JP4109139B2 - Release film holding device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is used for holding a film peeled off from a plate-like body such as a lead frame or a printed circuit board, particularly after processing such as QFN (Quad Flat Non-Leaded Package) and SON (Small Outline Non-Leaded Package). The present invention relates to a peeling film holding device.
[0002]
[Prior art]
In a printed circuit board on which an electronic component such as a semiconductor device is mounted, a film is attached to a surface opposite to the mounting surface so that the resin does not go around when the electronic component is sealed. Such a film is, after resin sealing, for example, attached to a winding member with a double-sided pressure-sensitive adhesive tape and wound (for example, see Patent Documents 1 and 2).
[0003]
[Patent Document 1]
Japanese Patent No. 2700083 [Patent Document 2]
Japanese Patent No. 2999904 [0004]
[Problems to be solved by the invention]
However, if the peeled film is wound up with the double-sided adhesive tape, the tape is consumed for each film, and the running cost is increased. Further, it is necessary to additionally provide a mechanism for supplying the adhesive tape. In addition, it is necessary to configure the release tape so that foreign matter or the like adheres to the adhesive tape and does not decrease the adhesive strength before use. For this reason, the configuration of the apparatus itself is complicated and expensive.
[0005]
Therefore, an object of the present invention is to provide a peeled film holding device capable of appropriately collecting a peeled film despite having a simple and inexpensive configuration.
[0006]
As a means for solving the above problems, the present invention provides:
A peeling film holding device for holding a film that is peeled off from the other surface of a plate-like body mounted with an electronic component on one side and sealed with a resin,
A suction wall having a plurality of suction holes for sucking the non-stick surface of the film to be peeled from the plate-like body;
The suction holes are sparsely arranged on the peeling start side so that a suction force that does not hinder the movement can be applied to the film approaching the suction wall, and separated from the suction wall on the peeling completion side. In order to prevent a reduction in the suction force acting on the film, it is arranged more densely than the peeling start side .
[0007]
With this configuration, the film being peeled from the plate-like body can be held along the suction wall while being sucked by the plurality of suction holes and sucked to the suction wall when the peeling is completed. is there. Since it is only necessary to suck in air through the suction hole, the configuration is simplified and it can be produced at low cost. And since the non-sticking surface of a film can always be attracted | sucked and the whole sticking surface can be exposed, it becomes possible to perform a subsequent process easily.
[0008]
It is preferable that the film is peeled while maintaining a predetermined angle with respect to the suction wall.
[0009]
According to this configuration, a strong suction force can be applied to the peeled portion of the film, while a relatively weak suction force can be applied to the already peeled portion to easily carry the film along the suction wall. It becomes possible to make it.
[0010]
If the suction wall is covered with a cover and partitioned into a plurality of suction regions along the peeling direction of the film so that the suction force at each suction hole can be adjusted, it corresponds to the peeling position of the film. By applying a suction force, it is preferable in that the film can be peeled and conveyed in the most suitable state.
[0012]
With a film recovery member that comes in contact with and separates from the film sucked and held on the suction wall, and attaches and collects the film, the collection of the film peeled off from the plate-like body is scattered in a space-saving manner. It is preferable in that it can be performed automatically without performing.
[0013]
The film recovery member includes a film recovery plate to which films peeled off from a plate-like body are sequentially attached. When the film recovery plate is detachably mounted on a lifting platform, the recovered film is discarded. Is preferable in that it can be easily performed.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments according to the present invention will be described below with reference to the accompanying drawings.
[0015]
Fig.1 (a) and FIG.1 (b) show the film peeling apparatus which concerns on this embodiment. This film peeling apparatus generally has a configuration in which a lead frame supply unit 2, a lead frame transport unit 3, a lead frame preheating unit 4, a film peeling unit 5, and a lead frame storage unit 6 are provided on a base plate 1.
[0016]
The lead frame supply unit 2 includes a supply magazine 8 in which lead frames 7 as an example of a plate-like body are accommodated in a stacked state. The supply magazine 8 can be attached to and detached from the base plate 1 and is arranged in two places.
