CN106801252B - 一种多晶硅铸锭用石英陶瓷坩埚及其制备方法 - Google Patents
一种多晶硅铸锭用石英陶瓷坩埚及其制备方法 Download PDFInfo
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- CN106801252B CN106801252B CN201611257092.7A CN201611257092A CN106801252B CN 106801252 B CN106801252 B CN 106801252B CN 201611257092 A CN201611257092 A CN 201611257092A CN 106801252 B CN106801252 B CN 106801252B
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- quartz
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- crucible
- silicon ingot
- ingot casting
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 158
- 239000010453 quartz Substances 0.000 title claims abstract description 120
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 52
- 238000005266 casting Methods 0.000 title claims abstract description 49
- 239000000919 ceramic Substances 0.000 title claims abstract description 41
- 238000002360 preparation method Methods 0.000 title claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims abstract description 74
- 238000000576 coating method Methods 0.000 claims abstract description 74
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 27
- 239000010703 silicon Substances 0.000 claims abstract description 27
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000011230 binding agent Substances 0.000 claims abstract description 16
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 11
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical group [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 claims abstract description 10
- 229910001863 barium hydroxide Inorganic materials 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 10
- 235000012239 silicon dioxide Nutrition 0.000 claims description 115
- 239000002002 slurry Substances 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 10
- 238000002156 mixing Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 5
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 238000005213 imbibition Methods 0.000 claims description 5
- 230000000750 progressive effect Effects 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000002202 Polyethylene glycol Substances 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 4
- 239000004115 Sodium Silicate Substances 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 4
- 229920001223 polyethylene glycol Polymers 0.000 claims description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 4
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical group [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 4
- 239000010431 corundum Substances 0.000 claims description 3
- 229910052593 corundum Inorganic materials 0.000 claims description 3
- 229920001709 polysilazane Polymers 0.000 claims description 3
- 230000001680 brushing effect Effects 0.000 claims description 2
- 238000007766 curtain coating Methods 0.000 claims description 2
- 239000000499 gel Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000007761 roller coating Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 238000004528 spin coating Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 239000005350 fused silica glass Substances 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 235000019795 sodium metasilicate Nutrition 0.000 claims 1
- 239000004575 stone Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000002210 silicon-based material Substances 0.000 description 5
- 238000003801 milling Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002085 enols Chemical class 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B26/00—Compositions of mortars, concrete or artificial stone, containing only organic binders, e.g. polymer or resin concrete
- C04B26/02—Macromolecular compounds
- C04B26/04—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B28/00—Compositions of mortars, concrete or artificial stone, containing inorganic binders or the reaction product of an inorganic and an organic binder, e.g. polycarboxylate cements
