CN106129077B - 成像装置和电子设备 - Google Patents
成像装置和电子设备 Download PDFInfo
- Publication number
- CN106129077B CN106129077B CN201610626493.9A CN201610626493A CN106129077B CN 106129077 B CN106129077 B CN 106129077B CN 201610626493 A CN201610626493 A CN 201610626493A CN 106129077 B CN106129077 B CN 106129077B
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- China
- Prior art keywords
- color filter
- imaging device
- film
- filter components
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011055631 | 2011-03-14 | ||
| JP2011-055631 | 2011-03-14 | ||
| CN201210058232.3A CN102683366B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210058232.3A Division CN102683366B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106129077A CN106129077A (zh) | 2016-11-16 |
| CN106129077B true CN106129077B (zh) | 2019-05-10 |
Family
ID=46815045
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610623971.0A Active CN106098716B (zh) | 2011-03-14 | 2012-03-07 | 成像装置和电子设备 |
| CN201610037666.3A Active CN105720066B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
| CN201610626493.9A Active CN106129077B (zh) | 2011-03-14 | 2012-03-07 | 成像装置和电子设备 |
| CN201710116321.1A Active CN107068705B (zh) | 2011-03-14 | 2012-03-07 | 成像装置和电子设备 |
| CN201210058232.3A Active CN102683366B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610623971.0A Active CN106098716B (zh) | 2011-03-14 | 2012-03-07 | 成像装置和电子设备 |
| CN201610037666.3A Active CN105720066B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710116321.1A Active CN107068705B (zh) | 2011-03-14 | 2012-03-07 | 成像装置和电子设备 |
| CN201210058232.3A Active CN102683366B (zh) | 2011-03-14 | 2012-03-07 | 固态成像装置、固态成像装置的制造方法和电子设备 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8742525B2 (enExample) |
| JP (1) | JP5938946B2 (enExample) |
| CN (5) | CN106098716B (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013229446A (ja) * | 2012-04-25 | 2013-11-07 | Sharp Corp | 固体撮像素子及び固体撮像の製造方法 |
| TWI620445B (zh) | 2013-03-25 | 2018-04-01 | Sony Corp | 攝像元件及電子機器 |
| JP6130221B2 (ja) * | 2013-05-24 | 2017-05-17 | ソニー株式会社 | 固体撮像装置、および電子機器 |
| US9064989B2 (en) * | 2013-08-30 | 2015-06-23 | Taiwan Semiconductor Manufacturing Company Limited | Photo diode and method of forming the same |
| JP2015076475A (ja) * | 2013-10-08 | 2015-04-20 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| JP6233188B2 (ja) * | 2013-12-12 | 2017-11-22 | ソニー株式会社 | 固体撮像素子およびその製造方法、並びに電子機器 |
| JP2016134587A (ja) * | 2015-01-22 | 2016-07-25 | ソニー株式会社 | 固体撮像装置、及び、電子機器 |
| US10636826B2 (en) | 2015-10-26 | 2020-04-28 | Sony Semiconductor Solutions Corporation | Solid-state imaging device, manufacturing method thereof, and electronic device |
| US9991302B1 (en) * | 2016-11-17 | 2018-06-05 | Visera Technologies Company Limited | Optical sensor with color filters having inclined sidewalls |
| US9985072B1 (en) * | 2016-11-29 | 2018-05-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMOS image sensor with dual damascene grid design having absorption enhancement structure |
| TWI756388B (zh) * | 2017-03-24 | 2022-03-01 | 日商富士軟片股份有限公司 | 結構體、近紅外線透射濾波層形成用組成物及光感測器 |
| JP2018200909A (ja) * | 2017-05-25 | 2018-12-20 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および撮像装置 |
| JP7383876B2 (ja) * | 2018-02-02 | 2023-11-21 | 株式会社ニコン | 撮像素子、及び、撮像装置 |
| US10770496B2 (en) * | 2018-04-16 | 2020-09-08 | Visera Technologies Company Limited | Optical sensors and methods for forming the same |
| WO2019220861A1 (ja) * | 2018-05-16 | 2019-11-21 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子および固体撮像素子の製造方法 |
| CN110729314A (zh) * | 2018-07-17 | 2020-01-24 | 联华电子股份有限公司 | 光学感测装置 |
| JP7362198B2 (ja) * | 2018-07-18 | 2023-10-17 | ソニーセミコンダクタソリューションズ株式会社 | 受光素子、測距モジュール、および、電子機器 |
| KR102649313B1 (ko) | 2019-02-13 | 2024-03-20 | 삼성전자주식회사 | 이미지 센서 |
| KR102747501B1 (ko) * | 2019-10-02 | 2024-12-31 | 에스케이하이닉스 주식회사 | 이미지 센서 |
| JP2021082716A (ja) * | 2019-11-19 | 2021-05-27 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および撮像装置 |
| US11631709B2 (en) * | 2020-03-10 | 2023-04-18 | Visera Technologies Company Limited | Solid-state image sensor |
