CN105729981A - Stripping method and stripping apparatus - Google Patents

Abstract

The present invention relates to a stripping method and a stripping apparatus. A retaining mechanism of the present invention retains a joint-seal body through retaining a first plate-shaped body and enables an abutting member to abut against a second plate-like body. The retaining mechanism is driven to move in linkage with the abutting member along the stripping direction movement. A plurality of stripping mechanisms arranged along the stripping direction parallel to the main plane of the joint-seal body are configured to sequentially retain the second plate-like body so as to enable the second plate-like body to move along a direction getting away from the first plate-like body. In this way, the second plate-like body and the first plate-like body are stripped to be separated. The movement starting sequence of all the stripping mechanisms is determined based on the time sequence of the opposite positions of the abutting member relative to each stripping mechanism during the actual measurement process.

Description

Stripping means and stripping off device

Technical field

The present invention relates to stripping means and stripping off device that a kind of two panels plate body made directly or mutually touch is peeled off across thin layer.

Background technology

As the technology forming specific pattern or thin film on the plate body such as glass substrate or semiconductor substrate, have and will support the technology being transferred to substrate in the pattern of other plate bodys or thin film (hereinafter referred to as " pattern etc. ").In the art, it is necessary to make two panels plate body contiguity and by pattern etc. from wherein a piece of be transferred to another sheet after, do not damage pattern etc. and two panels plate body can be peeled off.

As in order to realize this purpose and available technology, there is the technology recorded in such as patent documentation 1.In the art, comprise the first plate body of contiguity and the contiguity body of the second plate body mutually to be maintained at microscope carrier by being adsorbed by the first plate body and remain flat-hand position.And, the multiple mechanism for stripping being arranged in the second tabular side are connected to the second plate body successively, and one side maintenance the second plate body one faces the direction left from the first plate body and moves, thus the stripping between the first plate body and the second plate body is advanced to specific direction of peeling off.Now, manage as follows, i.e. abutment one side is connected to the surface one of the second plate body and faces stripping direction and move, and thus peels off with fixing speed.

[background technology document]

[patent documentation]

[patent documentation 1] Japanese Patent Laid-Open 2014-189350 publication

Summary of the invention

[inventing problem to be solved]

At the size-enlargement of plate body or when being supported with thin film between two panels plate body, there is the quantity or the interval that subtract set mechanism for stripping corresponding to the not equal of its contiguity power.It addition, for the advance being advantageously controlled stripping by the coordination of mechanism for stripping and abutment, it is preferable that at abutment by being connected to the surface of the second plate body to mechanism for stripping afterwards and to carry out remaining the time stopped short as far as possible.For being capable of these, it is necessary to one side prevents the interference of mechanism for stripping and abutment, the second plate body surface after simultaneously making mechanism for stripping pass through relative to abutment promptly abuts.It is therefore desirable to according to the configuration of mechanism for stripping suitably and simply set up the action sequence of each mechanism for stripping cooperated with abutment.

In described background technology, mechanism for stripping negligible amounts is set, and its etc. interval also bigger.Therefore, action sequence optimization is relatively easily made.Such as, the method that position and the corresponding relation of the mobile sequential of mechanism for stripping making device study abutment beforehand through teaching work can be used.But, if the quantity that arranges of mechanism for stripping becomes big, then adjust operation and will become very numerous and diverse.

The present invention is the person of completing in view of described problem, its object is to provide a kind of technology, in the stripping means making the two panels plate body of contiguity mutually peel off and stripping off device, can make the action optimization simply of each mechanism for stripping according to the configuration of mechanism for stripping.

[solving the technological means of problem]

For reaching described purpose, one aspect of the stripping means of the present invention is the stripping means of the contiguity body stripping making the first plate body and the second plate body directly or touching across thin layer, it possesses: configuration step, maintaining body keeps described contiguity body by keeping described first plate body, and each has the multiple mechanism for stripping being partially connected to described second plate body and keep the function of described second plate body, along the stripping direction parallel with the surface of described second plate body, and arrange on the surface of described second plate body and the spaced apart at gaps of described mechanism for stripping；And strip step, abutment one side is connected to the surface one side of described second plate body and is moving to described stripping direction with the clearance space of described mechanism for stripping, the each of described mechanism for stripping is after the surface of described second plate body moving and being connected to along described stripping direction to described second plate body successively after described abutment passes through, and one side keeps described second plate body one side to move along departure direction relative to described first plate body and make described second plate body leave from described first plate body；And the mobile sequential of described mechanism for stripping each be the described abutment that obtains according to making described abutment move to described stripping direction in advance by with the setting to the sequential of position and the corresponding relation of the location information of position that represents on the described stripping direction of described abutment of described mechanism for stripping.

It addition, for reaching described purpose, an aspect of the stripping off device of the present invention possesses: maintaining body, it keeps the first plate body and the second plate body directly or the contiguity body mutually touched across thin layer by keeping described first plate body；Abutment, its one side is connected to the surface of described second plate body of the described contiguity body kept by described maintaining body, and one side moves along the stripping direction parallel with the surface of described second plate body；Multiple mechanism for stripping, arrange along described stripping direction, each has a function being partially connected to described second plate body and keep described second plate body, and being connected to the abutted position on surface of described second plate body and can leave from the surface of described second plate body and be provided with between the position of readiness with the gap passed through for described abutment and move；And controlling organization, it controls the movement of described mechanism for stripping and described abutment and performs peeling action；In described peeling action, described abutment one side is connected to the surface one side of described second plate body and is moving to described stripping direction with the clearance space of described mechanism for stripping, the each of described mechanism for stripping is after the surface of described second plate body moving and being connected to along described stripping direction to described second plate body successively after described abutment passes through, one side keeps described second plate body one side to move along departure direction relative to described first plate body and make described second plate body leave from described first plate body, the mobile sequential of described mechanism for stripping each be according to make described abutment move along described stripping direction in advance and the described abutment that obtains by with described mechanism for stripping to the sequential of position, with the corresponding relation of location information of the position on the described stripping direction representing described abutment and set.

In the invention constituted as so, according to abutment when mobile actually by the corresponding relation to the position to the sequential of position and abutment with mechanism for stripping, set the mobile sequential of the mechanism for stripping each cooperated and make stripping advance with abutment.That is, grasp abutment actually by with mechanism for stripping to position sequential and represent abutment position location information corresponding relation after, decision mechanism for stripping action.Therefore, no matter how mechanism for stripping configures, and all can make each mechanism for stripping action configuring with it corresponding sequential.Thus, can avoid abutment by before mechanism for stripping make abutment and mechanism for stripping collision close to the second plate body, or utilize the problem that the keeping slow of the second plate body cannot be peeled off by mechanism for stripping well such that it is able to make the action optimization of each mechanism for stripping.

[effect of invention]

According to the present invention, as described above, it is possible to make the mobile sequential actual disposition corresponding to mechanism for stripping of each mechanism for stripping, thus the interference of abutment and mechanism for stripping can be avoided, and the action optimization of each mechanism for stripping can be made simply.

Accompanying drawing explanation

Fig. 1 indicates that the axonometric chart of an embodiment of the stripping off device of the present invention.

Fig. 2 indicates that the axonometric chart of the main composition of this stripping off device.

Fig. 3 indicates that the side view of the position relationship in the initial structure peeling off unit and each portion.

Fig. 4 indicates that the block diagram electrically constituted of this stripping off device.

Fig. 5 A～Fig. 5 D indicates that the figure of the action in each portion in the process of peeling action.

Fig. 6 A～Fig. 6 C indicates that the figure arranging the different example of pattern of absorbing unit.

Fig. 7 A and Fig. 7 B indicates that the figure of roller unit and the position relationship of absorbing unit.

Fig. 8 A～Fig. 8 C indicates that the figure of the aspect utilizing image pickup part shooting absorbing unit.

Fig. 9 indicates that the flow chart of the establishing method of the mobile sequential of absorbing unit.

Figure 10 A and Figure 10 B is the figure of the principle of the mobile sequential that absorbing unit is described.

Detailed description of the invention

Fig. 1 indicates that the axonometric chart of an embodiment of the stripping off device of the present invention.For representing the direction in each figure uniformly, as shown in Fig. 1 bottom right, set the orthogonal axes of coordinates of XYZ.Herein, X/Y plane represents horizontal plane.It addition, Z axis represents vertical axis, more specifically, (-Z) direction represents vertical direction down.

This stripping off device 1 is the device that the two panels plate body making the state touched each other with interarea move into is peeled off.Such as formed at the pattern of the surface of the substrate such as glass substrate or semiconductor substrate formation specific pattern in a part for processing procedure and use.More specifically, being formed in processing procedure at this pattern, on the printing cloth surface as the carrying body temporarily supporting the pattern that should be transferred in transfer printing body and substrate, coated pattern forms material (application step) equably.Then, coating layer patterning (patterning step) is made by the version having carried out Surface Machining according to pattern form being pressed on the coating layer printed on cloth.Make the figuratum printing cloth of formation and substrate contiguity (transfer step) as so, thus pattern is finally transferred to substrate from printing cloth.

Now, for making to leave between substrate and the printing cloth of contiguity between the version of contiguity in patterning step and printing cloth or in transfer step, this device can suitably be applied.Certainly, can be not only used for both these, it is possible to use in purposes in addition.Such as, it is possible to be applied in by be supported in carrying body film transfer to substrate time stripping processing procedure.In addition, this device can be applied in all processing procedures making the two panels plate body stripping directly or across thin layer contiguity such as thin film.

This stripping off device 1 has the structure being respectively fixed with microscope carrier block 3 and top absorption block 5 on the main frame 11 be arranged on framework.Fig. 1 omits the diagram of framework for representing the internal structure of device.It addition, except these each blocks, this stripping off device 1 possesses following control unit 70 (Fig. 4).

Microscope carrier block 3 has the microscope carrier 30 loading version with printing cloth or the contiguity body (hereinafter referred to as " workpiece ") of substrate and printing cloth contiguity.Microscope carrier 30 possesses the horizontal microscope carrier portion 31 that upper surface is approximate horizontal plane and the taper microscope carrier portion 32 of the plane that upper surface is the slope with respect to the horizontal plane several times with (such as about 2 degree).In the side, taper microscope carrier portion 32 of microscope carrier 30, namely the end of (-Y) side has been arranged around initially peeling off unit 33.It addition, to be provided with roller unit 34 in the way of horizontal microscope carrier portion 31.

On the other hand, absorption block 5 in top possesses the support framework 50 that main frame 11 erects and arranges in the way of covering the top of microscope carrier block 3.Support framework 50 be provided with the absorbing unit 51 of N group (N is natural number), 52,53 ..., 5N.These absorbing units 51～5N is sequentially arranged in (+Y) direction.Hereinafter, when each absorbing unit distinguished by needs, i-th (i is natural number) absorbing unit 5i will be played in (+Y) direction number and be called " the i-th absorbing unit ".

Fig. 2 indicates that the axonometric chart of the main composition of this stripping off device.More specifically, Fig. 2 represents the structure of the microscope carrier 30 in each composition of stripping off device 1, roller unit 34 and the i-th absorbing unit 5i.Microscope carrier 30 possesses horizontal microscope carrier portion 31 that upper surface 310 is generally horizontal plane and upper surface 320 is the taper microscope carrier portion 32 being inclined relative to horizontal taper surface several times.The upper surface 310 in horizontal microscope carrier portion 31 has the planar dimension that the planar dimension of the workpiece relatively loaded is slightly larger.

(-Y) the side end in taper microscope carrier portion 32 and horizontal microscope carrier portion 31 touches and arranges.Its upper surface 320 is positioned at the height (Z-direction position) identical with the upper surface 310 in horizontal microscope carrier portion 31 in the part contacted with horizontal microscope carrier portion 31.On the other hand, with being downward that (-Z) direction retreat to (-Y) direction away from, upper surface 320 from horizontal microscope carrier portion 31.Therefore, overall at microscope carrier 30, the horizontal plane of the upper surface 310 in horizontal microscope carrier portion 31 is continuous with the taper surface of the upper surface 320 in taper microscope carrier portion 32, and its etc. the crestal line portion E that connects become the linearity extended in X-direction.

It addition, the upper surface 310 in horizontal microscope carrier portion 31 is provided with cancellate groove quarter.More specifically, the central part of the upper surface 310 in horizontal microscope carrier portion 31 is provided with cancellate groove 311.It addition, by the way of surrounding the region being formed with groove 311 and in the way of becoming the shape removed on 1 limit of the side, taper microscope carrier portion 32 in rectangle, upper surface 310 circumference in horizontal microscope carrier portion 31 is provided with groove 312.These grooves 311,312 are to be connected with following negative pressure feeding portion 704 (Fig. 4) via controlling valve, and have the function as adsorption tank, namely adsorb the workpiece keeping placed on microscope carrier 30 by being supplied to negative pressure.2 kinds of grooves 311,312 are not connected on microscope carrier, it addition, be connected with negative pressure feeding portion 704 via separate control valve.Therefore, except using two kinds of grooves to adsorb, it is possible to only use a kind of groove to adsorb.

It is provided with roller unit 34 in the way of the microscope carrier 30 constituted as so.Specifically, along the X-direction both ends in horizontal microscope carrier portion 31, extended in the Y direction have pair of guide rails 351,352, and these guide rails 351,352 are fixed on main frame 11.And, relative to guide rail 351,352, roller unit 34 is installed sliding freely.

Roller unit 34 possesses the slide block 341,342 engaged sliding freely respectively with guide rail 351,352.It is provided with in the way of linking these slide blocks 341,342 across the top of microscope carrier 30 and at the extended bottom angle-shaped piece 343 of X-direction.At bottom angle-shaped piece 343, via elevating mechanism 344, top angle-shaped piece 345 is lifting freely installed.And, it is rotatably fitted at top angle-shaped piece 345 with X-direction for axial columned stripper roll 340.

Decline if top angle-shaped piece 345 is downwards (-Z) direction by elevating mechanism 344, then the lower surface of stripper roll 340 is connected to the upper surface of the workpiece being positioned in microscope carrier 30.On the other hand, when above top angle-shaped piece 345 is positioned at being the position in (+Z) direction by elevating mechanism 344, stripper roll 340 becomes the state of the upper surface leaving workpiece upward.At top angle-shaped piece 345, the backing roll 346 suppressing stripper roll 340 to bend rotatably is installed, and is suitably provided with the rib preventing top angle-shaped piece 345 self from bending.Stripper roll 340 and backing roll 346 do not have drive source, its etc. rotate freely.

Roller unit 34 can move in the Y direction by being arranged on the motor 353 of main frame 11.More specifically, bottom angle-shaped piece 343 is attached at such as ball screw mechanism 354 as the shifter that the rotary motion of motor 353 is converted to rectilinear motion.If motor 353 rotates, then bottom angle-shaped piece 343 moves in the Y direction along guide rail 351,352, and thus roller unit 34 moves in the Y direction.With roller unit 34 movement stripper roll 340 movable range (-Y) direction be set to the (-Y) side end to horizontal microscope carrier portion 31 near position, (+Y) direction is set to the (+Y) side end to horizontal microscope carrier portion 31 near position.

And then, at roller unit 34, image pickup part 347 is installed.Image pickup part 347 is the such as CCD camera (charge-coupleddevicecamera, charge-coupled device camera) with camera function, makes shooting be directed upwardly and is arranged on top angle-shaped piece 345.Details be explained below, and image pickup part 347 together moves along Y-direction with stripper roll 340 with the movement of roller unit 34, and shooting is arranged in the absorbing unit 51 etc. above roller unit 34.

Secondly, the composition of the i-th absorbing unit 5i (i=1,2 ..., N) is illustrated.Additionally, first to N absorbing unit 51～5N is identically structured.I-th absorbing unit 5i has extended in X-direction and is fixed on the beam parts 5i1 supporting framework 50.At beam parts 5i1, in the X direction mutually staggered positions and coupled columns parts 5i2,5i3 that below oriented vertical, namely (-Z) direction extends is installed.At post parts 5i2,5i3, via the guide rail being blocked in figure, plate member 5i4 is lifting freely installed.Plate member 5i4 lifts driving by comprising the elevating mechanism 5i5 of motor and shifter (such as ball screw mechanism).

The advance expenditure support part part 5i6 of the square rod shape extended in X-direction is installed in the bottom of plate member 5i4.At the lower surface of advance expenditure support part part 5i6, equally spaced it is arranged with multiple absorption layer 5i7 in the X direction.In Fig. 2 represent make the i-th absorbing unit 5i to the state that relatively physical location more top moves, when making plate member 5i4 move downwards by elevating mechanism 5i5, absorption layer 5i7 can drop to the upper surface 310 extremely close proximity in horizontal microscope carrier portion 31 till.When being placed with workpiece on microscope carrier 30, absorption layer 5i7 is connected to the upper surface of workpiece.Each absorption layer 5i7 is given the upper surface adsorbing holding workpiece from the negative pressure in following negative pressure feeding portion 704.

Fig. 3 indicates that the side view of the position relationship in the initial structure peeling off unit and each portion.First, one side illustrates the initial structure peeling off unit 33 with reference to Fig. 1 and Fig. 3 one side.Initial unit 33 of peeling off has above taper microscope carrier portion 32 and at the extended bar-shaped pressing component 331 of X-direction, pressing component 331 is supported by support arm 332.Support arm 332 is lifting freely arranged on post parts 334 via the guide rail 333 extended in vertical.By the start of elevating mechanism 335, support arm 332 moves up and down relative to post parts 334.Post parts 334 support by being arranged on the base portion 336 of main frame 11, and the Y-direction position of post parts 334 can be adjusted in base portion 336 by position adjusting mechanism 337 in specific scope.

Stripping object and workpiece WK are positioned in the microscope carrier 30 being made up of horizontal microscope carrier portion 31 and taper microscope carrier portion 32.The described workpiece in patterning step is contiguity body version touched across the thin film of pattern forming material with printing cloth.On the other hand, the workpiece in transfer step is the contiguity body touched across patterned pattern with printing cloth by substrate.Hereinafter, the peeling action of the stripping off device 1 when using the contiguity body of the substrate SB in transfer step and printing cloth BL as workpiece WK is illustrated.Peel off also by identical method when using the contiguity body being made up of version and printing cloth as workpiece.

In workpiece WK, printing cloth BL is made to have relatively bigger for substrate SB planar dimension.Substrate SB is closely contacted on the substantially central portion of printing cloth BL.Workpiece WK makes printing cloth BL lower and make substrate SB upper and be positioned in microscope carrier 30.Now, as shown in Figure 3, so that (-Y) side end of substrate SB becomes the crestal line portion E of horizontal microscope carrier portion 31 and the boundary in taper microscope carrier portion 32 generally above in workpiece WK, more specifically for the relatively crestal line portion E mode slightly by the position of (-Y) side, workpiece WK is positioned in microscope carrier 30.Therefore, on (-Y) direction, relatively the printing cloth BL of substrate SB more lateral configures in the way of prominent in taper microscope carrier portion 32, thus producing gap between lower surface and the upper surface 320 in taper microscope carrier portion 32 of printing cloth BL.Angle θ formed by lower surface and the upper surface 320 in taper microscope carrier portion 32 of printing cloth BL be with the cone angle in taper microscope carrier portion 32 identical (present embodiment is 2 degree) several times about.

Be provided with adsorption tank 311,312 in horizontal microscope carrier portion 31, absorption keeps the lower surface of printing cloth BL.Wherein, the lower surface of the printing cloth BL of the lower contacts of adsorption tank 311 absorption and substrate SB, on the other hand, adsorption tank 312 adsorbs the lower surface of the printing cloth BL of relatively substrate SB more lateral.Adsorption tank 311,312 can independently of each other on-off absorption, and can 2 kinds of adsorption tanks 311,312 used along and strongly adsorb printing cloth BL.On the other hand, by only using the adsorption tank 312 in outside to adsorb, the central part of the printing cloth BL being formed effectively with pattern is not adsorbed, and the pattern damage caused by the bending printing cloth BL that absorption is caused can be prevented.So, by the independently controlled adsorption tank 311 to central part and the negative pressure feeding of the adsorption tank 312 to circumference, the aspect that the absorption of printing cloth BL keeps can be switched according to purpose.

It is maintained at above the workpiece WK of microscope carrier 30 in absorption as so, is configured with the stripper roll 340 of first to N absorbing unit 51～5N and roller unit 34.As it has been described above, in the bottom of the i-th absorbing unit 5i, be disposed with multiple absorption layer 5i7 in X-direction.More specifically, absorption layer 5i7 is had flexibility by such as rubber or silicones etc. and elastic material is formed, and has lower surface and be connected to the upper surface (more specifically the upper surface of substrate SB) of workpiece WK and adsorb the function of workpiece.Hereinafter, by be arranged on each absorbing unit 51,52 ..., the absorption layer respectively label symbol 517 of 5N, 527 ..., 5N7 and be mutually distinguishable.

