CN105874095A - 沉积装置、沉积设备及其操作方法 - Google Patents

沉积装置、沉积设备及其操作方法 Download PDF

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Publication number
CN105874095A
CN105874095A CN201380081379.7A CN201380081379A CN105874095A CN 105874095 A CN105874095 A CN 105874095A CN 201380081379 A CN201380081379 A CN 201380081379A CN 105874095 A CN105874095 A CN 105874095A
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CN
China
Prior art keywords
chamber
substrate
gas
line
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380081379.7A
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English (en)
Chinese (zh)
Inventor
乌韦·许斯勒
斯蒂芬·班格特
卡尔·阿尔伯特·凯姆
乔斯·曼纽尔·迭格斯-坎波
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Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to CN202010001262.5A priority Critical patent/CN111441015A/zh
Publication of CN105874095A publication Critical patent/CN105874095A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0064—Feeding of liquid into an evaporator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0082—Regulation; Control
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details specially adapted for crucible or pot furnaces
    • F27B14/20—Arrangement of controlling, monitoring, alarm or like devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0028—Regulation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
CN201380081379.7A 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法 Pending CN105874095A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010001262.5A CN111441015A (zh) 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2013/075850 WO2015082022A1 (en) 2013-12-06 2013-12-06 Depositing arrangement, deposition apparatus and methods of operation thereof

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202010001262.5A Division CN111441015A (zh) 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法

Publications (1)

Publication Number Publication Date
CN105874095A true CN105874095A (zh) 2016-08-17

Family

ID=49886884

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202010001262.5A Pending CN111441015A (zh) 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法
CN201380081379.7A Pending CN105874095A (zh) 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN202010001262.5A Pending CN111441015A (zh) 2013-12-06 2013-12-06 沉积装置、沉积设备及其操作方法

Country Status (7)

Country Link
US (1) US20170022598A1 (enExample)
EP (1) EP3077567B1 (enExample)
JP (1) JP6647202B2 (enExample)
KR (1) KR102137181B1 (enExample)
CN (2) CN111441015A (enExample)
TW (1) TWI652363B (enExample)
WO (1) WO2015082022A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108248037A (zh) * 2016-12-28 2018-07-06 精工爱普生株式会社 液体喷出装置、控制方法以及记录介质
CN113169312A (zh) * 2018-12-12 2021-07-23 应用材料公司 悬跨涂覆系统和方法
CN115279935A (zh) * 2020-03-26 2022-11-01 应用材料公司 蒸发源、具有蒸发源的沉积设备及其方法
CN116670321A (zh) * 2021-01-15 2023-08-29 应用材料公司 用于提供液化材料的设备、用于配量液化材料的配量系统及方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110621803B (zh) * 2018-04-18 2022-07-12 应用材料公司 用于沉积已蒸发材料于基板上的蒸发源、沉积设备、用于测量已蒸发材料的蒸汽压力的方法、及用于确定已蒸发材料的蒸发率的方法
WO2020251696A1 (en) 2019-06-10 2020-12-17 Applied Materials, Inc. Processing system for forming layers
US11624113B2 (en) * 2019-09-13 2023-04-11 Asm Ip Holding B.V. Heating zone separation for reactant evaporation system
CN113302332B (zh) * 2019-10-21 2023-09-08 株式会社爱发科 成膜装置
KR102859881B1 (ko) * 2020-11-18 2025-09-12 주식회사 엘지화학 유기발광다이오드의 증착장치
RU2765222C1 (ru) * 2020-12-30 2022-01-26 Тхе Баттериес Сп. з о.о. Способ формирования пленки LiCoO2 и устройство для его реализации
CN113215535B (zh) * 2021-05-21 2022-11-22 泊肃叶科技(沈阳)有限公司 一种蒸发速率智能可调的蒸发镀膜机
CN120548781A (zh) * 2022-10-28 2025-08-26 提升材料德国有限公司 多孔介质蒸发器
CN119651320A (zh) * 2023-09-15 2025-03-18 中国科学院大连化学物理研究所 一种大流量碱金属原子蒸气生产装置

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US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
US5372754A (en) * 1992-03-03 1994-12-13 Lintec Co., Ltd. Liquid vaporizer/feeder
US5492724A (en) * 1994-02-22 1996-02-20 Osram Sylvania Inc. Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
WO1999016929A1 (en) * 1997-09-26 1999-04-08 Advanced Technology Materials, Inc. Liquid reagent delivery system
CN101911253A (zh) * 2008-01-31 2010-12-08 应用材料股份有限公司 闭环mocvd沉积控制
WO2013143692A1 (en) * 2012-03-30 2013-10-03 Tata Steel Nederland Technology B.V. Method and apparatus for feeding liquid metal to an evaporator device

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US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
US5372754A (en) * 1992-03-03 1994-12-13 Lintec Co., Ltd. Liquid vaporizer/feeder
US5492724A (en) * 1994-02-22 1996-02-20 Osram Sylvania Inc. Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
WO1999016929A1 (en) * 1997-09-26 1999-04-08 Advanced Technology Materials, Inc. Liquid reagent delivery system
CN101911253A (zh) * 2008-01-31 2010-12-08 应用材料股份有限公司 闭环mocvd沉积控制
WO2013143692A1 (en) * 2012-03-30 2013-10-03 Tata Steel Nederland Technology B.V. Method and apparatus for feeding liquid metal to an evaporator device

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108248037A (zh) * 2016-12-28 2018-07-06 精工爱普生株式会社 液体喷出装置、控制方法以及记录介质
CN108248037B (zh) * 2016-12-28 2020-03-27 精工爱普生株式会社 液体喷出装置、控制方法以及记录介质
CN113169312A (zh) * 2018-12-12 2021-07-23 应用材料公司 悬跨涂覆系统和方法
CN115279935A (zh) * 2020-03-26 2022-11-01 应用材料公司 蒸发源、具有蒸发源的沉积设备及其方法
CN116670321A (zh) * 2021-01-15 2023-08-29 应用材料公司 用于提供液化材料的设备、用于配量液化材料的配量系统及方法

Also Published As

Publication number Publication date
KR20160095091A (ko) 2016-08-10
EP3077567B1 (en) 2021-02-24
KR102137181B1 (ko) 2020-08-13
CN111441015A (zh) 2020-07-24
US20170022598A1 (en) 2017-01-26
JP6647202B2 (ja) 2020-02-14
JP2016540892A (ja) 2016-12-28
TWI652363B (zh) 2019-03-01
TW201522681A (zh) 2015-06-16
WO2015082022A1 (en) 2015-06-11
EP3077567A1 (en) 2016-10-12

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Application publication date: 20160817