CN106463422A - 球形成装置、打线装置以及球形成方法 - Google Patents
球形成装置、打线装置以及球形成方法 Download PDFInfo
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Abstract
一种球形成装置50,在炬电极48与金属线42的前端部之间产生放电而在金属线42的前端部形成球43,且所述球形成装置50包括:电流供给部54,对电极48与金属线42的前端部之间供给球形成电流;以及电流控制部57,以规定期间内的球形成电流的信号具有规定电流值的第1期间与包含三角波的第2期间的方式,对电流供给部54进行控制。由此,提供一种可抑制异形球的形成的球形成装置、打线装置以及球形成方法。
Description
技术领域
本发明的若干实施方式涉及一种球形成装置、打线(wire bonding)装置以及球形成方法。
背景技术
在半导体装置的制造方法中,例如广泛使用通过金属线(wire)将半导体元件(device)的电极与基板的配线进行电性连接的打线。作为打线的典型例,可列举所谓的球形接合(ball bonding)方式。即,在电极与插通接合工具(bonding tool)(例如毛细管(capillary))的金属线的前端部之间产生放电,而在金属线的前端部形成球。然后,使接合工具朝向半导体元件的电极下降,并对所述球赋予负荷及超声波振动,而在半导体元件的电极上对金属线的球部分进行接合。
作为球形接合方式的打线装置,已知有如下技术:为了在金属线的前端形成均匀的球,将通过在电极与金属线的前端部之间所产生的放电电压及放电电流来形成球时的焦耳(joule)热相当值与预先设定的热量设定值进行比较而控制放电条件(例如,参照专利文献1)。
现有技术文献
专利文献
专利文献1:日本专利特开平2-181943号公报
另外,现有的打线装置是以在电极与金属线的前端部之间流动的电流成为一定电流值的方式进行定电流控制,从而在金属线的前端部形成规定径(直径)的球。
然而,若如现有的打线装置的球形成方法那样对电极与金属线的前端部之间供给一定电流值的电流,则存在如下情况:根据金属线的材料的不同,会形成气泡、缩孔、偏心等形状变形的异形球。
发明内容
[发明所要解决的问题]
本发明的若干实施方式是鉴于所述问题而完成,目的之一在于提供一种可抑制异形球的形成的球形成装置、打线装置以及球形成方法。
[解决问题的技术手段]
本发明的一实施方式的球形成装置是在电极与金属线的前端部之间产生放电而在金属线的前端部形成球的球形成装置,其特征在于包括:电流供给部,对电极与金属线的前端部之间供给球形成电流;以及电流控制部,以规定期间内的球形成电流的信号具有规定电流值的第1期间与包含三角波的第2期间的方式,对电流供给部进行控制。
在所述球形成装置中,第2期间也可包含三角波,所述三角波具有规定的最大电流值及规定的最小电流值。
在所述球形成装置中,第2期间也可包含三角波,所述三角波的电流值随时间而降低。
在所述球形成装置中,金属线也可包含多种金属材料。
本发明的一实施方式的打线装置包括所述球形成装置。
本发明的一实施方式的球形成方法是在电极与金属线的前端部之间产生放电而在金属线的前端部形成球的球形成方法,其特征在于包括电流供给步骤,所述电流供给步骤是对电极与金属线的前端部之间供给球形成电流,且规定期间内的球形成电流的信号具有规定电流值的第1期间与包含三角波的第2期间。
[发明的效果]
根据本发明,规定期间内的球形成电流的信号具有规定电流值的第1期间。由此,在第1期间内对电极与金属线的前端部之间供给规定的电流值,因此,可抑制球径(直径)的不均,从而可在金属线的前端部形成规定径(直径)的球。而且,规定期间内的球形成电流的信号还包括包含三角波的第2期间。由此,在第1期间内所形成的球的表面通过所述三角波的球形成电流而重复熔融(熔解)与凝固,由此产生多次表面张力,故而可使表面的凹凸或变形平坦化。因此,可稳定地形成具有规定径(直径)的球,并且可抑制气泡、缩孔、偏心等的异形球的形成。
附图说明
图1是用以说明本实施方式的打线装置的一例的概略构成图。
图2是用以说明本实施方式的球形成装置的一例的概略构成图。
图3是用以说明本实施方式的球形成方法的一例的流程图(flow chart)。
