CN106298709A - 低成本扇出式封装结构 - Google Patents

低成本扇出式封装结构 Download PDF

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CN106298709A
CN106298709A CN201610996980.4A CN201610996980A CN106298709A CN 106298709 A CN106298709 A CN 106298709A CN 201610996980 A CN201610996980 A CN 201610996980A CN 106298709 A CN106298709 A CN 106298709A
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salient point
wiring layer
encapsulating structure
fan
out formula
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CN106298709B (zh
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杜茂华
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Samsung Semiconductor China R&D Co Ltd
Samsung Electronics Co Ltd
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    • HELECTRICITY
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Abstract

本发明提供了一种扇出式封装结构,所述扇出式封装结构包括:芯片,具有顶表面、侧表面和底表面;凸点,位于芯片的顶表面上;塑封料,包封芯片的侧表面,并覆盖芯片的除设置有凸点之外的顶表面;再布线层,位于塑封料的顶表面和凸点的顶表面上并与凸点电连接,再布线层包括设置在其上的焊盘;焊球,位于再布线层的焊盘上,并通过焊盘与再布线层电连接。

Description

低成本扇出式封装结构
技术领域
总体来说,本发明属于半导体封装领域;具体来说,本发明涉及一种低成本的扇出式封装结构。
背景技术
扇出式封装结构由芯片、塑封料、再布线层和焊球构成。通过再布线层,可以对芯片的焊区进行重新布局,使得新焊区能满足对焊球间距的要求和/或使新焊区按照阵列排布等。
图1是示出现有技术中扇出式封装结构100的剖视图。扇出式封装结构100包括芯片110、塑封料130、再布线层140、介电层150和焊球160。
如图1所示,塑封料130包封芯片110的侧表面和底表面,以对芯片110进行保护。芯片110的顶表面和塑封料130的顶表面共面。芯片110通过设置在芯片110的顶表面和塑封料130的顶表面上的多个再布线层140电连接到焊球160,从而电连接到外部,其中,再布线层140包括焊盘(未标出),焊球160设置在焊盘上并与焊盘电连接。另外,介电层150覆盖再布线层140。介电层150设置在再布线层140之间以及再布线层140与芯片110和塑封料130之间,并填充再布线层140的空隙。
由于工艺和设计上的限制与需求,通常需要布置多层再布线层。而制作再布线层要使用光刻、腐蚀等工艺,相应地,在需要制作的再布线层的层数越多时,需要的工艺数则会越多,从而导致成本的升高。为了减少再布线层的层数,传统做法是提高布线密度,减少布线间距。但是由于受到变形等因素的影响,扇出式封装结构在减少布线间距上存在很多技术障碍,从而难以利用此种方式减少再布线层的层数。
发明内容
本发明的目的在于提供一种低成本的扇出式封装结构。
在示例实施例中,提供了一种扇出式封装结构,所述扇出式封装结构包括:芯片,具有顶表面、侧表面和底表面;凸点,位于芯片的顶表面上;塑封料,包封芯片的侧表面,并覆盖芯片的除设置有凸点之外的顶表面;再布线层,位于塑封料的顶表面和凸点的顶表面上并与凸点电连接,再布线层包括设置在其上的焊盘;焊球,位于再布线层的焊盘上,并通过焊盘与再布线层电连接。
根据示例实施例,凸点中的至少两个凸点可以彼此电连接且不与芯片的内部电路电连接。
根据示例实施例,所述扇出式封装结构还可以包括位于芯片的顶表面上且被塑封料覆盖的连接线,所述至少两个凸点可以通过连接线彼此电连接。
根据示例实施例,所述至少两个凸点可以传输再布线层中的相同信号。
根据示例实施例,连接线的高度可以小于凸点的高度。
根据示例实施例,再布线层、凸点和连接线中的至少一者可以包含铜。
根据示例实施例,所述扇出式封装结构还可以包括:介电层,包封再布线层并填充再布线层的空隙。
根据示例实施例,塑封料的顶表面可以与凸点的顶表面共面。
根据示例实施例,再布线层可以包括单层。
根据示例实施例,再布线层可以包括多层。
本发明通过在芯片表面布置凸点,并在制作凸点的同时在芯片上进行连接布线,这样将一部分再布线层的布线转移到芯片表面,而通过凸点,使塑封料填充进芯片和再布线层之间,形成一层介电层,这样就可以减少再布线层的数量,降低封装成本。
附图说明
通过下面结合附图进行的描述,本发明的上述和其他目的和特点将会变得更加清楚,其中:
图1是示出现有技术中扇出式封装结构的剖视图;
图2是示出根据本发明的实施例的扇出式封装结构的剖视图;
图3是根据本发明的实施例的凸点与再布线层中的连接关系的一个示例的示图。
具体实施方式
在下文中,将参照附图更充分地描述本发明。本领域技术人员将理解的是,在不脱离本公开的精神或范围的情况下,可以以各种不同的方式修改所描述的实施例。将省略无关的部分,以清楚地描述本公开。
图2是示出根据本发明的实施例的扇出式封装结构200的剖视图。
与现有技术一样,扇出式封装结构200包括芯片210、塑封料230、再布线层240、介电层250和焊球260,因此将省略对这些部件的相同的详细描述。根据本发明的实施例,扇出式封装结构200还包括凸点220和连接线225。
与根据现有技术的图1的扇出式封装结构100的塑封料130相似,在图2中示出的塑封料230包封芯片210的侧表面和底表面,但是本发明不限于此,塑封料230也可以不包封芯片210的底表面。另外,在根据本发明的实施例的扇出式封装结构200中,在芯片210的顶表面上设置有多个凸点220,并且与图1中的塑封料130不同,塑封料230覆盖芯片210的除设置有凸点220之外的顶表面。在优选的实施例中,塑封料230覆盖设置在芯片210的顶表面上的连接线225。在图2示出的实施例中,塑封料230的顶表面与凸点220的顶表面共面。在可选择的实施例中,塑封料230的顶表面与凸点220的顶表面不共面。在下文中,将详细描述凸点220和连接线225。
参照图2,凸点220设置在芯片210的顶表面上。连接线225设置在芯片210的光敏聚酰亚胺(PSPI)层的表面上,而不与芯片210的内部电路产生电连接。优选地,连接线225的高度小于凸点220的高度。凸点220包括多个连接凸点2201和多个桥联凸点2202。芯片210通过连接凸点2201与再布线层240电连接。在本发明中,桥联凸点2202不与芯片210电连接。桥联凸点2202可以彼此电连接,优选地,可以通过设置在芯片210的顶表面上的连接线225彼此电连接。彼此电连接的桥联凸点2202为一组桥联凸点2202。根据本发明,扇出式封装结构200可以包括至少一组桥联凸点2202,每组桥联凸点2202可以包括至少两个桥联凸点2202。在桥联凸点2202的组数大于一时,各组桥联凸点2202中的桥联凸点2202的个数可以彼此相同、彼此部分相同或彼此不同。将在之后共同参照图3进一步描述桥联凸点2202。
在根据本发明的实施例的封装结构200中,与图1的介电层150相似,介电层250覆盖再布线层240,填充再布线层240的空隙。另外,虽然图2中示出再布线层240为单层,但是本发明构思不限于此。再布线层240可以是单层或多层,多层包括两层和大于两层的情况。在再布线层240为多层时,介电层250设置在再布线层240之间。在本发明中,因为塑封料230覆盖芯片210的除设置有凸点220之外的顶表面,部分实现了介电层的功能,所以与介电层150不同,介电层250并未设置在再布线层240与芯片210和塑封料230之间。
总体上来看,再布线层240与再布线层140基本相同,例如,也包括焊盘(未示出)。但是,在根据本发明的实施例的封装结构200中,因为设置在芯片110的顶表面上的凸点220和连接线225可以部分地实现再布线层的功能,所以在实现相同的再布线功能的情况下,根据本发明的封装结构200中的再布线层240的层数会少于根据现有技术(例如,参照图1)的再布线层140的层数。如上所述,凸点220和连接线225的使用可以减少所需再布线层的层数,从而可以减少制造再布线层所需的光刻、腐蚀等工艺的个数,以更低的成本完成扇出式封装结构。
根据本发明的实施例,凸点220、连接线225和再布线层240中的至少一者可以包含金属,例如铜。
图3是根据本发明的实施例的凸点与再布线层中的连接关系的一个示例的示图。
如图3所示,一组桥联凸点彼此电连接,并将再布线层中的两个相同的信号A彼此电连接,所述两个相同的信号A分别连接到再布线层上的两个焊盘。因为所述两个焊盘均连接到信号A,所以在图3中用符号“A”标示。另外,因为另一单独的焊盘连接到信号B,所以在图3中用符号“B”标示。在这样的连接方式下,可以在再布线层上实现信号跨越。同时,桥联凸点和连接线均不与芯片电连接,桥联凸点仅与再布线层连接。因此,桥联凸点的作用为连接再布线信号,从而实现部分再布线功能。
根据本发明,通过在芯片上布置凸点,可以将再布线层的线路部分地转移到芯片上,从而减少了扇出式封装的再布线层的层数,因此减少了光刻、腐蚀等工艺的使用,降低了封装成本。
对于本领域的技术人员将清楚的是,在不脱离本发明的精神或范围的情况下,可以在本发明中做出各种修改和变化。因此,如果本发明的修改和变化落入权利要求及其等同物的范围内,那么本发明意图覆盖本发明的这些修改和变化。

