CN106048674B - 铜箔表面处理镍-磷电镀液中亚磷酸根、磷酸根去除方法 - Google Patents
铜箔表面处理镍-磷电镀液中亚磷酸根、磷酸根去除方法 Download PDFInfo
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- CN106048674B CN106048674B CN201610633007.6A CN201610633007A CN106048674B CN 106048674 B CN106048674 B CN 106048674B CN 201610633007 A CN201610633007 A CN 201610633007A CN 106048674 B CN106048674 B CN 106048674B
- Authority
- CN
- China
- Prior art keywords
- plating solution
- phosphorous acid
- phosphor
- nickel
- phosphate radical
- Prior art date
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- 229910019142 PO4 Inorganic materials 0.000 title claims abstract description 33
- 239000010452 phosphate Substances 0.000 title claims abstract description 33
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 title claims abstract description 24
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 239000007788 liquid Substances 0.000 title claims abstract description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 239000011889 copper foil Substances 0.000 title claims abstract description 10
- 238000007747 plating Methods 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 16
- 239000000956 alloy Substances 0.000 claims abstract description 14
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 14
- 238000003756 stirring Methods 0.000 claims abstract description 12
- 238000002156 mixing Methods 0.000 claims description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 4
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims description 2
- 150000002505 iron Chemical class 0.000 abstract description 10
- 230000001376 precipitating effect Effects 0.000 abstract description 7
- 239000003153 chemical reaction reagent Substances 0.000 abstract description 6
- BZWGENDDUSTHIR-UHFFFAOYSA-N iron phosphorous acid Chemical compound [Fe].P(O)(O)O BZWGENDDUSTHIR-UHFFFAOYSA-N 0.000 abstract description 6
- 239000006174 pH buffer Substances 0.000 abstract description 5
- 239000005955 Ferric phosphate Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 229940032958 ferric phosphate Drugs 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 abstract description 4
- WBJZTOZJJYAKHQ-UHFFFAOYSA-K iron(3+) phosphate Chemical compound [Fe+3].[O-]P([O-])([O-])=O WBJZTOZJJYAKHQ-UHFFFAOYSA-K 0.000 abstract description 4
- 229910000399 iron(III) phosphate Inorganic materials 0.000 abstract description 4
- 239000002244 precipitate Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000012535 impurity Substances 0.000 abstract description 2
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 5
- 229910001447 ferric ion Inorganic materials 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000872 buffer Substances 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RFGNMWINQUUNKG-UHFFFAOYSA-N iron phosphoric acid Chemical compound [Fe].OP(O)(O)=O RFGNMWINQUUNKG-UHFFFAOYSA-N 0.000 description 2
- -1 phosphate anion Chemical class 0.000 description 2
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical class O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000001506 calcium phosphate Substances 0.000 description 1
- 229910000389 calcium phosphate Inorganic materials 0.000 description 1
- 235000011010 calcium phosphates Nutrition 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229960004887 ferric hydroxide Drugs 0.000 description 1
- GQZXNSPRSGFJLY-UHFFFAOYSA-N hydroxyphosphanone Chemical compound OP=O GQZXNSPRSGFJLY-UHFFFAOYSA-N 0.000 description 1
- 229940005631 hypophosphite ion Drugs 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- IEECXTSVVFWGSE-UHFFFAOYSA-M iron(3+);oxygen(2-);hydroxide Chemical compound [OH-].[O-2].[Fe+3] IEECXTSVVFWGSE-UHFFFAOYSA-M 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/562—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of iron or nickel or cobalt
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/06—Filtering particles other than ions
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/16—Regeneration of process solutions