图4是与现有的球形成方法相关的电流信号的曲线图(graph)。
图5(A)至图5(D)是用以说明形成于金属线的前端部的球的图。
图6是与本实施方式的球形成方法的一例相关的时序图(timing chart)。
图7是与本实施方式的球形成方法的另一例相关的时序图。
具体实施方式
以下,对本发明的实施方式进行说明。在以下的附图的记载中,相同或类似的部分以相同或类似的符号表示。然而,附图为示意性。因此,具体尺寸等应对照以下的说明而进行判断。而且,在附图彼此之间,当然也包含彼此的尺寸关系或比率不同的部分。进而,本申请发明的技术范围不应限定于所述实施方式而解释。另外,在以下的说明中,将附图的上侧称为“上”,将下侧称为“下”,将左侧称为“左”,将右侧称为“右”。
图1至图7用于表示本发明的球形成装置、打线装置以及球形成方法的一实施方式。图1是用以说明本实施方式的打线装置的一例的概略构成图。本实施方式的打线装置1是为了实施打线而使用的装置。作为一例,所述打线装置1包括本实施方式的球形成装置50。
如图1所示,打线装置1包括XY驱动机构10、接合臂(bonding arm)20、超声波焊头(ultrasonic horn)30、接合工具(bonding tool)40、球形成装置50、超声波振动元件60、及控制部80。
XY驱动机构10构成为可沿XY轴方向(平面方向)移动,在XY驱动机构(线性马达(linear motor))10,设置有使接合臂20可沿Z轴方向(上下方向)移动的Z驱动机构(线性马达)12。
接合臂20由支轴14支撑,相对于XY驱动机构10而摆动自如地构成。接合臂20是以自XY驱动机构10延伸出的方式呈大致长方体地形成,且在打线时,接近至距载置有作为接合对象的半导体元件100的接合台(bonding stage)16为规定距离。
超声波焊头30通过焊头固定螺钉32而安装于接合臂20的前端部。超声波焊头30在其前端部保持有接合工具40。通过超声波振动元件60产生超声波振动,所述超声波振动通过超声波焊头30而传递至接合工具40,从而可通过接合工具40对接合对象赋予超声波振动。超声波振动元件60例如为压电式(piezo)振动元件。
接合工具40用于供金属线42插通,例如为设置有插通孔的毛细管。此时,构成为在接合工具40的插通孔中插通有用于接合的金属线42,且可将金属线42的一部分自所述接合工具40的前端抽出。接合工具40利用弹簧力等而可更换地安装于超声波焊头30。而且,在接合工具40的上方设置有线夹(wire clamper)44,线夹44构成为在规定的时序将金属线42束紧或释放。在线夹44的更上方设置有线张力器(wire tensioner)46,线张力器46构成为供金属线42插通,且对接合中的金属线42赋予适度的张力。
金属线42的材料自容易加工与电阻低等方面适当选择,例如使用金(Au)、铜(Cu)、或银(Ag)等。另外,金属线42的材料并不限定于单一金属的情况,也可使用包含多种金属的材料,例如铜钯(Cu-Pd)等。
炬(torch)电极48用于产生放电(火花(spark))。炬电极48构成为通过放电的热而可在自接合工具40的前端抽出的金属线42的前端部(一端部)形成球43。而且,炬电极48的位置固定,在放电时,接合工具40接近至距炬电极48为规定距离,从而在炬电极48与金属线42的前端部(一端部)之间进行适当的放电。
球形成装置50为用于本实施方式的球形成方法的装置。而且,球形成装置50与控制部80之间构成为可收发信号,以使其中一个可使另一个的功能运作或停止。
控制部80连接于XY驱动机构10、Z驱动机构12、超声波焊头30(超声波振动元件60)、及放电检查装置50,通过控制部80而对这些构成的动作进行控制,由此,可进行打线所需的处理。控制部80包括界面(interface)(未图示),所述界面在与例如XY驱动机构10、Z驱动机构12、超声波焊头30(超声波振动元件60)、球形成装置50等所述各构成之间进行信号的收发。
另外,在控制部80,连接有用以输入控制信息的操作部82、及用以输出控制信息的显示部84,由此,作业者可一面利用显示部84识别画面,一面利用操作部82输入必要的控制信息。控制部80例如可主要由包括中央处理器(Central Processing Unit,CPU)及存储器(memory)等的计算机(computer)装置构成,且在存储器中预先存储有用于进行打线所需的处理的程序(program)或数据(data)等。
图2是用以说明本实施方式的球形成装置的一例的概略构成图。球形成装置50用以在金属线42的前端部形成球43。如图2所示,球形成装置50包括电源电路部51及控制电路部55。
电源电路部51用以进行放电、及检测与放电相关的电信号。电源电路部51例如为产生变动少且稳定的电压及电流的线性方式的电源电路。电源电路部51包括电压产生部52、电流检测部53、及电流供给部54。
电压产生部52用以产生电压。电压产生部52连接于控制电路部55,基于来自控制电路部55的控制信号而产生规定的高电压,例如最大5000[V]左右的高电压。而且,电压产生部52连接于炬电极48、及与自接合工具40抽出的金属线42的前端部(一端部)为相反侧的金属线42的另一端部。电压产生部52构成为对炬电极48与金属线42的前端部之间施加所产生的规定的高电压。由此,在炬电极48与金属线42的前端部之间产生放电。
电压产生部52可包含例如定电压电路与升压用的变压器(transformer)而构成。在此例的情况下,电压产生部52通过反馈(feedback)控制而产生一定的高电压值,所述反馈控制是将自定电压电路输出并通过升压用的变压器升压的电压的一部分再次反馈至定电压电路。作为升压用的变压器,例如使用具有定电压功能及定电流功能两者的线性输出型变压器。
电流检测部53用以检测电流,且连接于炬电极48。而且,电流检测部53连接于控制电路部55,且构成为在通过放电而在炬电极48与金属线42之间流动放电电流时,向控制电路部55输出放电电流的检测信号。
电流检测部53可包含例如放电电流检测用电阻器、成为阈值的电源、及比较器(comparator)等而构成。在此例的情况下,电流检测部53在放电电流的电压值大于电源的电压值时,输出放电电流的检测信号。
电流供给部54用以供给电流,且连接于炬电极48及金属线42的另一端。而且,电压检测部54连接于控制电路部55,且构成为基于来自控制电路部55的控制信号,而对炬电极48及金属线42的前端部之间供给用以形成球43的电流即球形成电流。
电流供给部54可包含例如定电流电路及升压用的变压器而构成。在此例的情况下,电流供给部54供给自定电流电路输出并通过升压用的变压器升压的一定电流值的电流。升压用的变压器例如使用具有定电压功能及定电流功能两者的线性输出型变压器,且可与所述电压产生部52共用。
控制电路部55用以控制放电。控制电路部55包括界面(未图示),所述界面在与例如电压产生部52、电流检测部53、电流供给部54等电源电路部51的所述各构成之间进行信号的收发。而且,控制电路部55包括电压控制部56及电流控制部57。电压控制部56与电流控制部57之间以彼此可收发信号的方式构成。
电压控制部56用以对产生电压的电压产生部52进行控制。电压控制部56构成为针对电压产生部52产生的电压,可控制例如开始(接通)、结束(断开)、电压值、及施加所述电压值的时间(期间)等。
电压控制部56例如基于来自控制部80的控制信号,而向电压产生部52输出使规定的高电压的施加开始的电压施加开始的控制信号(接通信号)。而且,电压控制部56例如基于来自电流检测部53的放电电流的检测信号,而向电压产生部52输出使规定的高电压的施加结束的电压施加结束的控制信号(断开信号)。
电流控制部57用以对供给电流的电流供给部54进行控制。构成为针对电流供给部54供给的球形成电流,可控制例如开始(接通)、结束(断开)、电流值、及供给所述电流值的时间(期间)等。
电流控制部57例如基于来自电流检测部53的放电电流的检测信号,而向电流供给部54输出控制信号,以在规定期间内对炬电极48及金属线42的前端部之间供给球形成电流。
而且,电流控制部57可包含例如脉冲(pulse)产生器等而构成。在此例的情况下,电流控制部57将脉冲信号作为控制信号而输出至电流供给部54。电流控制部57可将所述脉冲信号的输出值(振幅)、时间(宽度)、周期设定为规定的值。脉冲信号的输出值(振幅)、时间(宽度)、周期例如基于金属线42的径、金属线42的材料(材质)、形成的球43的径(直径)等而设定。