[0017]
As shown in FIG. 2A, the lead frame 7 is formed by pressing or etching a conductive plate material to form external leads 10 on the frame portion 9 and from the frame portion 9 via the support piece 11. A die pad 12 supported at four corners is formed. A semiconductor chip 13 is mounted on the die pad 12, and the semiconductor chip 13 and the external lead 10 are electrically connected (wire bonding) with a wire 14. An adhesive film 15 is attached to the lower surface of the lead frame 7. On the upper surface, as shown in FIG. 2B, the semiconductor chip 13, the die pad 12, the wire 14, and a part of the external lead 10 are formed. Resin-sealed. As shown in FIG. 2C, the film 15 is stuck so as to protrude from one end portion of the lead frame 7, and this protruding portion, that is, the non-sticking region can be easily sandwiched by the film peeling portion 5 described later. It has become. However, as shown in FIG. 2 (d), it is possible to form a non-sticking region by forming a notch 7 a at one end of the lead frame 7. According to this configuration, it is possible to reduce the amount of film 15 used compared to that shown in FIG. 2C, and the film 15 does not protrude from the lead frame 7 and is convenient for handling. .
[0018]
The lead frame 7 accommodated in the supply magazine 8 is sent upward by a delivery device 16 as shown in FIG. The delivery device 16 is provided with a delivery plate 18 at the tip of the ball screw 17, and by driving a pulse motor (not shown), the ball screw 17 is rotated and the delivery plate 18 is moved up and down to stop at a desired position. Is possible.
[0019]
As shown in FIGS. 1 (b), 3 (a) and 3 (b), the lead frame transport unit 3 can reciprocate along the guide rail 19 extending in the longitudinal direction above the base plate 1. The first transport unit 20 and the second transport unit 21 are provided. As shown in FIG. 3A, each of the transfer units 20 and 21 has holding arms 24 that can be opened and closed on both sides of a block 23 that is moved up and down via a rod 22 a by driving an actuator 22. As shown in FIG. 3B, the tip of the holding arm 24 is a holding portion 24 a that is bent at a substantially right angle along the side edge of the lead frame 7, and holds the lead frame 7 between the block 23. Thus, positioning is possible. Further, a contact piece 23a is formed at the end of the block 23 via an escape groove 23b so that the lead frame 7 can be guided in the longitudinal direction thereof. Each of the transfer units 20 and 21 can be individually moved to an arbitrary position by a ball screw using a pulse motor or the like as a drive source, for example. Here, the lead frame 7 is transported from the lead frame supply unit 2 to the lead frame preheating unit 4 by the first transport unit 20, and the film peeling unit 5 and the film peeling unit 5 from the lead frame preheating unit 4 by the second transport unit 21. To the lead frame collection unit 6.
[0020]
The lead frame preheating unit 4 includes a heater rail 25 on which the lead frame 7 is placed. The heater rail 25 has a heater (not shown). The heater is temperature-controlled by a controller (not shown).
[0021]
As shown in FIGS. 4 and 5, the film peeling unit 5 is generally formed by providing a peeling unit main body 26 with a guide unit 27, a film clamping unit 28, a film holding unit 29, and a film collection unit 30. .
[0022]
The peeling part main body 26 is box-shaped, has an opening 31 on one end side, and includes a guide shaft 32 arranged side by side in the longitudinal direction. A film clamping unit 28 is attached to the guide shaft 32 so as to be capable of reciprocating.
[0023]
The guide portion 27 is formed of a rectangular frame that guides the peripheral portion of the lead frame 7 conveyed by the lead frame conveyance portion 3, and is detachably attached to the upper surface opening of the peeling portion main body 26. Relief portions 27 a for avoiding interference with the holding arm 24 of the lead frame transport portion 3 are formed on the long side facing edge of the guide portion 27, respectively. A plurality of such guide portions 27 are prepared according to the difference in the form of the lead frame 7, and are replaced and used each time.
[0024]
As shown in FIG. 6A, the film clamping unit 28 enables the first clamping piece 34 and the second clamping piece 35 to be contacted and separated by the chuck member 33.
