CN106119919A - Plating apparatus, method for plating and conversion are for the method removably keeping the posture of the substrate holder of substrate - Google Patents

Plating apparatus, method for plating and conversion are for the method removably keeping the posture of the substrate holder of substrate Download PDF

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Publication number
CN106119919A
CN106119919A CN201610453013.3A CN201610453013A CN106119919A CN 106119919 A CN106119919 A CN 106119919A CN 201610453013 A CN201610453013 A CN 201610453013A CN 106119919 A CN106119919 A CN 106119919A
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substrate holder
storage unit
substrate
plating
conveyer
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CN106119919B (en
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南吉夫
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Ebara Corp
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Ebara Corp
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A kind of plating apparatus, including: platform, substrate holder is placed on this platform, and substrate holder can removably keep substrate；Plating portion, keeps plating solution in plating portion, for the substrate kept by substrate holder being carried out plating in this plating solution by being immersed in vertical plane by substrate；With substrate holder conveyer, for transporting this substrate holder between this and this plating portion, substrate holder conveyer includes the holding part for keeping substrate holder；Wherein, this has horizontal mobile mechanism, and when horizontal mobile mechanism supports the lower end of substrate holder, horizontal mobile mechanism can flatly move；And wherein, substrate holder conveyer includes rise and fall mechanism, when the lower end of substrate holder is moved horizontally mechanism supports, along with horizontal mobile mechanism moves horizontally, by this holding part the most mobile, rise and fall mechanism is for being level by the posture of substrate holder from vertical State Transferring, or is converted to vertical state from level.

Description

Plating apparatus, method for plating and conversion are for removably keeping the substrate of substrate to protect The method of the posture of holder
The application is the divisional application of following application:
The applying date of original application: on 03 15th, 2012
The application number of original application: 201210069120.8
The denomination of invention of original application: plating apparatus and method for plating
Technical field
The surface that the present invention relates to a kind of workpiece for such as semiconductor wafer (substrate) carries out equipment and the plating of plating Coating method, is formed particularly in a kind of groove of fine intercommunication, hole or impedance opening being suitable to and limiting in the surface of substrate Plating thin film, or be suitable to form the projection (protrusion that the electrode with packaging body (package) etc. electrically connects on a surface of a substrate Electrode).For the three-dimensional case for semiconductor chip etc., need to be formed in a substrate and multiple be referred to as inserter Or the straight-through plug (through via plug) of separator (spacer) (interposer).In order to form this feed-through connector, Plating apparatus and method for plating according to the present invention can be also used for filling by hole to form such straight-through plug.More specifically Saying, the present invention relates to a kind of in the plating solution by being immersed in plating coating groove by substrate, keeps by substrate holder Substrate carry out immersion type (dip-type) plating apparatus and the immersion type method for plating of plating.
Background technology
For the equipment of substrate plating being roughly divided into towards mo(u)ld bottom half (face-down type) plating apparatus and immersion type Plating apparatus.
Towards mo(u)ld bottom half plating apparatus perform the plating of the substrate of such as semiconductor wafer time, substrate by by head by water Level land keeps, and its surface that will be plated faces down.Generally, substrate is housed in such as front open type standard cell (Front Opening Unified Pod) etc. carrying container (carrier receptacle) in, and substrate flatly kept, Its surface that will be plated is towards upper.Therefore, before substrate is oriented to mo(u)ld bottom half plating apparatus plating, substrate needs facing down Plating apparatus is rotated so and spins upside down.
On the other hand, to by substrate in the plating solution that immersion type equipment vertically enters in plating coating groove by making substrate The substrate that keeper keeps carries out plating.Therefore, when substrate is maintained in substrate holder, need to keep substrate holder water Flat, and when substrate is immersed in plating solution, it is necessary to keep substrate holder vertical.Therefore, immersion type plating Equipment has for substrate being rotated into level from vertical state and from level, substrate being rotated into plumbness Mechanism.
As shown in figure 33, such as, conventional plating apparatus has the arm 304 being installed in rotation on conveyer 300, arm 304 can be rotated by motor 302.Behind one end of arm 304 chucking substrate keeper 306, motor 302 is energized, with Arm 304 is vertically rotated 90 °, so that substrate holder 306 is rotated into level from vertical state.Substrate holder 306 in It is disposed horizontally on platform 308.As shown in figure 34, the plating apparatus of another routine has fixed area 316, fixed area Territory 316 includes vertically rotatable platform 310 and rotatable axle 314, and one end of axle 314 chucking substrate keeper 312 also rotates Substrate holder 312.The axle 314 rotated rotates around the axis of its own, to be rotated from vertical state by substrate holder 312 Become level.
It is in recent years, owing to the size of substrate is relatively big, big for the size of the mechanism of the arm or platform that rotate this substrate, And by substrate holder time needed for vertical state turns to level and substrate holder is turned from level Time needed for moving vertical state is the longest.Bigger sky is had in the large corporation of turning arm or platform needs plating apparatus Between with turning arm or platform.Therefore, the size of plating apparatus self is relatively big and manufacturing cost is higher.
Traditional plating apparatus also includes that substrate holder is opened and close mechanism, such as, is used for substrate is arranged on base Automatic fixer (fixing robot) on plate keeper.Substrate holder is opened and close mechanism has the problem that
Known a kind of plating apparatus, including for keeping substrate the substrate being immersed in plating solution by substrate vertically Keeper.In this plating apparatus, substrate holder by by substrate clamping in fixing supporting member and movable supporting member Between keep substrate, this movable supporting member can be opened around hinge and close.Movable supporting member has non-disconnectable The rotatable supporting member unloaded.In supporting member is rotated to the clamping device that fixing supporting member is slipped in its outer circumference Time, the outer circumferential edges of the seal ring seal substrate of movable supporting member and some region of fixing supporting member, make fixing The feeding power contact of support component can contact the outer circumferential edges of substrate and (see Japan Patent No3979847, Japan Patent No3778282, Japan Patent No3940265 and Japan Patent No4162440).
According to above-mentioned plating apparatus, when supporting member rotates, itself it is worn, and causes movable supporting member to be revolved Turn, substrate may be made to be displaced to the position cannot alignd with sealing ring the sealability damaging sealing ring.In order to avoid this Shortcoming, uses pressing lever to press movable supporting member, and pressing lever is rotated and reduces the mill of supporting member and pressing lever Damage.But, in order to reduce the abrasion to supporting member when rotating supporting member, plating apparatus needs along vertical axes vertically The complex mechanism moved back and forth and can rotate.Complex mechanism makes substrate holder open and more complicated on close mechanism. Complicated substrate holder is opened and close mechanism occupies the larger space in plating apparatus, makes plating apparatus size relatively big and system Make costliness.
Traditional substrate holder is opened and close mechanism has another problem that if substrate holder has different Thickness, pressing lever can be changed by junk ring the pressing distance that makes sealing ring prop up substrate holder.Specifically, if base The thickness of plate keeper is thinner than general thickness, because sealing ring is not the most adequately compressed, supporting member is rotating when It is easier to be worn.If the thickness of substrate holder is more than general thickness, sealing ring then can be by extruding excessively with impaired.Cause This, can not reduced the sealability of sealing ring by the substrate holder being suitably fabricated to meet thickness requirement.
Traditional substrate holder opening and close mechanism are general with there being position offset detection unit, when substrate is mounted In substrate holder and when substrate is displaced to unjustified position, position offset detection unit is used for detecting this skew. According to this position offset detection unit, substrate-guided it is arranged on fixing supporting member and near the neighboring of substrate On position.The horizon light sensor of such as light-sensitive device or laser sensor, measures from being horizontally applied substrate holding The amount light of the upper light beam of the substrate in device.If substrate is placed on substrate-guided, then substrate is inclined by and stops light Bundle.Therefore, be suitably arranged in substrate-guided substrate holder space with substrate compared with, then sensed by horizon light The amount light of device detection becomes less.In such a way, minimizing based on the amount light being detected, substrate keeps at substrate The skew of the position in device is detected.When substrate offsets out aligned position in substrate holder, substrate-guided by substrate guarantor Hold on substrate-guided and keep the inclination of substrate, preventing substrate from offsetting out aligned position in horizontal cross-section.
But, horizon light sensor problematically, when having the own shape distortion of water droplet, substrate, substrate to keep on substrate The shape distortion of device own, the shape of the platform placing substrate holder own also deform or substrate holder is protected owing to placing substrate Paper powder present on the platform of holder or paper scrap and when tilting, substrate may be mistakenly detected as offsetting out in substrate holder Aligned position.Horizon light sensor also has the problem about accuracy of detection, because substrate-guided height is by substrate The restriction of the size of keeper, the atomization caused by stain because of time passage along with the surface of sensor, it is possible to by sensor The amount light detected reduces as time go on.
In immersion type plating apparatus, therefore before work, substrate holder is stored in storage unit.When immersion type is plated Compress apparatus is started working, and substrate holder is taken out from storage unit, and by substrate to be processed by from its storage portion Middle taking-up is also maintained in substrate holder.The substrate holder keeping substrate is transported to by substrate holder conveyer In the treatment trough that plating coating groove that substrate is correspondingly carried out processing is relevant with plating process with other.
When being found to exist the problems such as such as feeding power fault when substrate holder and to be keeped in repair to solve this problem, Traditional immersion type plating apparatus must be closed and therefore its operability relatively low.It is found to there is feeding power fault Substrate holder is retired storage unit and all can not re-use until rising to be keeped in repair.When immersion type plating apparatus is carrying out plating During process, the entrance of the inside leading to immersion type plating apparatus is restricted for the sake of security.Therefore, substrate holder is worked as When being keeped in repair, at least need by the time before generation problem firm incipient plating process terminate.Because the substrate that can not be used Keeper cannot be used in plating process, and the treating capacity in immersion type plating apparatus each unit interval reduces.
In traditional immersion type plating apparatus, it is combined in inseparably for the storage unit of memory substrate keeper In equipment.When the substrate holder being placed in storage unit needs to be keeped in repair, substrate holder is by manually or by specially Remove from storage unit with crane.Alternatively, storage unit is transported to the position can touched from the outside of immersion type plating apparatus Delivery chute in immersion type plating apparatus or service area, then substrate holder by manually or by special purpose crane from storage Tibetan portion removes.It is the heaviest and time-consuming for removing or reinstall immersion type plating apparatus by substrate holder from immersion type plating apparatus 's.Because the size of the substrate that will be operated is relatively big, required manual labor increases and the chi of required crane Very little the biggest, heavy and time-consuming maintenance process becomes even worse.
Summary of the invention
In view of situation above, it is provided that the present invention.
The invention provides a kind of plating apparatus, including: platform, substrate holder is placed on this platform, this substrate holder Can removably keep substrate；Plating portion, keeps plating solution in this plating portion, this plating portion is for by existing this substrate Vertical plane is immersed in this plating solution carries out plating to this substrate kept by this substrate holder；And substrate holder Conveyer, this substrate holder conveyer is for transporting this substrate holder between this and this plating portion, and this substrate keeps Device conveyer includes the holding part for keeping this substrate holder；Wherein, this has horizontal mobile mechanism, when this level When travel mechanism supports the lower end of this substrate holder, this horizontal mobile mechanism can flatly move；And wherein, this substrate Keeper conveyer includes rise and fall mechanism, when the lower end of this substrate holder is supported by this horizontal mobile mechanism, along with This horizontal mobile mechanism moves horizontally, and by this holding part the most mobile, this rise and fall mechanism is for keeping this substrate The posture of device is level from vertical State Transferring, or is converted to vertical state from level.
Further, present invention also offers a kind of conversion for removably keeping the posture of the substrate holder of substrate Method, the method includes: utilize the maintaining part of substrate holder conveyer to divide the end keeping this substrate holder；Pass through This substrate holder conveyer makes this substrate holder move the position above platform；Reduce this holding part so that this substrate Another end of keeper contacts with this horizontal mobile mechanism；With, in order to by this posture of this substrate holder from perpendicular Straight State Transferring is level, reduces this holding part further flatly to move this horizontal mobile mechanism.
Further, present invention also offers a kind of method for plating, this method for plating includes: by substrate holder conveyer Being placed on platform by substrate holder, this substrate holder conveyer can keep this substrate holder；Utilization is placed on this On this substrate holder install and keep substrate；The maintaining part utilizing this substrate holder conveyer divides this substrate of holding to keep One end of device；When horizontal mobile mechanism supports another end of this substrate holder, this holding part of lifting and Flatly move this horizontal mobile mechanism being positioned on this platform, to be converted to erect from level by the posture of this substrate holder Straight state；By this substrate holder conveyer, this substrate holder is moved to the top of the plating portion of holding plating solution Position；With, reduce this substrate holder by this substrate holder conveyer, to be immersed in this plating solution by this substrate.
The first object of the present invention is to provide a kind of plating apparatus and method for plating, and it allows substrate holder by simply Keep in repair and ensure that simultaneously and when substrate processes in plating apparatus, can easily touch substrate holder.
Second target of the present invention is all to provide a kind of plating apparatus, method for plating and conversion and uses in plating apparatus The method of the posture of substrate holder, its can the posture of conversion baseplate keeper, for removably keep substrate make its from Level becomes vertical state or becomes level from vertical state, without large-sized rotating mechanism.
3rd target of the present invention is to provide a kind of plating apparatus, and it can place a substrate in has substrate holder and open Opening with in the substrate holder of close mechanism, substrate holder is opened and close mechanism is without bigger size, complicated structure, And can detect when offsetting out aligned position by substrate when substrate is installed in substrate holder, allow substrate simultaneously Keeper has different thickness.
The invention provides a kind of plating apparatus, comprising: plating portion, plating portion is used for plating substrate；Substrate holder, Substrate holder is used for keeping substrate；Substrate holder conveyer, substrate holder conveyer is used for keeping and transport substrate to be protected Holder；Storage unit, storage unit is used for memory substrate keeper；With mounting portion, storage unit, mounting portion, storage unit will be for storing Tibetan portion is stored in mounting portion, storage unit；Wherein, storage unit includes travel mechanism, and travel mechanism is for moving into storage by storage unit Mounting portion, Tibetan portion and from removal storage unit, mounting portion, storage unit.
Utilizing this structure, substrate holder can be taken out without stopping substrate at plating apparatus from storage unit In process.Therefore, the treating capacity in the time per unit of plating apparatus will not step-down, and substrate holder can be by easily Safeguard rapidly.
According to a preferred aspect of the present invention, this travel mechanism includes castor, castor for moving from plating apparatus and Separate storage unit.
This mounting portion, storage unit may include that door, and door can selectively open and close；And flashboard, flashboard can Selectively open and close, for when door is opened, make the air in mounting portion, storage unit and the air in plating apparatus It is isolated from each other.
