CN105745764B - 用于太阳能电池和其他半导体装置的钝化的方法、设备和系统 - Google Patents
用于太阳能电池和其他半导体装置的钝化的方法、设备和系统 Download PDFInfo
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Classifications
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H01L31/02—Details
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- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
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- H01L31/02—Details
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- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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US61/929,906 | 2014-01-21 | ||
PCT/US2014/055933 WO2015039128A2 (en) | 2013-09-16 | 2014-09-16 | Methods, apparatus, and systems for passivation of solar cells and other semiconductor devices |
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US10619097B2 (en) * | 2014-06-30 | 2020-04-14 | Specmat, Inc. | Low-[HF] room temperature wet chemical growth (RTWCG) chemical formulation |
CN105576074A (zh) * | 2014-10-08 | 2016-05-11 | 上海神舟新能源发展有限公司 | 一种n型双面电池的湿法刻蚀方法 |
US9972513B2 (en) * | 2016-03-07 | 2018-05-15 | Shibaura Mechatronics Corporation | Device and method for treating a substrate with hydrofluoric and nitric acid |
JP6746187B2 (ja) * | 2016-11-02 | 2020-08-26 | 株式会社カネカ | 太陽電池の製造方法 |
JP7088487B2 (ja) * | 2018-02-20 | 2022-06-21 | 日清紡メカトロニクス株式会社 | 太陽電池モジュールの寿命予測方法 |
CN109216473B (zh) | 2018-07-20 | 2019-10-11 | 常州大学 | 一种晶硅太阳电池的表界面钝化层及其钝化方法 |
CN111129171B (zh) * | 2019-12-31 | 2022-03-04 | 横店集团东磁股份有限公司 | 一种用于碱抛的掩盖膜及其制备方法 |
CN115117207B (zh) * | 2021-03-22 | 2023-12-22 | 浙江爱旭太阳能科技有限公司 | Hjt电池钝化方法、hjt电池及其组件 |
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Also Published As
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WO2015039128A3 (en) | 2015-11-12 |
EP3047524B1 (de) | 2020-11-04 |
WO2015039128A2 (en) | 2015-03-19 |
CN105745764A (zh) | 2016-07-06 |
EP3047524A2 (de) | 2016-07-27 |
US10217893B2 (en) | 2019-02-26 |
US20160233374A1 (en) | 2016-08-11 |
EP3047524A4 (de) | 2017-05-31 |
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