Claims (10)

1.一种扇出式封装结构,所述扇出式封装结构包括:
芯片,具有顶表面、侧表面和底表面;
凸点,位于芯片的顶表面上;
塑封料,包封芯片的侧表面,并覆盖芯片的除设置有凸点之外的顶表面;
再布线层,位于塑封料的顶表面和凸点的顶表面上并与凸点电连接,再布线层包括设置在其上的焊盘;
焊球,位于再布线层的焊盘上,并通过焊盘与再布线层电连接。
2.根据权利要求1所述的扇出式封装结构,其中,所述凸点中的至少两个凸点彼此电连接且不与芯片的内部电路电连接。
3.根据权利要求2所述的扇出式封装结构,所述扇出式封装结构还包括位于芯片的顶表面上且被塑封料覆盖的连接线,所述至少两个凸点通过连接线彼此电连接。
4.根据权利要求3所述的扇出式封装结构,其中,所述至少两个凸点连接再布线层中的相同信号。
5.根据权利要求3所述的扇出式封装结构,其中,连接线的高度小于凸点的高度。
6.根据权利要求3所述的扇出式封装结构,其中,再布线层、凸点和连接线中的至少一者包含铜。
7.根据权利要求3所述的扇出式封装结构,其中,所述扇出式封装结构还包括:
介电层,覆盖再布线层并填充再布线层的空隙。
8.根据权利要求1所述的扇出式封装结构,其中,塑封料的顶表面与凸点的顶表面共面。
9.根据权利要求1所述的扇出式封装结构,其中,再布线层包括单层。
10.根据权利要求1所述的扇出式封装结构,其中,再布线层包括多层。
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