CN105563465B - A kind of photoelectrical electrostatic composite flooding microfluidic platform device - Google Patents
A kind of photoelectrical electrostatic composite flooding microfluidic platform device Download PDFInfo
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- CN105563465B CN105563465B CN201610058520.7A CN201610058520A CN105563465B CN 105563465 B CN105563465 B CN 105563465B CN 201610058520 A CN201610058520 A CN 201610058520A CN 105563465 B CN105563465 B CN 105563465B
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- direction displacement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
Abstract
The invention discloses a kind of photoelectrical electrostatic composite flooding microfluidic platform device, including coarse motion platform, X-direction displacement regulation platform, Y-direction displacement regulation platform, Z-direction displacement governor motion, T-shaped microfluidic platform, pulley guide rails mechanism, broach actuator, photoelectric ceramics twin lamella, mechanical slide, wire.After the positioning of coarse motion platform, Y-direction photoelectric ceramics twin lamella produces electrostatic potential and applied under ultraviolet source irradiation produces driving force on broach actuator in the Y direction, promotes Y-direction displacement to reconcile platform by displacement amplifying mechanism and carries out Y-direction displacement regulation；Similarly, X-direction broach actuator promotes X-direction displacement regulation platform to carry out X-direction displacement regulation.Its rotation is set to carry out vertical direction displacement regulation by putting on the electrostatic potential of parallel-plate in Z-direction displacement regulation.Photoelectricity-electrostatic composite flooding microfluidic platform apparatus structure simple and compact of the present invention, multiple degrees of freedom regulation and light-operated noncontact driving, fast response time, suitable for a variety of occasions can be achieved.
Description
Technical field
The present invention relates to a kind of drive device, particularly a kind of photoelectricity-electrostatic composite flooding microfluidic platform device.
Background technology
MEMS due to its small volume, stability is high many advantages, such as triggered in many fields one it is small
Type revolution.In recent years, the application of MEMS has been extended to information technology, Medical Devices, military project and electronic equipment etc.
In field, have become the emphasis of countries in the world research.
Typically using machine drivings such as gear, leading screw, levers, friction, loss etc. be present in traditional microfluidic platform adjusting means
Reason causes displacement regulation larger error to be present, has increasingly been unsuitable for applying in MEMS.And for Piezoelectric Driving,
The drive devices such as electromagnetic drive, electric heating are due to the factor such as had a great influence by its high power consumption, environment, and there is also adaptability deficiency etc.
Defect.Therefore, it is badly in need of a kind of simple in construction, miniaturization, low consumption, the microfluidic platform drive device for adapting to a variety of environment at present, but
It is that there is no associated description in the prior art.
The content of the invention
It is an object of the invention to provide a kind of photoelectricity-electrostatic composite flooding microfluidic platform device.
The technical solution for realizing the object of the invention is：A kind of photoelectricity-electrostatic composite flooding microfluidic platform device, including
Coarse motion platform, Y-direction drive mechanism, Y-direction guide rail mechanism, Y-direction mechanical slide, Y-direction displacement regulation platform, X-direction driving
Mechanism, X-direction guide rail mechanism, X-direction displacement regulation platform and X-direction mechanical slide；
The Y-direction guide rail mechanism includes two guide rails, and two guide rails are symmetricly set on coarse motion platform Y-direction axis
Both sides, Y-direction displacement regulation platform is positioned at the top of two guide rails and is moved along the rail in the Y direction under the driving of drive mechanism,
The Y-direction drive mechanism is equal on the symmetrically arranged actuating mechanism in coarse motion platform Y-direction axis, each actuating mechanism including two
Guide rail is respectively positioned on including the Y-direction broach actuator connected by wire and Y-direction photoelectric ceramics twin lamella, each actuating mechanism
Outside, Y-direction broach actuator is connected by corresponding Y-direction displacement amplifying mechanism with Y-direction mechanical slide, Y-direction machine
The other end of tool sliding block is connected with Y-direction displacement regulation platform；
X-direction guide rail mechanism is set on Y-direction displacement regulation platform, the X-direction guide rail mechanism includes two guide rails, should
Two guide rails are symmetrical arranged the both sides of the regulation platform X-direction of displacement in the Y direction axis, and X-direction displacement regulation platform is located at two
The top of root guide rail simultaneously moves along the rail under the driving of X-direction drive mechanism, and the X-direction drive mechanism includes two on Y
The direction displacement regulation symmetrically arranged actuating mechanism in platform X-direction axis, each actuating mechanism include connecting by wire
X-direction broach actuator and X-direction photoelectric ceramics twin lamella, each actuating mechanism is respectively positioned on the outside of guide rail, X-direction comb
Tooth actuator is connected by corresponding X-direction displacement amplifying mechanism with X-direction mechanical slide, the other end of X-direction mechanical slide
It is connected with X-direction displacement regulation platform；
Under ultraviolet source irradiation, the photoelectric ceramics twin lamella on Y-direction displacement regulation platform produces electrostatic potential and applied
On X-direction broach actuator, then realize that the displacement of X-direction is adjusted by displacement amplifying mechanism；Photoelectricity on coarse motion platform
Ceramic twin lamella generation electrostatic potential application on broach actuator, then realizes Y-direction by displacement amplifying mechanism in the Y direction
Displacement regulation.