[0025]
An air chuck is used as the chuck member 33, and the protruding arm portions 36a and 36b can be contacted and separated. Brackets 37a and 37b are fixed to the arms 36a and 36b, respectively. The brackets 37a and 37b are respectively provided with rectangular holes 37c and 37d through which the air chuck arms 36a and 36b are inserted. The brackets 37a and 37b are fixed by screwing screws into the arm portions 36a and 36b.
[0026]
The first sandwiching piece 34 includes protrusions 34a at two locations below, and is fitted into an insertion hole 37c formed by inserting the arm portion 36a through the rectangular hole of the bracket 37a. On the other hand, the 2nd clamping piece 35 is provided with the protrusion 35a in one lower center part, and is rotatably inserted in the insertion hole 37e of the said bracket 37b, as shown in FIG.6 (b). As a result, the second clamping piece 35 is rotatable with respect to the first clamping piece 34, and the clamping surfaces can always be brought into contact with each other regardless of assembly errors.
[0027]
As shown in FIG. 7A, the first holding piece 34 and the second holding piece 35 are extended so that the leading ends approach each other, and the film 15 can be held by the leading ends. ing. A recess 38 is formed at the tip of the second sandwiching piece 35 as shown in FIG. 7C, and the film 15 can be sandwiched between the recess 38 and a corner 39 below the tip of the first sandwiching piece 34. . The second sandwiching piece 35 has a curved portion 40 formed in the upper portion of the recess 38 and is devised so as not to be cut even when it comes into contact with the film 15. In addition, the shape of the part which clamps the film 15 is not restricted to what is shown in FIG.7 (c), For example, as shown in FIG.7 (d), it is also possible to comprise so that a mutual unevenness | corrugation may mesh | engage. .
[0028]
As shown in FIGS. 4 and 5, the film clamping unit 28 is rotatably supported by a moving table 41 that is attached to a guide shaft 32 provided in the peeling unit main body 26 so as to be reciprocally movable. The moving table 41 reciprocates along the guide shaft 32 by a motor 41a that can be driven forward and backward. As shown in FIG. 8, support walls 42 are erected on the upper surface of the moving table 41 at a predetermined interval, and the film clamping unit 28 is supported between the support walls 42 via a substantially U-shaped turning arm 43. . The turning arm 43 drives the actuator 43a provided on one support wall 42, and turns by transmitting power through the pulley 44a, the belt 45, and the pulley 44b. The turning position of the turning arm 43, that is, the film clamping unit 28 is regulated by a stopper (not shown). Here, the film clamping unit 28 is positioned at an inclined position where the film 15 adhered to the lead frame 7 by the clamping pieces 34 and 35 can be clamped, and a vertical position perpendicular to the lead frame 7. ing. Further, the position where the film 15 is held by the holding pieces 34 and 35 is set at a predetermined interval with respect to the lead frame 7, that is, when the film 15 is peeled from the lead frame 7, the film 15 being peeled from the lead frame 7 is predetermined. The angle α (see FIG. 11D) is determined. The smaller the predetermined angle α is, the easier it is to peel the film 15 from the lead frame 7. However, as will be described later, the film 15 is slidably held by the film holding portion 29 and the bending of the film 15 itself is taken into consideration. The value is determined.
[0029]
The film holding part 29 is provided on the suction wall 46 on the upper surface of the peeling part main body 26 adjacent to the guide part 27. That is, a plurality of suction holes 47 are formed in the suction wall 46, and the upper portion of the suction wall 46 is covered with the first cover 48 and the second cover 49. A first suction space 50 is formed by the first cover 48. A partition wall 51 is formed in the second cover 49, and a second suction space 52 and a third suction space 53 are formed by the second cover 49. A first exhaust pipe 54 is connected to the first suction space 50, a second exhaust pipe 55 is connected to the second suction space 52, and a third exhaust pipe 56 is connected to the third suction space 53. The first exhaust pipe 54, the second exhaust pipe 55, and the third exhaust pipe 56 are connected to a suction device (not shown), and open and close each valve (not shown) provided in the middle of each exhaust pipe. Thus, the film 15 can be sucked from the first, second, and third suction spaces 50, 52, and 53 and sucked to the lower surface of the suction wall 46 through the suction holes 47. Note that the suction hole 47 of the suction wall 46 is formed sparsely between the entire first suction region communicating with the first suction space 50 and the guide portion 27 side of the second suction region communicating with the second suction space 52. Has been. This is to prevent the suction force from acting too strongly in the part close to the film 15. Further, in the third suction area communicating with the third suction space 53, another suction area is provided so that the film 15 can be reliably sucked to the suction wall 46 when the sandwiching state of the film 15 by the sandwiching pieces 34 and 35 is released. The suction holes 47 are formed more densely than the above.
