TWM583542U - Dedicated table for manufacturing pneumatically fixed pressure sensing film - Google Patents

Abstract

A dedicated table for producing a pressure-fixed pressure-sensing film, comprising a substrate having a plurality of adsorption holes formed on the top surface for adsorbing a sheet, and a plurality of substrates standing on a horizontal surface spaced apart from each other and supporting the substrate. A base, a plurality of pressure sensors for measuring the pressure on the substrate, and a control module electrically connected to the bases and the pressure sensors. Each base can push the substrate in the up-down direction. The control module can control the bases to move the substrate up and down to adjust the inclination or height of the substrate according to the data measured by the pressure sensors.

Description

Dedicated table for making fixed pressure sensing film

The present invention relates to a platform, in particular to a dedicated table for manufacturing a pressure-fixed pressure sensing film.

At present, there are methods that use a thin film to adhere to the wafer and thereby drive the wafer to move. This type of film has very strict requirements for the coating of adhesive and the size of the adhesive. The current production method is: The film is placed on a platform that adsorbs the film through negative pressure, and then processes such as dispensing and rolling uniformly on the film are sequentially performed. However, the top surface of the platform used to adsorb the film is easily inclined due to various factors, such as the flat surface of the platform is placed unevenly, or the platform has been used for a long time and has abrasion at the bottom. At this time, if the adhesive on the film is rolled by a roller, If it is uniform, it will make the distribution of the roller force uneven, resulting in poor adhesive uniformity and affecting its characteristics. On the other hand, if the top surface of the platform is horizontal, but the force of the roller is not uniform, it will also produce The aforementioned problem of uneven distribution of viscose, so if the inclination or height of the platform can be adjusted according to the requirements during processing, the quality of the product can be improved and automation can be facilitated.

Therefore, an object of the present invention is to provide a dedicated table for producing a fixed pressure sensing film that can adjust the inclination or height in real time to maintain the level.

Therefore, the new special-purpose table for producing a fixed pressure sensing film for air pressure is suitable for a sheet. The dedicated table for producing a pressure-fixed pressure-sensing film includes a substrate having a plurality of adsorption holes on the top surface which can be used to adsorb the sheet, and a plurality of bases standing on a horizontal surface spaced from each other and supporting the substrate. A plurality of pressure sensors for measuring the pressure on the substrate, and a control module electrically connected to the base and the pressure sensors. Each base can push the substrate in the up-down direction. The control module can control the bases to move the substrate up and down to adjust the inclination or height of the substrate according to the data measured by the pressure sensors.

The effect of the new model is that when a sheet such as a film is adsorbed on the substrate and the sheet is rolled through a roller, the pressure sensors record the pressure felt through the substrate. The control module can adjust the height of the bases according to the pressure on different places on the substrate to change the inclination or height of the top surface of the substrate, so that the top surface of the substrate can be kept horizontal, or the The top surface is inclined to eliminate the uneven pressure error during rolling, so that the sheet can be evenly pressed, which not only improves the accuracy, but also facilitates production line automation.

Referring to FIG. 1, FIG. 2, and FIG. 3, an embodiment of the novel dedicated table 1 for producing a new type of pressure-fixed pressure-sensing film includes a substrate 11 and a plurality of substrates 11 formed by depressions from the top to the bottom. Below the four corners of the substrate 11, a base 12 supporting the substrate 11, a plurality of pressure sensors 13, respectively disposed on the bases 12, a horizontal sensor 14, disposed on the substrate 11, A control module 15 on the substrate 11 and a negative pressure generator 16 connected to the suction holes 110 of the substrate 11.

Each base 12 includes a base 121 erected on a plane, a lifting rod 122 movably inserted on the base 121, and a lifting rod 122 disposed on the base 121 and capable of controlling the lifting rod 122. Power source 123 moving up and down. In this embodiment, the lifting rod 122 is provided with a rack (not shown) on one side thereof, and the power source 123 is a motor capable of driving a gear (not shown) to rotate. The power source 123 passes through the The gear meshes with the rack of the lifting rod 122 to drive the lifting rod 122 to move up and down relative to the base body 121. It should be noted that the power source 123 and the lifting rod 122 may also be hydraulic cylinders, hydraulic rods that can be driven by the hydraulic cylinders, or other replaceable lifting mechanisms. And in FIG. 3, the installation position of the power source 123 is only for illustration. In fact, the power source 123 can be configured with the required mechanism and space. The power source 123 is not shown in FIG. 1.