The Z-direction photoelectric ceramics twin lamella being connected by wire and Z-direction displacement is set to adjust on X-direction displacement regulation platform
Mechanism is saved, T-shaped microfluidic platform is set on Z-direction displacement governor motion, wherein Z-direction displacement governor motion includes upper parallel electrode plate
And support, upper parallel electrode plate be located at the top of support and can opposite brackets rotate, the bottom of support and X-direction displacement regulation are flat
Platform is connected, and T-shaped microfluidic platform is set on upper parallel electrode plate；Z-direction displacement governor motion comes by the rotation of upper parallel electrode plate
Realize the displacement regulation on vertical direction.
Compared with prior art, its remarkable advantage is the present invention：The photoelectricity of the present invention-electrostatic composite flooding microfluidic platform dress
The characteristic for producing electrostatic potential by ultraviolet source irradiation using photoelectric ceramics twin lamella is put, it is passed energy as driving voltage,
The regulation of high voltage big displacement can be achieved, and it is simple and compact for structure.Meanwhile the driving source of the device is ultraviolet light, light can be achieved
Contactless and rotation multiple degrees of freedom regulation is controlled, avoids the interference of the environmental factors such as electromagnetism, fast response time, suitable for how free
Degree regulation and light-operated contactless field, being particularly suitable for use in needs not by the occasion of electromagnetic interference.
The present invention is described in further detail below in conjunction with the accompanying drawings.
Brief description of the drawings
Fig. 1 is photoelectricity-electrostatic composite flooding microfluidic platform installation drawing.
Fig. 2 is photoelectricity-electrostatic composite flooding microfluidic platform device floor map.
Fig. 3 is pulley guide rails mechanism.
Fig. 4 is Z-direction drive mechanism and T-shaped microfluidic platform.
Implication in figure representated by label is：1. coarse motion platform, 2.Y directions broach actuator, 3.Y directions photoelectric ceramics twin crystal
Piece, 4.Y traversing guides mechanism, 5.Y directions mechanical slide, 6.Y directions displacement amplifying mechanism, 7.Y directions displacement regulation platform,
8.X directions displacement amplifying mechanism, 9.X directions photoelectric ceramics twin lamella, 10.X directions broach actuator, 11.Z directions photoelectric ceramics
Platform, 15.X traversing guide machines are reconciled in twin lamella, 12.Z directions displacement governor motion, 13.T type microfluidic platforms, the displacement of 14.X directions
Structure, 16.X directions mechanical slide, parallel electrode plate on 17., 18. supports.