[0030]
The film collection unit 30 includes a film collection plate 57 that is moved up and down by an actuator 30 a and is disposed below the film holding unit 29. The film collection plate 57 is slidably attached to and removed from a support plate 58 provided on a rod 30b extending from the actuator 30a. The upward movement position of the film collection plate 57 is detected by a proximity sensor (not shown). The proximity sensor is highly sensitive, and can detect the position of the upper surface of the film 15 positioned at the top even if the collected films 15 are stacked. Thereby, it is possible to always raise the film collection plate 57 to the same position with respect to the lower surface of the suction wall 46.
[0031]
The lead frame storage unit 6 includes two storage magazines 59 that store the lead frame 7 from which the film 15 has been peeled off. A reception device 60 is provided below each storage magazine 59. The reception device 60 has a configuration similar to that of the supply magazine 8 and includes a reception plate 62 that can be moved up and down via a ball screw 61 that rotates by driving of a pulse motor.
[0032]
Next, the operation of the film peeling apparatus having the above configuration will be described with reference to FIGS. 11 and 12 according to the timing chart of FIG.
[0033]
The first transport unit 20 of the lead frame transport unit 3 is driven, and the lead frame 7 accommodated in the supply magazine 8 is transported to the one heater rail 25 of the lead frame preheating unit 4. In the supply magazine 8, when the uppermost lead frame 7 is conveyed, the delivery device 16 is driven to position the next lead frame 7 at the uppermost position. Further, the first transport unit 20 transports the next lead frame 7 to the heater rail 25 where the lead frame preheating unit 4 remains. The first transport unit 20 stands by above the supply magazine 8 while the lead frame 7 is positioned on both heater rails 25.
[0034]
When the preheating of the lead frame 7 is completed, the second transport unit 21 is driven and the lead frame 7 is transported to the guide unit 27 of the film peeling unit 5. At this time, the lead frame 7 is guided by maintaining the holding state by the holding arm 24.
[0035]
In the film clamping unit 28, the clamping pieces 34 and 35 are opened, and the film is clamped to the film 15 adhered to the lead frame 7 by turning the turning arm 43 as shown in FIG. The part 28 is inclined so that the one end part (peeling area) of the film 15 is easily held between the holding pieces 34 and 35. Then, while moving the moving table 41, the holding pieces 34 and 35 are brought close to each other to hold the non-sticking area of the film 15, and the turning arm 43 is turned to hold the film as shown in FIG. The part 28 is moved to the vertical position. Subsequently, peeling of the film 15 from the lead frame 7 is started by moving the moving table 41. At this time, the holding position of the lead frame 7 and the film 15 is maintained at a predetermined interval.
[0036]
Since the film 15 being peeled moves to the film holding part 29 as shown in FIG. 11C, the film 15 is sucked to the suction wall 46 of the peeling part main body 26 by driving the suction device. Here, first, the film 15 is sucked through the first exhaust pipe 54 and the second exhaust pipe 55.
