CN105980495B - 控制基底表面能的方法 - Google Patents

控制基底表面能的方法 Download PDF

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Publication number
CN105980495B
CN105980495B CN201580008266.3A CN201580008266A CN105980495B CN 105980495 B CN105980495 B CN 105980495B CN 201580008266 A CN201580008266 A CN 201580008266A CN 105980495 B CN105980495 B CN 105980495B
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CN
China
Prior art keywords
substrate
blend
copolymers
copolymer
block copolymer
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Expired - Fee Related
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CN201580008266.3A
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English (en)
Chinese (zh)
Other versions
CN105980495A (zh
Inventor
C.纳瓦罗
C.尼科利特
X.希瓦利埃
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Arkema France SA
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Arkema France SA
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F297/00—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer
    • C08F297/02—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type
    • C08F297/026—Macromolecular compounds obtained by successively polymerising different monomer systems using a catalyst of the ionic or coordination type without deactivating the intermediate polymer using a catalyst of the anionic type polymerising acrylic acid, methacrylic acid or derivatives thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00206—Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00—Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147—Film patterning
    • B81C2201/0149—Forming nanoscale microstructures using auto-arranging or self-assembling material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Wood Science & Technology (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Paints Or Removers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Graft Or Block Polymers (AREA)
CN201580008266.3A 2014-02-11 2015-02-06 控制基底表面能的方法 Expired - Fee Related CN105980495B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1451062A FR3017395B1 (fr) 2014-02-11 2014-02-11 Procede de controle de l'energie de surface d'un substrat
FRFR1451062 2014-02-11
PCT/FR2015/050285 WO2015121568A1 (fr) 2014-02-11 2015-02-06 Procede de controle de l'energie de surface d'un substrat

Publications (2)

Publication Number Publication Date
CN105980495A CN105980495A (zh) 2016-09-28
CN105980495B true CN105980495B (zh) 2018-12-25

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Family Applications (1)

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CN201580008266.3A Expired - Fee Related CN105980495B (zh) 2014-02-11 2015-02-06 控制基底表面能的方法

Country Status (10)

Country Link
US (1) US20160369031A1 (enExample)
EP (1) EP3105295B1 (enExample)
JP (1) JP6411529B2 (enExample)
KR (1) KR101876108B1 (enExample)
CN (1) CN105980495B (enExample)
ES (1) ES2731577T3 (enExample)
FR (1) FR3017395B1 (enExample)
SG (1) SG11201606659YA (enExample)
TW (1) TWI596058B (enExample)
WO (1) WO2015121568A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120863178B (zh) * 2025-09-26 2025-12-05 绍兴金阳纺织有限公司 一种航空机舱用阻燃型多层复合面料及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200906709A (en) * 2007-04-20 2009-02-16 Micron Technology Inc Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method
CN101978469A (zh) * 2008-03-21 2011-02-16 美光科技公司 具有受限于以均等优先湿润两嵌段的上界面的嵌段共聚物膜的热退火

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2679237B1 (fr) 1991-07-19 1994-07-22 Atochem Systeme d'amorcage pour la polymerisation anionique de monomeres (meth) acryliques.
FR2735480B1 (fr) 1995-06-15 1997-07-18 Atochem Elf Sa Procede de polymerisation anionique en continu d'au moins un monomere (meth)acrylique pour l'obtention de polymeres a haut taux de solide
CA2245413C (en) * 1997-09-16 2001-09-18 Thomas & Betts International, Inc. Conductive elastomer for grafting to an elastic substrate
US6673161B2 (en) 2001-07-03 2004-01-06 Brooks Automation, Inc. Substrate handling end effector
US7446149B2 (en) * 2001-09-27 2008-11-04 Basf Corporation Fast drying clearcoat refinish composition
JP4924424B2 (ja) * 2005-06-03 2012-04-25 ダイキン工業株式会社 フォトリソグラフィー用電磁波硬化組成物
JP4698347B2 (ja) * 2005-09-08 2011-06-08 富士フイルム株式会社 転写材料、それを用いたカラーフィルタの製造方法及びカラーフィルタ、ならびに液晶表示装置
JP5136999B2 (ja) * 2005-11-18 2013-02-06 国立大学法人京都大学 パターン基板の製造方法、パターン転写体、磁気記録用パターン媒体、及び高分子薄膜
US8012567B2 (en) * 2006-01-12 2011-09-06 3M Innovative Properties Company Light-collimating film
US8647814B2 (en) * 2006-05-24 2014-02-11 Northwestern University Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials
JP4673266B2 (ja) * 2006-08-03 2011-04-20 日本電信電話株式会社 パターン形成方法及びモールド
US7763319B2 (en) * 2008-01-11 2010-07-27 International Business Machines Corporation Method of controlling orientation of domains in block copolymer films
JP4654280B2 (ja) * 2008-08-28 2011-03-16 株式会社日立製作所 微細構造体の製造方法
US8362179B2 (en) * 2008-11-19 2013-01-29 Wisconsin Alumni Research Foundation Photopatternable imaging layers for controlling block copolymer microdomain orientation
WO2011100029A1 (en) * 2010-02-12 2011-08-18 Exxonmobil Oil Corporation Coated polymeric film
TWI556958B (zh) * 2010-09-14 2016-11-11 東京應化工業股份有限公司 基質劑及含嵌段共聚物之層的圖型形成方法
US8710150B2 (en) * 2012-02-10 2014-04-29 Rohm And Haas Electronic Materials Llc Blended block copolymer composition
US8513356B1 (en) * 2012-02-10 2013-08-20 Dow Global Technologies Llc Diblock copolymer blend composition
US8697810B2 (en) * 2012-02-10 2014-04-15 Rohm And Haas Electronic Materials Llc Block copolymer and methods relating thereto
US9127113B2 (en) * 2012-05-16 2015-09-08 Rohm And Haas Electronic Materials Llc Polystyrene-polyacrylate block copolymers, methods of manufacture thereof and articles comprising the same
US10280328B2 (en) * 2012-12-18 2019-05-07 Nissan Chemical Industries, Ltd. Bottom layer film-forming composition of self-organizing film containing styrene structure
JP5640099B2 (ja) * 2013-01-07 2014-12-10 株式会社日立製作所 微細構造を有する高分子薄膜およびパターン基板の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200906709A (en) * 2007-04-20 2009-02-16 Micron Technology Inc Extensions of self-assembled structures to increased dimensions via a "bootstrap" self-templating method
CN101978469A (zh) * 2008-03-21 2011-02-16 美光科技公司 具有受限于以均等优先湿润两嵌段的上界面的嵌段共聚物膜的热退火

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Preparation of Neutral Wetting Brushes for Block Copolymer;Shengxiang Ji等;《Advanced Material》;20080707;第20卷(第16期);第3054-3060页 *

Also Published As

Publication number Publication date
WO2015121568A1 (fr) 2015-08-20
US20160369031A1 (en) 2016-12-22
CN105980495A (zh) 2016-09-28
TW201600452A (zh) 2016-01-01
KR20160119174A (ko) 2016-10-12
FR3017395A1 (fr) 2015-08-14
JP6411529B2 (ja) 2018-10-24
EP3105295A1 (fr) 2016-12-21
EP3105295B1 (fr) 2019-03-27
FR3017395B1 (fr) 2017-11-03
ES2731577T3 (es) 2019-11-18
KR101876108B1 (ko) 2018-07-06
JP2017506684A (ja) 2017-03-09
SG11201606659YA (en) 2016-09-29
TWI596058B (zh) 2017-08-21

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Granted publication date: 20181225