CN105984225B - 电子装置以及电子装置的制造方法 - Google Patents
电子装置以及电子装置的制造方法 Download PDFInfo
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- CN105984225B CN105984225B CN201610153901.3A CN201610153901A CN105984225B CN 105984225 B CN105984225 B CN 105984225B CN 201610153901 A CN201610153901 A CN 201610153901A CN 105984225 B CN105984225 B CN 105984225B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
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- 238000003860 storage Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims description 25
- 238000007789 sealing Methods 0.000 abstract description 34
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- 239000007788 liquid Substances 0.000 description 19
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 19
- 238000004891 communication Methods 0.000 description 9
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- 238000005192 partition Methods 0.000 description 9
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- 239000003566 sealing material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
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- 238000004544 sputter deposition Methods 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
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- 239000004925 Acrylic resin Substances 0.000 description 1
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
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- 230000004308 accommodation Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
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- 229910052797 bismuth Inorganic materials 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
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- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- -1 iridium (Ir) Chemical class 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
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- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14362—Assembling elements of heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015057123A JP6477090B2 (ja) | 2015-03-20 | 2015-03-20 | 電子デバイス、および、電子デバイスの製造方法 |
| JP2015-057123 | 2015-03-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105984225A CN105984225A (zh) | 2016-10-05 |
| CN105984225B true CN105984225B (zh) | 2018-08-03 |
Family
ID=55442683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610153901.3A Active CN105984225B (zh) | 2015-03-20 | 2016-03-17 | 电子装置以及电子装置的制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9744764B2 (enExample) |
| EP (1) | EP3069879A1 (enExample) |
| JP (1) | JP6477090B2 (enExample) |
| CN (1) | CN105984225B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6432737B2 (ja) * | 2015-03-04 | 2018-12-05 | セイコーエプソン株式会社 | Ｍｅｍｓデバイス、ヘッド及び液体噴射装置 |
| JP6613717B2 (ja) * | 2015-08-25 | 2019-12-04 | セイコーエプソン株式会社 | 電子デバイス、液体噴射ヘッド、および、電子デバイスの製造方法 |
| JP6926647B2 (ja) * | 2017-05-09 | 2021-08-25 | セイコーエプソン株式会社 | 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器 |
| JP7487473B2 (ja) * | 2019-12-26 | 2024-05-21 | セイコーエプソン株式会社 | 圧電デバイス、及びｍｅｍｓデバイス |
| JP7578000B2 (ja) * | 2021-01-07 | 2024-11-06 | セイコーエプソン株式会社 | 液体噴射ヘッド、及び記録装置 |
| JP7718256B2 (ja) * | 2021-12-03 | 2025-08-05 | セイコーエプソン株式会社 | 液体吐出ヘッド、及び液体吐出装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3238674B2 (ja) * | 1999-04-21 | 2001-12-17 | 松下電器産業株式会社 | インクジェットヘッド及びその製造方法並びにインクジェット式記録装置 |
| JP4075317B2 (ja) * | 2001-04-11 | 2008-04-16 | 富士ゼロックス株式会社 | インクジェット記録ヘッド及びインクジェット記録装置 |
| US7340831B2 (en) * | 2003-07-18 | 2008-03-11 | Canon Kabushiki Kaisha | Method for making liquid discharge head |
| JP4366568B2 (ja) * | 2003-08-04 | 2009-11-18 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP4631572B2 (ja) * | 2005-07-14 | 2011-02-16 | セイコーエプソン株式会社 | 液滴吐出ヘッド |
| JP2013144360A (ja) * | 2010-04-20 | 2013-07-25 | Konica Minolta Inc | インクジェット式記録ヘッド |
| CN102555478B (zh) * | 2010-12-28 | 2015-06-17 | 精工爱普生株式会社 | 液体喷射头和液体喷射装置以及压电元件 |
| JP2013095088A (ja) * | 2011-11-02 | 2013-05-20 | Konica Minolta Holdings Inc | インクジェットヘッドおよびその製造方法と、インクジェット描画装置 |
| TWI511886B (zh) * | 2011-11-18 | 2015-12-11 | Canon Kk | 液體排出裝置 |
| JP6044200B2 (ja) * | 2012-09-06 | 2016-12-14 | ブラザー工業株式会社 | 液体噴射装置 |
| JP5983252B2 (ja) * | 2012-09-28 | 2016-08-31 | ブラザー工業株式会社 | 液体吐出装置、基板の接続構造、及び、液体吐出装置の製造方法 |
| JP6119325B2 (ja) * | 2013-03-14 | 2017-04-26 | セイコーエプソン株式会社 | 干渉フィルター、干渉フィルターの製造方法、光学モジュール、電子機器、及び接合基板 |
-
2015
- 2015-03-20 JP JP2015057123A patent/JP6477090B2/ja active Active
-
2016
- 2016-02-25 EP EP16157279.7A patent/EP3069879A1/en not_active Withdrawn
- 2016-03-09 US US15/065,599 patent/US9744764B2/en active Active
- 2016-03-17 CN CN201610153901.3A patent/CN105984225B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3069879A1 (en) | 2016-09-21 |
| CN105984225A (zh) | 2016-10-05 |
| JP6477090B2 (ja) | 2019-03-06 |
| US9744764B2 (en) | 2017-08-29 |
| JP2016175274A (ja) | 2016-10-06 |
| US20160271944A1 (en) | 2016-09-22 |
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