CN106153027B - 电路装置、物理量检测装置、电子设备以及移动体 - Google Patents

电路装置、物理量检测装置、电子设备以及移动体 Download PDF

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Publication number
CN106153027B
CN106153027B CN201610299003.9A CN201610299003A CN106153027B CN 106153027 B CN106153027 B CN 106153027B CN 201610299003 A CN201610299003 A CN 201610299003A CN 106153027 B CN106153027 B CN 106153027B
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signal
mode
circuit
input
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CN106153027A (zh
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青山孝志
瀬尾显太郎
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C15/00—Arrangements characterised by the use of multiplexing for the transmission of a plurality of signals over a common path
    • G08C15/06—Arrangements characterised by the use of multiplexing for the transmission of a plurality of signals over a common path successively, i.e. using time division
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C25/00—Arrangements for preventing or correcting errors; Monitoring arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C2200/00—Transmission systems for measured values, control or similar signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
  • Computer Networks & Wireless Communication (AREA)
CN201610299003.9A 2015-05-14 2016-05-06 电路装置、物理量检测装置、电子设备以及移动体 Active CN106153027B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-098792 2015-05-14
JP2015098792A JP6492949B2 (ja) 2015-05-14 2015-05-14 回路装置、物理量検出装置、電子機器及び移動体

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CN106153027A CN106153027A (zh) 2016-11-23
CN106153027B true CN106153027B (zh) 2021-04-20

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US (1) US10055975B2 (https=)
JP (1) JP6492949B2 (https=)
CN (1) CN106153027B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6586735B2 (ja) * 2015-02-20 2019-10-09 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6492739B2 (ja) 2015-02-20 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
CN105987691B (zh) * 2015-03-16 2021-02-05 精工爱普生株式会社 电路装置、物理量检测装置、电子设备以及移动体
JP7009923B2 (ja) * 2017-10-31 2022-01-26 セイコーエプソン株式会社 物理量測定装置、電子機器及び移動体
JP7069968B2 (ja) * 2018-03-29 2022-05-18 セイコーエプソン株式会社 回路装置並びにそれを用いた物理量測定装置、発振器、電子機器及び移動体

Citations (7)

* Cited by examiner, † Cited by third party
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JP2007327943A (ja) * 2006-05-09 2007-12-20 Seiko Epson Corp 検出装置、ジャイロセンサ及び電子機器
CN101287961A (zh) * 2005-10-11 2008-10-15 松下电器产业株式会社 振动型惯性力检测传感器的检测信号处理方法及振动型惯性力检测传感器
CN101611548A (zh) * 2007-01-26 2009-12-23 松下电器产业株式会社 ∑△型ad转换器以及使用了该转换器的角速度传感器
CN102472624A (zh) * 2009-06-26 2012-05-23 罗姆股份有限公司 角速度传感器和用于它的同步检波电路
CN102650522A (zh) * 2011-02-25 2012-08-29 精工爱普生株式会社 信号处理电路、物理量检测装置、角速度检测装置
CN102803897A (zh) * 2009-06-12 2012-11-28 精工恩琵希株式会社 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法
CN104061924A (zh) * 2013-03-22 2014-09-24 精工爱普生株式会社 检测装置、传感器、电子设备以及移动体

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US6912901B1 (en) * 1995-05-30 2005-07-05 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
JP5274130B2 (ja) * 2008-07-15 2013-08-28 キヤノン株式会社 像振れ補正装置及び光学機器、撮像装置並びに像振れ補正装置の制御方法
IT1394898B1 (it) * 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
JP5552976B2 (ja) * 2010-09-07 2014-07-16 セイコーエプソン株式会社 角速度検出装置及び電子機器
JP5975601B2 (ja) * 2011-02-25 2016-08-23 セイコーエプソン株式会社 検出回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
JP4924912B2 (ja) * 2011-08-24 2012-04-25 セイコーエプソン株式会社 角速度測定方法および角速度測定装置の診断回路
JP6331356B2 (ja) * 2013-11-25 2018-05-30 セイコーエプソン株式会社 検出装置、センサー、電子機器及び移動体
JP2014197010A (ja) 2014-05-29 2014-10-16 セイコーエプソン株式会社 角速度検出装置及び電子機器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101287961A (zh) * 2005-10-11 2008-10-15 松下电器产业株式会社 振动型惯性力检测传感器的检测信号处理方法及振动型惯性力检测传感器
JP2007327943A (ja) * 2006-05-09 2007-12-20 Seiko Epson Corp 検出装置、ジャイロセンサ及び電子機器
CN101611548A (zh) * 2007-01-26 2009-12-23 松下电器产业株式会社 ∑△型ad转换器以及使用了该转换器的角速度传感器
CN102803897A (zh) * 2009-06-12 2012-11-28 精工恩琵希株式会社 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法
CN102472624A (zh) * 2009-06-26 2012-05-23 罗姆股份有限公司 角速度传感器和用于它的同步检波电路
CN102650522A (zh) * 2011-02-25 2012-08-29 精工爱普生株式会社 信号处理电路、物理量检测装置、角速度检测装置
CN104061924A (zh) * 2013-03-22 2014-09-24 精工爱普生株式会社 检测装置、传感器、电子设备以及移动体

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US20160335885A1 (en) 2016-11-17
JP2016217713A (ja) 2016-12-22
US10055975B2 (en) 2018-08-21
CN106153027A (zh) 2016-11-23
JP6492949B2 (ja) 2019-04-03

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