CN108657818A - A kind of handling device based on FPC plating - Google Patents
A kind of handling device based on FPC plating Download PDFInfo
- Publication number
- CN108657818A CN108657818A CN201710208470.0A CN201710208470A CN108657818A CN 108657818 A CN108657818 A CN 108657818A CN 201710208470 A CN201710208470 A CN 201710208470A CN 108657818 A CN108657818 A CN 108657818A
- Authority
- CN
- China
- Prior art keywords
- fpc
- attitude
- adjusting system
- handling device
- clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 83
- 230000007246 mechanism Effects 0.000 claims abstract description 64
- 230000032258 transport Effects 0.000 claims abstract description 13
- 238000009713 electroplating Methods 0.000 claims description 18
- 238000005452 bending Methods 0.000 claims description 16
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002990 reinforced plastic Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- 229920006351 engineering plastic Polymers 0.000 claims description 3
- 229920002457 flexible plastic Polymers 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
Landscapes
- Electroplating Methods And Accessories (AREA)
Abstract
The invention discloses a kind of handling devices based on FPC plating, including：Horizontal input mechanism, the first attitude-adjusting system, chain conveyor mechanism, the second attitude-adjusting system and horizontal output mechanism；Horizontal input mechanism, for being transported the FPC substrates of sheet one by one to the first attitude-adjusting system；First attitude-adjusting system, for being vertical state by the FPC substrates overturning under horizontality；Chain conveyor mechanism is used for FPC substrate transports to the second attitude-adjusting system；Second attitude-adjusting system, the FPC substrates overturning for that will be in vertical state is horizontality, then is exported by horizontal output mechanism and carry out subsequent processing；Chain conveyor mechanism further includes the clamp assembly for clamping FPC substrates.
Description
Technical field
The present invention relates to machinery field more particularly to a kind of handling devices based on FPC plating.
Background technology
Flexible PCB (FPC, Flexible Printed Circuit) is using polyimides or polyester film as base material
It is manufactured a kind of with height reliability, excellent flexible printed circuit.It is high, light-weight with Distribution density, thickness is thin,
The good feature of bending.
In general, the base material for making FPC can become FPC substrates, which may include web-like and sheet two
The FPC substrates of class, web-like are socketed in out on winding up roller, and the other end is fixed on wind-up roll.The FPC substrates of the web-like are handled
When, when needing winding up roller to be rotated simultaneously with wind-up roll, the FPC substrates of web-like are unfolded, and then are handled it.
Currently, the equipment based on FPC plating is only applicable to the FPC substrates of web-like, without what is carried to FPC substrates
Equipment.
Invention content
The present invention provides a kind of handling devices based on FPC plating, for effectively being removed to the FPC substrates of sheet
Fortune.
A kind of handling device based on FPC plating of the present invention, including：
Horizontal input mechanism, the first attitude-adjusting system, chain conveyor mechanism, the second attitude-adjusting system and horizontal output
Mechanism；
Horizontal input mechanism, for being transported the FPC substrates of sheet one by one to the first attitude-adjusting system；
First attitude-adjusting system, for being vertical state by the FPC substrates overturning under horizontality；
Chain conveyor mechanism is used for FPC substrate transports to the second attitude-adjusting system；
Second attitude-adjusting system, the FPC substrates overturning for that will be in vertical state is horizontality, then by horizontal defeated
Go out mechanism output and carries out subsequent processing；
Chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；
Clamp assembly includes main body and left and right clamp, is arranged for enabling left and right clamp between main body and left and right clamp top
The elastic component being enough opened and closed；
By during the FPC substrate transports to the second attitude-adjusting system, FPC substrates immerse always for chain conveyor mechanism
In liquid in electroplating bath, and 2-12mm spacing distances are kept between FPC substrates.
Optionally,
Clamp assembly is made of stainless steel.
Optionally,
Clamp bends to U-shaped with stainless steel materials.
Optionally,
The upper outside of left and right clamp installs the roller that can be rotated；
Chain conveyor mechanism further includes switching mechanism；
Switching mechanism includes：Along the left and right rail that carry direction is arranged, for making the roller of the clamp assembly in institute
It states and moves between left and right rail；
Left and right rail forms the bending section of bending in the precalculated position of coating bath, and the bending section makes between left and right rail
Distance reduces, and after so that the roller is entered bending section, left and right clamp upper end generates opposite active force, and compressed spring, leads
Left and right clamp lower end is caused to open.
