CN105635922B - 电容式换能器和样本信息获取装置 - Google Patents
电容式换能器和样本信息获取装置 Download PDFInfo
- Publication number
- CN105635922B CN105635922B CN201510786812.8A CN201510786812A CN105635922B CN 105635922 B CN105635922 B CN 105635922B CN 201510786812 A CN201510786812 A CN 201510786812A CN 105635922 B CN105635922 B CN 105635922B
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- CN
- China
- Prior art keywords
- electrode
- capacitance
- type transducer
- electrostatic screen
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/221—Arrangements for directing or focusing the acoustical waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Gynecology & Obstetrics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-236048 | 2014-11-20 | ||
| JP2014236048A JP2016097033A (ja) | 2014-11-20 | 2014-11-20 | 静電容量型トランスデューサ、及び被検体情報取得装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105635922A CN105635922A (zh) | 2016-06-01 |
| CN105635922B true CN105635922B (zh) | 2019-07-23 |
Family
ID=54608388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510786812.8A Active CN105635922B (zh) | 2014-11-20 | 2015-11-17 | 电容式换能器和样本信息获取装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US10350636B2 (enExample) |
| EP (1) | EP3023778B1 (enExample) |
| JP (1) | JP2016097033A (enExample) |
| CN (1) | CN105635922B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105518885B (zh) | 2013-12-02 | 2018-02-16 | 东芝北斗电子株式会社 | 发光装置 |
| JP2016097033A (ja) * | 2014-11-20 | 2016-05-30 | キヤノン株式会社 | 静電容量型トランスデューサ、及び被検体情報取得装置 |
| JP2016122759A (ja) * | 2014-12-25 | 2016-07-07 | キヤノン株式会社 | 貫通配線を有する電子デバイスの作製方法 |
| JP6544037B2 (ja) * | 2015-05-18 | 2019-07-17 | 株式会社リコー | 発電素子ユニット、及び発電装置 |
| US10918356B2 (en) * | 2016-11-22 | 2021-02-16 | General Electric Company | Ultrasound transducers having electrical traces on acoustic backing structures and methods of making the same |
| JP6852366B2 (ja) * | 2016-11-29 | 2021-03-31 | セイコーエプソン株式会社 | 超音波デバイス、及び超音波装置 |
| JP2018126389A (ja) * | 2017-02-09 | 2018-08-16 | キヤノン株式会社 | 情報処理装置、情報処理方法、およびプログラム |
| JP6939219B2 (ja) * | 2017-08-03 | 2021-09-22 | セイコーエプソン株式会社 | 超音波装置 |
| US11738369B2 (en) * | 2020-02-17 | 2023-08-29 | GE Precision Healthcare LLC | Capactive micromachined transducer having a high contact resistance part |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3749948A (en) * | 1971-06-21 | 1973-07-31 | Seismic Logs | Pressure transducer |
| CN101238754A (zh) * | 2005-10-18 | 2008-08-06 | 株式会社日立制作所 | 超声波换能器、超声波探头以及超声波摄像装置 |
| CN102281818A (zh) * | 2009-01-16 | 2011-12-14 | 株式会社日立医疗器械 | 超声波探头的制造方法以及超声波探头 |
| CN103521421A (zh) * | 2012-07-06 | 2014-01-22 | 佳能株式会社 | 电容式换能器、其制造方法和被检体信息获取装置 |
| CN104145179A (zh) * | 2011-10-11 | 2014-11-12 | Mks仪器公司 | 压力传感器 |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6605043B1 (en) * | 1998-11-19 | 2003-08-12 | Acuson Corp. | Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components |
| US6933059B1 (en) * | 1999-05-07 | 2005-08-23 | Scc Products, Inc. | Electrostatic shielding, low charging-retaining moisture barrier film |
| CN1196215C (zh) * | 1999-05-14 | 2005-04-06 | 三菱电机株式会社 | 板状电池和电子仪器 |
| US6246158B1 (en) * | 1999-06-24 | 2001-06-12 | Sensant Corporation | Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same |
| US6359367B1 (en) * | 1999-12-06 | 2002-03-19 | Acuson Corporation | Micromachined ultrasonic spiral arrays for medical diagnostic imaging |
| US6831394B2 (en) * | 2002-12-11 | 2004-12-14 | General Electric Company | Backing material for micromachined ultrasonic transducer devices |
| US7087023B2 (en) * | 2003-02-14 | 2006-08-08 | Sensant Corporation | Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same |
| US7427825B2 (en) * | 2004-03-12 | 2008-09-23 | Siemens Medical Solutions Usa, Inc. | Electrical interconnections and methods for membrane ultrasound transducers |
| US7405861B2 (en) * | 2004-09-27 | 2008-07-29 | Idc, Llc | Method and device for protecting interferometric modulators from electrostatic discharge |
