CN100520349C - Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure - Google Patents
Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure Download PDFInfo
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- CN100520349C CN100520349C CNB2005101320563A CN200510132056A CN100520349C CN 100520349 C CN100520349 C CN 100520349C CN B2005101320563 A CNB2005101320563 A CN B2005101320563A CN 200510132056 A CN200510132056 A CN 200510132056A CN 100520349 C CN100520349 C CN 100520349C
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Abstract
The invention discloses a microstructure resonance dual-side bending fatigue experiment device driven on electrostatic force, which comprises: an electrode connected to ac and fixed lifetime with two side arms by the bottom electrode layer, another electrode grounding, a structure layer crossed opposite to said fixed comb and connected to a suspension comb with side arms, a horizontal side arm between two fixed combs connected to the ac electrode, a T-shaped side arm between two suspension combs and with horizontal side arm connected to suspension combs and vertical side arm connected to the grounding electrode by suspension beam as the fatigue test piece. This invention improves greatly the strain level of test piece.
Description
Technical field
The present invention is used for the research of MEMS (Micro-Electro-Mechanical System, MEMS (micro electro mechanical system)) structured material polysilicon fatigue properties, belongs to micro-nano technical foundation research field.
Background technology
Discover that the silicon that belongs to hard brittle material under macrostate can produce fatigue properties under micro-nano-scale, also not too clear and definite at present for the mechanism that this variation takes place.Understand this mechanism and measure the fatigue properties parameter of silicon under micro-meter scale and have great significance for MEMS reliability design and life prediction.
Torture test under the traditional macro yardstick is generally undertaken by the fatigue test of materials machine of special use, mainly contains type of drive such as hydraulic pressure, electromagnetism, and standard sample is clamped in wherein with dop.But this method also is not suitable for the research of MEMS fatigue properties, and at first, the type of drive of hydraulic pressure, electromagnetic force is inapplicable under micron order size state, and secondly, the clamping of micron-scale sample and centering operate extremely difficult, even may not finish.The high frequency alternating bending is the common a kind of operating load of micro-mechanical component, is necessary to design a kind of repeated bend test device that is used for little component fatigue characteristic research, and this device can be processed by existing MEMS job operation.
Summary of the invention
The objective of the invention is to by providing a kind of based on the power-actuated microstructure resonance bilateral of static repeated bend test device, to be used for the research of the little member Flexural fatigue of MEMS silicon.This device can be processed by MEMS two-layer polysilicon surface sacrifice layer standard technology.
The thinking of technical scheme that the present invention adopts is: a, driven by electrostatic force, apply alternating current to the interlaced broach of two couple on the microstructure and cause the alternating bending of structure to produce periodic electrostatic force, when the natural frequency of the frequency of this electrostatic force and structure is consistent, the microstructure that suspends will resonate, make the micro-test sample that is connected in mounting structure be subjected to periodic bending load effect, to reach the effect of repeated bend test; B, by the Oscillation Amplitude of microscopic mounting structure, can try to achieve the suffered stress level of sample according to this Oscillation Amplitude; C, sample and other structure connect together, and have removed the trouble of sample holder and centering from; The force environment that is subjected to of the structure of d, device, each several part size and sample must come from the typical MEMS member, and its result of study just has practical significance like this; The preparation of e, device must be suitable for existing MEMS process technology condition, can not exist to be difficult to the structure of processing or can't process at all.
The present invention adopts following technological means to realize:
A kind of based on the power-actuated microstructure resonance bilateral of static repeated bend test device, comprising: electrode, the side arm that is connected with electrode and be arranged at broach on the side arm; One of them electrode connects alternating current, and the bottom electrode layer by this electrode is connected with the fixed fingers that at least two groups and side arm become one; Another electrode grounding; Directly be connected with the suspension comb that its side arm becomes one by structural sheet with at least two groups; This suspension comb is staggered corresponding setting with described fixed fingers; Connect by its yi word pattern side arm that is connected with ac electrode between above-mentioned two groups of fixed fingers; Connect by the T font side arm that is connected with ground-electrode between above-mentioned two groups of suspension combs; Wherein the horizontal side arm of T font side arm connects suspension comb, and its vertical side arm is connected with ground-electrode by suspension beam; Above-mentioned suspension beam is a fatigue testing specimen.
Aforesaid fixed fingers and/or suspension comb are symmetrical expression setting and/or asymmetric setting.
The aforesaid electrode the superiors are metal level, are the polysilicon structure layer below metal level, are fixed bed below the structural sheet, further are provided with bottom electrode layer below fixed bed.
The top of aforesaid fatigue testing specimen is provided with the breach that strengthens suffered stress level.
The bottom of aforesaid suspension comb be provided with prevent with substrate stick lug boss.