First absorbing unit 51 is arranged on the top of the (-Y) side end in horizontal microscope carrier portion 31, the upper surface of (-Y) side end of sorbing substrate SB when declining.On the other hand, N absorbing unit 5N is arranged on the top of the (+Y) side end of the substrate SB being positioned on microscope carrier 30, the upper surface of (+Y) side end of sorbing substrate SB when declining.Second absorbing unit 52 is suitably distributed between these absorbing units to (N-1) absorbing unit 5 (N-1), for instance absorption layer 517～5N7 can be made to become in the Y direction substantially at equal intervals.Additionally, as described below, the interval of absorption layer 517～5N7 is set to unequal also dependent on needs.Between these absorbing units 51～5N, it is possible to what perform towards the movement of above-below direction and absorption independently of each other is switched on and off.

Stripper roll 340 above-below direction move and close relative to substrate SB, leave movement, and move horizontally along substrate SB by moving in the Y direction.When stripper roll 340 declines, it is connected to the upper surface of substrate SB and simultaneously rolls one side and move horizontally.The position near (+Y) side of the absorption layer 517 that position is the first absorbing unit 51 of the stripper roll 340 when moving extremely by (-Y) side.For being capable of the configuration to described approximated position, about the first absorbing unit 51, the absorbing unit with the i-th absorbing unit 5i same configuration shown in Fig. 2 is arranged on towards rightabout with other second to N absorbing unit 52～5N as shown in Figure 1 support framework 50.

Initial unit 33 of peeling off is to adjust its Y-direction position in the way of making pressing component 331 be positioned at the top printing cloth BL protruding above to taper microscope carrier portion 32.And, declined by support arm 332 and the lower end of pressing component 331 decline thus press printing cloth BL upper surface.Now, the front end of pressing component 331 is made to be formed by elastomeric element in the way of pressing component 331 will not damage printing cloth BL.

Fig. 4 indicates that the block diagram electrically constituted of this stripping off device.The each portion of device is controlled by control unit 70.Control unit 70 possesses CPU (CentralProcessingUnit, central processing unit) 701, motor control part 702, valve control portion 703, negative pressure feeding portion 704, user interface (UI, UserInterface) portion 705 and image processing part 706.CPU701 controls the action that device is overall.Motor control part 702 controls to be arranged on the motor type in each portion.Valve control portion 703 controls to be arranged on the valve class in each portion.Negative pressure feeding portion 704 produces the supply negative pressure to each portion.UI portion 705 has the operation accepted from user and inputs or report the state of device to the function of user.Image processing part 706 performs specific image procossing according to picture signal.Additionally, when the negative pressure that factory's electricity consumption etc. can be utilized certainly to be externally supplied, control unit 70 also can not possess negative pressure feeding portion.

Motor control part 702 drives and controls to be arranged on the motor 353 of microscope carrier block 3 and elevating mechanism 335,344 and be separately positioned on the motor cluster such as elevating mechanism 515～5N5 of each absorbing unit 51～5N of top absorption block 5.Valve control portion 703 controls to be arranged on the pipe arrangement path being linked to the adsorption tank 311,312 being arranged on horizontal microscope carrier portion 31 from negative pressure supply unit 704 in order to these adsorption tanks individually to supply the valve group V3 of specific underpressure and is arranged on the pipe arrangement path that negative pressure supply unit 704 is linked to each absorption layer 517～5N7 in order to each absorption layer 517～5N to supply the valve group V5 etc. of specific underpressure.

Image processing part 706 is received from the picture signal of image pickup part 347 output and performs specific image procossing.Details be explained below, and image processing part 706 is from the picture being detected the i-th absorbing unit by the image captured by image pickup part 347.

Secondly, the action of the stripping off device 1 constituted as mentioned above is illustrated.The peeling action performed by this stripping off device 1 is essentially identical with the peeling action of the stripping off device of record in described patent documentation 1 (Japanese Patent Laid-Open 2014-189350 publication).Therefore, omit the detailed description to the peeling action of this stripping off device 1, herein, simply illustrate the action in each portion in peeling action.

When peeling off object and when workpiece WK moves into this stripping off device 1 and is positioned in the ad-hoc location of microscope carrier 30 from outside, each portion of device is positioned in the original state shown in Fig. 3.In an initial condition, workpiece WK is kept by wherein one or two absorption of adsorption tank 311,312.It addition, initially peel off the pressing component 331 of unit 33, the stripper roll 340, first of roller unit 34 is all left from workpiece WK to the absorption layer 517～5N7 of N absorbing unit 51～5N.Each absorbing unit 5i by not with roller unit 34 interference divided a word with a hyphen at the end of a line along Y-direction in the way of, configure in absorption layer 5i7 and the spaced apart sufficient gap of substrate SB.It addition, stripper roll 340 is in the absorption layer 517 of relatively the first absorbing unit 51 position slightly by (+Y) side from the workpiece WK state left.Peeling action is performed from this original state.

Fig. 5 A～Fig. 5 D indicates that the figure of the action in each portion in the process of peeling action.First, the first absorbing unit 51 declines, and absorption layer 517 is connected to (-Y) side end upper surface of substrate SB and keeps substrate SB by negative-pressure adsorption.It addition, stripper roll 340 declines and is connected to the upper surface of substrate SB.As shown in Figure 5A, pressing component 331 declines and the end of lower impressing brushing BL from this state.Protruding above in taper microscope carrier portion 32 of end of printing cloth BL, thus having gap between the upper surface 320 of its lower surface and taper microscope carrier 32.Therefore, by pressing component 331, the end of printing cloth BL is pressed downwards, and make the end of printing cloth BL bend downwards along the taper surface in taper microscope carrier portion 32.Its result, starts to peel off by leaving between end and the printing cloth BL of the substrate SB of the first absorbing unit 51 absorption maintenance.

Then, as shown in Figure 5 B, the first absorbing unit 51 begins to ramp up, and stripper roll 340 is connected to substrate SB surface and one side rolls one and faces (+Y) direction and move.Thus, substrate SB carries out towards (+Y) direction with the stripping of printing cloth BL.Because making stripper roll 340 abut, therefore it is connected to the region of substrate SB without departing from stripper roll 340 and peels off.Move to (+Y) direction with fixed speed by making stripper roll 340 one side be connected to substrate SB one side, the pace of stripping can be maintained fixing.

Hereinafter, substrate SB and the printing stripping area peeled off of cloth BL and the demarcation line in unstripped region not yet peeled off are called " stripping demarcation line ".Stripper roll 340 is the roller member extended in X-direction, and its one side is connected to substrate SB mono-and faces (+Y) direction and move.Therefore, peel off demarcation line and be maintained the linearity along the extended direction of roller and X-direction, and carry out to (+Y) direction with fixed speed.Thus, the stress that can be prevented securely from the variation generation of the pace because peeling off concentrates the pattern damage caused.

Absorbing unit 52,53 ... are declined by substrate SB afterwards successively relative to stripper roll 340, are connected to the substrate SB after printing cloth BL just peels off and keep this substrate SB.Specifically, as shown in Figure 5 B, the second absorbing unit 52 begins to decline when stripper roll 340 is by its position directly below and advances to substrate SB.When absorption layer 527 is connected to the upper surface of substrate SB, by the negative pressure supplied from negative pressure supply unit 704, and start with the second absorbing unit 52 absorption and keep substrate SB.

As shown in Figure 5 C, the second absorbing unit 52 is changed into rising when the absorption starting substrate SB keeps.Hereafter, substrate SB is kept by the first absorbing unit 51 and the second absorbing unit 52.Thus, the substrate SB peeling off advance from printing cloth BL can be kept more effectively, thus substrate SB decurvation can be prevented and contacts with printing cloth BL again, or from the problem that absorption layer 517 comes off.It addition, by suitably keeping the angle peeling off the substrate SB near demarcation line and printing cloth BL, it is possible to obtain the effect making stripping advance well.

Other absorbing unit 53,54 ..., 5N begin to decline when stripper roll 340 is by the lower section of this absorbing unit similarly, and the time point being connected to substrate SB at absorption layer starts absorption maintenance and rises, and is thus lifted upward by substrate SB.Each absorbing unit stops rising to from microscope carrier 30 the time point till certain height.

Till namely the most downstream side of stripping direction of advance leans on the absorbing unit 5N of (+Y) side to keep substrate SB and rise to ad-hoc location most, thus, as shown in Figure 5 D, substrate SB is kept completely separate with printing cloth BL and completes stripping.Stripper roll 340 and pressing component 331 retreat to and all position away from from substrate SB, printing cloth BL, thus can be taken out of with printing cloth BL by the substrate SB being separated from each other, so complete peeling action.

In peeling action as above, about arranging quantity and the configuration thereof of absorbing unit, there is the preferred kind according to substrate SB or thickness and form situation about changing in the kind of the pattern printed between cloth BL or thin film.

Fig. 6 A～Fig. 6 C indicates that the figure arranging the different example of pattern of absorbing unit.Such as, when making contiguity power between the two relatively weak in material or the shape of the pattern because being supported between substrate SB and printing cloth BL, as shown in Figure 6A, it is preferable that angle α formed by substrate SB and the printing cloth BL after peeling off is remained relatively small value and peels off.Under this purpose, peel off required lift power also less, therefore in the Y direction absorbing unit is configured with bigger interval.

On the other hand, for instance when substrate SB is relatively strong with the contiguity power of printing cloth BL, as shown in Figure 6B, it is preferable that by the substrate SB after peeling off with print angle β formed by cloth BL and be maintained bigger value and peel off.Further it is necessary to make the power of lift substrate SB bigger.Therefore, it is necessary to what make between the absorbing unit in Y-direction is interval smaller, thus needing according to circumstances to make the arranging quantity of absorbing unit increase.

It addition, such as when the rigidity of substrate SB higher and when being difficult to bend, it is necessary to one side reduces angle formed by substrate SB and printing cloth BL, and one side is with relatively strong lift power lift substrate SB.In the case, it is also desirable to make the quantity of absorbing unit increase.Such as, for corresponding this situation, as shown in Figure 6 C, it is also considered that make the interval of absorbing unit unequal close to configuration absorbing unit etc. near the end of substrate SB.

So, about absorbing unit arranging quantity and etc. configuration, if can change according to purpose, then device utilize expanded range and convenient.But, following problem can be produced for being capable of this.

Fig. 7 A and Fig. 7 B indicates that the figure of roller unit and the position relationship of absorbing unit.As shown in Figure 7 A, in peeling action, roller unit 34 is divided a word with a hyphen at the end of a line to (+Y) direction with fixed speed.On the other hand, absorbing unit 5i is by making the plate member 5i4 being provided with absorption layer 5i7 in bottom carry out maintenance and the lift of substrate SB along Z-direction lifting.Therefore, set the mobile sequential of these parts if inappropriate, then there are both and interfere and the anxiety that contacts.

As shown in Figure 7 B, if after roller unit 34 is by position directly below, plate member 5i4 begins to decline in principle, will not produce to interfere.But, make stripping stably carry out for angle α formed by substrate SB and printing cloth BL is maintained at fixing, more satisfactory for the substrate SB after keeping stripper roll 340 to pass through by absorption layer 5i7 as quickly as possible.Namely, it is preferable that the interval W that (+Y) side end face 5i6y of advance expenditure support part part 5i6 when absorption layer 5i7 begins to decline and stripper roll 340 are connected in the Y-direction of the position of substrate SB is little as far as possible, more satisfactory is 0 for making this interval W.

In the past, it is such as be operated by that personnel carry out making device to be associated with the mobile sequential foundation in each portion by the clock signal of periodically output and the teaching work that stored sets in order to realize the mobile sequential in each portion of this action.But, as it has been described above, teaching work also becomes numerous and diverse when the arranging number of absorbing unit is more or when being configured as unequal, if even comprising the uneven corresponding inching with installation site, then job step number will become huge.

Therefore, the stripping off device 1 of present embodiment has following function, i.e. the position relationship of roller unit when measuring roll unit 34 is divided a word with a hyphen at the end of a line 34 and each absorbing unit 5i, and determines the mobile sequential of each absorbing unit 5i according to this result.Specifically, constituting as follows, namely roller unit 34 is provided with image pickup part 347 (Fig. 2), image pickup part 347 moves with stripper roll 340 integratedly with the movement of roller unit 34.And, the roller unit 34 lower section by absorbing unit 5i, image pickup part 347 shoots absorbing unit 5i above, grasps the position of each absorbing unit 5i observed from roller unit 34 from there through image procossing.According to its result, set the sequential mobile sequential as each absorbing unit 5i of benchmark of dividing a word with a hyphen at the end of a line with roller unit 34.

Fig. 8 A～Fig. 8 C indicates that the figure of the aspect utilizing image pickup part shooting absorbing unit.As shown in Figure 8 A, image pickup part 347, in the substantially position directly above of stripper roll 340, is fixed on top angle-shaped piece 345 in the way of making shooting be directed upwardly.Therefore, the image IM shot by image pickup part 347 when roller unit 34 is positioned at the position directly below of absorbing unit 5i comprises the picture of a part such as advance expenditure support part part 5i6 of this absorbing unit 5i as shown in Figure 8 B.In other words, it is known that when comprising the picture of absorbing unit 5i in the image IM shot by image pickup part 347, roller unit 34 is positioned at the position directly below of this absorbing unit 5i.Thus can grasp roller unit 34 sequential by the position directly below of each absorbing unit 5i in it is divided a word with a hyphen at the end of a line.

Resolved by image processing part 706 from the picture signal of image pickup part 347 output.Image processing part 706 detects the position having the anxiety producing interference with roller unit 34 in absorbing unit 5i from image IM, is namely positioned at the position of the most downstream side of the direction of travel of roller unit 34.Its reason is in that, by grasping this position sequential by roller top in advance, and can avoid the interference of roller unit 34 and absorbing unit 5i effectively.In present embodiment, (+Y) side end face 5i6y of advance expenditure support part part 5i6 is detected as this position.

As shown in Figure 8 C, in image IM, datum line Ls it is set with.The position of the advance expenditure support part part end face 5i6y that datum line Ls is equivalent to (+Y) side end face 5i6y of the interval W shown in Fig. 7 B, i.e. advance expenditure support part part 5i6 and stripper roll 340 is connected in image IM when being spaced apart 0 between the position of substrate SB.Therefore, when the position of advance expenditure support part part end face 5i6y is consistent with datum line Ls in image IM, interval W can be made to become 0.Utilize case above, each absorbing unit 5i can be specified that interval W becomes the sequential absorption layer 5i7 of the 0 mobile sequential begun to decline adjoint dividing a word with a hyphen at the end of a line of roller unit 34.

More specifically, the operating of available companion devices and the signal that periodically produces, and the position of the sequential with the roller unit 34 divided a word with a hyphen at the end of a line that are shot each absorbing unit 5i by image pickup part 347 is set up and associates.When the pulse motor that the motor 353 making roller unit 34 divide a word with a hyphen at the end of a line is such as stepping motor, can use for drive this motor 353 and from the number of drive pulses of the motor control part 702 output information as the position representing roller unit 34.The rotation amount of motor is in direct ratio with number of drive pulses, therefore the count value of the self-driven driving pulse started becomes the location information of the current location indicating roller unit 34.Therefore, if the sequential that the information of the position of instruction roller unit 34 goes out with shot detection the image IM of absorbing unit 5i is set up associate, then can individually grasp the roller unit 34 sequential by the position directly below of each absorbing unit 5i.

So, only it is to be understood that the position of roller unit 34 and by sequential, then can set and not interfere with roller unit 34 and for keeping the mobile sequential of each absorbing unit 5i needed for substrate SB with being not held off after roller passes through.As location information, the various information of the position of instruction roller unit 34 can be used.Except the motor-driven umber of pulse herein illustrated, can use such as the timing value from starting to drive or the measured value etc. controlling the signal regularly produced as the count value of seasonal pulse with the movement of roller unit 34.Additionally, it is possible to from the output signal of output signal, such as alignment sensor or the linear encoder of the testing agency of the function from the position with measuring roll unit and obtain location information from the picture signal etc. of monitoring camera.

Additionally, the basic action sequence of each absorbing unit 5i is:

(1) plate member 5i4 declines to substrate SB；

(2) when absorption layer 5i7 is connected to substrate SB and absorption keeps substrate SB, stop declining；And

(3) till plate member 5i4 rises to ad-hoc location；

This sequence itself can't change according to the arranging quantity of absorbing unit or equipping position.The beginning sequential of described (1) can change according to the arranging quantity of absorbing unit or equipping position.

In present embodiment, the sequential that the plate member 5i4 of each absorbing unit 5i begins to decline is to be specified by the driving pulse count value of motor 353.That is, the number of drive pulses being given to the motor 353 driving roller unit 34 is counted, and the plate member 5i4 of absorbing unit 5i begins to decline when the self-driven count value started reaches setting.This setting is individually to set for each absorbing unit 5i, and one side makes, and roller unit 34 is actual divides a word with a hyphen at the end of a line one side image acquired by image pickup part 347 and automatically set.Therefore, the homework burden of operator significantly alleviates, it addition, with the quantity of absorbing unit 5i or configure unrelated, the mobile sequential of each absorbing unit 5i can be set in same process.

Fig. 9 indicates that the flow chart of the establishing method of the mobile sequential of absorbing unit.It addition, Figure 10 A and Figure 10 B is the figure that its principle is described.It is perform, by CPU701, the control program that prestores and make each portion of device carry out specific action and perform based on the setting process of the mobile sequential of this principle.

In this process, first each portion of device is set to original state (step S101).Original state now is the state different from the original state of described peeling action.As shown in Figure 10 A, under the original state in this process, workpiece is not positioned in microscope carrier 30.It addition, the plate member 5i4 of each absorbing unit 5i is positioned at and positions away from upward from microscope carrier 30, even if thus becoming roller unit 34 and divide a word with a hyphen at the end of a line without the state producing interference.

Additionally, roller unit 34 is as shown in phantom in FIG., it is positioned at the position not making stripper roll 340 contact with microscope carrier 30 in z-direction, on the other hand, in the Y direction, it is positioned at relatively in absorption layer 517 more upstream side i.e. (-Y) side that roller direction of travel is the first absorbing unit 51 being positioned at side, most upstream on (+Y) direction.

Start with the shooting of image pickup part 347 from original state as above and utilize the image procossing (step S102) of image processing part 706.The image procossing performed by image processing part 706 is captured image IM to be resolved and the process of detecting pad support parts end face 5i6y.Such as can use known edge detection process, detect the edge being equivalent to advance expenditure support part part end face 5i6y from image IM.

Then, by motor 353 is given driving pulse and makes roller unit 34 start to divide a word with a hyphen at the end of a line to (+Y) direction, start the counting (step S103, S104) of umber of pulse.Thus, one side is performed continuously over the parsing of step-by-step counting, the shooting of image pickup part 347 and image processing part 706, and a roller unit 34 is divided a word with a hyphen at the end of a line to (+Y) direction.

When detecting, from the image IM shot at any time by image pickup part 347, edge (in step S105 the YES (YES)) being equivalent to advance expenditure support part part end face 5i6y, store counted number of pulses (step S106) now.If not detecting edge, then skip step S106.

Additionally, the value that the counted number of pulses that should obtain is when to be advance expenditure support part part end face 5i6y consistent with datum line Ls.But, can there is following situation, i.e. be taken into the sequential of image according to the configuration of absorbing unit 5i and image pickup part 347, as shown in Figure 10 B, the position of the advance expenditure support part part end face 5i6y detected in image IM is inconsistent with datum line Ls.In this case, the residual quantity Δ y of the position of the advance expenditure support part part end face 5i6y in Y-direction and datum line Ls is calculated from image IM.Owing to the amount of movement of the roller unit 34 of every 1 pulse is it is known that therefore can calculate counted number of pulses during advance expenditure support part part end face 5i6y arrival datum line Ls according to this value with residual quantity Δ y.In step s 106, the counted number of pulses calculated as storage so.

Until roller unit 34 till its movable range arrives the end position of (+Y) side (in step S107 YES), continue dividing a word with a hyphen at the end of a line and the rim detection of image IM of roller unit 34.Thus, for all absorbing units 51,52,53,54,55 ... each, counted number of pulses c1 when obtaining roller unit 34 by the position directly below of this absorbing unit 5i, c2, c3, c4, c5 ....As it can be seen, when the configuration of absorbing unit 5i is unequal, the counted number of pulses measured also becomes irregular.

If roller unit 34 arrives end position, then the shooting (step S108) of the movement of stop roller unit 34 and image pickup part 347.Then, according to the counted number of pulses c1 corresponding with each absorbing unit 51,52 ... of storage, c2 ..., and the action sequence (step S109) of each absorbing unit 51,52 ... is determined.Specifically, for each absorbing unit 5i, the setting of counted number of pulses corresponding when should begin to decline is determined with the plate member 5i4 of this absorbing unit 5i.

It is said that in general, from roller unit 34 start to divide a word with a hyphen at the end of a line the counted number of pulses started at become the count value c1, the c2 ... that are previously stored time each absorbing unit 51,52 ... beginning action.But, when beginning to decline, from plate member 5i4, the time difference that there is more than 1 pulsed quantity with roller unit 34 to producing to interfere, it is possible to count value correspondingly is added as offset.Additionally, it is possible between the sequential that sequential and the plate member 5i4 of pulses generation begin to decline, give reasonable time poor.The action sequence of each absorbing unit 5i is determined as so.