| DE112021001902T5 (de) * | 2020-03-27 | 2023-02-23 | Sony Semiconductor Solutions Corporation | Abbildungsvorrichtung und elektronische vorrichtung |
| KR102786345B1 (ko) * | 2020-04-24 | 2025-03-24 | 삼성전자주식회사 | 이미지 센서 및 그 제조 방법 |
| US12027549B2 (en) | 2020-11-27 | 2024-07-02 | Samsung Electronics Co., Ltd. | Image sensor |
| KR20230156322A (ko) | 2021-03-16 | 2023-11-14 | 소니 세미컨덕터 솔루션즈 가부시키가이샤 | 촬상 장치 |
| CN220603808U (zh) * | 2022-05-16 | 2024-03-15 | 3M创新有限公司 | 用于显示系统的光学构造体 |
| CN120769579A (zh) * | 2025-09-08 | 2025-10-10 | 格科微电子(上海)有限公司 | 一种光学传感器的滤光器及其形成方法 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6081018A (en) * | 1998-06-05 | 2000-06-27 | Nec Corporation | Solid state image sensor |
| JP2005033074A (ja) * | 2003-07-09 | 2005-02-03 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
| CN1825608A (zh) * | 2005-02-23 | 2006-08-30 | 松下电器产业株式会社 | 固态摄像器件及其制造方法 |
| CN1825607A (zh) * | 2005-01-18 | 2006-08-30 | 松下电器产业株式会社 | 固态成像器件及其制造方法和配置有固态成像器件的相机 |
| CN101079967A (zh) * | 2006-02-24 | 2007-11-28 | 索尼株式会社 | 固态成像装置及其制造方法、以及摄像机 |
| CN101197386A (zh) * | 2006-12-08 | 2008-06-11 | 索尼株式会社 | 固体摄像装置及其制造方法和照相机 |
| CN101588506A (zh) * | 2008-05-22 | 2009-11-25 | 索尼株式会社 | 固体摄像装置及其制造方法以及电子设备 |
| CN101652864A (zh) * | 2007-04-10 | 2010-02-17 | 富士胶片株式会社 | 有机电致发光显示设备 |
| JP2010085700A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
| CN101800233A (zh) * | 2009-02-10 | 2010-08-11 | 索尼公司 | 固态成像装置及其制造方法以及电子设备 |
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| JP3180748B2 (ja) * | 1997-12-11 | 2001-06-25 | 日本電気株式会社 | 固体撮像装置 |
| EP1315003A4 (en) * | 2000-07-31 | 2003-09-17 | Hamamatsu Photonics Kk | RADIATION SENSOR |
| US20050116271A1 (en) * | 2003-12-02 | 2005-06-02 | Yoshiaki Kato | Solid-state imaging device and manufacturing method thereof |
| CN100487900C (zh) * | 2004-01-15 | 2009-05-13 | 松下电器产业株式会社 | 固体成像装置,其制造方法,和使用固体成像装置的相机 |
| JP4274145B2 (ja) * | 2005-04-25 | 2009-06-03 | ソニー株式会社 | 固体撮像素子の製造方法 |
| KR100672687B1 (ko) * | 2005-06-03 | 2007-01-22 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서 및 그 제조방법 |
| JP2007156219A (ja) * | 2005-12-07 | 2007-06-21 | Seiko Epson Corp | 情報表示システム、情報表示装置および位置指示装置 |
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-
2012
- 2012-01-31 US US13/362,722 patent/US8742525B2/en active Active
- 2012-02-29 JP JP2012044006A patent/JP5938946B2/ja active Active
- 2012-03-07 CN CN201610623971.0A patent/CN106098716B/zh active Active
- 2012-03-07 CN CN201610037666.3A patent/CN105720066B/zh active Active
- 2012-03-07 CN CN201610626493.9A patent/CN106129077B/zh active Active
- 2012-03-07 CN CN201710116321.1A patent/CN107068705B/zh active Active
- 2012-03-07 CN CN201210058232.3A patent/CN102683366B/zh active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6081018A (en) * | 1998-06-05 | 2000-06-27 | Nec Corporation | Solid state image sensor |
| JP2005033074A (ja) * | 2003-07-09 | 2005-02-03 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
| CN1825607A (zh) * | 2005-01-18 | 2006-08-30 | 松下电器产业株式会社 | 固态成像器件及其制造方法和配置有固态成像器件的相机 |
| CN1825608A (zh) * | 2005-02-23 | 2006-08-30 | 松下电器产业株式会社 | 固态摄像器件及其制造方法 |
| CN101079967A (zh) * | 2006-02-24 | 2007-11-28 | 索尼株式会社 | 固态成像装置及其制造方法、以及摄像机 |
| CN101197386A (zh) * | 2006-12-08 | 2008-06-11 | 索尼株式会社 | 固体摄像装置及其制造方法和照相机 |
| CN101652864A (zh) * | 2007-04-10 | 2010-02-17 | 富士胶片株式会社 | 有机电致发光显示设备 |
| CN101588506A (zh) * | 2008-05-22 | 2009-11-25 | 索尼株式会社 | 固体摄像装置及其制造方法以及电子设备 |
| JP2010085700A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
| CN101800233A (zh) * | 2009-02-10 | 2010-08-11 | 索尼公司 | 固态成像装置及其制造方法以及电子设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105720066A (zh) | 2016-06-29 |
| US8742525B2 (en) | 2014-06-03 |
| JP5938946B2 (ja) | 2016-06-22 |
| JP2012209542A (ja) | 2012-10-25 |
| CN106129077A (zh) | 2016-11-16 |
| CN102683366A (zh) | 2012-09-19 |
| CN106098716B (zh) | 2018-04-17 |
| CN107068705B (zh) | 2019-03-08 |
| CN105720066B (zh) | 2021-11-16 |
| US20120235263A1 (en) | 2012-09-20 |
| CN102683366B (zh) | 2017-04-12 |
| CN107068705A (zh) | 2017-08-18 |
| CN106098716A (zh) | 2016-11-09 |
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