This substrate holder conveyer can include sensor, and sensor is used for detecting the most whether substrate holder is positioned at In storage unit, or detection substrate holder position in storage unit.
This plating apparatus may further include: controller, and controller is used for substrate holder conveyer is monitored and controlled State with mounting portion, storage unit；And indicating section, indicating section is for the movement to controller instruction storage unit.This storage Portion can include lock pin handle, and lock pin handle is for being locked in storage unit in mounting portion, storage unit, and storage unit installation portion Divide the lock pin acceptance division included for engaging with lock pin handle.
According to a preferred aspect of the present invention, this mounting portion, storage unit includes the door trip of the unlatching for limiting door With the flashboard the opened switch for limiting flashboard, wherein, door trip and flashboard switch co-operate.
The invention provides a kind of method for plating automatically carrying out step for controlling plating apparatus, it includes following step Rapid: substrate holder is removed from storage unit；Substrate holder is used to keep substrate；Substrate holder conveyer is used to keep The substrate holder of substrate is transported to plating portion；In plating portion, substrate is carried out plating；With use substrate holder conveyer Substrate holder is shipped back storage unit；Wherein, method for plating includes: when plating apparatus is when automatically carrying out above-mentioned steps, Storage unit is removed from plating apparatus by the travel mechanism using storage unit.
According to a preferred aspect of the present invention, travel mechanism includes castor, and castor is for moving from plating apparatus and dividing From storage unit.
According to a preferred aspect of the present invention, this method for plating farther includes: on plating apparatus automatically carries out When stating step, before storage unit is moved out plating apparatus, indicate storage unit removal plating apparatus to the controller of plating apparatus.
According to a preferred aspect of the present invention, this method for plating farther includes: be moved out of plating apparatus in storage unit Before, Guan Bi flashboard is to isolate internal for plating apparatus with outside air；With after storage unit is moved into plating apparatus, beat Gate open plate, to allow substrate holder conveyer to touch storage unit.
The invention provides a kind of storage unit for being stored in plating apparatus the substrate holder used, this storage unit Including: substrate holder memory block, substrate holder memory block keeps for memory substrate in this substrate holder memory block Device；And travel mechanism；Wherein, storage unit is moved from plating apparatus by travel mechanism and is separated.
Storage unit can include the drain pan being arranged on bottom storage unit.
Substrate holder memory block can store anode holder in this substrate holder memory block.
The invention provides the another kind of storage unit for storing the anode holder used in plating apparatus, this storage unit Including: anode holder memory block, anode holder memory block keeps for storing anode in this anode holder memory block Device；Drain pan, drain pan is arranged on the bottom of storage unit；And travel mechanism；Wherein, travel mechanism is passed through by from plating in storage unit Equipment moves and separates.
The invention provides another kind of plating apparatus, this plating apparatus includes: substrate holder, and substrate holder is used for can Releasably keep substrate；Platform, substrate holder is disposed horizontally on platform；Plating portion, plating portion has plating coating groove, plating coating groove For the substrate kept by substrate holder being carried out plating by being immersed in vertical plane in plating solution by substrate；With Substrate holder conveyer, substrate holder conveyer is for transporting substrate holder between platform and plating portion, and substrate keeps Device conveyer includes the holding part for keeping substrate holder；Wherein, platform has horizontal mobile mechanism, when moving horizontally machine When structure supports the lower end of substrate holder, horizontal mobile mechanism can flatly move；Wherein, substrate holder conveyer bag Include the arm that can vertically move, when the lower end of substrate holder is moved horizontally mechanism supports and by the most mobile maintaining part When dividing horizontal mobile mechanism to move horizontally, arm is used for from vertical state, the posture of substrate holder is become level, or Vertical state is become from level.
Utilizing this structure, substrate holder can be stably rotated and without large-sized rotating mechanism, and this plating Compress apparatus can save space can be with low cost manufacture.Particularly since for substrate holder being sent to plating district Substrate holder conveyer be used for rotary plate keeper, it is not necessary to additional actuating unit carrys out rotary plate keeper. Therefore, plating apparatus is with the lowest cost manufacture.
Plating apparatus may further include: sensor, and sensor is used for detecting whether substrate holder conveyer keeps Substrate holder, or the distance of the substrate holder kept by substrate holder conveyer detected
One preferred aspect of the present invention, if a sensor senses that when substrate holder conveyer does not keep substrate to protect Holder or the distance to the substrate holder kept by substrate holder conveyer deviate reference value, it is possible to the vertically arm of movement It is stopped running.
Substrate holder can include round handle, and maintaining part divides holding round handle.
Holding part can have the shape being pivotably supported round handle.
The lower end of the substrate holder that horizontal mobile mechanism supports can have the half-round contacted with horizontal mobile mechanism Point.
By the weight hung from horizontal mobile mechanism, horizontal mobile mechanism is along just reducing on the direction keeping part Often bias.
Substrate holder conveyer can include for preventing substrate holder from rocking when substrate holder is transported Clamper.
The invention provides a kind of conversion for the method removably keeping the posture of the substrate holder of substrate, the party Method includes: use the maintaining part of substrate holder conveyer to divide the end keeping substrate holder；Above platform move by Maintaining part divides the substrate holder of holding；Reduce and keep part so that level on another end and the platform of substrate holder Travel mechanism contacts；With in order to be level by the posture of substrate holder from vertical State Transferring, reduce holding further Part is with flatly mobile and horizontal travel mechanism.
The method farther includes: use whether sensor detection substrate holder conveyer keeps substrate holder, or Person detects the distance of the substrate holder kept by substrate holder conveyer；With if a sensor senses that when substrate keep Device conveyer does not keep substrate holder or the distance to the substrate holder kept by substrate holder conveyer to deviate Reference value, stops keeping the running of part.
The method farther includes: after the other end of substrate contacts with horizontal mobile mechanism, and flatly moving substrate is protected Holder conveyer, so that substrate holder predetermined oblique angle.
The invention provides another kind of method for plating, this method for plating includes: be placed on platform by substrate holder；Use The substrate holder being placed on platform is installed and keeps substrate；The maintaining part using substrate holder conveyer divides holding substrate to protect The end of holder；Lifting substrate holder conveyer and flatly move the horizontal mobile mechanism being positioned on platform, with by substrate The posture of keeper becomes vertical state from level；Use substrate holder conveyer substrate holder is moved into place in There is the position of the top of the plating coating groove of plating solution；Substrate holder is reduced, with by base with using substrate holder conveyer Plate is immersed in the plating solution in plating coating groove.
The invention provides another kind of plating apparatus, this plating apparatus includes: substrate holder, and substrate holder is used for can Releasably keep substrate；Platform, substrate holder is disposed horizontally on platform；Plating portion, plating portion has plating coating groove, plating coating groove For substrate being carried out plating by being immersed in vertical plane in plating solution by the substrate kept by substrate holder；With Substrate holder conveyer, substrate holder conveyer is for transporting substrate holder between platform and plating portion, and substrate keeps Device conveyer includes the holding part for keeping substrate holder；Substrate holder is opened and close mechanism, substrate holder Open with close mechanism for opening and close the substrate holder being positioned on platform；Wherein, substrate holder includes: removable Support component, removable supporting member has rotatable supporting member；With fixing supporting member, fixing supporting member is used for and can move Dynamic supporting member collaborative work is to clamp substrate, and removable supporting member is removably fastened to fixing supporting member；And its In, substrate holder is opened and is included with close mechanism: head part, and head part is used for pressing removable supporting member, and head part is extremely Have less and removable supporting member is fastened to fixing supporting member and removable supporting member is discharged from fixing supporting member Rotatable part, removable supporting member is kept removedly by head part；First actuator, the first actuator is used for erecting Straight ground slip-on head part；With the second actuator, the second actuator is at least some of for swivel head part.
This can simplify the mechanism for opening and closing substrate holder, to reduce the size of plating apparatus, so that The cost of plating apparatus can be lowered.
A preferred aspect according to the present invention, this head part includes swivel plate and pressing tablet, pressing tablet have for Keeping the suspension hook of removable supporting member, pressing tablet is used for pressing removable supporting member；Supporting member includes protuberance；Fixing Supporting member includes clamper；Swivel plate is connected to axle, and when axle is pushed by the second actuator, swivel plate is rotated to Rotating supporting member；Rotating with along with supporting member, protuberance engages with clamper adaptation, to be fastened to by movement supporting member Fixing supporting member, maybe moves to the position suspended in midair by suspension hook by mobile supporting member.
Head part can include substrate position detection part, and substrate position test section demultiplexing is in determining that substrate keeps at substrate Position in device.
Therefore, when substrate is placed in substrate holder, the deviation post of substrate can be accurately detected, and nothing The deformation discussing such as substrate and substrate holder and the water droplet being applied on substrate and substrate holder.
Pressing tablet can have briquetting, and briquetting is used for pressing removable supporting member, briquetting include being arranged on by Pretensioned spring in briquetting.
This can reduce the frictional resistance being applied on assembly when substrate holder is opened and closed, though and substrate Keeper has different thickness also can reach the stable sealability for hermetic sealing substrate keeper
Accompanying drawing explanation
Fig. 1 is the schematic side elevation of plating apparatus according to an embodiment of the invention；
Fig. 2 is the plane graph of the plating apparatus shown in Fig. 1；
Fig. 3 is the schematic diagram of the structure of display base plate keeper；
Fig. 4 A is the explanatory view of the structure of display base plate keeper conveyer；Fig. 4 B is to show the base of display in Fig. 4 A Plate keeper conveyer keeps the explanatory view of the mode of substrate holder；And Fig. 4 C is cutting of the line Y-Y' along Fig. 4 B Face figure；
Fig. 5 A to 5F is to schematically show the horizontal mobile mechanism for moving horizontally platform and substrate holder conveyer The schematic diagram of operation order of arm, for substrate holder is disposed horizontally in platform；
Fig. 6 A to 6F is with the operation order substrate holder shown in detail in Fig. 5 A to Fig. 5 F and horizontal mobile mechanism View；
Fig. 7 A to Fig. 7 D is to show that the substrate holder for being placed on horizontal mobile mechanism by substrate holder transports The view of the operation order of device；
Fig. 8 A to 8C is to schematically show, for moving horizontally horizontal mobile mechanism and the substrate holder conveyer of platform The schematic diagram of another operation order of arm, for substrate holder is disposed horizontally in platform；
Fig. 9 A to 9C is to schematically show the horizontal mobile mechanism for flatly mobile station and substrate holder transmission The schematic diagram of another operation order of the arm of device, for substrate holder is disposed horizontally in platform,
Figure 10 is the explanatory view of the structure showing another substrate holder；
Figure 11 A is the explanatory view of the fixing supporting member of the substrate holder showing that Figure 10 shows；And Figure 11 B is The explanatory view of the movable supporting member of the substrate holder that display Figure 10 shows；
Figure 12 is movable supporting member and the part amplification section of fixing supporting member of the substrate holder of display in Figure 10 Face figure；
Figure 13 is the schematic representation that the structure with close mechanism opened by display base plate keeper；
Figure 14 A is the plane graph of the structure of the head part of display base plate keeper opening and close mechanism；And Figure 14 B is The front view of the head part in display Figure 14 A；
Figure 15 is the sectional view of the briquetting in head part；
Figure 16 A and 16B explanation is the explanatory view of the process of the position skew using sensor detection substrate；
Figure 17 is the plane graph of substrate holder, this substrate holder have substrate placement location be limited at substrate protect Recess in holder；
Figure 18 A and 18B explanation is the explanatory view of the process of the position skew using sensor detection substrate；
Figure 19 is the axonometric chart that the mode of the work with close mechanism opened by display base plate keeper；
Figure 20 is the axonometric chart that the mode of the work with close mechanism opened by display base plate keeper；
Figure 21 is the axonometric chart of the mode that display base plate keeper is opened and close mechanism works；
Figure 22 is the axonometric chart of the mode that display base plate keeper is opened and close mechanism works；
Figure 23 is the schematic diagram of the structure showing lorry formula storage unit；
Figure 24 is the axonometric chart of the structure showing another lorry formula storage unit；
Figure 25 is schematically to show the storage unit installation portion in plating apparatus and the side view of lorry formula storage unit；
Figure 26 is schematically to show the storage unit installation portion in plating apparatus and the rearview of lorry type storage unit；
Figure 27 is the guide plate in the installation portion of storage unit and the vertical roller in lorry formula storage unit and the plane graph of horizontal roller；
Figure 28 is the guide plate in the installation portion of storage unit and the vertical roller in lorry formula storage unit and the front view of horizontal roller；
Figure 29 A is to show relation between the lock guiding on the door of the shank of the key and storage unit installation portion on lorry formula storage unit Schematic diagram；Figure 29 B is to show that lock guides the surface of the door being mounted on and the schematic diagram of the relation of shank of the key；With Figure 29 C it is The side view of the door that lock guides is installed；
Figure 30 is to show the controller of plating apparatus, substrate holder conveyer, storage unit installation portion, and storage unit touching refers to Show portion and can touch/can not touch the block chart of contact between display part；
Figure 31 A to 31E is schematically to show the storage unit peace for lorry formula storage unit is placed into lorry formula storage unit Dress portion and remove the axonometric chart of step of storage unit installation portion from lorry formula storage unit；
Figure 32 be when plating apparatus operationally, for lorry formula storage unit being placed into the storage unit of lorry formula storage unit Installation portion and remove the flow chart of step of storage unit installation portion from lorry formula storage unit；
Figure 33 is to show showing of mechanism for carrying out rotating by the substrate holder being arranged in traditional plating apparatus It is intended to；With
Figure 34 be show another for carry out rotating by the substrate holder being arranged in another traditional plating apparatus The schematic diagram of one mechanism.
Detailed description of the invention
Hereinafter, presently preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.Fig. 1 shows according to the present invention The side view of the plating apparatus of embodiment, Fig. 2 is the plane graph of the plating apparatus that Fig. 1 shows.
As illustrated in fig. 1 and 2, plating apparatus includes device framework 100, for supporting the substrate holder 110 of substrate 500 (seeing Fig. 3), a pair load port 170 for the carrying container of the such as FOUP of memory substrate 500 is placed on it, substrate Automatic conveying device 180, rotary flushing exsiccator (SRD) 190, platform 120, plating portion 130, substrate holder conveyer 140, goods Vehicle type storage unit 150 and aligner 195.Lorry formula storage unit 150 is placed on the mounting portion, storage unit in device framework 100 160.In above-described embodiment, lorry formula storage unit 150 is used as storage unit.