Aforesaid control terminal is a computing machine.
Aforesaid control terminal is the single card microcomputer microprocessor.
The present invention compared with prior art has remarkable advantages and beneficial effect:
The force environment that is subjected to of structure, each several part size and the sample of microstructure bilateral repeated bend test device of the present invention comes from the typical MEMS member, be applicable to the processing of MEMS standard technology, sample and other structure connect together, and have avoided the clamping of micron-scale fatigue sample when torture test and the operation of centering fully.The utilization of the resonance characteristics of structure and fatigue testing specimen root gap has improved the suffered stress level of sample greatly, and torture test can be finished in the time range of allowing.In the test, sample is in the bilateral flexural loading environment, with the residing stressed environmental classes of MEMS typical structure seemingly.Characteristics such as this little torture test constructional device has handling ease, and is easy and simple to handle have very high practical value to the research of MEMS structural strength.
Description of drawings
The positive overall situation figure of Fig. 1 microstructure bilateral repeated bend test device;
The partial enlarged drawing of Fig. 2 microstructure bilateral repeated bend test device;
The structure cut-open view of Fig. 3 microstructure bilateral repeated bend test device electrode 1;
The structure cut-open view of Fig. 4 microstructure bilateral repeated bend test device electrode 2;
Fig. 5 tests the assembling synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing specific embodiments of the invention are illustrated:
A kind of based on the power-actuated microstructure resonance bilateral of static repeated bend test device, comprising: electrode, the side arm that is connected with electrode and be arranged at broach on the side arm; One of them electrode 1 connects alternating current, and the bottom electrode layer by this electrode 1 is connected with fixed fingers that side arm becomes one with two groups; Another electrode 2 ground connection; Directly be connected by structural sheet with two groups of suspension combs that become one with its side arm; This suspension comb is staggered corresponding setting with described fixed fingers;
Connect by its yi word pattern side arm that is connected with ac electrode between above-mentioned two groups of fixed fingers, connect by hearth electrode between each section of side arm; Connect by the T font side arm that is connected with suspension beam between above-mentioned two groups of suspension combs; Wherein the horizontal side arm of T font side arm connects suspension comb, and its vertical side arm is connected with ground-electrode by suspension beam; Above-mentioned suspension beam is a fatigue testing specimen.
According to the structural representation of the designed microstructure bilateral repeated bend test device of this technical scheme thinking referring to Fig. 1, Fig. 2, Fig. 3, Fig. 4.Fig. 1 is positive overall situation figure, wherein 1,2 is electrode, Fig. 2 is a partial enlarged drawing, Fig. 3, Fig. 4 is respectively electrode 1,2 structure cut-open view, each electrode the superiors all covers layer of metal metal level, as shown in Figure 3 21, among Fig. 4 25, purpose is in order to strengthen electric conductivity, it below the metal level polysilicon structure layer, as 22 among Fig. 3, among Fig. 4 26 is the primary structure layer of whole device, and the following of structural sheet is fixed bed, as shown in Figure 3 23, among Fig. 4 27, also have bottom electrode layer 24 below electrode 1 fixed bed, be used for and fixed fingers 5,6 side arm 9, electricity between 10 connects.3 and 5,4 and 6 are respectively two pairs of broach, and wherein, 5,6 is fixed fingers, links to each other with electrode 1 by bottom electrode layer 12; 3,4 is suspension comb, is suspended in the air with the T font side arm that is connected suspension beam and suspension comb by suspension beam 7,8; Can be up and down under the driving of electrostatic force, link to each other with electrode 2 with fixed block 11 by suspension beam 7,8.Suspension beam 7,8 is fatigue testing specimen, and the vibration of broach 3,4 will produce bilateral alternating bending load to sample 7,8, to reach the effect of torture test.The place introduces breach 71 in the middle of the fatigue testing specimen 7,8, and purpose is in order to cause stress to concentrate, to add the suffered stress level of bulk specimen.It is sticking for microstructure that prevents to suspend in the dispose procedure and substrate that the reverse side design of broach 3,4 has some small embossments, these projectioies.
Its principle of work of microstructure bilateral repeated bend test device of the present invention is: electrode 1 connects the alternating current of certain frequency, electrode 2 ground connection.Between broach is to 3 and 5,4 and 6, will produce alternation electrostatic force like this, when the plane natural frequency of the frequency of this electrostatic force and structure is suitable, the part that suspends will resonate, and produce periodic bending load thereby drive sample 7,8, and the fatigue damage that causes sample is until fracture.Broach 3 and 4 Oscillation Amplitude can be observed by microscope, calculate the fatigue properties that the suffered stress level of sample break part is studied the micro-dimension test specimen according to this Oscillation Amplitude.
