚增值比(TBR)最大,但存在磁流体动力学(MHD)压降的问题。一个可行的解决办法是在第一壁结构候选材料钒合金上通过表面处理涂覆一层Er2O3绝缘氧化层。这样可以既有效预防氚渗透的危害,还可以极大地减少膜流带来的MHD压降。截止目前,已有的报道均是在316L不锈钢或马氏体钢上制备防渗氚用Er2O3涂层(Junyou Yang,Hui Chen,Jiansheng Zhang,ShuanglongFeng.Preparation of Er2O3coating on a low activation martensitic steelsubstrate via the route of sol-gel[J].SURFACE&COATINGS TECHNOLOGY 205(2011):5497-5501;杨旭东,李弢,古宏伟,汤梅.316L不锈钢基体上磁控溅射Er2O3/Er涂层的后处理研究[J].中国稀土学报2009,27(2).)。而关于在钒合金基底上制备Er2O3涂层的文章尚未见到。
本专利申请报道了通过合理的控制实验参数在钒合金基底上制备合格的Er2O3涂层。
发明内容
本发明的目的是提供一种在钒合金基底上制备Er2O3涂层的方法。首先将Er(NO3)3·5H2O溶于无水乙醇中,并加入一定体积的火棉胶,经磁力搅拌后制成溶胶。通过旋涂法将溶胶均匀的涂覆在钒合金表面。然后在真空干燥箱中干燥,随后炉冷。最后在管式炉中热处理获得Er2O3涂层。
本发明提供了一种在钒合金基底上制备Er2O3涂层的方法,具体步骤如下:
1.钒合金基底的预处理
将一定厚度的钒合金板利用线切割的方式切割成所需大小。再分别用600-5000目砂纸打磨,并抛光成镜面,用无水乙醇洗净。然后吹干。
2.溶胶配制
称取一定质量的Er(NO3)3·5H2O溶于无水乙醇中并加入体积分数为3-5%的火棉胶,利用电磁搅拌制成浓度为0.4M-0.6M的溶胶,然后将溶胶密封保存。
3.在钒合金基底上制备Er2O3涂层
将处理好的钒合金固定在旋涂机上,利用滴管滴加适量的溶胶于钒合金片上。先以600-1000rpm低速旋涂5-9s,再以高速4000-6000rpm旋涂20s-40s,可以保证钒合金基体被涂层包覆。将旋涂好的试样放置于真空干燥箱内,分2步加热真空干燥;从室温加热至40-50℃时真空干燥30-50min,然后继续升温,在温度达到70-85℃时再真空干燥30-50min,然后炉冷。利用高温管式炉将干燥后的试样进行热处理。热处理过程在氩气气氛保护下进行,氩气流速为130-180sccm。热处理温度为550-650℃,保温时间为40-75min,采用炉内冷却。
4.重复步骤3以达到需要的涂层厚度。
本发明选择溶胶-凝胶法结合旋涂法在钒合金基底上制备Er2O3涂层,制备的涂层均匀,无裂纹,厚度可控且具有操作简便快捷,成本低廉,反应温度低以及涂层成分单一等明显的优势,能够实现对Er2O3涂层厚度的控制。
附图说明
图1为涂层的表面形貌高倍图,
图2为涂层的表面形貌低倍图,
图3为涂层的截面形貌图,
图4为涂层的XRD图,
从图1,图2可以看出,在钒合金基底上以本方法制备出的Er2O3涂层表面平整且无气孔裂纹等缺陷。图3表明涂层的连续性以及涂层与基底的结合很好。图4表明本实验所采用的工艺参数确实可以使铒的前驱体完全转化为Er2O3
具体实施案例一
1.将经线切割获得的5mm×5mm×1mm的钒合金片用600-5000目砂纸打磨并抛光成镜面,利用无水乙醇洗净。然后吹干。
2.称取4.433g的Er(NO3)3·5H2O并量取0.8ml的火棉胶,加入无水乙醇经磁力搅拌后制成20ml的溶胶。
3.将处理好的钒合金基底固定在旋涂机上,利用滴管滴加适量的溶胶于钒合金片上。以650rpm低速旋涂9s后,再以高速5000rpm旋涂30s。将旋涂好的试样放置于真空干燥箱内,当温度从室温升至50℃时真空干燥30min,之后继续升温,在温度达到85℃时再真空干燥30min,然后炉冷。利用高温管式炉将干燥后的试样进行热处理。热处理过程在氩气气氛保护下进行,氩气流速为150sccm。热处理温度为600℃,保温时间为45min,采用炉内冷却。
4.重复步骤3以达到需要的涂层厚度。
5.利用万用表测试涂层的绝缘性能发现当两电极分别位于覆层和基体时,所测得的电导率为零。当两电极均位于覆层上时,所测得的电导率为零。
具体实施案例二
1.将经线切割获得的5mm×5mm×1mm的钒合金片用600-5000目砂纸打磨并抛光成镜面,利用无水乙醇洗净。然后吹干。
2.称取3.990g的Er(NO3)3·5H2O并量取0.9ml的火棉胶,加入无水乙醇经磁力搅拌后制成20ml的溶胶。
3.将处理好的钒合金基底固定在旋涂机上,利用滴管滴加适量的溶胶于钒合金片上。以900rpm低速旋涂6s后,再以高速5500rpm旋涂25s。将旋涂好的试样放置于真空干燥箱内,当温度从室温升至42℃时真空干燥45min,之后继续升温,在温度达到80℃时再真空干燥40min,然后炉冷。利用高温管式炉将干燥后的试样进行热处理。热处理过程在氩气气氛保护下进行,氩气流速为170sccm。热处理温度为630℃,保温时间为40min,采用炉内冷却。
4.重复步骤3以达到需要的涂层厚度。
5.利用万用表测试涂层的绝缘性能发现当两电极分别位于覆层和基体时,所测得的电导率为零。当两电极均位于覆层上时,所测得的电导率为零。
具体实施案例三
1.将经线切割获得的5mm×5mm×1mm的钒合金片用600-5000目砂纸打磨并抛光成镜面,利用无水乙醇洗净。然后吹干。
2.称取4.877g的Er(NO3)3·5H2O并量取0.7ml的火棉胶,加入无水乙醇,经磁力搅拌后制成20ml的溶胶。
3.将处理好的钒合金基底固定在旋涂机上,利用滴管滴加适量的溶胶于钒合金片上。以750rpm低速旋涂7s后,再以高速4500rpm旋涂35s。将旋涂好的试样放置于真空干燥箱内,当温度从室温升至47℃时真空干燥40min,之后继续升温,在温度达到75℃时再真空干燥50min,然后炉冷。利用高温管式炉将干燥后的试样进行热处理。热处理过程在氩气气氛保护下进行,氩气流速为140sccm。热处理温度为550℃,保温时间为60min,采用炉内冷却。
4.重复步骤3以达到需要的涂层厚度。
5.利用万用表测试涂层的绝缘性能发现当两电极分别位于覆层和基体时,所测得的电导率为零。当两电极均位于覆层上时,所测得的电导率为零。