在本实施方式中,示出将来自电流检测部53的放电电流的检测信号输入至电压控制部56及电流控制部57的例子,但并不限定于此。例如,也可将来自电流检测部53的放电电流的检测信号仅输入至电压控制部56,电压控制部56将所输入的放电电流的检测信号发送至电流控制部57。而且,球形成装置50包括未图示的切换电路(开关电路(switchcircuit)),所述切换电路(开关电路)也可基于来自电流检测部53的放电电流的检测信号,而切换电压控制部56及电流控制部57与电源电路部51的所述各构成之间的连接。在此例的情况下,切换电路(开关电路)在输入放电电流的检测信号之前将电压产生部52与电压控制部56之间电性连接,另一方面,将电流供给部54与电流控制部57之间电性切断。然后,当输入放电电流的检测信号时,切换电路(开关电路)将电压产生部52与电压控制部56电性切断,另一方面,将电流供给部54与电流控制部57之间电性连接。
接下来,参照图3至图7,对在金属线的前端部形成球的方法进行说明。
图3是表示本实施方式的球形成方法的一例的流程图。如图3所示,开始球形成处理S10时,首先,电压控制部56向电压产生部52输出电压施加开始的控制信号(接通信号),电压产生部52开始对炬电极48及金属线42的前端部之间施加规定的高电压(S11)。
其次,电压控制部56基于自电流检测部53输入的放电电流的检测信号,而判定是否已检测到放电电流(S12),重复S12的步骤直至检测到放电电流为止。
当S12的判定结果为检测到放电电流时,电压控制部56向电压产生部52输出电压施加结束的控制信号(断开信号),电压产生部52结束对炬电极48及金属线42的前端部之间施加规定的高电压(S13)。与此同时,电流控制部57向电流供给部54输出控制信号,电流供给部54在规定期间内对炬电极48及金属线42的前端部之间供给球形成电流(S14)。
在S14的步骤后,电流控制部57结束球形成处理S10。
此处,为了进行比较,对现有的球形成方法进行说明。
图4是与现有的球形成方法相关的电流信号的曲线图。如图4所示,现有的球形成方法在时刻t1,在炬电极48与金属线42的前端部之间产生放电后,在规定的期间Tj内对炬电极48与金属线42的前端部之间供给一定的电流值i0的电流。
图5是用以说明形成于金属线的前端部的球的图,图5(A)是表示正常的球的一例的图,图5(B)是表示异形的球的一例的图,图5(C)是表示异形的球的另一例的图,图5(D)是表示异形的球的又一例的图。通过在产生放电后对炬电极48与金属线42的前端部之间供给电流,而例如图5(A)所示,在金属线42的前端部形成具有规定的径(直径)D的球43。所述球43具有球形或大致球形的形状,认为是正常的球(正常球)。
另一方面,例如在金属线42的材料为铜(Cu)等的情况下,图4所示的现有的球形成方法存在如下情况:如图5(B)所示,通过放电而在球43的表面产生气泡43a。另外,例如在金属线42的材料为铜钯(Cu-Pd)等的情况下,图4所示的现有的球形成方法存在如下情况:若在球43的表面存在钯(Pd)的浓度高的部位,则如图5(C)所示,在所述部位会形成缩孔43b。同样地,在金属线42的材料为铜钯(Cu-Pd)等的情况下,图4所示的现有的球形成方法存在如下情况:如图5(D)所示,球43的重心自其刚心偏移而偏心。在图5(B)至图5(D)的情况下,虽可形成规定的径(直径)的球43,但形状自球形或大致球形变形,认为这些球43是异形的球(异形球)。
图6是与本实施方式的球形成方法的一例相关的时序图。另外,实际上相对于电流控制部57所输出的信号,电流供给部54所供给的球形成电流可产生时间的偏差(时滞(timelag)),但为了简化说明,图6除明显的情况以外,表示为未产生时间的偏差(时滞)的情况,在以下的说明中也相同。本实施方式的球形成方法中,如图6所示,在时刻t0,电压控制部56向电压产生部52输出电压施加开始的控制信号(接通信号),电压产生部52开始对炬电极48及金属线42的前端部之间施加规定的高电压。然后,在经过规定时间后,在时刻t1,在炬电极48与金属线42的前端部之间产生放电而流动放电电流。此时,电流检测部53检测到所述放电电流并输出放电电流的检测信号后,电流控制部57输出控制信号而对电流供给部54进行控制,电流供给部54在规定的期间Tb内对炬电极48及金属线42的前端部之间供给球形成电流。