Substrate 500 is taken out from the carrying container being placed on a load port 170 by substrate automatic conveying device 180, and Substrate 500 is sent to platform 120.Substrate automatic conveying device 180 also transports the substrate processed from platform 120, and will process The substrate crossed is stored in the carrying container being placed in a load port 170.Substrate automatic conveying device 180 rotatable and Load port 170, platform 120, transport substrate 500 between rotary flushing exsiccator 190 and aligner 195.Rotary flushing is dried Device 190 rotates the complete substrate of plating 500, rinses the substrate 500 that plating is complete simultaneously, and complete finally by plating rotate at high speed Substrate 500 makes substrate 500 be dried.
Aligner 195 and the substrate 500 ad-hoc location angular alignment on the circumferencial direction of substrate 500.Specifically, school Quasi-device 195 detects the interior recess limited of substrate 500 or the position of depression, and is directed to recess align with the Angle Position marked, Thus substrate 500 is turned to the Angle Position marked.When substrate 500 rotates, aligner 195 is also at precalculated position and substrate The center alignment of 500.
Plating apparatus also includes transporting axle 101, and this transport axle 101 is used for substrate holder conveyer 140 along this transport axle 101 move, substrate holder is opened and close mechanism 102 and controller 200, and this controller 200 includes that substrate holder transports Device controller.
When substrate 500 is plated, substrate holder 110 keeps substrate 500, and by close to end and the reverse side of substrate 500 Surfaces to be plated is also exposed by envelope.Substrate holder 110 also has electrical contact, and this electrical contact is used for making electrical contact with substrate The outward flange of the surfaces to be plated of 500, and this electrical contact powered by external power supply.Before plating processes, substrate keeps Device 110 is stored in lorry formula storage unit 150.In plating processes, substrate holder 110 is by substrate holder conveyer 140 are moved between platform 120 and plating portion 130.After plating processes, substrate holder 110 is stored in the storage of lorry formula The rear portion in portion 150.
Substrate holder 110 can be disposed horizontally on platform 120.Substrate 500 is placed by substrate automatic conveying device 180 In the substrate holder 110 being disposed horizontally on platform 120, or by substrate 500 from being disposed horizontally in platform 120 Substrate holder 110 takes out.
Plating apparatus uses two kinds of plating solutions in its plating processes.Plating portion 130 include according to plating process suitable What sequence was sized pre-wash groove 130a, pretreatment tank 130b, flushed channel 130c, the first plating coating groove 130d, flushed channel 130e, Second plating coating groove 130f, flushed channel 130g and melting groove 130h.Preferably, what treatment trough 130a to 130h was processed with plating is suitable Sequence in turn arranges along from x towards the direction of x', gets rid of other extra transport paths.The type of groove, number in plating apparatus Mesh and arrange can purpose based on processing substrate and be chosen freely.
In the plating apparatus described in Fig. 1 and 2, the substrate 500 being kept by substrate holder 110 passes through plating portion Process fluid in treatment trough 130a to the 130h of 130 is processed.Particularly, the substrate being kept by substrate holder 110 In 500 plating solutions being immersed in vertically in plating coating groove 130f, and it is plated in plating solution, plating solution simultaneously By from lower introducing plating coating groove 130f and overflow plating coating groove 130f.In the present embodiment, plating coating groove 130f is divided into multiple region, logical Cross the substrate 500 that substrate holder 110 is kept be immersed in vertically in plating solution in each region and be plated. Each region of plating coating groove 130f has the insertion groove for being passed therethrough by substrate holder 110, is used for supplying electric energy and arrives The power subsystem of substrate holder 110, positive pole, agitating device and barricade.Positive pole is installed on positive pole keeper, with substrate 500 coaxially and have the exposing surface in the face of substrate 500.
Substrate holder conveyer 140 can be by connecting gear along transporting axle 101 at platform 120, plating portion 130 and goods Move between vehicle type storage unit 150, connecting gear e.g. linear electric machine etc., but not shown in the diagram.Substrate holder is transported Device 140 is sent to transport substrate holder 110 and keep substrate holder 110 to be in vertical posture simultaneously.
Lorry formula storage unit 150 can store multiple substrate holder 110, and each substrate holder 110 is at perpendicular Interior extension.In FIG, lorry formula storage unit 150 is disposed proximate to the rear surface of plating apparatus.But, lorry formula storage unit 150 can be arranged on other position, such as between platform 120 and plating portion 130.
Below by the operation order of brief description plating apparatus by way of example.Operation order comprises the following steps (a) to step Suddenly (h).
A () substrate holder conveyer 140 moves to the position above lorry formula storage unit 150, keep and take out storage Substrate holder 110 in lorry formula storage unit.
B () then, substrate holder conveyer 140 moves to the position above platform 120, keep substrate holder simultaneously 110, and being placed on substrate holder 110 level on platform 120.
C () substrate 500 is arranged to substrate holder 110.
D () substrate holder conveyer 140 keeps substrate holder 110 vertically, and move to the prewashing of plating portion 130 Wash groove 130a.Hereafter, substrate holder conveyer 140 passes sequentially through the treatment trough of plating portion 130 on the direction from x to x' 130a to the treatment trough 130h of plating portion 130, the substrate 500 being simultaneously kept by substrate holder 110 is at treatment trough 130a It is processed in treatment trough 130h.
E the () substrate 500 process in plating portion 130 completes after, substrate holder conveyer 140 moves to platform 120, with Time keep substrate holder 110, then being placed on substrate holder 110 level on platform 120 vertically.
F () substrate 500 is removed from substrate holder 110.
If g () multiple pending substrate 500 to be processed continuously, the most next not processed substrate 500 quilt It is placed in substrate holder 110, and repeats above from the order of step (d) to step (f).
(h) after whole platings has processed, substrate holder conveyer 140 keep vertically by substrate 500 from The substrate holder 110 that it removes, substrate holder conveyer 140 moves to lorry formula storage unit 150, and by substrate holder 110 store in arrival vehicle type storage unit 150 vertically.
In aforesaid operations order, after substrate 500 is placed in substrate holder 110, substrate holder conveyer 140 pre-wash groove 130a by what the substrate holder 110 keeping substrate 500 moved to plating portion 130.But, by substrate 500 After being placed in substrate holder 110, substrate holder 110 can be transported to the storage of lorry formula by substrate holder conveyer 140 Portion 150, it is possible to temporarily substrate holder 110 is placed on lorry formula storage unit 150.
Details in substrate holder 110 structure explained below.Fig. 3 is showing of the structure of display base plate keeper 110 Meaning property view；
As it is shown on figure 3, substrate holder 110 has handlebar 111 in its one end.Handlebar 111 is kept by substrate Device conveyer 140 is kept.The form of handlebar 111 is the round bar that can rotate around own axes, and this round bar is for by substrate The posture of keeper 110 is level from vertical State Transferring and is converted to vertical state from level.
Handlebar 111 is desirably made up of the rustless steel of corrosion resistance, so that himself can be resisted is likely to be applied to it On plating solution.It is made of stainless steel at handlebar 111, but still is vulnerable to the feelings of corrosion because of contacting with plating solution Under condition, the surface of handlebar 111 wishes to be coated with chromium plating layer or titanium carbide (TiC) layer, is used for increasing corrosion resistance.Behaviour Vertical handle 111 can be made up of the titanium with high corrosion resistance.In this case, because substrate holder conveyer 140 The grade of skin friction resistance is the highest, needs finally to be processed into by substrate holder conveyer and can smoothly rotational slide connect Touching the lifter 142 of substrate holder conveyer 140, this lifter 142 will be described later on.
Substrate holder 110 has a pair suspension bracket 112, and each suspension bracket 112 lays respectively at the relative of substrate holder 110 On upper end.Each suspension bracket 112 is cuboid or cubic form.Suspension bracket 112 is placed separately in suspension bracket receptor, hangs The effect of frame 120 is the substrate guarantor that slings when substrate holder 110 is placed in treatment trough 130a to the 130h of plating portion 130 Holder 110.One in suspension bracket 112 has feeding electric energy contact 114.If plating coating groove 130d and 130f is electroplating groove, then Feeding electric energy contact 114 on suspension bracket 112 is kept and contacts with the electrical contact being positioned on corresponding suspension bracket receptor, this electricity Gas contact is for treating plating surface by electric current from what external power source was fed to substrate 500.Hang when substrate holder 110 is placed on When suspension bracket 112 on frame receptor is sling, feeding electric energy contact 114 is positioned at the position not contacted with the plating solution in plating coating groove Put.When substrate holder 110 is stored in lorry formula storage unit 150, suspension bracket 112 is supported on lorry formula storage unit 150 Suspension bracket receptor 152 on, this suspension bracket receptor 152 will be described later on.
The form of each suspension bracket 112 is cuboid or cube, and each suspension bracket 112 is designed to when substrate holder 110 Preventing substrate holder 110 from rocking time mobile, opposing is applied to substrate holder along the direction that the arrow A in Fig. 3 represents Power on conveyer 140.When substrate holder 110 is in vertical state and its lower end 113 faces down, suspension bracket 112 makes Their upper surface is horizontally disposed.
The lower end 113 of substrate holder 110 has semicircular cross section (seeing Fig. 6 A to 6F), is used for and platform 120 Horizontal mobile mechanism 121 smoothly rotates sliding contact, and this horizontal mobile mechanism 121 will be described later on.
Fig. 4 A is the explanatory view of the structure of display base plate keeper 110.Fig. 4 B is to show the base shown by Fig. 4 A Plate keeper conveyer 140 keeps the explanatory view of the mode of substrate holder 110.Fig. 4 C is the line Y Y' along Fig. 4 B Sectional view.Substrate holder conveyer 140 includes the rise and fall mechanism being combined in vertical support column 145, these rise and fall Mechanism does not show.Rise and fall mechanism runs vertically with lifting and reduces substrate holder 110.Rise and fall mechanism includes Horizontal arm 141 for substrate holder 110 of slinging.Arm 141 has the lifter 142 as holding part, for by from Supported underneath handlebar 111 is sling and keeps substrate holder 110.In order to support handlebar 111, lifter or guarantor from below Hold part 142 and there is a pair semicircle finger 142a for engaging with handlebar 111.Semicircle finger 142 has There is the inside diameter of the slightly larger than outside diameter of handlebar 111.Lifter 142 has between semicircle finger 142a Space, and also include sensor 144, this sensor 144, as substrate holder detector, is used for detecting handlebar 111 current Whether occur in space, and for the distance of the handlebar 111 in space being detected.If sensor or substrate holder Detector 144 detects anomic or is not detected by handlebar 111, i.e. substrate holder 110, or detects when to behaviour The distance deviation reference value of vertical handle 111, i.e. when substrate holder 110 offsets out the position relative to arm 141, sensor 144 Anomic is shown to rise and fall mechanics controller, and this rise and fall mechanics controller stops lifting and reduces arm 141, should Rise and fall mechanics controller is not shown in figure.Sensor 144 can also detect another anomic, this another anti- Often in state, when finger 142a wants to support handlebar 111 from below, because the position skew of substrate holder 110, The finger 142a of lifter 142 the most suitably supports handlebar 111.
Preferably, finger 142a remains, at them, the surface contacted with handlebar 111 and should be combined with such as The synthetic resin layer of PTFE etc., or processed or be coated with the aluminium lamination of PEEK by TUFRAM, to reduce the friction system on surface Number, makes handlebar 111 smoothly rotate relative to finger 142a.
Substrate holder conveyer 140 includes a pair clamper 143, is used for preventing substrate holder 110 from rocking.Work as substrate Keeper conveyer 140 flatly moves, and the upper horizontal plane of the suspension bracket 112 of substrate holder 110 is applied downwards by clamper 143 Power, to prevent substrate holder 110 from rocking on the direction moved along substrate holder conveyer 140.In order to more effectively Prevent substrate holder 110 from rocking, suspension bracket 112 can be designed to have and clamper 143 shape that engages of adaptation.
In this embodiment, clamper 143 has the most open C-shaped, for the suspension bracket to substrate holder 110 The upper horizontal plane of 112 applies downward power, and the contrary vertical surface of support hanger 112, to prevent substrate holder 110 from shaking Shake.If the degree being vertically applied to the power of the upper horizontal plane of suspension bracket 112 from clamper 143 can be configured to more than making base Plate keeper 110 trends towards the power rocked, then clamper 143 need not the contrary vertical surface of support hanger.Substantially, because of Upper horizontal plane for suspension bracket 112 does not have bigger area, it is preferable that clamper 143 should the contrary of support hanger 112 hang down Straight surface.
When substrate holder 110 is changed into level from vertical state, and clamper 143 is moved upward to discharge base Plate keeper 110.Clamper 143 is by the independent actuator 146 being installed on arm 141, such as cylinder, YE Etc. moved vertically.In the present embodiment, two actuators 146 are used for mobile clamper 143, and clamper 143 is at base In the end opposite of plate keeper 110, support hanger 112 supports.But, single actuator 146 can be installed on arm 141, and Being directed at the center of substrate holder 110, attachment may be mounted on the movable member of actuator 146, and is connected to two Individual clamper 146, this attachment does not show.
By being changed into plumbness from level, platform 120 is used for the most flatly placing substrate holder 110.Platform 120 includes the horizontal mobile mechanism 121 (seeing Fig. 5 A to 5F) of the lower end 113 for supporting substrate holder 110.Water Flat travel mechanism 121 can along with guide thing along substrate holder conveyer 140 transport axle 101 square upward sliding, Such as linear movement (LM) guides the lower end 113 of substrate holder 110 to carry out linear movement, guides thing the most in the drawings Display.
In the present embodiment, horizontal mobile mechanism 121 is subject to by weight 123 via line 122 externally applied forces, moves horizontally Mechanism 121 trends towards horizontal mobile mechanism 121 is returned to initial position, i.e. when substrate holder conveyer 140 is by towards platform During 120 reduction, the position that horizontal mobile mechanism 121 always contacts with the lower end 113 of substrate holder 110.Weight 123 can be used Helical spring replaces.Preferably, horizontal mobile mechanism 121 should have the lower end 113 being suitable for substrate holder 110 and slides The shape of contact and material.
Describe for substrate holder 110 is changed from vertical state below with reference to Fig. 5 A to 5F, 6A to 6F, 7A to 7D Become level and the operation order being disposed horizontally on platform 120 by substrate holder 110.
Fig. 5 A to 5F is to be schematically shown as being disposed horizontally on platform 120, for level substrate holder 110 The operation of the arm 141 of the horizontal mobile mechanism 121 of mobile station 120 and the rise and fall mechanism of substrate holder conveyer 140 is suitable The view of sequence.Fig. 6 A to 6F is the substrate holder 110 in the operation order of Fig. 5 A to 5F shown in detail and moves horizontally machine The view of structure 121.Fig. 7 A to 7D is to show that the substrate for being placed on horizontal mobile mechanism 121 by substrate holder 110 is protected The view of the operation order of holder conveyer 140.