Claims (4)

1.一种在钒合金基底上制备Er2O3涂层的方法,其特征在于具体步骤如下:
1)、钒合金基底的预处理
将一定厚度的钒合金板利用线切割的方式切割成所需大小,再分别用600-5000目砂纸打磨,并抛光成镜面,用无水乙醇洗净,然后吹干;
2)、溶胶配制
称取一定质量的Er(NO3)3·5H2O溶于无水乙醇中并加入体积分数为3-5%的火棉胶,利用电磁搅拌制成浓度为0.4M-0.6M的溶胶,然后将溶胶密封保存;
3)、在钒合金基底上制备Er2O3涂层
将处理好的钒合金固定在旋涂机上,利用滴管滴加适量的溶胶于钒合金片上,先以低速旋涂,再以高速旋涂;将旋涂好的试样放置于真空干燥箱内,分2步加热真空干燥,然后炉冷;利用高温管式炉将干燥后的试样进行热处理,采用炉内冷却;
4)、重复步骤3)以达到需要的涂层厚度。
2.如权利要求1所述一种在钒合金基底上制备Er2O3涂层的方法,其特征在于步骤3)所述低速旋涂旋速为600-1000rpm,旋涂时间5-9s;高速旋涂旋速4000-6000rpm,旋涂时间20s-40s。
3.如权利要求1所述一种在钒合金基底上制备Er2O3涂层的方法,其特征在于步骤3)所述的2步真空干燥是:1)从室温加热至40-50℃时真空干燥30-50min,2)继续升温,在温度达到70-85℃时再真空干燥30-50min。
4.如权利要求1所述一种在钒合金基底上制备Er2O3涂层的方法,其特征在于步骤3)所述的热处理过程是在氩气气氛保护下进行,氩气流速为130-180sccm,热处理温度为550-650℃,保温时间为40-75min,采用炉内冷却。
CN201710126624.1A 2017-03-03 2017-03-03 一种在钒合金基底上制备Er2O3涂层的方法 Expired - Fee Related CN106868476B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710126624.1A CN106868476B (zh) 2017-03-03 2017-03-03 一种在钒合金基底上制备Er2O3涂层的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710126624.1A CN106868476B (zh) 2017-03-03 2017-03-03 一种在钒合金基底上制备Er2O3涂层的方法

