CN106433482A - 氧化铝抛光粉及其制备方法 - Google Patents
氧化铝抛光粉及其制备方法 Download PDFInfo
- Publication number
- CN106433482A CN106433482A CN201610496464.5A CN201610496464A CN106433482A CN 106433482 A CN106433482 A CN 106433482A CN 201610496464 A CN201610496464 A CN 201610496464A CN 106433482 A CN106433482 A CN 106433482A
- Authority
- CN
- China
- Prior art keywords
- aluminum oxide
- polishing powder
- oxide polishing
- preparation
- activated alumina
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 58
- 239000000843 powder Substances 0.000 title claims abstract description 45
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 36
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims abstract description 25
- 235000006408 oxalic acid Nutrition 0.000 claims abstract description 8
- 229910001593 boehmite Inorganic materials 0.000 claims description 8
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- IRXRGVFLQOSHOH-UHFFFAOYSA-L dipotassium;oxalate Chemical compound [K+].[K+].[O-]C(=O)C([O-])=O IRXRGVFLQOSHOH-UHFFFAOYSA-L 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 7
- 239000011148 porous material Substances 0.000 claims description 7
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 6
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 150000003891 oxalate salts Chemical class 0.000 claims description 4
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 claims description 3
- ZNCPFRVNHGOPAG-UHFFFAOYSA-L sodium oxalate Chemical compound [Na+].[Na+].[O-]C(=O)C([O-])=O ZNCPFRVNHGOPAG-UHFFFAOYSA-L 0.000 claims description 3
- 238000005245 sintering Methods 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 238000005660 chlorination reaction Methods 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000004579 marble Substances 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 150000001879 copper Chemical class 0.000 abstract 1
- 230000008859 change Effects 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 229910000423 chromium oxide Inorganic materials 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 235000013877 carbamide Nutrition 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- YOBAEOGBNPPUQV-UHFFFAOYSA-N iron;trihydrate Chemical compound O.O.O.[Fe].[Fe] YOBAEOGBNPPUQV-UHFFFAOYSA-N 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- RYZCLUQMCYZBJQ-UHFFFAOYSA-H lead(2+);dicarbonate;dihydroxide Chemical compound [OH-].[OH-].[Pb+2].[Pb+2].[Pb+2].[O-]C([O-])=O.[O-]C([O-])=O RYZCLUQMCYZBJQ-UHFFFAOYSA-H 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000021180 meal component Nutrition 0.000 description 1
- 238000004137 mechanical activation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000009418 renovation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
- C09G1/14—Other polishing compositions based on non-waxy substances
- C09G1/18—Other polishing compositions based on non-waxy substances on other substances
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
Description
项目 | 光泽度 | 划痕 |
实施例1 | 93 | 无 |
实施例2 | 92 | 无 |
实施例3 | 91 | 无 |
对比例1 | 85 | 少量 |
对比例2 | 70 | 大量 |
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610496464.5A CN106433482B (zh) | 2016-06-29 | 2016-06-29 | 氧化铝抛光粉及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610496464.5A CN106433482B (zh) | 2016-06-29 | 2016-06-29 | 氧化铝抛光粉及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106433482A true CN106433482A (zh) | 2017-02-22 |
CN106433482B CN106433482B (zh) | 2020-09-18 |
Family
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Family Applications (1)
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---|---|---|---|
CN201610496464.5A Active CN106433482B (zh) | 2016-06-29 | 2016-06-29 | 氧化铝抛光粉及其制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106433482B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114456716A (zh) * | 2022-01-14 | 2022-05-10 | 华东理工大学 | 一种抛光蓝宝石用氧化铝抛光液及其制备方法 |
Citations (13)
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---|---|---|---|---|
JPH11279539A (ja) * | 1998-03-30 | 1999-10-12 | Denki Kagaku Kogyo Kk | 研磨用組成物 |
CN1451710A (zh) * | 2002-04-12 | 2003-10-29 | 台湾永光化学工业股份有限公司 | 高速研磨金属层用化学机械研磨液组成物 |