Optionally,
The top of left and right clamp is removably equipped with the contact portion for contacting FPC substrates.
Optionally,
Contact portion is slidably connected with the left and right clamp.
Optionally,
Main body is made of reinforced plastics；
Main body is connected with contact portion copper coin and coating copper conductors；
Roller is made of stainless steel or is made of plastic resins such as engineering plastics；
Contact portion is covered other than with PFC substrates contact site with rubber, flexible plastic or resin.
Optionally,
Chain conveyor mechanism further includes：Left and right driven sprocket, drive sprocket, the left and right carrying chain being wound, left and right are carried
The multiple connecting components being arranged between chain；
Clamp assembly is mounted in the connecting component.
Optionally,
Connecting component is made of metal, and passes through electroplating bath top, when contacting preset cathode bar, the clamp assembly, the moon
Pole stick will form electric current between anode and FPC substrates.
Optionally,
Carry width of the interval more than electroplating bath of chain in left and right.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
A kind of handling device based on FPC plating provided by the invention, including horizontal input mechanism, the first pose adjustment machine
Structure, chain conveyor mechanism, the second attitude-adjusting system and horizontal output mechanism；The horizontal input mechanism is used for sheet
FPC substrates are transported one by one to the first attitude-adjusting system；First attitude-adjusting system is used for the FPC under horizontality
Substrate overturning is vertical state；The chain conveyor mechanism is used for the FPC substrate transports to the second attitude-adjusting system；
Second attitude-adjusting system, the FPC substrates overturning for that will be in vertical state is horizontality, then defeated by the level
Go out mechanism output and carries out subsequent processing；The chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；Institute
It includes main body and left and right clamp to state clamp assembly, is arranged for enabling the left and right clamp between main body and left and right clamp top
The elastic component of opening and closing；The chain conveyor mechanism is described by during the FPC substrate transports to the second attitude-adjusting system
FPC substrates are immersed always in the liquid in electroplating bath, and 2-12mm spacing distances are kept between FPC substrates.In the prior art without
Method is realized the carrying of FPC substrates, and the present invention is first transported sheet FPC substrates one by one to first by horizontal input mechanism
Attitude-adjusting system, then by the first attitude-adjusting system by under horizontality FPC substrates overturning be vertical state, then by
The FPC substrate transports will be in perpendicular by chain conveyor mechanism to the second attitude-adjusting system, then by the second attitude-adjusting system
The FPC substrates overturning of straight state is horizontality, is finally exported by the horizontal output mechanism and carries out subsequent processing.Phase of the present invention
The FPC substrates realized effectively to sheet than the prior art are carried.
Further, chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；Clamp assembly includes master
The elastic component for enabling left and right clamp to be opened and closed is arranged in body and left and right clamp between main body and left and right clamp top；Chain type is transported
For transfer mechanism by during the FPC substrate transports to the second attitude-adjusting system, FPC substrates immerse the liquid in electroplating bath always
In, and 2-12mm spacing distances are kept between FPC substrates.For preferably fixing FPC substrates and controlling time of plating.
Description of the drawings
Fig. 1 is a kind of partial enlarged view of electroplanting device embodiment in the present invention；
Fig. 2 is a kind of structural schematic diagram of clamp assembly in the embodiment of the present invention；
Fig. 3 is a kind of structural schematic diagram of handling device in the embodiment of the present invention；
Fig. 4 shows for a kind of structure of the switching mechanism first embodiment of the clamp assembly of handling device in the embodiment of the present invention
It is intended to；
Fig. 5 shows for a kind of structure of the switching mechanism second embodiment of the clamp assembly of handling device in the embodiment of the present invention
It is intended to.