- C04B28/24—Compositions of mortars, concrete or artificial stone, containing inorganic binders or the reaction product of an inorganic and an organic binder, e.g. polycarboxylate cements containing alkyl, ammonium or metal silicates; containing silica sols
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Structural Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (10)
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CN201611257092.7A CN106801252B (zh) | 2016-12-30 | 2016-12-30 | 一种多晶硅铸锭用石英陶瓷坩埚及其制备方法 |
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CN201611257092.7A CN106801252B (zh) | 2016-12-30 | 2016-12-30 | 一种多晶硅铸锭用石英陶瓷坩埚及其制备方法 |
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CN106801252A CN106801252A (zh) | 2017-06-06 |
CN106801252B true CN106801252B (zh) | 2019-06-18 |
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CN201611257092.7A Expired - Fee Related CN106801252B (zh) | 2016-12-30 | 2016-12-30 | 一种多晶硅铸锭用石英陶瓷坩埚及其制备方法 |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107312432B (zh) * | 2017-06-23 | 2019-09-03 | 石家庄优士科电子科技有限公司 | 多晶硅铸锭石英坩埚氮化硅涂层用粘结剂及其制备方法 |
CN107419330A (zh) * | 2017-09-04 | 2017-12-01 | 江苏高照新能源发展有限公司 | 一种低侧壁斜向长晶坩埚及其制备方法 |
CN107619303A (zh) * | 2017-09-11 | 2018-01-23 | 江西中昱新材料科技有限公司 | 一种多晶坩埚及其制备方法 |
CN109020523B (zh) * | 2018-07-27 | 2022-01-21 | 东海县太阳光新能源有限公司 | 一种低铁超白熔融石英陶瓷坩埚制备方法 |
CN111733453A (zh) * | 2019-03-25 | 2020-10-02 | 中材江苏太阳能新材料有限公司 | 一种多晶硅铸锭用坩埚及其制备方法 |
CN109955154A (zh) * | 2019-04-15 | 2019-07-02 | 徐州协鑫太阳能材料有限公司 | 一种坩埚表面粗糙度的加工方法 |
CN110000708A (zh) * | 2019-04-15 | 2019-07-12 | 徐州协鑫太阳能材料有限公司 | 一种改造坩埚粗糙度的方法 |
CN110451941A (zh) * | 2019-08-21 | 2019-11-15 | 大同新成新材料股份有限公司 | 一种多晶硅铸锭用坩埚的制备方法 |
CN111020696B (zh) * | 2019-12-24 | 2021-10-22 | 江苏润弛太阳能材料科技有限公司 | 一种硅颗粒作为形核源高效坩埚的制备方法 |
CN111589678A (zh) * | 2020-05-29 | 2020-08-28 | 徐州协鑫太阳能材料有限公司 | 一种致密石英坩埚高纯涂层的制备方法 |
CN114773042A (zh) * | 2022-03-23 | 2022-07-22 | 康姆罗拉有限公司 | 一种石英陶瓷的制备工艺 |
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JP2000072589A (ja) * | 1998-08-31 | 2000-03-07 | Shinetsu Quartz Prod Co Ltd | シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法 |
JP2000264776A (ja) * | 1999-03-15 | 2000-09-26 | Toshiba Ceramics Co Ltd | シリコン単結晶引上げ用石英ガラスルツボの製造方法 |
JP2001348294A (ja) * | 2000-05-31 | 2001-12-18 | Shinetsu Quartz Prod Co Ltd | 多層構造の石英ガラスルツボ及びその製造方法 |
CN201506853U (zh) * | 2009-07-08 | 2010-06-16 | 济宁凯伦光伏材料有限公司 | 一种多晶硅铸锭炉用石英坩埚 |
CN201762478U (zh) * | 2010-08-25 | 2011-03-16 | 扬州华尔光电子材料有限公司 | 一种多晶硅铸锭用涂层石英坩埚 |
CN201857440U (zh) * | 2010-11-02 | 2011-06-08 | 上海普罗新能源有限公司 | 太阳能级多晶硅提纯铸锭用的坩埚 |
CN104651932A (zh) * | 2015-03-17 | 2015-05-27 | 江西中昱新材料科技有限公司 | 一种多晶石英陶瓷坩埚及其制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20130192302A1 (en) * | 2012-02-01 | 2013-08-01 | Memc Singapore Pte. Ltd. (Uen200614794D) | Crucibles for holding molten material and methods for producing them and for their use |
-
2016
- 2016-12-30 CN CN201611257092.7A patent/CN106801252B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000072589A (ja) * | 1998-08-31 | 2000-03-07 | Shinetsu Quartz Prod Co Ltd | シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法 |
JP2000264776A (ja) * | 1999-03-15 | 2000-09-26 | Toshiba Ceramics Co Ltd | シリコン単結晶引上げ用石英ガラスルツボの製造方法 |
JP2001348294A (ja) * | 2000-05-31 | 2001-12-18 | Shinetsu Quartz Prod Co Ltd | 多層構造の石英ガラスルツボ及びその製造方法 |
CN201506853U (zh) * | 2009-07-08 | 2010-06-16 | 济宁凯伦光伏材料有限公司 | 一种多晶硅铸锭炉用石英坩埚 |
CN201762478U (zh) * | 2010-08-25 | 2011-03-16 | 扬州华尔光电子材料有限公司 | 一种多晶硅铸锭用涂层石英坩埚 |
CN201857440U (zh) * | 2010-11-02 | 2011-06-08 | 上海普罗新能源有限公司 | 太阳能级多晶硅提纯铸锭用的坩埚 |
CN104651932A (zh) * | 2015-03-17 | 2015-05-27 | 江西中昱新材料科技有限公司 | 一种多晶石英陶瓷坩埚及其制备方法 |
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