[0037]
As described above, the holding position of the film 15 by the holding pieces 34 and 35 is separated from the lead frame 7 by a predetermined dimension. As shown in FIG. 11D, the peeling position on the lead frame 7 and the holding pieces 34 and 35 are separated from each other. An inclination of a predetermined angle α is formed between the holding position by 35. That is, the distance from the suction wall 46 of the peeling portion main body 26 to the film 15 differs depending on the location, and a difference occurs in the suction force acting on the film 15 from each suction hole 47. The suction holes 47 in the second suction region are arranged so as to be dense on the peeling direction side. Thereby, in the peeling position of the film 15 of the lead frame 7, the strong suction | attraction force of the grade which does not prevent a movement with respect to the film 15 can be made to act, and a peeling state can be stabilized. On the other hand, on the clamping position side away from the peeling position, the suction force 47 that is densely arranged compensates the suction force that has been weakened individually, thereby preventing a reduction in the suction force acting on the film 15 away from the suction wall 46. can do. Therefore, if the distance between the suction wall 46 (peeling position on the lead frame 7) and the holding pieces 34 and 35 is adjusted to a predetermined dimension (indicated by C in FIG. 7A), each suction is performed according to the place. An appropriate suction force can be applied to the film 15 through the hole 47, and the film 15 can be smoothly moved along the suction wall 46.
[0038]
As shown in FIG. 12A, the peeled film 15 moves away from the first suction area and moves to the second and third suction areas, so that the suction from the first exhaust pipe 54 is stopped, Suction from the third exhaust pipe 56 is started. At this time, the film 15 in the vicinity of the sandwiching pieces 34 and 35 is in close contact with the suction wall 46 and a strong suction force acts on the film 15, so that the film 15 is firmly held on the suction wall 46.
[0039]
When the film 15 is completely peeled from the lead frame 7, the holding pieces 34, 35 are maintained as shown in FIG. 12B while maintaining the suction state from the second exhaust pipe 55 and the third exhaust pipe 56. To release the clamping state. This makes it possible to reliably separate the sandwich pieces from the film 15 regardless of the adhesive strength of the film 15. Then, after moving the holding piece to a position away from the film 15, as shown in FIG. 12C, the film holding portion 28 is moved to the initial position in a closed state. The reason why the sandwiching piece is in a closed state is to prevent problems such as being caught by other parts (for example, a film).
[0040]
Further, the second transport unit 21 is driven, and the lead frame 7 is transported to the lead frame storage unit 6 and collected in the storage magazine 59. In the storage magazine 59, the reception device 60 raises the reception plate 62 so that the lead frame 7 can always be collected at the uppermost position.
[0041]
Further, the film 15 peeled off from the lead frame 7 is collected by the film collection unit 30 while being sucked by the suction wall 46. That is, the actuator 30a is driven to raise the film collection plate 57 and bring it into contact with the adhesive layer of the film 15. At this time, the suction from the second exhaust pipe 55 and the third exhaust pipe 56 is stopped, and the suction force acting on the film 15 is extinguished. In this case, the film 15 sucked to the suction wall 46 by discharging air from both the exhaust pipes 55 and 56 may be forcibly pressed against the film collection plate 57 side. Then, the film 15 is adhered to the film recovery plate 57 using the adhesive force remaining in the adhesive layer. Subsequently, the actuator 15a is driven to lower the film collection plate 57, thereby collecting the film 15.
[0042]
The film 15 is peeled from the lead frame 7 as described above. If the proximity sensor detects that the film 15 stacked on the film collection plate 57 of the film collection unit 30 has reached a predetermined amount, the film is collected. The plate 57 may be replaced. The replacement of the film collection plate 57 may be performed automatically, or may be performed manually by notifying the operator by a notifying device (buzzer, lamp, etc.) not shown.
[0043]
In addition, this invention is not limited to the said embodiment, If it is a range which does not deviate from the main point of invention, it can change suitably.
[0044]
【The invention's effect】
As is clear from the above description, according to the present invention, since the suction wall formed with a plurality of suction holes for sucking the non-adhering surface of the film is provided, despite the simple and inexpensive configuration, While the film being peeled can be moved while being sucked, the film after the peeling is completed can be sucked and held appropriately. Further, since it is the non-sticking surface of the film that is sucked into the suction wall, the entire sticking surface can be maintained in a state where it can be stuck and can be easily collected.
[Brief description of the drawings]
1A is a schematic plan view of a film peeling apparatus according to the present embodiment, and FIG. 1B is a side view thereof.
2A is a plan view of a lead frame used in the film peeling apparatus of FIG. 1, FIG. 2B is a cross-sectional view taken along line AA after sealing molding of FIG. Is a plan view showing a state before peeling the film from the lead frame, and (d) is a plan view of another lead frame.