Along with substrate holder 110 is sling and clamper 143 clamping substrate keeper 110 by the lifter 142 of arm 141 Rocking with opposing, substrate holder conveyer 140 moves to the position above platform 120.Now substrate holder 110 and level are moved Spatial relationship between motivation structure 121 shows in Fig. 7 A and 7B.Platform 120 is included in the lower end 113 supporting substrate holder 110 While the horizontal mobile mechanism 121 that can move horizontally.When substrate holder conveyer 140 moves to the position above platform 120 When putting, the arm 141 of substrate holder 110 is kept to begin to decline vertically.Fig. 5 A shows the lower end 113 of substrate holder 110 It is lowered to the state of the slightly higher than position of horizontal mobile mechanism 121.Now substrate holder 110 and horizontal mobile mechanism Position relationship between 121 shows in Fig. 6 A and 7B.
Then, as seen in figure 7 c, clamper 143 release substrate keeper 110.As shown in 5B, 6B and 7D, arm 141 is dropped Low, until the lower end 113 exposure level travel mechanism 121 of substrate holder 110.
Substrate holder 110 as shown in Figure 5 A and 5B move downward period, it is preferable that arm 141 should be by with height Prompt drop is low, and clamper 143 supports substrate holder 110 to resist jigging motion, until the lower end of substrate holder 110 113 positions arriving slightly higher than horizontal mobile mechanism 121.Then, it is preferable that clamper 143 release substrate keeper 110 is also Arm 141 is reduced with low velocity, until the lower end 113 exposure level travel mechanism 121 of substrate holder 110.In such a way, Substrate holder 110 is stably reduced in short time period.
When the lower end 113 of substrate holder 110 just touches horizontal mobile mechanism 121, substrate holder 110 is positioned at The bottom dead center of its rotation round and can not smoothly rotating.Therefore, the lower end 113 at substrate holder 110 touches After horizontal mobile mechanism 121, as shown in Figure 5 C, arm 141 is somewhat reduced and is moved horizontally slightly towards plating portion 130. Therefore, as shown in Figure 6 C, substrate holder 110 tilts now and starts Smooth Rotation.
After substrate holder 110 is inclined by certain predetermined angular, preferably about 15 °, arm 141 is lowered so that The lower end 113 of substrate holder 110 promotes horizontal mobile mechanism 121 under the weight of substrate holder 110, as shown in Figure 6 D. When the lower end 113 of substrate holder 110 is lowered, arm 141 can slightly be moved towards substrate automatic conveying device 180.As Shown in Fig. 5 D and 5E, the lower end 113 of substrate holder 110 is supported by horizontal mobile mechanism 121, and the decline of arm 141 makes base Plate keeper 110 is rotated and is inclined to level from vertical state.Specifically, as illustrated in fig. 6e, when arm 141 is from Fig. 6 D Shown position reduces, and substrate holder 110 is inclined to level, is supported at an A simultaneously.
When arm 141 is further reduced, substrate holder 110 is horizontally disposed, as shown in Fig. 5 F and 6F, and substrate holder The horizontal movement with horizontal mobile mechanism 121 that moves downward of conveyer 140 completes.Whole weights of horizontal base plate keeper 110 Amount is born by platform 120.Arm 141 is lowered further, then returns towards plating portion 130, and is hereafter lifted.
As it has been described above, substrate holder 110 is converted to flat-hand position from vertical posture, without having for rotating base The large scale rotating mechanism of the high pulling torque of plate keeper 110.According to the invention, it is important that optimize following design: substrate keeps Device conveyer 140 initial movable so that substrate holder 110 tilt distance, arm 141 reduce speed, be applied such that water Flat travel mechanism 121 returns to the slip resistance between the power of initial position, handlebar 111 and the finger 142a of lifter 142 Power, the resistance to sliding between the lower end 113 of substrate holder 110 and horizontal mobile mechanism 121, the lower end of substrate holder 110 113 and the shape of horizontal mobile mechanism 121.
According to the present invention, the posture of substrate holder 110 is changed along with the horizontal movement of horizontal mobile mechanism 121.Root According to another posture conversion plan, as described in Fig. 8 A to 8C, the lower end 113 of substrate holder 110 can be retained as and platform 120 Left end contact, arm 141 can be mobile by arc, so that substrate holder 110 becomes flat-hand position.But, such as Fig. 1 institute Show, when substrate 500 is transported to substrate holder 110 by substrate automatic conveying device 180 or receives substrate from substrate holder 110 When 500, substrate holder is opened and close mechanism 102 can make substrate holder 110 release substrate 500, and substrate holder is opened Open with the top that close mechanism 102 is arranged on platform 120, substrate holder conveyer 140 and substrate holder and Guan Bi machine Structure 102 is prone to interfere.
According to another posture conversion plan, as described in Fig. 9 A to 9C, the lower end 113 of substrate holder 110 can be protected Holding as contacting with the right-hand member of platform 120, arm 141 can make substrate holder 110 tilt towards plating portion 130, until substrate keeps Device 110 level, and finally substrate holder 110 is moved on platform 120 by arm 141.But, as shown in Figure 9 B, because substrate is protected Holder conveyer 140 highlights bigger distance from platform 120 towards plating portion 130, it is possible to the process behaviour of interference plating portion 130 Make.
Change the process of the posture of substrate holder 110 according to the present invention, be different from other posture conversion scheme above, During the posture of substrate holder conveyer 140 conversion baseplate keeper 110, substrate holder conveyer 140 does not interferes with substrate Keeper is opened and the process operation in close mechanism 102 and plating portion 130.Therefore, substrate holder conveyer need not be considered Distance between 140 and substrate holder unlatching and close mechanism 102 and plating portion 130.Substrate holder according to the present invention The process that the posture of 110 changes is highly effective for the space saving plating apparatus.
Horizontal mobile mechanism 121 can be included for just may be used without the weight of substrate holder 110 by himself The mechanism moved horizontally.But, for the posture of conversion baseplate keeper 110, this mechanism need its own power supply and Must be with arm 141 cooperating, result result in the control process of complexity.Accordingly, it is desirable to make horizontal mobile mechanism 121 energy Enough slips, and it also is intended to control a mechanism so that horizontal mobile mechanism 121 is at weight 123 or helical spring externally applied forces Under move horizontally so that horizontal mobile mechanism 121 returns to its initial position.
Along with substrate holder 110 changes over level from vertical state, in the present embodiment, handlebar 111 and liter The fall finger 142 of device 142, the lower end 113 of substrate holder 110 and horizontal mobile mechanism 121 slide over each other against.If Need not them slide against each other, then the end opposite of handlebar 111 can pass through bearings, and roller can be installed in The lower end 113 of substrate holder 110.But, because substrate holder 110 is immersed in plating solution, bearing and roller are set Put in plating solution or near the surface of plating solution.Bearing may be not intended to and roller is plated solution influenced.Therefore, in order to The slip avoiding parts is moved, and roller can be installed on finger 142a or the horizontal mobile mechanism 121 of lifter 142, So that the lower end 113 of handlebar 111 or substrate holder 110 is rotatable.
The substrate 500 processed is removed from the substrate holder 110 being placed on platform 120 or next pending base After plate 500 is kept by substrate holder 110, its posture is changed into vertical state from level by substrate holder 110.For The conversion of this posture, the finger 142a of lifter 142 enters the lower section of handlebar 111, and engages with handlebar 111, Along with arm 141 rises, substrate holder 110 is sling by lifter 142.Horizontal mobile mechanism 121 does not has and substrate holder 110 Lower end 113 be disengaged, and return to its initial position so that substrate holder 110 becomes vertical posture.Arm 141 is entered One step rises, and when arm 141 is raised, clamper 143 is work as described above, prevents substrate holder 110 from rocking.
In the present embodiment, in order to the posture of substrate holder 110 is changed between vertical posture and flat-hand position, only Require motivation level ground mobile and horizontal travel mechanism 121 and lifting and reduce arm 141.Horizontally and vertically move for generation The mechanism of substrate holder conveyer 140 is required substrate holder 110 moves to treatment trough and substrate 500 is immersed in place In process solution in reason groove.Therefore, there is no need to special power to change the posture of substrate holder 110.
The present invention is applicable to much use substrate holder to keep setting of substrate, transport substrate holder and plating substrate Standby.In the present embodiment, illustrate how the principle of the present invention is used for plating apparatus by example.But, the principle of invention Also suitable pickler and without plating compress apparatus etc..The principle of the present invention is not only applicable to be completely submerged in substrate holder Processing equipment in treatment trough, is also applied for including the processing equipment of such treatment trough: opening is limited at this treatment trough In upright side walls and flatly near the substrate kept by substrate holder.In the present embodiment, plating apparatus includes single base Plate keeper conveyer, this substrate holder conveyer is usually used to change the posture of substrate holder and kept by substrate Device is transported to include the treatment trough of plating coating groove.But, the principle of the present invention is applicable to include multiple substrate holder conveyer Plating apparatus, such as, in multiple substrate holder conveyers is for changing the posture of substrate holder, and another is such as For substrate holder being transported to plating portion 130.
According to the present invention, as it has been described above, because substrate holder can be stably rotated and be no longer necessary to large-sized rotation Rotation mechanism, this plating apparatus saves space and reduces manufacturing cost.Particularly because be used to be transported to substrate holder The substrate holder conveyer of plating coating groove is used to again rotary plate keeper, it is not necessary to individually for rotary plate keeper Actuating unit, the manufacturing cost of this plating apparatus can be reduced significantly.
Substrate holder explained below opens the operation order with close mechanism 102.Substrate holder is opened and is closed The effect of mechanism 102 is to install and the cover of moving substrate keeper 110, i.e. movable supporting member 11 explained below, in order to Substrate 500 is installed to the substrate holder 110 being disposed horizontally on platform 120, and removes from this substrate holder 110.
Figure 10 is the plane graph of the structure of display base plate keeper 110, in this substrate holder 110, and moveable support structure Part 11 is installed on fixing supporting member 15, and protuberance (lobe) 13 is maintained separately as connecing with clamper 16 adaptation simultaneously Close.Figure 11 A is the plane graph of the fixing supporting member 15 of display base plate keeper 110.Figure 11 B says display base plate keeper 110 Movable supporting member 11 fixed pan figure.Figure 12 is fixing supporting member 15 and the movable supporting member of substrate holder 110 The amplification sectional view of the part of 11.
As Figure 10 is to shown in 12, and substrate holder 110 has the movable supporting member 11 as cover and is placed on platform 120 On fixing supporting member 15.Substrate 500 is clamped between movable supporting member 11 and fixing supporting member 15.Moveable support Component 11 is shaped generally as circular and has supporting member 12 and multiple protuberance 13, multiple protuberances 13 and supporting member 12 It is integrally formed and from supporting member 12 outwardly.Movable supporting member 11 can be fixed to fixing supporting member 15 and energy Enough remove from movable supporting member 11.As shown in Figure 10, movable supporting member 11 is fixed to the upper table of fixing supporting member 15 On face.Fixing supporting member 15 has multiple clamper 16, and the position of the plurality of clamper 16 is corresponding with protuberance 13 respectively.Folder Holder 16 has the L shape of reversing, and has aduncate top.When protuberance 13 be adapted into clamper 16 to inflection During bent top, movable supporting member 11 is fastened to fixing supporting member 15 by clamper 16.Preferably, protuberance 13 and clamping Device 16 should have the conical surface for making protuberance 13 and clamper 16 to be mutually adapted easily.
Supporting member 12 can rotate relative to movable supporting member 11, and is prevented component (dislodgment by separation Prevention member) 12b keeps inseparably, supporting member 12 and protuberance 13 can together with around movable supporting member The center R of 11 is rotatable in approximate horizontal plane.Supporting member 12 is formed as the most circular.Supporting member 12 has The head part 1100 being arranged on the circumferential surface of supporting member 12 and open with close mechanism towards substrate holder is had to highlight Projection 12a, this projection 12a will be described later on.Supporting member 12 prevents component 12b to be prevented from from moveable support structure by separation Part 11 separates.
Substrate 500 is clamped between movable supporting member 11 and fixing supporting member 15, when supporting member 12 is rotated During so that protuberance 13 engages with clamper 16 adaptation, movable supporting member 11 and fixing supporting member 15 are secured together. In order to install and remove substrate 500, supporting member 12 is rotated so that protuberance 13 is de-from engage with the adaptation of clamper 16 From.Substrate 500 is placed on the substrate of fixing supporting member 15 and places in region 14.
Movable supporting member 11 has the first sealing ring 18a and the second sealing ring 18b, for being not required to of hermetic sealing substrate 500 Part to be plated, such as substrate 500 edge and reverse side, thus do not contact with plating solution.First sealing ring 18a is kept Contacting with the neighboring of substrate 500, the second sealing ring 18b is kept and contacts with the surface fixing supporting member 15.Substrate is protected Holder 110 is used in plating apparatus.Therefore, substrate holder 110 has electric contact 20, and this electric contact 20 passes through for contact The marginal area of substrate 500 that sealed by the first sealing ring 18a also provides power to substrate 500.Electric contact 20 is electrically connected Receive external power source, and substrate 500 is clamped between movable supporting member 11 and fixing supporting member 15.First sealing ring 18a and the second sealing ring 18b is kept 19 holdings by sealing ring.In order to concisely want, the first sealing ring 18a and the second sealing ring 18b can be broadly considered sealing ring 18.
In order to be removed from substrate holder 110 by substrate 500, movable supporting member 11 is moved away from fixing supporting member 13.Now, the first sealing ring 18a can tighten together with substrate 500, and substrate 500 may be attached to movable supporting member 11 and rise together with movable supporting member 11.In order to prevent substrate 500 to be attached to movable supporting member 11, it is preferable that can Dynamic supporting member 11 has peeling spring, for when substrate 500 is moved away from the first sealing ring 18a by substrate 500 towards Fixing supporting member 15 biases, and is peeled off from the first sealing ring 18a by substrate 500.Peel off spring by Patent No. No4162440 Japanese Patent Publication.
But, even if movable supporting member 11 has spring member, according to the character of the protective layer being applied to substrate 500 And characteristic, such as material and thickness, because sealing ring 18a and substrate 500 are fastened to when movable supporting member 11 is removed Together, substrate 500 can be offset by position from substrate placement region 14.Especially, the part at the edge of substrate 500 can be by Being fastened to the first sealing ring 18a, substrate 500 can rise and fall into the unjustified position of fixing supporting member 15 with being inclined by.
