CN106569396B - 目标定位装置 - Google Patents

目标定位装置 Download PDF

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Publication number
CN106569396B
CN106569396B CN201610901826.4A CN201610901826A CN106569396B CN 106569396 B CN106569396 B CN 106569396B CN 201610901826 A CN201610901826 A CN 201610901826A CN 106569396 B CN106569396 B CN 106569396B
Authority
CN
China
Prior art keywords
motor
supporting table
carrier
target locating
locating set
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201610901826.4A
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English (en)
Chinese (zh)
Other versions
CN106569396A (zh
Inventor
J·J·M·佩斯特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
Mapper Lithopraphy IP BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mapper Lithopraphy IP BV filed Critical Mapper Lithopraphy IP BV
Publication of CN106569396A publication Critical patent/CN106569396A/zh
Application granted granted Critical
Publication of CN106569396B publication Critical patent/CN106569396B/zh
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/58—Baseboards, masking frames, or other holders for the sensitive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/026—Shields
    • H01J2237/0266—Shields electromagnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005—Seal mechanisms
    • H01J2237/2006—Vacuum seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H01J2237/20285—Motorised movement computer-controlled

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Epidemiology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Mathematical Physics (AREA)
  • Public Health (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201610901826.4A 2011-09-12 2012-09-12 目标定位装置 Active CN106569396B (zh)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US201161533404P 2011-09-12 2011-09-12
US201161533398P 2011-09-12 2011-09-12
US61/533,398 2011-09-12
NL2007403 2011-09-12
NL2007403 2011-09-12
NL2007404 2011-09-12
NL2007404 2011-09-12
US61/533,404 2011-09-12
CN201280051562.8A CN103946749B (zh) 2011-09-12 2012-09-12 目标定位装置
PCT/NL2012/050637 WO2013039389A2 (en) 2011-09-12 2012-09-12 Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201280051562.8A Division CN103946749B (zh) 2011-09-12 2012-09-12 目标定位装置

Publications (2)

Publication Number Publication Date
CN106569396A CN106569396A (zh) 2017-04-19
CN106569396B true CN106569396B (zh) 2018-10-19

Family

ID=47883905

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610901826.4A Active CN106569396B (zh) 2011-09-12 2012-09-12 目标定位装置
CN201280051562.8A Active CN103946749B (zh) 2011-09-12 2012-09-12 目标定位装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201280051562.8A Active CN103946749B (zh) 2011-09-12 2012-09-12 目标定位装置

Country Status (6)

Country Link
US (1) US9030649B2 (enExample)
JP (1) JP5844468B2 (enExample)
CN (2) CN106569396B (enExample)
NL (1) NL1039797C2 (enExample)
TW (1) TW201312300A (enExample)
WO (1) WO2013039389A2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015032609A (ja) * 2013-07-31 2015-02-16 キヤノン株式会社 駆動装置、荷電粒子線照射装置、及びデバイスの製造方法
CN108020252B (zh) * 2016-11-03 2020-03-06 香港城市大学深圳研究院 样品台、微观观察装置和样品台调整方法
US10559710B2 (en) * 2017-07-19 2020-02-11 Intevac, Inc. System of height and alignment rollers for precise alignment of wafers for ion implantation
CN113917796A (zh) * 2021-09-22 2022-01-11 哈尔滨工业大学 一种多自由度宏微混合的精密运动台

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4972574A (en) * 1988-06-08 1990-11-27 Mamiya Denshi Co., Ltd. Table driving apparatus
CN101206409A (zh) * 2007-12-17 2008-06-25 上海微电子装备有限公司 一种工件台平衡质量定位系统
CN201134009Y (zh) * 2007-11-14 2008-10-15 上海微电子装备有限公司 一种工件台平衡定位装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02124286A (ja) * 1988-10-28 1990-05-11 Mamiya Denshi:Kk 組立ロボット
EP0366420A3 (en) * 1988-10-28 1992-04-15 Mamiya Denshi Co. Ltd. Table driving apparatus
US6279490B1 (en) * 1999-10-08 2001-08-28 Etec Systems, Inc. Epicyclic stage
TW546551B (en) * 1999-12-21 2003-08-11 Asml Netherlands Bv Balanced positioning system for use in lithographic apparatus
TWI264617B (en) * 1999-12-21 2006-10-21 Asml Netherlands Bv Balanced positioning system for use in lithographic apparatus
DE602004022947D1 (de) * 2003-07-17 2009-10-15 Newport Corp Hochauflösender dynamischer positionierungsmechanismus
DE10359273A1 (de) * 2003-12-17 2005-07-21 Erich Thallner Justiervorrichtung
JP4307288B2 (ja) * 2004-02-25 2009-08-05 キヤノン株式会社 位置決め装置
JP5028659B2 (ja) * 2007-08-24 2012-09-19 秋田県 位置決め機構
NL1036557A1 (nl) * 2008-03-11 2009-09-14 Asml Netherlands Bv Method and lithographic apparatus for measuring and acquiring height data relating to a substrate surface.
WO2010002153A2 (ko) 2008-06-30 2010-01-07 엘지전자주식회사 다중안테나 시스템에서 동기신호의 전송장치
US8796644B2 (en) * 2008-08-18 2014-08-05 Mapper Lithography Ip B.V. Charged particle beam lithography system and target positioning device
TWI472884B (zh) * 2008-08-18 2015-02-11 Mapper Lithography Ip Bv 帶電粒子射束微影系統以及目標物定位裝置
US7959141B2 (en) 2008-12-23 2011-06-14 Sumitomo Heavy Industries, Ltd. Stage apparatus
US20100158645A1 (en) * 2008-12-23 2010-06-24 Sumitono Heavy Industries, Ltd. Stage apparatus
JP5953177B2 (ja) * 2011-10-31 2016-07-20 株式会社日立ハイテクノロジーズ 試料ステージ及び荷電粒子装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4972574A (en) * 1988-06-08 1990-11-27 Mamiya Denshi Co., Ltd. Table driving apparatus
CN201134009Y (zh) * 2007-11-14 2008-10-15 上海微电子装备有限公司 一种工件台平衡定位装置
CN101206409A (zh) * 2007-12-17 2008-06-25 上海微电子装备有限公司 一种工件台平衡质量定位系统

Also Published As

Publication number Publication date
JP2014528165A (ja) 2014-10-23
NL1039797A (en) 2013-03-13
WO2013039389A3 (en) 2013-07-11
US9030649B2 (en) 2015-05-12
US20130094008A1 (en) 2013-04-18
CN103946749A (zh) 2014-07-23
NL1039797C2 (en) 2015-02-09
CN106569396A (zh) 2017-04-19
WO2013039389A2 (en) 2013-03-21
CN103946749B (zh) 2016-11-16
JP5844468B2 (ja) 2016-01-20
TW201312300A (zh) 2013-03-16

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Effective date of registration: 20190529

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Patentee after: ASML Holland Co., Ltd.

Address before: Delft

Patentee before: Mapper Lithography IP B. V.