- C25D21/18—Regeneration of process solutions of electrolytes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
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CN201610633007.6A CN106048674B (zh) | 2016-08-04 | 2016-08-04 | 铜箔表面处理镍-磷电镀液中亚磷酸根、磷酸根去除方法 |
Applications Claiming Priority (1)
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CN201610633007.6A CN106048674B (zh) | 2016-08-04 | 2016-08-04 | 铜箔表面处理镍-磷电镀液中亚磷酸根、磷酸根去除方法 |
Publications (2)
Publication Number | Publication Date |
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CN106048674A CN106048674A (zh) | 2016-10-26 |
CN106048674B true CN106048674B (zh) | 2019-01-15 |
Family
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Family Applications (1)
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CN201610633007.6A Active CN106048674B (zh) | 2016-08-04 | 2016-08-04 | 铜箔表面处理镍-磷电镀液中亚磷酸根、磷酸根去除方法 |
Country Status (1)
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CN (1) | CN106048674B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI818791B (zh) * | 2022-11-02 | 2023-10-11 | 環球晶圓股份有限公司 | 化學鍍鎳液之處理系統及處理方法 |
Families Citing this family (1)
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---|---|---|---|---|
CN114002205B (zh) * | 2021-11-12 | 2024-04-26 | 上海太洋科技有限公司 | 光学级磷酸二氢钙中杂质元素含量的测定方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5531181A (en) * | 1978-08-28 | 1980-03-05 | Nippon Columbia Co Ltd | Nickel alloy plating solution |
CN102329030A (zh) * | 2011-09-06 | 2012-01-25 | 冯云香 | 化学镀镍废水处理方法 |
CN102616961A (zh) * | 2012-03-29 | 2012-08-01 | 李朝林 | 一种降解化学镀镍废液中有机污染物并回收磷酸盐的方法 |
CN104876200A (zh) * | 2015-04-21 | 2015-09-02 | 深圳市世清环保科技有限公司 | 从化学镀镍废液中回收磷资源的方法 |
CN104988574A (zh) * | 2015-07-29 | 2015-10-21 | 山东大学 | 一种新型清洁电镀Ni-W-P镀液的循环利用方法 |
-
2016
- 2016-08-04 CN CN201610633007.6A patent/CN106048674B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5531181A (en) * | 1978-08-28 | 1980-03-05 | Nippon Columbia Co Ltd | Nickel alloy plating solution |
CN102329030A (zh) * | 2011-09-06 | 2012-01-25 | 冯云香 | 化学镀镍废水处理方法 |
CN102616961A (zh) * | 2012-03-29 | 2012-08-01 | 李朝林 | 一种降解化学镀镍废液中有机污染物并回收磷酸盐的方法 |
CN104876200A (zh) * | 2015-04-21 | 2015-09-02 | 深圳市世清环保科技有限公司 | 从化学镀镍废液中回收磷资源的方法 |
CN104988574A (zh) * | 2015-07-29 | 2015-10-21 | 山东大学 | 一种新型清洁电镀Ni-W-P镀液的循环利用方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI818791B (zh) * | 2022-11-02 | 2023-10-11 | 環球晶圓股份有限公司 | 化學鍍鎳液之處理系統及處理方法 |
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GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Jian Zhichao Inventor after: Li Yong Inventor after: Huang Yongfa Inventor after: Zhao Chen Inventor after: Peng Yongzhong Inventor after: Wu Xiaojie Inventor after: Guo Ligong Inventor after: Liu Haidan Inventor before: Jian Zhichao Inventor before: Li Yong Inventor before: Huang Yongfa Inventor before: Zhao Chen Inventor before: Peng Yongzhong Inventor before: Wu Xiaojie Inventor before: Guo Ligong Inventor before: Liu Haidan |
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CP02 | Change in the address of a patent holder |
Address after: 335400 No. 15 metallurgical Avenue, Yingtan, Jiangxi, Guixi Patentee after: JIANGXI COPPER Corp. Address before: 335424 No. 28 metallurgy North Road, Yingtan City, Jiangxi, Guixi Patentee before: JIANGXI COPPER Corp. |
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TR01 | Transfer of patent right |
Effective date of registration: 20210226 Address after: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: JIANGXI COPPER YATES FOIL Inc. Address before: No.15 metallurgical Avenue, Guixi City, Yingtan City, Jiangxi Province, 335400 Patentee before: JIANGXI COPPER Corp. |
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TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: Jiangxi Jiangxi Jiangxi Copper Foil Technology Co.,Ltd. Address before: 330000 No. 1129, Gaoxin Avenue, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee before: JIANGXI COPPER YATES FOIL Inc. |
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