As described by rear, open the sensor 1140 with close mechanism 102 when substrate holder and the position of substrate 500 detected When putting unjustified, solve this problem by the operation stoping plating apparatus to continue the substrate 500 to skew.
Figure 13 is the explanatory view that the structure with close mechanism 102 opened by display base plate keeper.As shown in figure 13, base Plate keeper is opened and is included head part the 1100, first actuator 1200 and the second actuator 1300 with close mechanism 102.
It is placed on the substrate holder 110 that the head part 1100 above platform 120 can keep being placed on platform 120 Movable supporting member 11.Head part 1100 can rotate the supporting member 12 of movable supporting member 11 with rotation protrusion 13, use In movable supporting member 11 being fastened to fixing supporting member 15 or discharging movable supporting member 11 from fixing supporting member 15, and Keep movable supporting member 11,.
First actuator 1200 is connected to head part 1100 by the connection bump 1170 of head part 1100.Work as operation Time, the first actuator 1200 slip-on head part 1100 vertically.In the present embodiment, the first actuator 1200 has actuator list Unit 1210 and axle 1220, this axle 1220 has the end being connected to head part 1100.Along with axle 1220 is extended and shortens, first Actuator 1200 slip-on head part 1100 vertically.
Second actuator 1300 has the actuating unit 1310 that single shaft moves and the shifting being fixed to actuating unit 1310 The axle hook 1330 of dynamic plate 1320.By the roll shaft 1350 for enabling axle 1130 to be slided when promoting, two rollers 1340 exist It is rotatably mounted to axle hook 1330 on position spaced between these two rollers 1340.When the second actuator 1300 is run Time, axle hook 1330 is flatly moved back and forth, to promote the axle 1130 extended from head part 1100, with swivel head part 1100 Swivel plate 1150.Second actuator 1300 can comprise ball screw.
Details in the structure of Figure 14 A and 14B display head part 1100.Such as Figure 14 A and 14B, head part 1100 include by Tabletting 1110 and the swivel plate 1150 being installed in pressing tablet 1100.Pressing tablet 1110 includes that suspension hook 1111, swivel plate guide 1112, guide reel 1113 and briquetting 1114.Sensor 1140 is stably supported at certain intervals by the periphery along it On pressing tablet 1110.
Swivel plate 1150 has fastening hook 1151 and is connected to the end of axle 1130.Swivel plate 1150 is annulus substantially Shape the swivel plate being pressed on sheet disk 1110 guide 1112 clampings.Swivel plate 1150 can be around its center axis substantially Horizontal plane rotates and engages with guide reel 1113.
Axle 1130 such as includes bar.When the second actuator 1300 operates with flatly shifting axle hook 1330, axle 1130 is also Being horizontally moved, swivel plate 1150 is rotated.Specifically, the rotation of swivel plate 1150 can be by controlling the second actuator The operating of 1300 controls.It is installed to pressing tablet 1110 for detecting the sensor 1131 of the position of axle 1130.
When swivel plate 1150 rotates around its center axis, swivel plate 1150 rotating supporting member 12 and protuberance 13. In the present embodiment, two fastening hooks 1151 downwardly extend from swivel plate 1150 at respective two circumferential positions.Work as swivel plate 1150 by the second actuator 1300 rotated time, in fastening hook 1,151 one promote supporting member 12 projection 12a, rotate Support component 12.
Briquetting 1114 is installed on the bottom surface of pressing tablet 1110.When the first actuator 1120 reduces head part 1100 Time, such as, briquetting 1114 point P in fig. 12 contacts with movable supporting member 11, presses down on movable supporting member 11.When When movable supporting member 11 is so pressed, sealing ring 18 deforms, and deformation distance is that movable supporting member 11 is pressed downwardly Distance.Along with movable supporting member 11 is lowered by, between protuberance 13 and clamper 16, create space.Therefore, apply Power with rotating supporting member 12, i.e. the driving force produced by the second actuator 1300 can be less, so that clamper 16 Minimize with the abrasion on protuberance 13.
It is true that briquetting 1114 presses down on the position that the distance of movable supporting member 11 is lowered to by head part 1100 Fixed.If substrate holder 110 has different thickness, then the distance meeting difference that sealing ring 18 is deformed or compressed.Specifically Ground, if substrate holder 110 is thinner than normal thickness, then because sealing ring 18 is not compressed, supporting member 12 exists It is prone to during rotation be worn and torn more.If substrate holder 110 is thicker than normal thickness, then sealing ring 18 by exceedingly compression and Destroy, on the contrary, the sealability of sealing ring 18 will be affected.
As shown in figure 15, the problems referred to above can have the piston solution of elastic component 30, this elastic component 30 by use As each briquetting 1114, for example, it is arranged on the spring of internal piston.Piston also accommodates and is held against elastic component 30 And the pin 31 outside prominent piston.Have elastic component 30 springy compressed in advance to a certain degree and be accommodated in piston In, in order to elastic component 30 offset pins 31 normally, so that pin 31 stretches out from piston and contacts with substrate holder 110.Press Briquetting 1114 is thus configured to reduce sealing ring 18 because the distance that causes of the geometrical property of each substrate holder 110 On difference.Therefore, it can allow that substrate holder 110 has thickness difference, stably reduce and produce at substrate holder 110 Frictional force between elements when being opened and closed, and stabilize the sealability of sealing ring 18.
Pressing tablet 1110 has multiple suspension hook 1111 at its outward flange.When the protuberance 13 of movable supporting member 11 is rotated During to the position of surface of each suspender member of multiple suspension hooks 1111, head part 1100 is raised.Movable supporting member 11 Protuberance 13 is hung now by suspension hook 1111, so that movable supporting member 11 synchronizes to rise along with head part 1100.Now, Space is produced, it is allowed to substrate 500 is placed on fixing supporting member between movable supporting member 11 and fixing supporting member 15 On 15 or removed on fixing supporting member 15.
As it has been described above, the supporting member 12 of movable supporting member 11 is rotated to be fastened to fix by movable supporting member 11 Supporting member 15, movable supporting member 11 is lifted by separating actuator and declines, and each step is existed by head part 1100 Individual part runs.Therefore, need not the complicated reciprocal and rotating mechanism required for tradition plating apparatus at this, plating sets Standby size is less and simple in construction, low cost of manufacture.Including mobile supporting member 11 He being connected to each other by hinge Traditional substrate holder of fixing supporting member 15, it needs for lifting movable supporting member 11 to the position less than platform Mechanism.Substrate holder 110 according to the present invention need not special actuator for opening and closing substrate holder 110.
Sensor 1140 is installed in the neighboring of pressing tablet 110, and sensor 1140 is placed on as detection The position detector of the position of the substrate 500 in substrate holder 110 on platform 120.Describe below with reference to Figure 16 A and 16B The process of the position of detection substrate 500.
Such as Figure 16 A and 16B, substrate holder opens and closes each sensor 1140 of mechanism 102 and is placed on substrate The top of keeper 110.Sensor 1140 can be such as laser sensor, but is not limited thereto.Substrate holder is opened The position that can accurately detect substrate 500 with at least one sensor 1140 of closing organ 102 does not lines up.Substrate holder The fixing supporting member 15 of 110 has the recess 17 of the neighboring being limited at fixing supporting member 15, recess 17 and sensing Device 1140 applies the aligned in position of laser beam.Such as, as shown in figure 17, substrate holder opening and closing mechanism 102 has three Individual sensor 1140, fixing supporting member 15 has three recesses 17 in the neighboring of substrate resettlement area 14.Preferably, often Individual recess 17 has the bottom surface of inclination, and this bottom surface is substantially vertical with the axis of the laser beam from sensor 1140, and allows plating Apply solution and flow out recess 17, in order between the ramped bottom surface of sensor 1140 and recess 17, maintain constant distance.
The distance of object measured by sensor 1140, and determines that the distance recorded is whether in predetermined scope.Example As, if be arranged on the certain height of the ramped bottom surface standoff distance A of recess 17 at sensor 1140, such as Figure 16 A institute Showing, sensor 1140 detecting distance A is as the distance to ramped bottom surface, then, it is judged that sensor 1140 detects and inclines The correct distance of inclined end face rather than the distance to the substrate 500 on fixing supporting member 15.Thus, it is found that substrate 500 is not It is positioned at sensor 1140 and ramped bottom surface, i.e. recess 17, between.
On the other hand, if described sensor 1140 detects distance W less than distance A1, as shown in fig 16b, then judge Go out sensor 1140 and measure the distance having arrived substrate 500, and the position that substrate 500 is in does not lines up.
If the correct distance apart from the ramped bottom surface of multiple recesses 17 is to be detected, then by corresponding sensor 1140 Find that not lining up does not occurs in the substrate 500 position on the direction of any recess 17.Therefore the position of substrate 500 does not lines up energy Enough detected more accurately.
Can be by gradient R and distance A of regulation sensor 1140 and substrate 500 normal with set and be used for determining base Threshold value D that the position of plate 500 does not lines up is suitable value.Preferably, threshold value D should be at the scope of 05 millimeter to 15 millimeters In.
When substrate 500 is not at the position between sensor 1140 and recess 17, substrate 500 may not be positioned at fixing On supporting member 15.Such as, substrate 500 may adhere to movable supporting member 11, and may with movable supporting member 11 together It is lifted.In order to prevent this situation from occurring, as shown in figures 18a and 18b, sensor 1140 can be along with in head part 1100 Rise, it is possible to again measure height residing when the distance of the pre-test of sensor 1140 to the ramped bottom surface of recess 17 to recessed The distance of the ramped bottom surface in portion 17.
Specifically, as shown in Figure 18 A, when sensor 1140 is from the ramped bottom surface of the pre-test of sensor 1140 to recess 17 Distance time residing height lifting height H, sensor 1140 and substrate 500 spacing distance W2。
If distance W of distance substrate 500 measured by sensor 11402, then judge that sensor 1140 has measured base The correct distance of plate 500, and find that substrate 500 is placed on fixing supporting member 15.
As shown in figure 18b, on the other hand, if sensor 1140 is measured less than distance W2Distance B, then judge sensing The distance of the ramped bottom surface of recess 17 measured by device 1140, and finds that substrate 500 is not positioned on fixing supporting member 15.
Describe in substrate 500 is placed on substrate holder 110 hereinafter with reference to Figure 19 to 22 and by substrate 500 from The substrate holder that substrate holder 110 removes opens and closes the sequence of operation of mechanism 102.
Figure 19 is to show the substrate holder 110 being disposed horizontally on platform 120 by substrate holder conveyer 140 Axonometric chart.In this condition, be connected to by connection bump 1170 head part 1100 of the first actuator 1200 by with base Plate keeper 110 is up spaced.Axle 1130 extends to the position above the second actuator 1300 from head part 1100.Substrate is protected Holder 110 does not keep substrate 500, and movable supporting member 11 is temporarily fastened to fixing supporting member by protuberance 13 15, this protuberance 13 engages holding slightly with clamper 16.
Then, head part 1100 is lowered by the first actuator 1200 so that axle 1130 be positioned at two rollers 1340 it Between position.
Thereafter, as shown in figure 20, the second actuator 1300 be operated with by movable supporting member 11 from fixing supporting member 15 releases, i.e. discharge protuberance 13 from clamper 16.As shown in figure 20, axle hook 1330 is on the direction indicated by arrow X' Moved by the second actuator 1300, swivel plate 1150 counter-clockwise direction is rotated.Therefore, as it has been described above, fastening hook 1151 In one promotion supporting member 12 projection 12a, protuberance 13 is moved to suspension hook 1111.
On arrow X, the direction shown in X', the second actuator 1300 moves to its initial position, with by axle hook 1330 from Position shown in Figure 20 returns to intermediate position.Then, the first actuator 1200 is operated with poppet part 1100, promotes Movable supporting member 11.As shown in figure 21, substrate 500 is placed on the base of fixing supporting member 15 by substrate automatic conveying device 180 Region 14 placed by plate.
Then, the first actuator 1200 is operated to reduce head part 1100 from the position shown in Figure 21.As it has been described above, When the briquetting 1114 on the lower surface being positioned at pressing tablet 1110 presses movable supporting member 11, because briquetting 1114 is respective Include that elastic component 30, elastic component 30 can reduce sealing ring 18 because of the different-thickness of substrate holder 110 wherein The difference in distance compressed.
When the first actuator 1200 reduce head part 1100 and the second actuator 1300 on the direction that arrow X indicates from During position shifting axle hook 1330 shown in Figure 21, axle hook 1330 is impeller-hub 1130 on the direction that arrow X indicates, clockwise Rotate swivel plate 1150, as shown in figure 22.Fastening hook 1151 promotes projection 12a of supporting member 12, and this projection 12a is the most clockwise Rotate.Protuberance 13 engages with clamper 16 adaptation now.Mobile supporting member 11 is fixed to fixing supporting member 15 now, So that substrate 500 is clamped between mobile supporting member 11 and fixing supporting member 15.
Figure 22 shows the protuberance 13 and clamper 16 engaged that be retained as fitting each other, and substrate 500 is clamped in movement Between supporting member 11 and fixing supporting member 15.If mobile supporting member 11 will be temporarily fastened to fixing supporting member 15, and substrate 500 is not clamped between mobile supporting member 11 and fixing supporting member 15, axle hook 1330 may be stopped On the position more forward than the position shown in Figure 22.
As shown in figure 22, when protuberance 13 and clamper 16 are retained as being mutually adapted joint, the second actuator 1300 Move to its initial position, so that the side that axle hook 1330 indicates at arrow X, X' is returned back up to intermediate position.Keep substrate Then the substrate holder 110 of 500 is transported to substrate 500 by processed plating portion 130 by substrate holder conveyer 140.
After substrate 500 is processed, the substrate holder 110 of processed substrate 500 is kept to be placed on platform 120 On, and substrate 500 opens and closes mechanism 102 by substrate holder and substrate automatic conveying device 180 is kept from substrate Device 110 removes.In order to substrate 500 is removed from substrate holder 110, by fixing supporting member 15 from mobile supporting member 11 points From process carried out by the way of same as mentioned above by the first actuator 1,200 second actuator 1300.Figure 21 displays that After the substrate holder 110 of the substrate 500 that keeps being processed is placed on platform 120, head part 1100 lifting movable Supporting member 11.If substrate 500 is secured to the first sealing ring 18a and is lifted by the first sealing ring 18a, later fall into fixing Do not line up position on supporting member 15, if or substrate 500 continue to be attached to movable supporting member 11, then when sensor 1140 Measured as described above to when fixing supporting member 15 and arrive the distance of substrate 500, such problem is positioned in head part 1100 Sensor 1140 detect.
As it has been described above, because substrate holder opens and closes mechanism 102 and combines with simple assembly, its size phase To less, and cost is relatively low.Can be vertical because substrate holder in the present embodiment opens and closes that mechanism 102 includes being positioned at Sensor 1140 in the head part 1100 of movement, this sensor 1140 does not lines up for the position detecting substrate 500, and substrate is protected Holder opens and closes mechanism 102 and can detect the position of substrate 500 more accurately than existing equipment and do not line up, regardless of whether base Whether plate 500 and substrate holder 110 deform and whether have water droplet on substrate 500.It addition, because be used for pressing substrate and keep The briquetting 1114 of device 1100 includes respective elastic component 30 the most wherein, elastic component 30 can reduce sealing ring 18 because of The difference in distance compressed for the different-thickness of substrate holder 110, and stabilized seal ring 18 is relative to substrate 500 Sealability.
In this present embodiment, the second actuator 1300 is arranged along platform 120.But, because the second actuator 1300 Playing the effect rotating swivel plate 1150 relative to pressing tablet 1110, the second actuator 1300 can be installed in pressing tablet 1110 On, for rotating swivel plate 1150.In the present embodiment, include that the briquetting 114 of elastic component 30 reduces sealing ring respectively Difference in 18 distances compressed because of the different-thickness of substrate holder 110.But, for slip-on head part vertically First actuator 1200 of 1100 can comprise the servomotor with torque monitoring ability, can control servomotor to control The decline of head part 1100, so that the power of compression seal ring 18 is constant.In this approach, the distance that sealing ring 18 is compressed can Think constant, regardless of whether the different-thickness of substrate holder 110.Lorry type storage unit in the present embodiment 150 (see Fig. 1 and 2) it is applicable to store each substrate holder 110 extended in perpendicular.Lorry type storage unit 150 can store at least with The same number of substrate holder 110 of the compartment in plating coating groove 130f in plating portion 130.Preferably, lorry type storage unit 150 should store an extra group substrate keeper 110, the base gone wrong because of feeding power fault etc. as being found Plate keeper 110 standby.
Lorry type storage unit 150 is positioned at mounting portion, storage unit 160.As it is shown in figure 1, mounting portion, storage unit 160 is arranged For the rear surface near plating apparatus, the front surface of plating apparatus has load port 170.Mounting portion, storage unit 160 He Lorry type storage unit 150 can be placed on other positions, such as, between platform 120 and plating portion 130.But, platform 120, plating Apply portion 130 and mounting portion, storage unit 160 should be arranged in order with the order such as Fig. 1, to improve efficiency, because such cloth Office can produce higher handling capacity in time per unit.Specifically, when plating apparatus is in continuously running, keep at substrate After device 110 transports the substrate 500 processed in plating portion 130, substrate holder 110 receives next pending substrate 500.Therefore, during unless substrate holder 110 runs into the problems such as such as feeding power fault, the phase in lorry type storage unit 150 Answer compartment emptying, and the shipping time passed over from empty lorry type storage unit 150 for substrate holder 110 can be caused to damage Consumption.In other words, when plating apparatus is in and continuously runs, substrate holder 110 will not be transported to the right beyond the X in Fig. 1 The point represented.
If lorry type storage unit 150 and mounting portion, storage unit 160 are arranged between platform 120 and plating portion 130, faced by The sidewall of the plating apparatus of the observer of Fig. 1 needs have opening, and lorry type storage unit 150 must be put by this opening Enter mounting portion, storage unit 160 and take out from mounting portion, storage unit 160.But, the equipment that plating apparatus is usual and neighbouring Spaced apart about 1 meter, it is provided that the confined space, wherein operator puts lorry type storage unit 150 into mounting portion, storage unit 160 Take out with from mounting portion, storage unit 160, and continue to work on lorry type storage unit 150.Being difficult to manufacture has such May move and can store the lorry type storage unit of multiple substrate holder in limit space.According to the present embodiment, storage unit installation portion Divide 160 rear surfaces being arranged close to plating apparatus, because having bigger space after the rear surface of plating apparatus, can With freely close to mounting portion, storage unit 160.
Then, the details in the structure of lorry type storage unit 150 explained below.When plating apparatus power-off, i.e. when not having When having substrate 500 to be processed, lorry type storage unit 150 stores all of substrate holder 110 wherein.When plating apparatus is in Time in work, i.e. when substrate 500 is processed, it is necessary to substrate holder 110 by from lorry type storage unit 150 take out, and And the substrate holder 110 that is not used or the substrate holder 110 that runs into the problems such as such as feeding power fault are stored up Exist in lorry type storage unit 150.
Figure 23 is the explanatory view of the structure showing lorry type storage unit 150.As shown in figure 23, lorry type storage unit 150 include as the multiple castors 151 for moving lorry type storage unit 150, for supporting the suspension bracket of substrate holder 110 112 with multiple suspension bracket receptors 152 of substrate holder 110 of slinging with for preventing the base sling by suspension bracket receptor 152 The substrate holder that plate keeper 110 rocks rocks and prevents component 153.Lorry type storage unit 150 includes the use of such as lock pin etc. In a pair storage unit lock 159, framework 155, vertical roller that lorry type storage unit 150 is locked in mounting portion, storage unit 160 156, horizontal roller 157, drain pan 158 and handle 154.The details of these parts will be described below.Lorry type storage unit 150 There is the substrate holder memory block being limited in framework 155, as being used for storing wherein the sky of multiple substrate holder 110 Between.
Because lorry type storage unit 150 has the castor 151 as travel mechanism, lorry type storage unit 150 can be moved Enter mounting portion, storage unit 160 and remove from mounting portion, storage unit 160, i.e. be moved into plating apparatus and remove from plating apparatus. In this present embodiment, castor 151 is used as travel mechanism.But, lorry type storage unit 150 can have another moving machine Structure is to replace castor 151.For example, it is possible to arrange track slidably lorry type storage unit 150 is directed into storage unit installation portion Divide 160 or remove from mounting portion, storage unit 160.Because lorry type storage unit 150 can be from the storage unit in plating apparatus Mounting portion 160 pulls out, and substrate holder 110 can be placed into the lorry type storage unit 150 being positioned at outside plating apparatus and from this Lorry type storage unit 150 is taken out, the burden of operator compared to substrate holder 110 by manually or by being positioned at plating apparatus Interior elevator is placed into lorry type storage unit 150 and takes out from lorry type storage unit 150.
Because lorry type storage unit 150 can be moved due to castor 151, lorry type storage unit 150 can be by fully Separate from plating apparatus.The substrate holder 110 hung from suspension hook receptor 152 can be preserved from lorry type via depression 155a Portion 150 is easily removed, and substrate holder 110 can be easily directed into lorry type storage unit 150 and via depression 155a hangs from suspension hook receptor 152.Depression 155a make substrate holder 110 can by easily via depression recess be put into and Take out lorry type storage unit 150, it is not necessary to 150, lorry type storage unit is risen from substrate holder 110.Figure 24 is to show another The axonometric chart of the structure of individual lorry type storage unit 150.As shown in figure 24, the framework 155 of lorry type storage unit 150 has and is defined Depression 155a at the sidewall of framework 155.The substrate holder 110 hung from suspension hook receptor 152 can be via depression 155a Easily being removed from lorry type storage unit 150, substrate holder 110 can be easily directed into lorry type storage unit 150 And hang from suspension hook receptor 152 via depression 155a.Depression 155a makes the substrate holder 110 can be by easily via depression 155a puts and takes out lorry type storage unit 150 into, it is not necessary to 150, lorry type storage unit is risen from substrate holder 110.
Mounting portion, storage unit 160 that Figure 25 is in plating apparatus and the schematic side elevational of lorry type storage unit 150 Figure.Mounting portion, storage unit 160 that Figure 26 is in plating apparatus and the schematic rear view of lorry type storage unit 150.
Preferably, mounting portion, storage unit 160 is placed on the extension transporting axle 101 of substrate holder conveyer 140 Side is upwardly close on the position of the rear surface of plating apparatus, because substrate holder 110 is without empty lorry type storage unit 150 Top and response time be reduced, do not have the loss in shipping time.Such as, as illustrated in fig. 1 and 2, storage unit installation portion Points 160 can be arranged between platform 120 and dissolving tank 130h rather than close to the rear surface of plating apparatus.But, work as lorry When type storage unit 150 is pulled out from the mounting portion, storage unit 160 between platform 120 and dissolving tank 130h, lorry type is preserved Portion 150 is placed on the sidepiece of plating apparatus.Because limited by neighbouring equipment in the space of the sidepiece of plating apparatus, thus not Lorry type storage unit 150 can be made freely to be touched, and mounting portion, storage unit 160 wishes to be arranged on close to plating apparatus The position of rear surface.
As shown in figs. 25 and 26, mounting portion, storage unit 160 includes door 161, via this door 161 lorry type storage unit 150 Being placed into mounting portion, storage unit 160 and mounting portion, storage unit 160 to take out, this door 161 is arranged on and is limited at plating and sets In the opening of standby rear surface, flashboard 162 is as opening and closing device, for can make surrounding air when door 161 is opened The space flowing into plating apparatus minimizes.In the present embodiment, door 161 includes the locking mechanism worked together with flashboard 162.When When flashboard 162 is opened, door 161 is locked in closed position by locking mechanism.
Locking mechanism in the present embodiment includes the flashboard switch 165a for pinning flashboard 162 and for pinning door 161 Door trip 165b.Flashboard switch 165a and door trip 165b is arranged on mounting portion, storage unit 160.Each flashboard switchs 165a and door trip 165b is preferably actuator group combination switch.When the actuator being installed on flashboard 162 or door 161 is inserted When entering in flashboard switch 165a or door trip 165b, flashboard switch 165a or door trip 165b detection flashboard 162 or door 161 are closed Closing, flashboard switch 165a or door trip 165b pins actuator and prevents it to be removed.When unlocking signal is transmitted to flashboard switch During 165a or door trip 165b, actuator is unlocked by flashboard switch 165a or door trip 165b.When flashboard switch 165a pins During actuator, flashboard 162 can not be opened, and when door trip 165b pins actuator, door 162 can not be opened.Flashboard leaves Close 165a and door trip 165b to co-operate, thus door trip 165b can not be unlocked, unless flashboard switch 165a is locked Live, and flashboard switch 165a can not unlock, unless door trip 165b is lockable.Therefore, as long as flashboard switchs 165a and Men Kai Opening for one closed in 165b, another must be turned off, so that flowing into such as plating portion 130 and substrate holder conveyer The surrounding air in the region of 140 minimizes.
Each in flashboard switch 165a and in door trip 165b can comprise the safety switch of Electromagnetic Control.Plating sets That standby rear board is used as lorry type storage unit 150 and door with lorry type storage unit 150 one, and without storage unit The door of mounting portion 160.Flashboard 162 includes the flashboard pivoted, and in order to save space, this flashboard passes through flashboard rotating mechanism 162a can angle move between open and closed positions.Mounting portion, storage unit 160 is examined by flashboard switch 165a Survey when flashboard 162 is opened or closed.
In the present embodiment, storage unit lock or storage unit lock pin 159 in each include for securely by lorry type store Tibetan portion 150 is fixed to the lock pin handle 159a of mounting portion, storage unit 160.Install when lorry type storage unit 150 is in storage unit Time in part 160, lorry type storage unit 150 is immovably maintained at storage unit peace by storage unit lock or storage unit lock pin 159 In dress part 160.The elastomer block 167 being made up of rubber etc. is installed in one end of lorry type storage unit 150, when lorry type is preserved When portion 150 moves into mounting portion 160, storage unit, this end is as front end, or enters storage unit peace in lorry type storage unit 150 During dress part 160, mounting portion, storage unit 160 is against on the rear surface of lorry type storage unit 150.Elastomer block 167 plays works as lorry The effect of impact is reduced when the rear surface of type storage unit 150 and mounting portion, storage unit 160 contacts with each other.When lorry type storage unit 150 when being guided into mounting portion 160, storage unit, and operator promotes lorry type storage unit 150 to enter mounting portion, storage unit 160, until lorry type storage unit 150 extrudes elastomer block 167, then use storage unit lock or storage unit lock pin 159 by lorry type Storage unit 150 is fastened on the position in mounting portion, storage unit 160.
In the present embodiment, mounting portion, storage unit 160 has the horizontally-guided being arranged in mounting portion, storage unit 160 Plate 163, for being placed into mounting portion, storage unit 160 and taking out from mounting portion, storage unit 160 in lorry type storage unit 150 Time regulation lorry type storage unit 150 position and height.Figure 27 is provided in the guide plate 163 in mounting portion, storage unit 160 With the vertical roller 156 being positioned on lorry type storage unit 150 and the plane graph of horizontal roller 157.Figure 28 is to be arranged on storage unit peace Guide plate 163 in dress part 160 and the vertical roller 156 being positioned on lorry type storage unit 150 and the side view of horizontal roller 157.
Such as Figure 27 and 28, lorry type storage unit 150 includes being positioned at the vertical roller 156 that castor 150 is other, mounting portion, storage unit 160 include guide plate 163.When lorry type storage unit 150 is pushed in mounting portion, storage unit 160, vertical roller 156 is positioned at leads On plate 163.At this moment waiting, castor 151 is lifted away from floor.
Each plating apparatus is generally of the height on different distance floors.If mounting portion, storage unit 160 is not led To plate, when lorry type storage unit 150 is pushed into mounting portion 160, storage unit, castor 151 holding contacts, then with floor Lorry type storage unit 150 can be the most different plating apparatus can not be by the most vertically oriented.Set relative to a plating The standby lorry type storage unit 150 being adjustable vertically, it may not be possible to the most vertically oriented relative to another plating apparatus.So Shortcoming can be avoided by by guide plate 163, this guide plate 163 is positioned vertically and by as in different plating apparatus The reference of public height of parts.Because lorry type storage unit 150 is supported on guide plate 163, when lorry type storage unit 150 when being in mounting portion, storage unit 160, and lorry type storage unit 150 can be public by different plating apparatus.Unless otherwise Illustrating, multiple lorry type storage units 150 can be used in a plating apparatus.
In order to put lorry type storage unit 150 into mounting portion, storage unit 160, in the present embodiment, guide plate swimmingly 163 have center vertical guide rail 163a, when lorry type storage unit 150 moves into mounting portion 160, storage unit, are positioned at lorry Horizontal roller 157 on type storage unit 150 is retained as the side Structure deformation with guide rail 163a.When horizontal roller 157 is retained as During with the side Structure deformation of guide rail 163a, horizontal roller limits the shifted laterally of castor 151, thus regulates the position of castor 151.