Embodiment
With reference to accompanying drawing, a kind of photoelectricity of the invention-electrostatic composite flooding microfluidic platform device, including coarse motion platform 1, Y-direction are driven
Motivation structure, Y-direction guide rail mechanism 4, Y-direction mechanical slide 5, Y-direction displacement regulation platform 7, X-direction drive mechanism, X-direction are led
Rail mechanism 15, X-direction displacement regulation platform 14 and X-direction mechanical slide 16；
The Y-direction guide rail mechanism 4 includes two guide rails, and two guide rails are symmetricly set on coarse motion platform 1Y directions axis
Both sides, Y-direction displacement regulation platform 7 is positioned at the top of two guide rails and is transported in the Y direction under the driving of drive mechanism along guide rail
Dynamic, the Y-direction drive mechanism includes two on the symmetrically arranged actuating mechanism in coarse motion platform 1Y directions axis, each actuator
Structure includes the Y-direction broach actuator 2 and Y-direction photoelectric ceramics twin lamella 3 connected by wire, each equal position of actuating mechanism
In the outside of guide rail, Y-direction broach actuator 2 passes through corresponding Y-direction displacement amplifying mechanism 6 and the phase of Y-direction mechanical slide 5
Even, the other end of Y-direction mechanical slide 5 is connected with Y-direction displacement regulation platform 7；
X-direction guide rail mechanism 15 is set on Y-direction displacement regulation platform 7, the X-direction guide rail mechanism 15 is led including two
Rail, two guide rails are symmetrical arranged the both sides of the regulation of displacement in the Y direction platform 7X directions axis, X-direction displacement regulation platform
14 are located at the top of two guide rails and are moved along the rail under the driving of X-direction drive mechanism, and the X-direction drive mechanism includes two
Individual to adjust the symmetrically arranged actuating mechanism in platform 7X directions axis on Y-direction displacement, each actuating mechanism includes passing through
The X-direction broach actuator 10 and X-direction photoelectric ceramics twin lamella 9 of wire connection, each actuating mechanism are respectively positioned on the outer of guide rail
Side, X-direction broach actuator 10 are connected by corresponding X-direction displacement amplifying mechanism 8 with X-direction mechanical slide 16, X-direction machine
The other end of tool sliding block 16 is connected with X-direction displacement regulation platform 14；
Under ultraviolet source irradiation, the photoelectric ceramics twin lamella 9 on Y-direction displacement regulation platform 7 produces electrostatic potential and applied
It is added on X-direction broach actuator 10, then realizes that the displacement of X-direction is adjusted by displacement amplifying mechanism 8；On coarse motion platform 1
Photoelectric ceramics twin lamella 3 produce electrostatic potential and apply in the Y direction on broach actuator 2, then by displacement amplifying mechanism 6
Realize the displacement regulation of Y-direction.
The Z-direction photoelectric ceramics twin lamella 11 being connected by wire and Z side are set on the X-direction displacement regulation platform 14
To displacement governor motion 12, T-shaped microfluidic platform 13, wherein Z-direction displacement governor motion 12 are set on Z-direction displacement governor motion 12
Including upper parallel electrode plate 17 and support 18, upper parallel electrode plate 17 be located at the top of support 18 and can opposite brackets rotate, branch
The bottom of frame 18 is connected with X-direction displacement regulation platform 14, and T-shaped microfluidic platform 13 is set on upper parallel electrode plate 17；Z-direction displacement
Governor motion 12 realizes that the displacement on vertical direction is adjusted by the rotation of upper parallel electrode plate 17.
X-direction photoelectric ceramics twin lamella 9, Y-direction photoelectric ceramics twin lamella 3 and Z-direction photoelectric ceramics twin lamella 11 are adopted
Electrostatic drive voltage is produced with ultraviolet source irradiation.
Further detailed description is done to the present invention with reference to embodiment.
Embodiment 1
With reference to Fig. 1, a kind of photoelectricity of the invention-electrostatic composite flooding microfluidic platform device, including X-direction displacement are reconciled and put down
It is platform, Y-direction displacement regulation platform, Z-direction displacement governor motion, X-direction broach actuator, Y-direction broach actuator, T-shaped micro-
Platform etc..X-direction displacement regulation includes X-direction displacement amplifying mechanism 8, X-direction mechanical slide 16, X-direction displacement regulation platform
14th, on the symmetrically arranged X-direction broach actuator 10 in Y-direction displacement regulation platform 7X directions axis and X-direction photoelectricity pottery
Porcelain twin lamella 9.Y-direction displacement regulation include Y-direction displacement amplifying mechanism 6, Y-direction mechanical slide 5, Y-direction displacement regulation put down
Platform 7, on the symmetrically arranged Y-direction broach actuator 2 in coarse motion platform 1Y directions axis and Y-direction photoelectric ceramics twin lamella 3.Z
The displacement regulation in direction includes Z-direction displacement governor motion 12 and photoelectric ceramics twin lamella 11 and T-shaped microfluidic platform 13.