The pressure sensors 13 are respectively disposed on the lifting rods 122 of the bases 12 and can be used to detect the pressure when the substrate 11 is pressed against the lifting rods 122. The level sensor 14 is disposed on the bottom surface of the substrate 11 and can be used to measure the level of the substrate 11. The control module 15 is electrically connected to the power source 123 of the bases 12, the pressure sensors 13, the level sensor 14, and the negative pressure generator 16. It should be noted that the installation positions of the pressure sensor 13, the level sensor 14, and the control module 15 in FIG. 2 and FIG. 3 are for illustration only. In fact, they can be buried, attached, and detached. And other common sensors and controllers, and the aforementioned components are not shown in FIG. 1.

When this embodiment is used, after placing a sheet such as a film 2 on the top surface of the substrate 11, the negative pressure generator 16 is turned on to adsorb the film 2 on the top of the substrate 11 through the adsorption holes 110. In the foregoing process, the level sensor 14 senses whether the substrate 11 is horizontal. If not, the control module 15 controls the power source 123 of the bases 12 to make the lifting rods 122 move up and down. In order to adjust the inclination of the substrate 11, when the film 2 is not horizontally attached to the substrate 11 with the naked eye or other sensors, the negative pressure generator 16 can be controlled through the control module 15, The suction force of all or specific suction holes 110 is adjusted to avoid unevenness of the film 2.

Then glue is injected on the film 2 and rolled by a glue roller 3. The pressure on the substrate 11 during the rolling is recorded by the pressure sensors 13, and when the rolling is sensed, When the pressure of the gluer 3 is uneven, the control module 15 controls the bases 12 to adjust the height or inclination of the substrate 11 so that the substrate 11 can respond to the pressure of the glue roller 3 and eliminate the pressure. Uneven error. In addition to the above-mentioned applications, the control module 15 can also be electrically connected to other actuating mechanisms to adjust different parameters of the pressure-fixed pressure-sensing film production dedicated table 1 instead of adjusting the aforementioned parameters as limit.

In summary, by controlling the bases 12 through the control module 15, the height and inclination of the substrate 11 can be adjusted so as to maintain the levelness or eliminate the error of uneven pressure applied by the roller 3, so it can be achieved. The purpose of this new model.

However, the above are only examples of the new model. When the scope of implementation of the new model cannot be limited by this, any simple equivalent changes and modifications made in accordance with the scope of the patent application of the new model and the content of the patent specification are still Within the scope of this new patent.

1‧‧‧ special table for pressure-fixed pressure sensing film production

11‧‧‧ substrate

110‧‧‧ adsorption hole

12‧‧‧ base

121‧‧‧ seat

122‧‧‧Lift

123‧‧‧Power source

13‧‧‧Pressure sensor

14‧‧‧level sensor

15‧‧‧control module

16‧‧‧ negative pressure generator

2‧‧‧ film

3‧‧‧Roller

Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a perspective view illustrating an embodiment of a dedicated table for producing the novel air pressure fixed pressure sensing film; FIG. 2 Is a schematic side view illustrating the state of the side view of FIG. 1; and FIG. 3 is a schematic side view illustrating the state of the present invention when it is operating.

Claims (4)

A dedicated table for producing a pressure-fixed pressure-sensing film is suitable for a sheet, and includes: a substrate, on the top surface of which a plurality of adsorption holes for adsorbing the sheet are formed; and a plurality of bases are erected at intervals from each other. A horizontal plane and used to support the substrate, each base can push the substrate in the up-down direction; a plurality of pressure sensors for measuring the pressure on the substrate; and a control module and the bases And the pressure sensors are electrically connected, and according to the data measured by the pressure sensors, the bases can be controlled to drive the substrate to move up and down to adjust the inclination or height of the substrate. The special platform for producing a fixed pressure sensing film according to claim 1, further comprising at least one negative pressure generator that communicates with the adsorption holes and provides suction through a negative pressure method, and the control module is based on the pressure sensing The result measured by the device controls the suction force of the at least one negative pressure generator to adjust the suction force distribution of the suction holes. According to claim 1, the dedicated table for manufacturing a pressure-fixed pressure-sensing film further includes at least one horizontal sensor disposed on the substrate and electrically connected to the control module. The control module may be configured according to the at least one The data measured by the level sensor controls the bases to drive the substrate to move up and down to adjust the inclination or height of the substrate. According to any one of claims 1 to 3, a dedicated table for producing a pressure-fixed pressure-sensing film, wherein each base includes a base, and a base that is inserted on the base and can be moved up and down and connected to the substrate. The lifting rod and a power source arranged on the base body and capable of controlling the lifting rod to move up and down, the pressure sensors are respectively disposed on the lifting rods.