In the peeling action performed afterwards, the driving pulse making roller unit 34 divide a word with a hyphen at the end of a line is counted, and every time each absorbing unit 51,52 ... start successively when count value becomes above required setting, thus plate member 5i4 begins to decline.Thus, absorption layer 5i7 can relative to stripper roll 340 by and from printing cloth BL just leave after substrate SB abut and keep substrate SB.

As above, present embodiment is that a kind of making mutually is touched and formed printing cloth BL and the substrate SB of the workpiece WK stripping off device 1 peeled off.In this stripping off device 1, microscope carrier 30 absorption keeps printing cloth BL.And, arrange multiple absorbing unit 5i in the Y direction and be connected to substrate SB successively and keep it, and move to from the printing cloth BL direction left.Thus, peeling off between printing cloth BL is advanced to the other end from one end of substrate SB.Now, stripper roll 340 one side be connected to substrate SB one side along peel off direction of advance divide a word with a hyphen at the end of a line with fixed speed.Thus, can make stripping towards a direction and advance with fixed speed, making stripping advance well thus can simultaneously prevent pattern etc. from damaging one side.

Require that absorbing unit 5i interferes in stripper roll 340 this stripper roll 340 of Shi Buyu of dividing a word with a hyphen at the end of a line, and after stripper roll 340 is passed through, promptly keep substrate SB.In present embodiment, stripper roll 340 is actual divides a word with a hyphen at the end of a line and image pickup part 347 shoots each absorbing unit 5i in the process, and grasps the position of each absorbing unit 5i observed from stripper roll 340 from its image.Then, according to this result, set up with the location information of stripper roll 340 and associate and determine the sequential of each absorbing unit 5i start.Therefore, and the quantity of absorbing unit 5i or configure unrelated, same process can be used to make the mobile sequential optimization of each absorbing unit 5i.Its result, can alleviate the burden performing to adjust the operator of operation, significantly it addition, can prevent because of the fault caused by human error.

Additionally, the present invention is not limited to described embodiment, it is possible to carry out the various changes except described situation in scope without departing from the spirit.Such as, in said embodiment, associate for the position with each absorbing unit 5i of dividing a word with a hyphen at the end of a line of roller unit 34 is set up, and use the image pickup part 347 such as comprising CCD camera with camera function.But, as the mechanism of the position of detection absorbing unit 5i, it is not limited to this mechanism with camera function.

Such as, it is possible to the one of which at roller unit 34 and each absorbing unit 5i arranges illumination apparatus, and arranges light-receiving device in another one, detect the position of absorbing unit 5i from the sequential of the light of illumination apparatus from light-receiving device reception.It addition, be alternatively following composition, i.e. use optical chopper, when roller unit 34 is by the position directly below of absorbing unit 5i, light is interdicted (or releasing blocking).It addition, be not limited to utilize the detection of this optical means, for instance be alternatively and use the mechanical detection method having microswitch or use the electromechanical detection method having Magnetic Sensor.

It addition, such as, in the mobile timing settings of described embodiment processes, the position of (-Y) side is more leaned on to start dividing a word with a hyphen at the end of a line of roller unit 34 from relatively the first absorbing unit 51.Its reason is in that, in the same manner as other absorbing units, about the position of the first absorbing unit 51, is also that the number of drive pulses foundation with roller unit 34 associates and stores.But, the first absorbing unit 51 keeps (-Y) side end of substrate SB, and its position is without influence on the arranging quantity of absorbing unit or configuration.Therefore, it is possible to for following composition, namely the position of the first absorbing unit 51 as it is known that and grasped the position of the later each absorbing unit of the second absorbing unit 52 by dividing a word with a hyphen at the end of a line of roller unit 34.Now, the starting position of dividing a word with a hyphen at the end of a line of roller unit 34 can be set to position between the first absorbing unit 51 and the second absorbing unit 52 in the Y direction, for instance identical with the initial position of the peeling action shown in Fig. 3.

It addition, such as, in said embodiment, top angle-shaped piece 345 at roller unit 34 is provided with image pickup part 347, but as it has been described above, image pickup part 347 is in order to determine that the mobile sequential of each absorbing unit 5i uses before peeling action, peeling action does not have special function.Removably constitute relative to roller unit accordingly, as making image pickup part, it is possible to from roller unit removal image pickup part after the mobile sequential of each absorbing unit 5i of decision.Such as will not change after factory shipment in the quantity of absorbing unit 5i or the goods of configuration, it is possible to under the state of removal image pickup part after the adjustment by the aspect of device shipment.Additionally, for the action monitoring each portion in peeling action, it is possible to utilize image pickup part.

It addition, such as, in said embodiment, it is provided with cancellate adsorption tank 311,312 at microscope carrier 30 and adsorbs maintenance printing cloth BL, but the shape of adsorption tank is not limited to this.Such as may also set up the adsorption tank of ring-type, additionally, it is possible to the adsorption hole of appropriately configured supply negative pressure and adsorb printing cloth.

It addition, in said embodiment, in the way of the posture by the substrate SB after stripping is maintained close to the state of plane, controls the rising of each absorbing unit 51～5N and reduces and apply the stress to substrate SB, but the aspect of the lift of substrate SB is not limited to this.Such as, also can by the substrate after making stripping become approximate horizontal in the way of make each absorbing unit stop at level altitude, or substrate is remained with the posture of specific curvature bending.These freely can set by controlling the aspect of the rising of each absorbing unit.

It addition, in said embodiment, kept substrate and printing cloth by vac sorb, but the aspect kept is not limited to this.Maintenance is adsorbed for example also by electrostatic or magnetic adsorbability.Especially with respect to the first absorbing unit 51 first keeping substrate SB, it is possible to keep substrate with adsorbing unrelated by mechanically clamping substrate circumference.

It addition, in said embodiment, make printing cloth BL prominent and be maintained at taper microscope carrier portion 32, make printing cloth BL bending form the opportunity of stripping by pressing component 331.But, so operation is not for essential condition, for instance also only stripping can be made to start by the lift of the first absorbing unit 51.In the case, it is not necessary at microscope carrier, tapered portion is set.

As mentioned above, in the present embodiment, printing cloth BL and substrate SB is respectively equivalent to " first plate body " and " the second plate body " of the present invention, and these are equivalent to " the contiguity body " of the present invention across the workpiece WK of the integrations such as pattern.It addition, in present embodiment, (+Y) direction is equivalent to " the stripping direction " of the present invention.

It addition, in said embodiment, microscope carrier 30 is as the present invention " maintaining body " function.It addition, multiple absorbing unit 5i are respectively as " mechanism for stripping " function of the present invention.More specifically, the movable part comprising plate member 5i4 and absorption layer 5i7 in absorbing unit 5i is equivalent to " mechanism for stripping ".It addition, stripper roll 340 is as the present invention " abutment " function.Then, the number of drive pulses motor 353 driving roller unit 34 given is equivalent to " location information " of the present invention.It addition, in said embodiment, image pickup part 347 is as the present invention " testing agency " and " image mechanism " function.