Coarse motion platform, X-direction displacement platform and Y-direction displacement platform are overlapped mutually one by linear pulley guide rails two-by-two
Rise, pulley guide rails are as shown in Figure 3 as guiding mechanism, pulley guide rails guiding mechanism.X, Y-direction broach actuator is put by displacement
Great institutions connect displacement platform with mechanical slide, and parallel top crown is connected with T-shaped microfluidic platform in Z-direction displacement regulating member, lead to
The rotation of parallel top crown is crossed to control T-shaped microfluidic platform.
X-direction photoelectric ceramics twin lamella 9 produces electrostatic potential under ultraviolet source irradiation, is applied to the actuating of X-direction broach
Driving force is produced on device 10, X-direction displacement amplifying mechanism 8 forms driving angle after power is driven and moved in X direction, warp
Mechanical slide promotes X-direction displacement platform 14, and X-direction displacement platform 14 moves in X direction in pulley guide rails.
Y-direction photoelectric ceramics twin lamella 3 produces electrostatic potential under ultraviolet source irradiation, applies broach in the Y direction and activates
Driving force is produced on device 2, Y-direction displacement amplifying mechanism 6 forms driving angle after power is driven and moved along Y-direction, warp
Mechanical slide promotes Y-direction displacement platform 7, and Y-direction displacement platform 7 moves in pulley guide rails along Y-direction.
With reference to Fig. 4, in Z-direction displacement governor motion 12, T-shaped microfluidic platform 13 is fixed on the end of parallel electrode plate 17,
The parallel-plate other end is fixed on X-direction displacement platform 14 by support 18.
After the displacement regulation in the direction of X, Y two, Z-direction photoelectric ceramics twin lamella 11 produces quiet under ultraviolet source irradiation
Piezoelectric voltage driving upper parallel electrode plate rotation controls T-shaped microfluidic platform to move with this, realizes that the vertical direction of T-shaped microfluidic platform is adjusted
Section.
From the foregoing, it will be observed that X, Y, Z-direction photoelectric ceramics twin lamella produce driving voltage, amplified machine after ultraviolet source irradiation
The regulation of the Three Degree Of Freedom of T-shaped microfluidic platform is realized under structure effect.Photoelectricity-electrostatic composite flooding microfluidic platform device of the present invention can
Realize that high voltage big displacement is adjusted, and it is simple and compact for structure.Meanwhile the driving source of the device is ultraviolet light, can be achieved light-operated
Contactless and rotation multiple degrees of freedom regulation, avoids the interference of the environmental factors such as electromagnetism, fast response time, suitable for multiple degrees of freedom
Regulation and light-operated contactless field, being particularly suitable for use in needs not by the occasion of electromagnetic interference.
Claims (3)
- A kind of 1. photoelectricity-electrostatic composite flooding microfluidic platform device, it is characterised in that including coarse motion platform [1], Y-direction drive mechanism, Y-direction guide rail mechanism [4], Y-direction mechanical slide [5], Y-direction displacement regulation platform [7], X-direction drive mechanism, X-direction are led Rail mechanism [15], X-direction displacement regulation platform [14] and X-direction mechanical slide [16]；The Y-direction guide rail mechanism [4] includes two guide rails, and two guide rails are symmetricly set on coarse motion platform [1] Y-direction axis Both sides, Y-direction displacement regulation platform [7] is positioned at the top of two guide rails and in the Y direction under the driving of drive mechanism along guide rail Motion, the Y-direction drive mechanism include two on the symmetrically arranged actuating mechanism in coarse motion platform [1] Y-direction axis, Mei Gezhi Motivation structure includes the Y-direction broach actuator [2] and Y-direction photoelectric ceramics twin lamella [3] connected by wire, each actuating Mechanism is respectively positioned on the outside of guide rail, and Y-direction broach actuator [2] passes through corresponding Y-direction displacement amplifying mechanism [6] and Y-direction Mechanical slide [5] is connected, and the other end of Y-direction mechanical slide [5] is connected with Y-direction displacement regulation platform [7]；X-direction guide rail mechanism [15] is set on Y-direction displacement regulation platform [7], and the X-direction guide rail mechanism [15] includes two Guide rail, two guide rails are symmetrical arranged the both sides of the regulation of displacement in the Y direction platform [7] X-direction axis, X-direction displacement regulation Platform [14] is positioned at the top of two guide rails and is moved along the rail under the driving of X-direction drive mechanism, the X-direction drive mechanism The symmetrically arranged actuating mechanism in platform [7] X-direction axis is adjusted on Y-direction displacement including two, each actuating mechanism is equal It is equal including the X-direction broach actuator [10] connected by wire and X-direction photoelectric ceramics twin lamella [9], each actuating mechanism Positioned at the outside of guide rail, X-direction broach actuator [10] is sliding by corresponding X-direction displacement amplifying mechanism [8] and X-direction machinery Block [16] is connected, and the other end of X-direction mechanical slide [16] is connected with X-direction displacement regulation platform [14]；Under ultraviolet source irradiation, the photoelectric ceramics twin lamella [9] on Y-direction displacement regulation platform [7] produces electrostatic potential and applied It is added on X-direction broach actuator [10], then realizes that the displacement of X-direction is adjusted by displacement amplifying mechanism [8]；Coarse motion platform [1] photoelectric ceramics twin lamella [3] the generation electrostatic potential application on broach actuator [2], is then put by displacement in the Y direction Great institutions [6] come realize the displacement of Y-direction adjust.