更详细而言,电流控制部57在时刻t2至时刻t3的时间(期间)内,向电流供给部54输出规定输出值(规定振幅)的脉冲信号。电流供给部54基于所述脉冲信号,而在时刻t2至时刻t3的时间(期间)内对炬电极48与金属线42的前端部之间供给规定的电流值i1的球形成电流。另外,规定的电流值i1的一例为40[mA]左右。
其次,在时刻t3,电流控制部57向电流供给部54输出规定输出值(规定振幅)且规定时间(规定宽度)的脉冲信号。所述脉冲信号在时刻t3至时刻t4的时间(期间)内被输出多次(多个)。电流供给部54基于所述多次(多个)脉冲信号,而对炬电极48与金属线42的前端部之间供给重复电流值的上升(增加)与下降(减少)的三角波形(波形为三角波)的球形成电流。所述三角波例如具有最大电流值i2及最小电流值i3的规定的振幅。另外,最大电流值i2的一例为50[mA]左右,最小电流值i3的一例为30[mA]左右。
另外,本申请的“三角波”的用语是指波形为三角或三角状,也包含大致三角波、近似三角波的、及实质上为三角波的,而且,也包含锯形波(锯齿状波)。因此,显然本申请的“三角波”的用语并不限定于严谨意义(狭义)上的三角波。
其次,在时刻t4,电流控制部57停止(结束)所述脉冲信号的输出时,电流供给部54在时刻t4至时刻t5的时间内,一面使电流值降低一面对炬电极48与金属线42的前端部(一端部)之间供给球形成电流。继而,在时刻t5,电流供给部54停止(结束)对炬电极48与金属线42的前端部之间供给球形成电流,从而在金属线42的前端部形成球43。另外,时刻t0至时刻t5的时间(期间)的一例为100μsec左右。
此处,如图6所示,时刻t2至时刻t5的时间(期间)、即规定的期间Tb内的球形成电流的信号具有为规定的电流值i1的时刻t2至时刻t3的时间(期间)、即第1期间Tb1。由此,在第1期间Tb1内对炬电极48与金属线42的前端部之间供给规定的电流值i1,因此,可抑制球径(直径)的不均,从而可在金属线42的前端部(一端部)形成规定的径(直径)的球。
而且,如图6所示,规定的期间Tb内的球形成电流的信号还包括包含三角波的时刻t3至时刻t5的时间(期间)、即第2期间Tb2。由此,在第1期间Tb1内所形成的球的表面通过所述三角波的球形成电流而重复熔融(熔解)与凝固,由此产生多次表面张力,因此可使表面的凹凸或变形平坦化。
另外,金属线42优选为包含多种金属材料,例如铜钯(Cu-Pd)。此时,即便在第1期间Tb1内所形成的球的表面存在钯(Pd)的浓度高的部位,当通过第2期间Tb2的三角波的球形成电流而使球的表面熔融(熔解)时,所述钯(Pd)也会扩散至铜(Cu)中,因此可使球的表面的钯(Pd)的浓度均匀化,从而可有效地抑制图5(C)所示的缩孔43b的形成。
图7是与本实施方式的球形成方法的另一例相关的时序图。另外,与图6的情况同样地,图7除明显的情况以外,表示为相对于电流控制部57所输出的信号,电流供给部54所供给的球形成电流未产生时间的偏差(时滞)的情况,在以下的说明中也相同。而且,包含第1期间Tb1的时刻t0至时刻t3的时间(期间)与图6相同,故省略其说明。如图7所示,在时刻t3,电流控制部57向电流供给部54输出规定时间(规定宽度)的脉冲信号。所述脉冲信号在时刻t3至时刻t4的时间(期间)内被输出多次(多个),且各脉冲信号具有互不相同的输出值(振幅),各个输出值(振幅)随时间经过而降低。电流供给部54基于所述多次(多个)脉冲信号,而对炬电极48与金属线42的前端部之间供给重复电流值的上升(增加)与下降(减少)的三角波形(波形为三角波)的球形成电流。所述三角波的电流值随时间经过而逐渐降低。
在时刻t4,电流控制部57停止(结束)所述脉冲信号的输出时,电流供给部54在时刻t4至时刻t5的时间内,一面使电流值降低一面对炬电极48与金属线42的前端部(一端部)之间供给球形成电流。继而,在时刻t5,电流供给部54停止(结束)对炬电极48与金属线42的前端部之间供给球形成电流,从而在金属线42的前端部形成球43。
此处,如图7所示,规定的期间Tb内的球形成电流的信号具有包含三角波的时刻t3至时刻t5的时间(期间)、即第2期间Tb2,且所述三角波的电流值随时间而降低。由此,在第1期间Tb1内所形成的球的表面通过所述三角波的球形成电流而重复熔融(熔解)与凝固,由此产生多次表面张力,因此可使表面的凹凸或变形平坦化,并且由于三角波的电流值随时间而降低,故而利用第1期间Tb1而液体化的球逐渐被冷却,因此可形成具有圆球或大致圆球的形状的球43。