CN1502667A (zh) * | 2002-10-30 | 2004-06-09 | ������������ʽ���� | 研磨液组合物 |
CN1854235A (zh) * | 2005-04-21 | 2006-11-01 | 安集微电子(上海)有限公司 | 抛光浆料 |
TWI267111B (en) * | 2000-12-01 | 2006-11-21 | Applied Materials Inc | Method and composition for the removal of residual materials during substrate planarization |
CN101890375A (zh) * | 2009-05-19 | 2010-11-24 | 中国石油化工股份有限公司 | 一种大孔氧化铝载体及其制备方法 |
CN102516881A (zh) * | 2011-12-14 | 2012-06-27 | 德米特(苏州)电子环保材料有限公司 | 一种氧化铝基质的树脂镜片抛光粉制作方法 |
CN102861619A (zh) * | 2011-07-07 | 2013-01-09 | 中国石油化工股份有限公司 | 一种高比表面积氧化铝载体的制备方法 |
CN103360953A (zh) * | 2012-04-05 | 2013-10-23 | 安集微电子科技(上海)有限公司 | 一种化学机械抛光液 |
CN103382368A (zh) * | 2012-05-03 | 2013-11-06 | 安集微电子(上海)有限公司 | 一种化学机械平坦化浆料 |
CN103826802A (zh) * | 2011-09-26 | 2014-05-28 | 圣戈本陶瓷及塑料股份有限公司 | 包括磨料颗粒材料的磨料制品,使用磨料颗粒材料的涂布磨料及其形成方法 |
EP2857476A1 (en) * | 2012-05-24 | 2015-04-08 | Daehan Ceramics Co., Ltd. | Method for manufacturing alumina-based abrasive grains for abrasive material, and alumina-based abrasive grains for abrasive material manufactured thereby |
CN104815661A (zh) * | 2015-04-09 | 2015-08-05 | 中国科学院山西煤炭化学研究所 | 一种以改性氧化铝为载体的催化剂及制备方法 |
-
2016
- 2016-06-29 CN CN201610496464.5A patent/CN106433482B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11279539A (ja) * | 1998-03-30 | 1999-10-12 | Denki Kagaku Kogyo Kk | 研磨用組成物 |
TWI267111B (en) * | 2000-12-01 | 2006-11-21 | Applied Materials Inc | Method and composition for the removal of residual materials during substrate planarization |
CN1451710A (zh) * | 2002-04-12 | 2003-10-29 | 台湾永光化学工业股份有限公司 | 高速研磨金属层用化学机械研磨液组成物 |
CN1502667A (zh) * | 2002-10-30 | 2004-06-09 | ������������ʽ���� | 研磨液组合物 |
CN1854235A (zh) * | 2005-04-21 | 2006-11-01 | 安集微电子(上海)有限公司 | 抛光浆料 |
CN101890375A (zh) * | 2009-05-19 | 2010-11-24 | 中国石油化工股份有限公司 | 一种大孔氧化铝载体及其制备方法 |
CN102861619A (zh) * | 2011-07-07 | 2013-01-09 | 中国石油化工股份有限公司 | 一种高比表面积氧化铝载体的制备方法 |
CN103826802A (zh) * | 2011-09-26 | 2014-05-28 | 圣戈本陶瓷及塑料股份有限公司 | 包括磨料颗粒材料的磨料制品,使用磨料颗粒材料的涂布磨料及其形成方法 |
CN102516881A (zh) * | 2011-12-14 | 2012-06-27 | 德米特(苏州)电子环保材料有限公司 | 一种氧化铝基质的树脂镜片抛光粉制作方法 |
CN103360953A (zh) * | 2012-04-05 | 2013-10-23 | 安集微电子科技(上海)有限公司 | 一种化学机械抛光液 |
CN103382368A (zh) * | 2012-05-03 | 2013-11-06 | 安集微电子(上海)有限公司 | 一种化学机械平坦化浆料 |
EP2857476A1 (en) * | 2012-05-24 | 2015-04-08 | Daehan Ceramics Co., Ltd. | Method for manufacturing alumina-based abrasive grains for abrasive material, and alumina-based abrasive grains for abrasive material manufactured thereby |
CN104815661A (zh) * | 2015-04-09 | 2015-08-05 | 中国科学院山西煤炭化学研究所 | 一种以改性氧化铝为载体的催化剂及制备方法 |
Non-Patent Citations (1)
Title |
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李永祥等: "煅烧条件对制备γ-Al2O3的影响", 《华北工学院学报》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114456716A (zh) * | 2022-01-14 | 2022-05-10 | 华东理工大学 | 一种抛光蓝宝石用氧化铝抛光液及其制备方法 |
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Publication number | Publication date |
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CN106433482B (zh) | 2020-09-18 |
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Denomination of invention: Alumina polishing powder and its preparation method Effective date of registration: 20220620 Granted publication date: 20200918 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2022310000067 |
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Denomination of invention: Aluminum oxide polishing powder and its preparation method Effective date of registration: 20230627 Granted publication date: 20200918 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2023310000314 |
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Granted publication date: 20200918 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2023310000314 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Aluminum oxide polishing powder and its preparation method Granted publication date: 20200918 Pledgee: Industrial Bank Co.,Ltd. Shanghai Songjiang sub branch Pledgor: SHANGHAI HUAMING GONA RARE EARTH NEW MATERIALS Co.,Ltd. Registration number: Y2024310000534 |
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