In this present embodiment, the upper surface of guide plate 163 has slope 163b, and this slope 163b is before upper surface End, is used for allowing vertical roller 156 to be rolled to guide plate 163 swimmingly.Guide rail 163a has a pair slope 163c, and this is to slope 163c is positioned in its opposite sides and near its front end, is rolled to guide rail 163a swimmingly for tolerable injury level roller 157.Guide rail 163a can have width, and this width little by little becomes big, to be incrementally decreased horizontal roller 157 on the direction away from slope 163c And the space between guide rail 163a.Horizontal roller 157 moved swimmingly and with guide rail 163a Structure deformation, by lorry type storage unit 150 are adjusted to more accurate position in mounting portion, storage unit 160.
Except the vertical roller 156 on lorry formula storage unit 150, the ball castor can be installed on guide plate 163, and When lorry formula storage unit 150 is pushed into mounting portion 160, storage unit, lorry formula storage unit 150 can be on guide plate 163 Move on the ball castor.Lorry formula storage unit 150 can have roller, and mounting portion, storage unit 160 can have for adjusting The guiding of joint position in mounting portion, storage unit 160, the lorry formula storage unit 150.
In the present embodiment, support column 164 is installed in the lower surface of guide plate 163, is used for undertaking lorry formula storage unit The weight of 150.Support column 164 has the function of regulation height.The height on the distance floor of whole plating apparatus is by being positioned at plating Actuator 168 (seeing Figure 25) regulation on the lower surface of compress apparatus.In fig. 25, guide plate 163 has and is fixed to plating and sets Standby left end, and it is adjusted to parallel with floor by the height adjusting function of support column 164.
Mounting portion, storage unit 160 can have storage unit detector, and this storage unit detector does not show, the most infrared Line sensor or photographing unit, be used for determining whether lorry formula storage unit 150 is positioned in mounting portion, storage unit 160 and lorry formula is store Whether Tibetan portion 150 is fastened to the appropriate location in mounting portion, storage unit 160.Mounting portion, storage unit 160 can also have To operator, instruction unit, such as bulb etc., for indicating whether lorry formula storage unit 150 is positioned in mounting portion, storage unit 160.
Unless storage unit detector detect that lorry formula storage unit 150 is fastened in mounting portion, storage unit 160 suitable Work as position, and unless door 161 is pinned by door trip 165b, unlocking signal will not be sent to just pinning the flashboard of flashboard 162 Switch 165a, i.e. flashboard 162 remain turned-off.So it is prevented from substrate holder 110 to be installed in lorry formula storage unit 150 The transport problem caused during errors present in mounting portion, storage unit 160, or prevent outside air to be introduced into plating portion 130 He The sinuous flow of substrate holder conveyer 140.
As shown in Figure 29 A to 29C, lock pin handle 159a is installed in lorry formula storage unit 150 in the face of the sidewall of door 161 On.Mounting portion, storage unit 160 has the lock pin receptor 159b for receiving lock pin handle 159a respectively.Lock pin handle 159a With lock pin receptor 159b connection composition lock pin or storage unit lock 159, install for lorry formula storage unit 150 being locked in storage unit In part 160.Door 161 this 161 in the face of lorry formula storage unit 150 surface on have lock pin guide 169, lock pin guide 169 are used for guiding respective lock pin handle 159a.
Figure 29 A is the lock of the door 161 showing lock pin handle and mounting portion, storage unit 160 on lorry formula storage unit 150 Pin guides the schematic diagram of relation between 169；Figure 29 B is to show surface and the lock that lock pin guides 169 doors 161 being mounted on The side view of the relation of pin handle 159a；It is the side view being provided with the door 161 that lock pin guides 169 with Figure 29 C.
When lock pin handle 159a engages with lock pin receptor 159b, lorry formula storage unit 150 is locked in storage unit and installs Appropriate location in part 160.When lock pin handle 159a is by anti-from the elastomer block being extruded of lock pin receptor 159b Under active force, lock pin handle 159a engages with lock pin receptor 159.
Lock pin guides 169 to be arranged on the inner surface of door 161, when lorry formula storage unit 150 is placed on storage unit peace Time in dress part 160, this inner surface is in the face of lorry formula storage unit 150.As shown in Figure 29 C, lock pin guides the form of 169 to be from door 161 prominent rack forms also essentially horizontally extend, and are shaped to be maintained in the middle of it lock pin handle 159a.In order to incite somebody to action Lorry formula storage unit 150 is arranged in mounting portion, storage unit 160 and closes door 161, and lock pin handle 159a must be positioned For approximate horizontal, in order to lock pin handle 159a is maintained at lock pin and guides between 169.
In order to orientate as approximate horizontal by lock pin handle 159a, lorry formula storage unit 150 needs to be pushed into storage unit and installs In portion 160 precalculated position.When lorry formula storage unit 150 is positioned at the precalculated position in mounting portion, storage unit 160, lorry Formula storage unit 150 is locked in storage unit installation portion by the lock pin 159 being made up of lock pin handle 159a and lock pin receptor 159b Divide in 160.Unless lock pin handle 159a is oriented to approximate horizontal, lock pin handle 159a and lock pin receptor 159b is the most dry Relate to, and prevent door 161 to be closed.Therefore, door 161 can not be closed, unless lorry formula storage unit 150 is pushed into storage unit and installs Precalculated position in part 160.
In such a way, what lorry formula storage unit 150 must be mounted and be locked in mounting portion, storage unit 160 is predetermined In position.Lorry formula storage unit 150 can have switch and actuator, and this switch and actuator do not show, this switch is used for The when that detection lock pin handle 159a in position engaging with lock pin receptor 159, this actuator is used for fastening lock pin handle 159a prevents unsuitable movement.
Such as Figure 23, shown in 25 and 26, drain pan 158 is arranged in the relatively lower part of lorry formula storage unit 150 or lorry The bottom of formula storage unit 150.As shown in figure 25, opening 166 is limited at the top of mounting portion, storage unit 160, passes through substrate The substrate holder 110 that keeper conveyer 140 keeps enters and leaves mounting portion, storage unit 160 through opening 166.Opening 166 are set smaller than the drain pan 158 in lorry formula storage unit 150.Correspondingly, when flashboard 162 is opened, drop passes through opening 166 fall, and drop is received in lorry formula storage unit 150 by drain pan 158 rather than is fallen on floor and make ground dirty Plate.
Mounting portion, storage unit 160 can have sufficiently large size, to be placed on wherein lorry formula storage unit 150. It is preferable, however, that when lorry formula storage unit 150 is placed in mounting portion, storage unit 160, lorry formula storage unit 150 and storage Should not have bigger space between mounting portion, Tibetan portion 160, to prevent when flashboard 162 is opened, too much outside air enters Enter plating portion 130.No matter whether lorry formula storage unit 150 is placed in mounting portion, storage unit, in order to allow outside air The change of the area entering the opening of plating apparatus minimizes and prevents internal gas and drop from discharging from plating apparatus, spacer Can be arranged on lorry formula storage unit 150 around, spacer shows the most in the drawings.
According to the plating apparatus of the present embodiment, even if when plating apparatus is just in operation, lorry formula storage unit 150 can be by Pull out from plating apparatus, i.e. the outside of the outer panels of plating apparatus, without the operation interrupting plating apparatus.Therefore, goods Vehicle type storage unit 150 can be taken out from plating apparatus, and substrate holder 110 can be maintained without reducing plating The operability of equipment.When plating apparatus is the most on-stream, in order to lorry formula storage unit 150 is put into or is left plating apparatus, Need to consider the processing safety of plating apparatus, and make the interference plating caused because of touching lorry formula storage unit 150 as far as possible The minimum gas flow of equipment.To touch lorry formula storage unit 150 when plating apparatus does not operates, above for plating apparatus Operation safety and the requirement minimizing interference air-flow should be met, to touch lorry formula storage unit when plating apparatus operates 150, requirements above to be met more accurately.
When substrate holder 110 is put in lorry formula storage unit 150 by substrate holder conveyer 140 or is protected by substrate When holder 110 removes from lorry formula storage unit 150, it is preferable that plating apparatus should be controlled to pin lorry formula storage unit 150, Make it can not remove from plating apparatus.Therefore, plating apparatus includes for grasping and controlling substrate holder conveyer 140 The substrate holder conveyer controller 210 (seeing Figure 30) of operating condition.
Figure 30 be show the controller 200 of plating apparatus, substrate holder conveyer 140, mounting portion, storage unit 160, Storage unit is touched instruction unit 250 and can touch/not touch the block diagram of contact between display part 260.As shown in figure 30, plating sets For including controller 200, this controller 200 includes substrate holder conveyer controller 210, mounting portion, storage unit controller 220, instruction unit controller 230 and display part controller 240.
Substrate holder conveyer controller 210 is monitored and controlled substrate holder conveyer 140, and receives from being pacified The detection signal (seeing Fig. 4 A to 4C) of the sensor 144 being contained on substrate holder conveyer 140.Storage unit installation portion sub-control Device 220 processed is monitored and controlled each assembly of mounting portion, storage unit 160, including door 161, for pinning the door trip of door 161 165b, flashboard 162 and for pin flashboard 162 flashboard switch 165a.
Instruction unit controller 230 receives the touching instruction from storage unit touching instruction unit 250.Display part controller 240 Control can touch/display part 260 can not be touched, based on whether can be touched about mounting portion, storage unit 160 information show Show that mounting portion, storage unit 160 can be touched or mounting portion, storage unit 160 can not be touched.
Storage unit touching instruction unit 250 (hereinafter referred to as " instruction unit ") indicates to instruction unit controller 230 and lorry formula is store Tibetan portion 150 takes out the operation beginning of process from mounting portion, storage unit 160 and lorry formula storage unit 150 returns storage unit installation portion Divide the end of the process of the operation of 160, and control substrate holder conveyer controller 210 with restricting substrate keeper conveyer The touching of mounting portion, 140 pairs of storage units 160.The form of instruction unit 250 could be for input processing instruction can contacting surface plate Or it is positioned close to the dedicated button of the rear surface of plating apparatus.Instruction unit 250 indicates lorry formula to store to instruction unit controller 230 Tibetan portion 150 can touch, and instruction is sent to substrate holder conveyer controller 210 by instruction unit controller 230.Substrate holder Conveyer controller 210 limits by the substrate holder conveyer 140 touching to mounting portion, storage unit 160.
When instruction unit 250 indicates the imminent touching to lorry formula storage unit 150 to instruction unit controller 230, refer to Show that portion's controller 230 sends this instruction to mounting portion, storage unit controller 220.Mounting portion, storage unit controller 220 based on The state of mounting portion, storage unit 160 and the operating condition of substrate holder conveyer 140, determine mounting portion, storage unit The property touched of 160 maybe can not the property touched, wherein the operating condition of substrate holder conveyer 140 is by substrate holder conveyer Controller 210 is controlled.Can touch/can not touch display part 260 and show that to operator the property touched being sized maybe can not be touched Property.
Can touch/can not touch display part 260 and can include bulb, GUI screen image or siren, with to operator or Equipment user instruction can be touched and maybe can not touch.Can touch/can not touch display part 260 can show about the storage of lorry formula Whether portion 150 is installed in the information in mounting portion, storage unit 160, to allow operator to easily verify that storage unit installation portion Divide whether 160 can touch and the state of mounting portion, storage unit 160.
When substrate holder conveyer 140 is operable to be stored in lorry formula storage unit 150 substrate holder 110 Time, the touching to lorry formula storage unit 150 is prohibited, and lorry formula storage unit 150 judged by mounting portion, storage unit controller 220 For touching.When mounting portion, storage unit controller 220 judges that lorry formula storage unit 150 is as touching, door 161 is firm Admittedly pin, to prevent door 161 from unexpectedly being opened.
Door 161 is by by switch 165 pinning, and switch 165 is by for pinning the flashboard switch 165a of flashboard 162 and for locking Live the door trip 165b composition of door 161.
Door 161 may include turn on and closure sensor, to prevent following this situation: although i.e. flashboard 162 is opened, But owing to for pinning some reason that the door trip 165 of door 161 breaks down, door 161 is also turned on.These opening and closing pass Sensor does not show.Interlocking mechanism can also be included, when door 161 is opened, interlocking mechanism can be used for detection and based on Signal from opening and closure sensor produces error signal.
In the present embodiment, the sensor 144 (seeing Fig. 4 A to 4C) being installed on substrate holder conveyer 140 is also It is used for detecting quantity and the position of the substrate holder 110 being stored in lorry formula storage unit 15.When plating apparatus is activated With when initializing, sensor 144 detects quantity and the position of the substrate holder 110 being stored in lorry formula storage unit 150.With After, according to for starting the instruction that plating processes, substrate holder 110 is preserved by substrate holder conveyer 140 from lorry formula Portion 150 removes.The controller 200 of plating apparatus always grasps which substrate holder 110 by from lorry formula storage unit Take out in 150.Therefore, before lorry formula storage unit 150 is removed from mounting portion, storage unit 160, the control of plating apparatus Device 200 is able to know that how many substrate holders 110 are stored in lorry formula storage unit 150.It addition, in lorry formula storage unit Before 150 are removed from mounting portion, storage unit 160, substrate holder 110 can again be detected and be checked.
Then, lorry formula storage unit 150 is removed from plating apparatus, is stored in the substrate in lorry formula storage unit 150 Keeper 110 is maintained, and lorry formula storage unit 150 is put back in plating apparatus.When lorry formula storage unit 150 is put back into storage unit During mounting portion 160, sensor 144 detects the substrate holder 110 in lorry formula storage unit 150.Now, if in lorry formula Storage unit 150 is taken back to the quantity of the substrate holder 110 that mounting portion, storage unit 160 detects afterwards more than in lorry formula The quantity of the substrate holder 110 detected before is removed in storage unit 150 from mounting portion, storage unit 160, and sensor 144 can To send alarm signal.Because the quantity increase of substrate holder 110 means that lorry formula storage unit 150 will not be available for plating The space that substrate holder 110 in equipment is put back into, so sensor 144 alarm signal to be occurred.
When lorry formula storage unit 150 is removed from plating apparatus, it is housed in substrate holder 110 therein maintained, so After the most maintained substrate holder 110 be taken back in lorry formula storage unit 150, the most maintained substrate holder 110 can To be housed on positions different from the original position that it is removed in lorry formula storage unit 150.Now, when the most maintained substrate When keeper 110 is taken back to lorry formula storage unit 150, substrate holder 110 is detected as described above, substrate holder 110 in lorry formula storage unit 150 positional information be updated.Therefore, when substrate holder conveyer 140, substrate is kept When device 110 is put back into lorry formula storage unit 150, if substrate holder 110 position to be stored is by another substrate Keeper 110 occupies, and sensor 144 will detect that another substrate holder 110 has already taken up this position, and generation is used for Stop the signal that substrate holder 110 is put back to by substrate holder conveyer 140.Sensor 144 is not necessarily to be installed in In substrate holder conveyer 140, but can be installed in and can detect the substrate being stored in lorry formula storage unit 150 In the quantity of keeper 110 and any position of position.
In order to mounting portion, storage unit 160 is reliably put into and from mounting portion, storage unit 160 in lorry formula storage unit 150 Take out, when lorry formula storage unit 150 is placed into mounting portion, storage unit 160 and takes out from mounting portion, storage unit 160, base Plate keeper conveyer 140 is prevented from moving to the position above mounting portion, storage unit 160.Substrate holder conveyer 140 It is prevented from pass through the drive division of the such as servomotor of moving substrate keeper conveyer 140 and is moved to storage unit installation portion Divide the position above in the of 160.
Describe for mounting portion, storage unit 160 He is put in lorry formula storage unit 150 below with reference to Figure 31 A to 31E The operation that lorry formula storage unit 150 is removed from mounting portion, storage unit 160.Figure 31 A to 31E be schematically show for will Lorry formula storage unit 150 is put into mounting portion, storage unit 160 and is moved from mounting portion, storage unit 160 lorry formula storage unit 150 The axonometric chart of the operating process gone.
First, as shown in fig. 3 ia, lorry type storage unit 150 is moved to the door 161 near mounting portion, storage unit 160 Position.Then, as shown in figure 31b, door 161 is opened.When sensor detects the most close lorry type storage unit 150, Door 161 can be manually opened and maybe can be automatically opened.Then, as shown in Figure 31 C, lorry type storage unit 150 is moved Enter the precalculated position of mounting portion, storage unit 160.As fig. 3 id, after door 161 is closed, confirm lorry type storage unit 150 It is placed to the precalculated position of mounting portion, storage unit 160.Then, as shown in Figure 31 E, confirming that lorry type storage unit 150 is put After entering the precalculated position in mounting portion, storage unit 160, door 161 is closed, the flashboard 162 in mounting portion, storage unit 160 It is opened.Mounting portion, storage unit 160 is likely to be of for indicating flashboard 162 to be opened and lorry type storage unit 150 is permissible Carried out the display part of plating process.
Lorry type storage unit 150 is removed from mounting portion, storage unit 160 with following steps:
First, as fig. 3 id, confirming that door 161 is closed, then flashboard 162 is closed.Then, as shown in Figure 31 C, Door 161 is opened.Lorry type storage unit 150 now begins to remove from mounting portion, storage unit 160.As shown in figure 31b, lorry Type storage unit 150 removes from mounting portion, storage unit 160, until lorry type storage unit 150 fully with mounting portion, storage unit 160 separate.After confirming that lorry type storage unit 150 fully separates with mounting portion, storage unit 160, door 161 is closed, such as figure Shown in 31A.
Describe below with reference to accompanying drawing 32 and work as plating apparatus in the running, for storage is put in lorry type storage unit 150 Mounting portion, portion 160 and the operation that lorry type storage unit 150 is removed from mounting portion, storage unit 160.Figure 32 is that this operated The flow chart of journey, wherein continuous print step is identified by the reference number of mark, and before added with prefix " S ".
When plating apparatus is when running well, and lorry type storage unit 150 is placed into mounting portion, storage unit 160, door 161 quilt Closing and pin, flashboard 162 is opened (step S101).
When in order to the substrate holder 110 in lorry type storage unit 150 is safeguarded and must be by lorry type storage unit 150 when removing from mounting portion, storage unit 160, and such as, instruction unit 250 sends installs lorry type storage unit 150 from storage unit The instruction that part 160 removal operation starts, instruction unit controller 230 receives the instruction (step S102) from instruction unit 250.When When instruction unit controller 230 receives the instruction from instruction unit 250, substrate holder conveyer controller 210 confirms that substrate is protected The state of holder conveyer 140.State based on the substrate holder 140 confirmed by substrate holder conveyer 210, storage unit Mounting portion controller 220 determines whether lorry type storage unit 150 can be touched and maybe can not touch, and such as, substrate holder transports Whether device 140 is removed from lorry type storage unit 150 by substrate holder 110 or whether substrate holder conveyer 140 is by substrate Lorry type storage unit 150 (step S103) put into by keeper 110.
If mounting portion, storage unit controller 220 judge lorry type storage unit 150 as touching, display part controller Display part 260 can be touched/can not be touched to 240 controls with instruction lorry type storage unit 150 is untouchable (step S104).This Time, door 161 keeps locking and can not open.Subsequently, if the state of substrate holder conveyer 140 is changed in the near future, storage Tibetan portion mounting portion controller 220 judges that lorry type storage unit 150, as touching, controls to proceed to step S105
If mounting portion, storage unit controller 220 judge lorry type storage unit 150 as touching, display part controller 240 control can touch/display part 260 can not be touched, to show that lorry type storage unit 150 is (step S105) that can touch.Lock Plate 162 is closed by switch 165a and is pinned, and door 161 is released by switch 165b, and discharge interlock mechanism.Storage unit is pacified Dress segment controller 220 allows door 161 to be opened (step S106) now.
When door 161 is opened to allow touching lorry type storage unit 150, storage unit lock or lock pin 159 can be by manually Ground release.Mounting portion, storage unit controller 220 uses the sensor etc. being arranged on mounting portion, storage unit 160 to detect arrival Vehicle storage unit 150 is removed (step S107) from mounting portion, storage unit 160.
After lorry type storage unit 150 is removed from mounting portion, storage unit 160, door 161 is closed, storage unit installation portion Sub-controller 220 detects that door 161 is closed (step S108).The lorry type storage being removed from mounting portion, storage unit 160 Substrate holder 110 in Tibetan portion 150 is taken out and maintained (step S109) from lorry type storage unit 150.When substrate is protected After the maintenance of holder 110 completes, door 161 is opened and lorry type storage unit 150 is put back to mounting portion, storage unit 160.Door 161 Open by mounting portion, storage unit controller 220 detected (step S110).
Lorry type storage unit 150 is placed in mounting portion, storage unit 160, is then locked by storage unit or lock pin 159 It is lockable.Detect that lorry type storage unit 150 is in mounting portion, storage unit 160 by mounting portion, storage unit controller 220 Locked by storage unit or lock pin 159 is lockable (step S111).It is placed on mounting portion, storage unit in lorry type storage unit 150 Locking in 160 and by storage unit or after lock pin 159 is lockable, door 161 is closed.The closedown of door 161 is by storage unit installation portion Sub-controller 220 detected (step S112).
After the instruction of the installation sending lorry type storage unit 150 when instruction unit 250, instruction unit controller 230 receives Instruction (step S113) from instruction unit 250.Mounting portion, storage unit controller 220 controls switch 165b, to pin door 161, and controller 220 control switch 165a in mounting portion, storage unit is to discharge and to open flashboard 162 (step S114).At lock After plate 162 is closed in step S105, until step S114, flashboard 162 is kept cut out to stop that outside air enters.
In the present embodiment, substrate holder 110 is housed in wherein by lorry type storage unit 150.If plating apparatus is Perform electronics plating plating apparatus, lorry type storage unit 150 can store anode holder with in plating coating groove use, or Can be with memory substrate keeper 110 and anode holder.It is stored in lorry at substrate holder 110 and anode holder In the case of in type storage unit 150, for substrate holder 110 being stored in the substrate holder in lorry type storage unit 150 Storage area also acts as the effect of anode holder storage area.
The anode holder keeping anode is placed in the plating solution in plating coating groove.In plating coating groove, anode passes through Anode holder is kept, and substrate 500 is configured to relative with anode by substrate holder 110, anode and the table of substrate 500 Face is parallel to each other.When plating power supply provides electric current between anode and substrate 500, the substrate exposed from substrate holder 110 The surface that will be plated of 500 is by electronics plating.The profile of anode holder and display substrate holder 110 in figure 3 Outline similar, such as, anode holder includes main body, suspension bracket and handle, and anode holder is maintained at anode in main body. The anode kept by anode holder is electrically connected to the power feed contact being positioned on suspension bracket, this method of attachment and Fig. 3 institute That shows is roughly the same.
Anode holder is placed in lorry type storage unit in the following manner: first, anode holder is by from plating coating groove In upwards pull out.Anode holder is common has anode rear portion, is used for preventing anode slime from spreading.Therefore, keep when anode After device is upwards pulled out from plating coating groove, at short notice, plating solution continues to drip from anode rear portion.At plating solution drop Starting with sufficiently long interval drippage, anode holder is rinsed in flushed channel.When major part flushing water is kept from anode When device is removed, anode holder is taken back in lorry type storage unit 150.Even if because being stored in lorry at anode holder In type storage unit 150 after plating solution continue to from anode holder drip, be positioned at lorry type storage unit 150 lower part or The drain pan 158 of bottom receives and keeps the plating solution of drippage.
Storage has the lorry type storage unit 150 of anode holder to have has the lorry type of substrate holder 110 to store with storage The advantage that Tibetan portion 150 is identical.Specifically, because lorry type storage unit 150 can be pulled out from plating apparatus, and anode Lorry type storage unit that keeper can be placed in outside plating apparatus and taking out from the lorry type storage unit plating apparatus, If being artificially to put into lorry type storage unit by the elevator in plating apparatus and store from lorry type with anode holder Tibetan portion takes out and compares, and the burden of operator is less.
In the present embodiment, lorry type storage unit 150 is used as storage unit.Can also use and be configured to move along track Enter mounting portion, storage unit and the storage unit from the removal of mounting portion, storage unit, and do not use lorry type storage unit 150.
Although some preferred embodiment of the present invention is described in detail, the present invention is not limited to above-described embodiment, and And it should be understood that various changes and modifications may be made wherein in without departing from the scope of appended claims.

Claims (11)

1. a plating apparatus, it is characterised in that including:
Platform, substrate holder is placed on described platform, and described substrate holder can removably keep substrate；
Plating portion, keeps plating solution in described plating portion, described plating portion is for by soaking described substrate in vertical plane In described plating solution, the described substrate kept by described substrate holder is not carried out plating；With
Substrate holder conveyer, described substrate holder conveyer is described for transporting between described and described plating portion Substrate holder, described substrate holder conveyer includes the holding part for keeping described substrate holder；
Wherein, described has horizontal mobile mechanism, when described horizontal mobile mechanism supports the lower end of described substrate holder, Described horizontal mobile mechanism can flatly move；And
Wherein, described substrate holder conveyer includes rise and fall mechanism, when the lower end of described substrate holder is by described water When flat travel mechanism supports, along with described horizontal mobile mechanism moves horizontally, by vertically mobile described holding part, described on Rise descending mechanism for being level by the posture of described substrate holder from vertical State Transferring, or turn from level It is changed to vertical state.
2. plating apparatus as claimed in claim 1, it is characterised in that farther include:
Substrate holder detector, described substrate holder detector is used for detecting whether described substrate holder conveyer keeps Described substrate holder.
3. plating apparatus as claimed in claim 2, it is characterised in that farther include:
Rise and fall mechanics controller, if described substrate holder detector detects that described holding part does not keeps described base Plate keeper, described rise and fall mechanics controller stops the operation of described rise and fall mechanism.
4. plating apparatus as claimed in claim 1, it is characterised in that described substrate holder includes round handle, and institute Stating maintaining part divides holding described round handle.
5. plating apparatus as claimed in claim 4, it is characterised in that described holding part has and is pivotably supported described circle The shape of shape handle.
6. plating apparatus as claimed in claim 1, it is characterised in that when from the moving direction of described horizontal mobile mechanism and When the direction that described holding vertical moving direction partly is the most vertical is observed, the lower end of described substrate holder has semicircular Shape of cross section.
7. plating apparatus as claimed in claim 1, it is characterised in that the weight hung by described horizontal mobile mechanism, institute State horizontal mobile mechanism to be biased on the direction reducing described holding part.
8. plating apparatus as claimed in claim 1, it is characterised in that described substrate holder conveyer includes for described The clamper that described substrate holder rocks is prevented when substrate holder is transported.
9. a conversion is for the method removably keeping the posture of the substrate holder of substrate, it is characterised in that described side Method includes:
The maintaining part utilizing substrate holder conveyer divides the end keeping described substrate holder；
Described substrate holder is made to move the position above platform by described substrate holder conveyer；
Reduce described holding partly so that another end of described substrate holder the horizontal mobile mechanism with described connects Touch；With
In order to be level by the described posture of described substrate holder from vertical State Transferring, reduce described holding further Part is flatly to move described horizontal mobile mechanism.
10. method as claimed in claim 9, it is characterised in that farther include:
After the other end of described substrate contacts with described horizontal mobile mechanism, and dropped further in described holding part Low before flatly moving described horizontal mobile mechanism, the described holding part of mobile described substrate holder conveyer, with Described substrate holder predetermined oblique angle is made not move described horizontal mobile mechanism.
11. 1 kinds of method for plating, it is characterised in that described method for plating includes:
Being placed on platform by substrate holder by substrate holder conveyer, described substrate holder conveyer can keep institute State substrate holder；
The described substrate holder being placed on described platform is utilized to install and keep substrate；
The maintaining part utilizing described substrate holder conveyer divides the end keeping described substrate holder；
When horizontal mobile mechanism supports another end of described substrate holder, keep part and flatly described in lifting The mobile described horizontal mobile mechanism being positioned on described platform, to be converted to erect from level by the posture of described substrate holder Straight state；
By described substrate holder conveyer, described substrate holder is moved to the top of the plating portion of holding plating solution Position；With
Described substrate holder is reduced, so that described substrate is immersed in described plating solution by described substrate holder conveyer In.
CN201610453013.3A 2010-10-21 2012-03-15 Plating apparatus, method for plating and change substrate holder for removably keeping substrate posture method Expired - Fee Related CN106119919B (en)

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CN201210069120.8A CN102888647B (en) 2010-10-21 2012-03-15 Plating apparatus and method for plating

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CN108657818A (en) * 2017-03-31 2018-10-16 可能可特科技（深圳）有限公司 A kind of handling device based on FPC plating
CN108657818B (en) * 2017-03-31 2024-04-26 可能可特科技（深圳）有限公司 Conveying device based on FPC electroplating
CN111074211A (en) * 2020-01-15 2020-04-28 苏州东福来机电科技有限公司 Electrosilvering equipment

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CN102888647B (en) 2016-08-03
JP2012107311A (en) 2012-06-07
JP6001134B2 (en) 2016-10-05
JP2015187306A (en) 2015-10-29
JP5750327B2 (en) 2015-07-22
CN102888647A (en) 2013-01-23

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