- 2. photoelectricity according to claim 1-electrostatic composite flooding microfluidic platform device, it is characterised in that X-direction displacement is adjusted The Z-direction photoelectric ceramics twin lamella [11] and Z-direction displacement governor motion [12] for setting on platform [14] and being connected by wire are saved, T-shaped microfluidic platform [13] is set on Z-direction displacement governor motion [12], and wherein Z-direction displacement governor motion [12] includes upper parallel Battery lead plate [17] and support [18], upper parallel electrode plate [17] be located at the top of support [18] and can opposite brackets rotate, support [18] bottom is connected with X-direction displacement regulation platform [14], and T-shaped microfluidic platform [13] is set on upper parallel electrode plate [17]；Z side Parallel electrode plate [17] rotates to realize that the displacement on vertical direction is adjusted on to displacement governor motion [12] process.
- 3. photoelectricity according to claim 1-electrostatic composite flooding microfluidic platform device, it is characterised in that X-direction photoelectricity is made pottery Porcelain twin lamella [9], Y-direction photoelectric ceramics twin lamella [3] and Z-direction photoelectric ceramics twin lamella [11] use ultraviolet source irradiation To produce electrostatic drive voltage.
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| CN201610058520.7A CN105563465B (en) | 2016-01-28 | 2016-01-28 | A kind of photoelectrical electrostatic composite flooding microfluidic platform device |
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| CN201610058520.7A CN105563465B (en) | 2016-01-28 | 2016-01-28 | A kind of photoelectrical electrostatic composite flooding microfluidic platform device |
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| CN106154974B (en) * | 2016-08-13 | 2018-09-04 | 南京理工大学 | A kind of photoelectric ceramics displacement Close loop servo control experimental provision and control method |
| CN106842555B (en) * | 2017-01-18 | 2019-06-25 | 南京理工大学 | A kind of three-dimensional piezoelectric driving micro mirror regulating device |
| CN112428168B (en) * | 2020-11-27 | 2022-02-18 | 佛山科学技术学院 | Photoelectric-electrostatic repulsion force composite driven micro clamp |
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| KR100483047B1 (en) * | 2002-12-26 | 2005-04-18 | 삼성전기주식회사 | Mems variable optical attenuator |
| CN100520349C (en) * | 2005-12-21 | 2009-07-29 | 北京工业大学 | Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure |
| CN102064021B (en) * | 2009-11-17 | 2013-03-20 | 北京大学 | Comb tooth capacitor of micromachine |
| CN103056887B (en) * | 2013-01-17 | 2015-05-13 | 苏州大学 | Multi-finger micro-gripper |
| CN103487934B (en) * | 2013-09-25 | 2015-05-13 | 南京理工大学 | Micro-mirror fine adjusting device driven by photoelectric ceramic |
| CN104326434A (en) * | 2014-09-01 | 2015-02-04 | 清华大学 | Micromechanical electrostatic driving comb tooth structure |
| CN105174199B (en) * | 2015-08-05 | 2018-03-09 | 南京衡平电子科技有限公司 | A kind of micro- anchor drive of low energy consumption |
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