Specific implementation mode：
A kind of handling device based on FPC plating provided by the invention, including horizontal input mechanism, the first pose adjustment machine
Structure, chain conveyor mechanism, the second attitude-adjusting system and horizontal output mechanism；The horizontal input mechanism is used for sheet
FPC substrates are transported one by one to the first attitude-adjusting system；First attitude-adjusting system is used for the FPC under horizontality
Substrate overturning is vertical state；The chain conveyor mechanism is used for the FPC substrate transports to the second attitude-adjusting system；
Second attitude-adjusting system, the FPC substrates overturning for that will be in vertical state is horizontality, then defeated by the level
Go out mechanism output and carries out subsequent processing；The chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；Institute
It includes main body and left and right clamp to state clamp assembly, is arranged for enabling the left and right clamp between main body and left and right clamp top
The elastic component of opening and closing；The chain conveyor mechanism is described by during the FPC substrate transports to the second attitude-adjusting system
FPC substrates are immersed always in the liquid in electroplating bath, and 2-12mm spacing distances are kept between FPC substrates.In the prior art without
Method is realized the carrying of FPC substrates, and the present invention is first transported sheet FPC substrates one by one to first by horizontal input mechanism
Attitude-adjusting system, then by the first attitude-adjusting system by under horizontality FPC substrates overturning be vertical state, then by
The FPC substrate transports will be in perpendicular by chain conveyor mechanism to the second attitude-adjusting system, then by the second attitude-adjusting system
The FPC substrates overturning of straight state is horizontality, is finally exported by the horizontal output mechanism and carries out subsequent processing.Phase of the present invention
The FPC substrates realized effectively to sheet than the prior art are carried.
Further, chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；Clamp assembly includes master
The elastic component for enabling left and right clamp to be opened and closed is arranged in body and left and right clamp between main body and left and right clamp top；Chain type is transported
For transfer mechanism by during the FPC substrate transports to the second attitude-adjusting system, FPC substrates immerse the liquid in electroplating bath always
In, and 2-12mm spacing distances are kept between FPC substrates.For preferably fixing FPC substrates and controlling time of plating.
Above-mentioned handling device is illustrated with the example in concrete application below：
Handling device 70 has the clamp assembly 170 for FPC substrates to be clamped.Handling device 70 is by FPC substrates with 0.5m/
Min~3.0m/min, the preferably speed of 1.0m/min are carried.For example, carrying FPC substrates with the speed of 1.0m/min
When, the inlet portion 61 of electrolysis electroplating bath 60 is reached from the outlet portion 42 of electroless plating slot 40, needs 3 minutes.As long as 3 minutes
Left and right, even if FPC substrates are by the way that in water, electroless plating layer C will not be aoxidized.
Fig. 2 is the architectural overview of clamp assembly 170.Clamp assembly 170 is by T-shaped main body 171 and left and right clamp 172
It constitutes, the elastomeric elements such as setting spring 174 between 172 top of main body 171 and left and right clamp, left and right clamp 172 can freely openable.
The roller 175 of the upper outside installation of clamp 172 is freely rotatable, and the top installation of clamp 172 is used to be clamped
The contact portion 173 of FPC substrates can be installed or be removed or free to slide.Clamp assembly 170 is typically with the stainless steel that can be powered
At, but main body 171 can be made of reinforced plastics.Using made of reinforced plastics when main body 171, main body 171 and contact portion
173 are connected with the conductors such as copper coin and coating copper wire, can be powered.Clamp 172 bends to U-shaped with stainless steel materials.Roller
175 can be made of stainless steel, but in order to mitigate weight, preferably made of the plastic resins such as engineering plastics.Contact portion 173
(except the contact point of FPC substrates) is covered with resins such as rubber, flexible plastics.
As described above, contact portion 173 can be installed or be removed or free to slide, so as to be easy to as clamp assembly
170, width, length equidimension and the shape of corresponding FPC substrates.
Fig. 3 is the skeleton diagram of handling device 70.Handling device 70 makes the clamp assembly 170 of clamping FPC substrates move, by preceding
The left and right driven sprocket being arranged above the entrance side of processing unit 30 and above the outlet side of electrolysis electroplating bath 60 (is not marked in figure
Show) it carries chain 271 drive sprocket 71, the left and right being wound, control the multiple connecting components 272 carried and be arranged between chain 271
It constitutes (referring to Fig.1).
Clamp assembly 170 is mounted in connecting component 272.In addition, what connecting component 272 was made of metal, pass through electrolysis
When 60 top of electroplating bath, the cathode bar 69 for touching the electrolysis setting of electroplating bath 60 will be positive by clamp assembly 170, cathode bar 69
The current earthing flowed through between pole 65 and FPC substrates to outside.
The interval that chain 271 is carried in left and right can be more than the width for being electrolysed electroplating bath 60.In the position setting carry chain 271 it
Afterwards, it is carried on chain 271 even if the foreign matters such as dust, metal powder, grease are fallen to, the plating of electrolysis electroplating bath 60 will not be mixed into
Liquid.
Fig. 5 is the skeleton diagram of the switching mechanism 275 of the clamp assembly 170 in handling device 70.
Illustrate to be electrolysed the switching mechanism 275 for being used to open in electroplating bath 60 and closing clamp assembly 170 at this.Electroless plating
Slot 40, pre-treatment portion 30, washing portion 50 rinsing bowl can also have identical structure.
Switching mechanism 275 is by " roller 175 with clamp assembly 170 is arranged substantially in sustained height along carry direction
Left and right rail 276 " is constituted.Guide rail 276 forms the bending section 276A of bending in the designated position of electrolysis electroplating bath 60, to reduce a left side
Right septum.When the roller 175 of mobile clamp assembly 170 is adjacent to bending section 276A, it can be more than the elastic force of spring 174, open
Clamp 172 unclamps FPC substrates.Moreover, after clamp assembly 170 passes through bending section 276A, due to the elastic force of spring 174, again
Clamp is closed, FPC substrates are clamped.Such switching mechanism 275 can arbitrarily set the opened and closed positions of clamp assembly 170.But
In above-mentioned implementation form, switching mechanism 275 makes guide rail 276 be bent, and forms bending section 276A, but as shown in figure 5, switching mechanism
275 can be made of linear guide rail 277 and bending part 278.Such bending part 278 can be in addition opening and closing later
Position.
It is apparent to those skilled in the art that for convenience and simplicity of description, the device of foregoing description
Specific work process, can refer to corresponding processes in the foregoing method embodiment, details are not described herein.Provided herein
Several embodiments in, it should be understood that disclosed device may be implemented in other ways.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, it will be understood by those of ordinary skill in the art that：It still can be to aforementioned each implementation
Technical solution recorded in example is modified or equivalent replacement of some of the technical features；And these modification or
It replaces, the spirit and scope for various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of handling device based on FPC plating, which is characterized in that including：
Horizontal input mechanism, the first attitude-adjusting system, chain conveyor mechanism, the second attitude-adjusting system and horizontal output machine
Structure；
The horizontal input mechanism, for being transported the FPC substrates of sheet one by one to the first attitude-adjusting system；
First attitude-adjusting system, for being vertical state by the FPC substrates overturning under horizontality；
The chain conveyor mechanism is used for the FPC substrate transports to the second attitude-adjusting system；
Second attitude-adjusting system, the FPC substrates overturning for that will be in vertical state is horizontality, then by the water
Flat output mechanism output carries out subsequent processing；
The chain conveyor mechanism further includes the clamp assembly for clamping the FPC substrates；
The clamp assembly includes main body and left and right clamp, and setting is for making the left and right folder between main body and left and right clamp top
Clamp the elastic component that can be opened and closed；
The chain conveyor mechanism is by during the FPC substrate transports to the second attitude-adjusting system, and the FPC substrates are always
It immerses in the liquid in electroplating bath, and keeps 2-12mm spacing distances between FPC substrates.
2. the handling device according to claim 1 based on FPC plating, it is characterised in that：
The clamp assembly is made of stainless steel.
3. the handling device according to claim 1 based on FPC plating, it is characterised in that：
The left and right clamp bends to U-shaped with stainless steel materials.
4. the handling device according to any one of claim 1 to 3 based on FPC plating, it is characterised in that：
The upper outside of the left and right clamp installs the roller that can be rotated；
The chain conveyor mechanism further includes switching mechanism；
The switching mechanism includes：Along the left and right rail that carry direction is arranged, for making the roller of the clamp assembly in institute
It states and moves between left and right rail；
The left and right rail forms the bending section of bending in the precalculated position of coating bath, and the bending section makes between left and right rail
Distance reduces, and after so that the roller is entered bending section, left and right clamp upper end generates opposite active force, and compressed spring, leads
Left and right clamp lower end is caused to open.
5. the handling device according to claim 4 based on FPC plating, it is characterised in that：
The top of the left and right clamp is removably equipped with the contact portion for contacting FPC substrates.
6. the handling device according to claim 5 based on FPC plating, it is characterised in that：
The contact portion is slidably connected with the left and right clamp.
7. the handling device according to claim 5 based on FPC plating, it is characterised in that：
The main body is made of reinforced plastics；
Main body is connected with contact portion copper coin and coating copper conductors；
Roller is made of stainless steel or is made of plastic resins such as engineering plastics；
Contact portion is covered other than with PFC substrates contact site with rubber, flexible plastic or resin.
8. the handling device according to any one of claim 1 to 3 based on FPC plating, it is characterised in that：
The chain conveyor mechanism further includes：Left and right driven sprocket, drive sprocket, the left and right carrying chain being wound, left and right are carried
The multiple connecting components being arranged between chain；
The clamp assembly is mounted in the connecting component.
9. the handling device according to claim 8 based on FPC plating, it is characterised in that：
Connecting component is made of metal, by above electroplating bath, when contacting preset cathode bar, the clamp assembly, cathode bar,
Electric current will be formed between anode and FPC substrates.
10. the handling device according to claim 8 based on FPC plating, it is characterised in that：
Carry width of the interval more than electroplating bath of chain in the left and right.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710208470.0A CN108657818B (en) | 2017-03-31 | 2017-03-31 | Conveying device based on FPC electroplating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710208470.0A CN108657818B (en) | 2017-03-31 | 2017-03-31 | Conveying device based on FPC electroplating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108657818A true CN108657818A (en) | 2018-10-16 |
| CN108657818B CN108657818B (en) | 2024-04-26 |
Family
ID=63783698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710208470.0A Active CN108657818B (en) | 2017-03-31 | 2017-03-31 | Conveying device based on FPC electroplating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108657818B (en) |
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|---|---|---|---|---|
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| JP2008177340A (en) * | 2007-01-18 | 2008-07-31 | Asyst Technologies Japan Inc | Ceiling running transfer apparatus |
| CN101372754A (en) * | 2007-08-20 | 2009-02-25 | 株式会社荏原制作所 | Conducting belt for use with anode holder and anode holder |
| TW201020194A (en) * | 2008-09-12 | 2010-06-01 | Dainippon Screen Mfg | Substrate processing apparatus and substrate conveying apparatus for use in the same |
| CN102888647A (en) * | 2010-10-21 | 2013-01-23 | 株式会社荏原制作所 | Plating device and plating method |
| CN103374745A (en) * | 2012-04-28 | 2013-10-30 | 丸仲工业株式会社 | Clamping fixture for horizontally conveying thin-plate-shaped processed objects in electroplating processing device |
| US20150357213A1 (en) * | 2014-06-09 | 2015-12-10 | Ebara Corporation | Substrate attaching/detaching unit for substrate holder, wet-type substrate processing apparatus including the same, substrate holder conveying method, substrate processing apparatus, and substrate conveying method |
| CN206624419U (en) * | 2017-03-31 | 2017-11-10 | 可能可特科技（深圳）有限公司 | A kind of handling device based on FPC plating |
-
2017
- 2017-03-31 CN CN201710208470.0A patent/CN108657818B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1647245A (en) * | 2002-04-12 | 2005-07-27 | 西门子公司 | Device and method for positioning a plate-type substrate |
| JP2006327723A (en) * | 2005-05-24 | 2006-12-07 | Fukui Kogyo Kk | Electro-plating treatment system |
| JP2008177340A (en) * | 2007-01-18 | 2008-07-31 | Asyst Technologies Japan Inc | Ceiling running transfer apparatus |
| CN101372754A (en) * | 2007-08-20 | 2009-02-25 | 株式会社荏原制作所 | Conducting belt for use with anode holder and anode holder |
| TW201020194A (en) * | 2008-09-12 | 2010-06-01 | Dainippon Screen Mfg | Substrate processing apparatus and substrate conveying apparatus for use in the same |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108657818B (en) | 2024-04-26 |
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