| US8796901B2 (en) * | 2005-06-17 | 2014-08-05 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having an insulation extension |
| US8477983B2 (en) * | 2005-08-23 | 2013-07-02 | Analog Devices, Inc. | Multi-microphone system |
| JP2009509786A (ja) * | 2005-09-30 | 2009-03-12 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Mems装置及びmems装置における相互接続 |
| US7804970B2 (en) * | 2005-10-24 | 2010-09-28 | Sonosite, Inc. | Array interconnect for improved directivity |
| JP4972350B2 (ja) * | 2006-06-30 | 2012-07-11 | 株式会社日立製作所 | 半導体装置の製造方法 |
| JP4271252B2 (ja) * | 2006-10-12 | 2009-06-03 | オリンパスメディカルシステムズ株式会社 | 超音波振動子セル、超音波振動子エレメント、超音波振動子アレイ及び超音波診断装置 |
| US20090005685A1 (en) * | 2007-06-29 | 2009-01-01 | Canon Kabushiki Kaisha | Ultrasonic probe and inspection apparatus equipped with the ultrasonic probe |
| US7843022B2 (en) * | 2007-10-18 | 2010-11-30 | The Board Of Trustees Of The Leland Stanford Junior University | High-temperature electrostatic transducers and fabrication method |
| US20110071396A1 (en) * | 2008-05-15 | 2011-03-24 | Hitachi Medical Corporation | Ultrasonic probe, method for manufacturing the same and ultrasonic diagnostic apparatus |
| JP5550363B2 (ja) * | 2010-01-26 | 2014-07-16 | キヤノン株式会社 | 静電容量型電気機械変換装置 |
| JP5355777B2 (ja) * | 2010-03-12 | 2013-11-27 | 株式会社日立メディコ | 超音波トランスデューサおよびそれを用いた超音波診断装置 |
| WO2011140082A1 (en) * | 2010-05-03 | 2011-11-10 | Georgia Tech Research Corporation | Cmut devices and fabrication methods |
| US9310485B2 (en) * | 2011-05-12 | 2016-04-12 | Georgia Tech Research Corporation | Compact, energy-efficient ultrasound imaging probes using CMUT arrays with integrated electronics |
| US8724832B2 (en) * | 2011-08-30 | 2014-05-13 | Qualcomm Mems Technologies, Inc. | Piezoelectric microphone fabricated on glass |
| JP6205704B2 (ja) * | 2012-10-25 | 2017-10-04 | セイコーエプソン株式会社 | 超音波測定装置、ヘッドユニット、プローブ及び診断装置 |
| JP2014083283A (ja) * | 2012-10-25 | 2014-05-12 | Seiko Epson Corp | 超音波測定装置、ヘッドユニット、プローブ及び診断装置 |
| JP2014171694A (ja) * | 2013-03-09 | 2014-09-22 | Canon Inc | 静電容量型トランスデューサ、及び静電容量型トランスデューサの製造方法 |
| EP2796210B1 (en) * | 2013-04-25 | 2016-11-30 | Canon Kabushiki Kaisha | Capacitive transducer and method of manufacturing the same |
| JP6271887B2 (ja) * | 2013-07-10 | 2018-01-31 | キヤノン株式会社 | 静電容量型トランスデューサ、プローブ、及び被検体情報取得装置 |
| JP2015023994A (ja) * | 2013-07-26 | 2015-02-05 | セイコーエプソン株式会社 | 超音波測定装置、超音波ヘッドユニット、超音波プローブ及び超音波画像装置 |
| JP2015023995A (ja) * | 2013-07-26 | 2015-02-05 | セイコーエプソン株式会社 | 超音波測定装置、超音波ヘッドユニット、超音波プローブ及び超音波画像装置 |
| WO2016009783A1 (ja) * | 2014-07-16 | 2016-01-21 | 日立アロカメディカル株式会社 | 超音波探触子、その性能評価方法及び超音波診断装置 |
| JP2016097033A (ja) * | 2014-11-20 | 2016-05-30 | キヤノン株式会社 | 静電容量型トランスデューサ、及び被検体情報取得装置 |
| JP2016101417A (ja) * | 2014-11-28 | 2016-06-02 | キヤノン株式会社 | 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置 |
| JP6590601B2 (ja) * | 2015-09-04 | 2019-10-16 | キヤノン株式会社 | トランスデューサユニット、トランスデューサユニットを備えた音響波用プローブ、音響波用プローブを備えた光音響装置 |
-
2014
- 2014-11-20 JP JP2014236048A patent/JP2016097033A/ja active Pending
-
2015
- 2015-11-17 CN CN201510786812.8A patent/CN105635922B/zh active Active
- 2015-11-18 US US14/945,337 patent/US10350636B2/en active Active
- 2015-11-19 EP EP15195316.3A patent/EP3023778B1/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3749948A (en) * | 1971-06-21 | 1973-07-31 | Seismic Logs | Pressure transducer |
| CN101238754A (zh) * | 2005-10-18 | 2008-08-06 | 株式会社日立制作所 | 超声波换能器、超声波探头以及超声波摄像装置 |
| CN102281818A (zh) * | 2009-01-16 | 2011-12-14 | 株式会社日立医疗器械 | 超声波探头的制造方法以及超声波探头 |
| CN104145179A (zh) * | 2011-10-11 | 2014-11-12 | Mks仪器公司 | 压力传感器 |
| CN103521421A (zh) * | 2012-07-06 | 2014-01-22 | 佳能株式会社 | 电容式换能器、其制造方法和被检体信息获取装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20160144402A1 (en) | 2016-05-26 |
| CN105635922A (zh) | 2016-06-01 |
| EP3023778B1 (en) | 2018-06-06 |
| EP3023778A1 (en) | 2016-05-25 |
| US10350636B2 (en) | 2019-07-16 |
| JP2016097033A (ja) | 2016-05-30 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |