CN105706003B - 用于euv投射光刻的照明光学装置以及照明系统 - Google Patents

用于euv投射光刻的照明光学装置以及照明系统 Download PDF

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Publication number
CN105706003B
CN105706003B CN201480060611.3A CN201480060611A CN105706003B CN 105706003 B CN105706003 B CN 105706003B CN 201480060611 A CN201480060611 A CN 201480060611A CN 105706003 B CN105706003 B CN 105706003B
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CN
China
Prior art keywords
illumination
facet
mirror
field
specular
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CN201480060611.3A
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English (en)
Chinese (zh)
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CN105706003A (zh
Inventor
M.帕特拉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70116—Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201480060611.3A 2013-09-11 2014-08-25 用于euv投射光刻的照明光学装置以及照明系统 Active CN105706003B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE201310218131 DE102013218131A1 (de) 2013-09-11 2013-09-11 Beleuchtungsoptik sowie Beleuchtungssystem für die EUV-Projektionslithographie
DE102013218131.0 2013-09-11
PCT/EP2014/067961 WO2015036226A1 (de) 2013-09-11 2014-08-25 Beleuchtungsoptik sowie beleuchtungssystem für die euv-projektionslithographie

Publications (2)

Publication Number Publication Date
CN105706003A CN105706003A (zh) 2016-06-22
CN105706003B true CN105706003B (zh) 2019-06-28

Family

ID=51542327

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480060611.3A Active CN105706003B (zh) 2013-09-11 2014-08-25 用于euv投射光刻的照明光学装置以及照明系统

Country Status (6)

Country Link
US (1) US9915874B2 (enExample)
JP (2) JP6703944B2 (enExample)
KR (1) KR102343801B1 (enExample)
CN (1) CN105706003B (enExample)
DE (1) DE102013218131A1 (enExample)
WO (1) WO2015036226A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015217603A1 (de) 2015-09-15 2017-03-16 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithografie
DE102018201457A1 (de) * 2018-01-31 2019-08-01 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
US11543753B2 (en) * 2019-10-30 2023-01-03 Taiwan Semiconductor Manufacturing Co., Ltd. Tunable illuminator for lithography systems
DE102024205226A1 (de) 2024-06-06 2025-02-20 Carl Zeiss Smt Gmbh Verfahren zum Betrieb eines optischen Systems einer Lithographie-Projektionsbelichtungsanlage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008009600A1 (de) * 2008-02-15 2009-08-20 Carl Zeiss Smt Ag Facettenspiegel zum Einsatz in einer Projektionsbelichtungsanlage für die Mikro-Lithographie
DE102008000967A1 (de) * 2008-04-03 2009-10-08 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die EUV-Mikrolithographie
CN102193334A (zh) * 2010-03-17 2011-09-21 卡尔蔡司Smt有限责任公司 用于投射光刻的照明光学系统
CN102257421A (zh) * 2008-10-20 2011-11-23 卡尔蔡司Smt有限责任公司 用于引导辐射束的光学模块

Family Cites Families (18)

* Cited by examiner, † Cited by third party
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US5361292A (en) * 1993-05-11 1994-11-01 The United States Of America As Represented By The Department Of Energy Condenser for illuminating a ring field
US6014252A (en) 1998-02-20 2000-01-11 The Regents Of The University Of California Reflective optical imaging system
DE10053587A1 (de) * 2000-10-27 2002-05-02 Zeiss Carl Beleuchtungssystem mit variabler Einstellung der Ausleuchtung
DE19931848A1 (de) 1999-07-09 2001-01-11 Zeiss Carl Fa Astigmatische Komponenten zur Reduzierung des Wabenaspektverhältnisses bei EUV-Beleuchtungssystemen
US7333178B2 (en) * 2002-03-18 2008-02-19 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US6771352B2 (en) * 2002-03-18 2004-08-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE10317667A1 (de) 2003-04-17 2004-11-18 Carl Zeiss Smt Ag Optisches Element für ein Beleuchtungssystem
JP2006108224A (ja) * 2004-10-01 2006-04-20 Nikon Corp 照明光学系、露光装置及びマイクロデバイスの製造方法
US7277158B2 (en) * 2004-12-02 2007-10-02 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7405809B2 (en) * 2005-03-21 2008-07-29 Carl Zeiss Smt Ag Illumination system particularly for microlithography
JP2007134464A (ja) * 2005-11-09 2007-05-31 Canon Inc 多層膜を有する光学素子及びそれを有する露光装置
DE102006059024A1 (de) * 2006-12-14 2008-06-19 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie, Beleuchtungsoptik für eine derartige Projektionsbelichtungsanlage, Verfahren zum Betrieb einer derartigen Projektionsbelichtungsanlage, Verfahren zur Herstellung eines mikrostrukturierten Bauteils sowie durch das Verfahren hergestelltes mikrostrukturiertes Bauteil
DE102007045396A1 (de) 2007-09-21 2009-04-23 Carl Zeiss Smt Ag Bündelführender optischer Kollektor zur Erfassung der Emission einer Strahlungsquelle
CN101946190B (zh) * 2008-02-15 2013-06-19 卡尔蔡司Smt有限责任公司 微光刻的投射曝光设备使用的分面镜
DE102008049586A1 (de) * 2008-09-30 2010-04-08 Carl Zeiss Smt Ag Feldfacettenspiegel zum Einsatz in einer Beleuchtungsoptik einer Projektionsbelichtungsanlage für die EUV-Mikrolithographie
DE102009032194A1 (de) * 2008-10-16 2010-04-22 Carl Zeiss Smt Ag Optischer Spiegel mit einer Mehrzahl benachbarter Spiegelelemente und Verfahren zur Herstellung eines derartigen Spiegels
JP6041304B2 (ja) * 2009-03-27 2016-12-07 カール・ツァイス・エスエムティー・ゲーエムベーハー Ｅｕｖマイクロリソグラフィ用の照明光学系、この種の照明光学系用のｅｕｖ減衰器、及びこの種の照明光学系を有する照明系及び投影露光装置
DE102011076145B4 (de) 2011-05-19 2013-04-11 Carl Zeiss Smt Gmbh Verfahren zum Zuordnen einer Pupillenfacette eines Pupillenfacettenspiegels einer Beleuchtungsoptik einer Projektionsbelichtungsanlage zu einer Feldfacette eines Feldfacettenspiegels der Beleuchtungsoptik

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008009600A1 (de) * 2008-02-15 2009-08-20 Carl Zeiss Smt Ag Facettenspiegel zum Einsatz in einer Projektionsbelichtungsanlage für die Mikro-Lithographie
DE102008000967A1 (de) * 2008-04-03 2009-10-08 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die EUV-Mikrolithographie
CN102257421A (zh) * 2008-10-20 2011-11-23 卡尔蔡司Smt有限责任公司 用于引导辐射束的光学模块
CN102193334A (zh) * 2010-03-17 2011-09-21 卡尔蔡司Smt有限责任公司 用于投射光刻的照明光学系统

Also Published As

Publication number Publication date
JP7071436B2 (ja) 2022-05-18
US9915874B2 (en) 2018-03-13
KR102343801B1 (ko) 2021-12-28
JP6703944B2 (ja) 2020-06-03
KR20160054579A (ko) 2016-05-16
JP2020122989A (ja) 2020-08-13
WO2015036226A1 (de) 2015-03-19
JP2016535313A (ja) 2016-11-10
US20160187784A1 (en) 2016-06-30
DE102013218131A1 (de) 2015-03-12
CN105706003A (zh) 2016-06-22

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