在本实施方式中,示出图6所示的第2期间Tb2包含具有规定的最大电流值i2及规定的最小电流值i3的三角波的例子,且示出图7所示的第2期间Tb2包含电流值随时间经过而降低的三角波的例子,但并不限定于这些例子。第2期间Tb2例如也可包含具有规定的最大电流值及规定的最小电流值的三角波、及电流值随时间经过而降低的三角波两种。
如上所述,根据本实施方式,如图6及图7所示,规定的期间Tb内的球形成电流的信号具有为规定的电流值i1的第1期间Tb1。由此,在第1期间Tb1内对炬电极48与金属线42的前端部之间供给规定的电流值i1,因此可抑制球径(直径)的不均,从而可在金属线42的前端部(一端部)形成规定的径(直径)的球。而且,如图6及图7所示,规定的期间Tb内的球形成电流的信号还包括包含三角波的第2期间Tb2。由此,在第1期间Tb1内所形成的球的表面通过所述三角波的球形成电流而重复熔融(熔解)与凝固,由此产生多次表面张力,故而可使表面的凹凸或变形平坦化。因此,如图5(A)所示,可稳定地形成具有规定的径(直径)D的球43,并且可抑制如图5(B)至图5(D)所示的气泡43a、缩孔43b、偏心等的异形球的形成。
另外,本发明并不限定于所述实施方式,可进行各种变形而应用。
此外,通过所述发明的实施方式而说明的实施例或应用例可根据用途而适当组合、或加以变更或者改良而使用,本发明并不限定于所述实施方式的记载。根据权利要求书的记载可知,所述组合而成或加以变更或者改良而成的实施方式也可包含在本发明的技术范围内。
[符号的说明]
1:打线装置
42:金属线
43:球
48:炬电极
50:球形成装置
54:电流供给部
57:电流控制部
S10:球形成处理
Claims (7)
1.一种球形成装置,在电极与金属线的前端部之间产生放电,而在所述金属线的前端部形成球,且所述球形成装置包括:
电流供给部,对所述电极与所述金属线的前端部之间供给球形成电流;以及
电流控制部,以规定期间内的所述球形成电流的信号具有规定电流值的第1期间与包含三角波的第2期间的方式,对所述电流供给部进行控制。
2.根据权利要求1所述的球形成装置,其中所述第2期间包含三角波所述三角波具有规定振幅。
3.根据权利要求1所述的球形成装置,其中所述第2期间包含三角波,所述三角波的电流值随时间而降低。
4.根据权利要求2所述的球形成装置,其中所述第2期间包含三角波,所述三角波的电流值随时间而降低。
5.根据权利要求1所述的球形成装置,其中所述金属线包含多种金属材料。
6.一种打线装置,包括根据权利要求1所述的球形成装置。
7.一种球形成方法,在电极与金属线的前端部之间产生放电而在所述金属线的前端部形成球,且所述球形成方法包括:
电流供给步骤,对所述电极与所述金属线的前端部之间供给球形成电流,且
规定期间内的所述球形成电流的信号具有规定电流值的第1期间与包含三角波的第2期间。
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KR950009996B1 (ko) * | 1992-12-24 | 1995-09-04 | 주식회사금강 | 규산칼슘계 인조목재 및 그의 제조방법 |
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JP2006041412A (ja) * | 2004-07-30 | 2006-02-09 | Fooemu Gijutsu Kenkyusho:Kk | ワイヤボンダにおけるボール形成装置 |
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US20040155089A1 (en) * | 2001-06-27 | 2004-08-12 | Sanyo Electric Co., Ltd., A Japan Corporation | Recognition device, bonding device, and method of manufacturing a circuit device |
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