3A is a partially enlarged cross-sectional view of the first transport unit, and FIG. 3B is a partially enlarged perspective view of the first transport unit.
FIG. 4 is a perspective view of a film peeling portion.
FIG. 5 is a front sectional view of FIG. 4;
6A is an exploded perspective view of a film clamping portion, and FIG. 6B is a perspective view of the clamping piece.
7A is a partially enlarged view of the sandwiching piece, FIG. 7B is an explanatory view showing the turning state of the sandwiching piece, FIG. 7C is an enlarged view of the tip portion of the sandwiching piece, and FIG. It is an enlarged view of the front-end | tip part.
FIG. 8 is a perspective view showing a turning mechanism of a film clamping unit.
FIG. 9 is a partially enlarged cross-sectional view of a film collection unit.
FIG. 10 is a plan view of a film holding unit.
FIG. 11 is a schematic view showing a process of peeling a film from a lead frame.
FIG. 12 is a schematic view showing a process of peeling a film from a lead frame.
FIG. 13 is a timing chart showing a procedure for peeling a film from a lead frame.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Base plate 2 ... Lead frame supply part 3 ... Lead frame conveyance part 4 ... Lead frame preheating part 5 ... Film peeling part 6 ... Lead frame storage part 7 ... Lead frame 8 ... Supply magazine 9 ... Frame part 10 ... External lead 11 ... Support piece 12 ... Die pad 13 ... Semiconductor chip 14 ... Wire 15 ... Film 16 ... Sending device 17 ... Ball screw 18 ... Sending plate 19 ... Guide rail 20 ... First transport unit 21 ... Second transport unit (positioning means, transport means)
22 ... Actuator 23 ... Block 24 ... Holding arm 25 ... Heater rail 26 ... Peeling part body 27 ... Guide part 28 ... Film clamping part (film clamping means)
DESCRIPTION OF SYMBOLS 29 ... Film holding part 30 ... Film collection | recovery part 31 ... Opening part 32 ... Guide shaft 33 ... Chuck member 34 ... 1st clamping piece (clamping part)
35 ... 2nd clamping piece (clamping part)
36 ... Arm 37 ... Bracket 38 ... Concave 39 ... Corner 40 ... Curve 41 ... Moving platform (moving means)
42 ... support wall 43 ... turning arm 44 ... pulley 45 ... belt 46 ... suction wall 47 ... suction hole 48 ... first cover 49 ... second cover 50 ... first suction space 51 ... partition wall 52 ... second suction space 53 ... 3rd suction space 54 ... 1st exhaust pipe 55 ... 2nd exhaust pipe 56 ... 3rd exhaust pipe 57 ... Film recovery plate 58 ... Support plate 59 ... Storage magazine 60 ... Reception device 61 ... Ball screw 62 ... Reception plate

Claims (5)

A peeling film holding device for holding a film that is peeled off from the other surface of a plate-like body mounted with an electronic component on one side and sealed with a resin,
A suction wall having a plurality of suction holes for sucking the non-stick surface of the film to be peeled from the plate-like body;
The suction holes are sparsely arranged on the peeling start side so that a suction force that does not hinder the movement can be applied to the film approaching the suction wall, and separated from the suction wall on the peeling completion side. A peeling film holding device, wherein the peeling film holding device is arranged denser than the peeling start side so as to prevent a reduction in suction force acting on the film.   The peelable film holding device according to claim 1, wherein the film is peeled off while maintaining a predetermined angle with respect to the suction wall.   2. The suction wall according to claim 1, wherein an upper surface of the suction wall is covered with a cover, and the suction force in each suction hole can be adjusted by dividing the suction wall into a plurality of suction regions along the peeling direction of the film. 2. A release film holding device according to 2. The suction wall apart relative contact against sucked and held film, according to claims 1, characterized in that it comprises a film collecting member for collecting by sticking a film in any one of 3 Film peeling equipment. Said film collecting member includes a film collecting plate film peeled from the plate-like body are sequentially attached, claim 4 wherein film collecting plate, characterized in that it is mounted removably to the lifting platform The film peeling apparatus as described in.

Images