Publications (2)

Publication Number Publication Date
CN106868476A true CN106868476A (zh) 2017-06-20
CN106868476B CN106868476B (zh) 2019-02-15

Family

ID=59170152

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710126624.1A Expired - Fee Related CN106868476B (zh) 2017-03-03 2017-03-03 一种在钒合金基底上制备Er2O3涂层的方法

Country Status (1)

Country Link
CN (1) CN106868476B (zh)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101469409A (zh) * 2007-12-27 2009-07-01 北京有色金属研究总院 一种复合氧化铝/铒阻氢涂层及其制备方法
CN102618871A (zh) * 2012-02-14 2012-08-01 中国科学院电工研究所 一种化学溶液法制备Er2O3阻氚涂层的方法
CN104070718A (zh) * 2014-07-14 2014-10-01 四川材料与工艺研究所 一种阻氚镀层及其制备方法
WO2015049977A1 (ja) * 2013-10-02 2015-04-09 株式会社豊田自動織機 太陽熱集熱管及びその製造方法
CN105729934A (zh) * 2014-12-11 2016-07-06 北京有色金属研究总院 一种M/MOx复合阻氢涂层及其制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101469409A (zh) * 2007-12-27 2009-07-01 北京有色金属研究总院 一种复合氧化铝/铒阻氢涂层及其制备方法
CN102618871A (zh) * 2012-02-14 2012-08-01 中国科学院电工研究所 一种化学溶液法制备Er2O3阻氚涂层的方法
WO2015049977A1 (ja) * 2013-10-02 2015-04-09 株式会社豊田自動織機 太陽熱集熱管及びその製造方法
CN104070718A (zh) * 2014-07-14 2014-10-01 四川材料与工艺研究所 一种阻氚镀层及其制备方法
CN105729934A (zh) * 2014-12-11 2016-07-06 北京有色金属研究总院 一种M/MOx复合阻氢涂层及其制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈辉: "Er2O3防氚渗透涂层的制备及组织结构研究", 《万方学位论文》 *

Also Published As

Publication number Publication date
CN106868476B (zh) 2019-02-15

Similar Documents

Publication Publication Date Title
CN100577892C (zh) 一种梯度硅酸钇涂层的水热电泳沉积方法
CN107338372B (zh) 一种放电等离子烧结的铝基复合制氢材料的制备及其应用
CN103172382B (zh) 一种抗超高温度氧化损伤的二硼化锆-碳化硅陶瓷基复合材料的制备方法
CN105016760B (zh) 一种超高温陶瓷改性c/c复合材料的制备方法
CN101898906B (zh) 碳/碳复合材料SiO2-莫来石-Al2O3梯度外涂层的制备方法
CN103724055B (zh) 一种SiC/HfC/ZrC热匹配涂层及其制备方法
CN104577699A (zh) 复合激光介质的扩散键合方法
CN104141122A (zh) 一种金属基体表面氧化铝涂层及其制备方法
CN110241325A (zh) 一种钛金属化石墨片增强铝基复合材料及其制备方法和应用
CN110627055A (zh) 一种二氧化钒与石墨烯复合薄膜结构及其制备方法和应用
Ramanathan et al. Role of rare earth oxide coatings on oxidation resistance of chromia-forming alloys
CN106048519A (zh) 一种聚变堆氚增殖包层用Fe‑Al/Al2O3 阻氚涂层及其制备方法
Yang et al. Preparation of Er2O3 coating on a low activation martensitic steel substrate via the route of sol–gel
CN110616420A (zh) 一种用于垃圾焚烧炉内壁复合防腐蚀涂层的制备方法
CN100453689C (zh) 一种采用包埋渗硅工艺制备高硅电工钢片的方法
CN106868476A (zh) 一种在钒合金基底上制备Er2O3涂层的方法
CN110256092A (zh) 一种热障涂层材料及其制备方法
CN106631161A (zh) 一种在碳基材料表面制备抗高温氧化复合涂层的方法
CN107866214A (zh) 一种化学溶液法制备Ca3Bi8O15薄膜的方法
CN112194372A (zh) 一种玻璃-陶瓷复合薄膜固态石榴石电解质及制备方法
CN104087775B (zh) 一种b改性tc4钛合金的制备方法
CN104278231B (zh) 一种Ti68Zr32合金的热氧化阻氢方法
CN103484844B (zh) 一种氢化锆表面防护方法
CN103614692A (zh) 一种采用铝硼共渗工艺在铌基合金上制备涂层的方法
CN108085526B (zh) 一种低密度铌基复合材料及制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190215