Above, as illustrating as illustrated specific embodiment, the present invention is such as alternatively following composition, namely, it is provided with the testing agency moving and detecting mechanism for stripping with abutment integratedly along stripping direction, and sets the mobile sequential of mechanism for stripping each according to the testing result of testing agency and the corresponding relation of location information.Thus by the testing agency's detection mechanism for stripping moved integratedly with abutment, thus can gear to actual circumstances and grasp the movement of abutment and the position of mechanism for stripping exactly.

In the case, for instance, testing agency is alternatively following composition, i.e. have a camera function of shooting mechanism for stripping, and detect according to the image of shooting abutment by with mechanism for stripping to the sequential of position.In so constituting, prevent error detection miscellaneous part by detecting with the mechanism for stripping taken by pictorial form.

It addition, such as, as the setting of mobile sequential, it is possible to when being arranged with mechanism for stripping relative to the maintaining body not keeping contiguity body, abutment moves along stripping direction, and detects that the result of mechanism for stripping is set according to testing agency.In the setting of the mobile sequential of the mechanism for stripping of the present invention, it is not necessary to contiguity body is maintained at maintaining body.

It addition, such as, as location information, the various information that the signal regularly produced by measuring the movement with abutment obtains can be used.In device, produce the signal of various periodicity, utilize its measured value can suitably indicate the position of abutment.For instance, it is possible to abutment will be made to be used as location information along the number of drive pulses peeling off the pulse motor that direction is moved.The amount of movement of abutment with to drive its pulse motor give number of drive pulses in direct ratio, therefore utilize number of drive pulses measured value and can with the position of higher accuracy representing abutment.

It addition, such as, maintaining body is so that the flat-hand position that the second plate body is upside keeps contiguity body, and mechanism for stripping also can be arranged in the top of contiguity body.In this aspect, stripping is made to advance by being lifted upward by the second plate body when the first plate body is remained flat-hand position.This is the aspect that can the first tabular be kept with most stable of posture, can prevent the first plate body when making the second plate body leave from following the second plate body and peeling off failure.

[industrial applicability]

The present invention is except the stripping processing procedure that can be applicable in making two panels plate body contiguity make the pattern formation of the transfers such as pattern process, it is not limited to be attended by the processing procedure of this pattern transfer, the various purposes peeled off well by two panels plate body that is direct or that mutually touch across thin layer can be suitably applied to.

[explanation of symbol]

1 stripping off device

30 microscope carriers (maintaining body)

51～5N absorbing unit (mechanism for stripping)

34 roller units

340 stripper roll (abutment)

347 image pickup parts (testing agency, image mechanism)

353 motor (pulse motor)

5i4 (i=1,2 ..., N) plate member

5i6 (i=1,2 ..., N) pads holding member

5i7 (i=1,2 ..., N) absorption layer

BL prints cloth (the first plate body)

SB substrate (the second plate body)

WK workpiece (contiguity body)

Claims (12)

1. a stripping means, makes the first plate body and the second plate body directly or the contiguity body touched across thin layer is peeled off, and possesses:

Configuration step, maintaining body keeps described contiguity body by keeping described first plate body, each has the multiple mechanism for stripping being partially connected to described second plate body and keep the function of described second plate body, peels off direction along parallel with the surface of described second plate body and arrange on the surface of described second plate body and the spaced apart at gaps of described mechanism for stripping；And

Strip step, abutment one side is connected to the surface one side of described second plate body and is moving along described stripping direction with the clearance space of described mechanism for stripping, the each of described mechanism for stripping is after the surface of described second plate body moving and being connected to along described stripping direction to described second plate body successively after described abutment passes through, and one side keeps described second plate body one side to move along departure direction relative to described first plate body and make described second plate body leave from described first plate body；And

The mobile sequential of described mechanism for stripping each be according to make described abutment move along described stripping direction in advance and the described abutment that obtains by with the setting to the sequential of position and the corresponding relation of the location information of position that represents on the described stripping direction of described abutment of described mechanism for stripping.

2. stripping means according to claim 1, it is provided with moving and detecting along described stripping direction with described abutment integratedly the testing agency of described mechanism for stripping, sets the mobile sequential of described mechanism for stripping each according to the corresponding relation of the testing result of described testing agency and described location information.

3. stripping means according to claim 2, wherein said testing agency has the camera function shooting described mechanism for stripping, detect according to captured image described abutment by with described mechanism for stripping to the sequential of position.

4. stripping means according to claim 2, wherein when being arranged with described mechanism for stripping relative to the described maintaining body not keeping described contiguity body, described abutment moves along described stripping direction, and described mechanism for stripping detects in described testing agency.

5. stripping means according to any one of claim 1 to 4, wherein said location information is the information acquired by the signal regularly produced by measuring the movement with described abutment.

6. stripping means according to claim 5, wherein said location information is the number of drive pulses of the pulse motor making described abutment move along described stripping direction.

7. the stripping means any one of Claims 1-4, wherein in described configuration step, described maintaining body is that described mechanism for stripping is arranged in the top of described contiguity body so that described second plate body is positioned at the flat-hand position of upside and keeps described contiguity body.

8. a stripping off device, possesses:

Maintaining body, it keeps the first plate body and the second plate body directly or the contiguity body mutually touched across thin layer by keeping described first plate body；

Abutment, its one side is connected to the surface of described second plate body of the described contiguity body kept by described maintaining body, and one side moves along the stripping direction parallel with the surface of described second plate body；

Multiple mechanism for stripping, arrange along described stripping direction, each has a function being partially connected to described second plate body and keep described second plate body, and can be connected to the abutted position on surface of described second plate body and the surface from described second plate body is left and is provided with and moves between the position of readiness with the gap passed through for described abutment；And

Controlling organization, it controls the movement of described mechanism for stripping and described abutment and performs peeling action；And

In described peeling action,

Described abutment one side is connected to the surface one side of described second plate body and is moving along described stripping direction with the clearance space of described mechanism for stripping,

The each of described mechanism for stripping is after the surface of described second plate body moving and being connected to along described stripping direction to described second plate body successively after described abutment passes through, one side keeps described second plate body one side to move along departure direction relative to described first plate body and make described second plate body leave from described first plate body

The mobile sequential of described mechanism for stripping each be according to make described abutment move along described stripping direction in advance and the described abutment that obtains by with the setting to the sequential of position and the corresponding relation of the location information of position that represents on the described stripping direction of described abutment of described mechanism for stripping.

9. stripping off device according to claim 8, it possesses one side and moves, with described abutment, the testing agency simultaneously detecting described mechanism for stripping integratedly,

Described controlling organization be testing result according to described testing agency with the corresponding relation of described location information and set the mobile sequential of described mechanism for stripping each.

10. stripping off device according to claim 9, wherein said testing agency is the image mechanism shooting described mechanism for stripping.

11. according to Claim 8 to the stripping off device according to any one of 10, it possesses the pulse motor making described abutment move along described stripping direction,

Described location information is the number of drive pulses of described pulse motor.

12. according to Claim 8 to the stripping off device according to any one of 10, wherein said maintaining body is that described mechanism for stripping is arranged in the top of described contiguity body so that described second plate body is positioned at the flat-hand position of upside and keeps described contiguity body.