The present invention utilizes the designed micromechanics torture test scheme of above-mentioned microstructure bilateral repeated bend test device.This scheme synoptic diagram mainly is made of terminal control mechanism 200, signal generator 500, power amplifier 400, test unit 110 referring to Fig. 5.Microstructure bilateral repeated bend test device is put on the operator's console, its circuit connects to be provided by probe on the operator's console 120, the fatigue testing specimen top is placed with microscope 140, is provided with ccd video camera 150 and is used to observe the amplitude of fluctuation of suspension beam 7,8 and the situation of carrying out of test on microscope 140.The sinusoidal signal with fixed frequency that signal generator 500 produces is amplified the ac electrode 1 of back by probe 120 access microstructure bilateral repeated bend test devices by power amplifier 400, and electrode 2 is by probe ground connection.
It should be noted that at last: above embodiment only in order to the explanation the present invention and and unrestricted technical scheme described in the invention; Therefore, although this instructions has been described in detail the present invention with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the present invention; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present invention.
Claims (7)
1, a kind of based on the power-actuated microstructure resonance bilateral of static repeated bend test device, comprising: electrode, the side arm that is connected with electrode and be arranged at broach on the side arm; It is characterized in that:
Side arm comprises yi word pattern side arm and T font side arm, wherein, an electrode (1) connects alternating current, bottom electrode layer (24) by this electrode is connected with two groups of fixed fingers that become one with the yi word pattern side arm (5) (6), make between two groups of fixed fingers to connect, connect by hearth electrode (12) between each section of yi word pattern side arm by the yi word pattern side arm; Another electrode (2) ground connection, by structural sheet (26) directly and two groups be connected with suspension comb (3) (4) that T font side arm becomes one, make between two groups of suspension combs by the connection of T font side arm, T font side arm is connected with suspension beam (7) (8); Described suspension comb (3) (4) is staggered corresponding setting with described fixed fingers (5) (6);
Wherein the horizontal side arm of T font side arm connects suspension comb, and its vertical side arm is connected with the electrode (2) of ground connection with fixed block (11) by suspension beam (7) (8); Above-mentioned suspension beam (7) (8) is a fatigue testing specimen.
2, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: described fixed fingers and/or suspension comb are symmetrical expression setting and/or asymmetric setting.
3, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: described two electrodes (1) (2) the superiors are metal level, it below metal level the polysilicon structure layer, be fixed bed below the structural sheet, below fixed bed, further be provided with bottom electrode layer.
4, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: the top of described fatigue testing specimen is provided with the breach that strengthens suffered stress level.
5, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: be provided with in the bottom of described suspension comb and prevent the lug boss that sticks with substrate.
6, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is a computing machine.
7, according to claim 1 based on the power-actuated microstructure resonance bilateral of static repeated bend test device, it is characterized in that: also comprise terminal control mechanism, described terminal control mechanism is the single card microcomputer microprocessor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101320563A CN100520349C (en) | 2005-12-21 | 2005-12-21 | Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101320563A CN100520349C (en) | 2005-12-21 | 2005-12-21 | Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure |
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| CN1800815A CN1800815A (en) | 2006-07-12 |
| CN100520349C true CN100520349C (en) | 2009-07-29 |
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| CNB2005101320563A Expired - Fee Related CN100520349C (en) | 2005-12-21 | 2005-12-21 | Electrostatic force driven apparatus for testing resonant two-side flexural-tensile fatigue of microstructure |
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| CN105563465B (en) * | 2016-01-28 | 2017-12-12 | 南京理工大学 | A kind of photoelectrical electrostatic composite flooding microfluidic platform device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
| US6424165B1 (en) * | 2000-09-20 | 2002-07-23 | Sandia Corporation | Electrostatic apparatus for measurement of microfracture strength |
| CN2849703Y (en) * | 2005-12-21 | 2006-12-20 | 北京工业大学 | Microstructure resonance double side bending fatique tester based on electro static force driving |
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2005
- 2005-12-21 CN CNB2005101320563A patent/CN100520349C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
| US6424165B1 (en) * | 2000-09-20 | 2002-07-23 | Sandia Corporation | Electrostatic apparatus for measurement of microfracture strength |
| CN2849703Y (en) * | 2005-12-21 | 2006-12-20 | 北京工业大学 | Microstructure resonance double side bending fatique tester based on electro static force driving |
Non-Patent Citations (4)
| Title |
|---|
| MEMS材料力学性能的测试技术. 张泰华，杨业敏，赵亚溥，白以龙.力学进展，第32卷第4期. 2002 |
| MEMS材料力学性能的测试技术. 张泰华，杨业敏，赵亚溥，白以龙.力学进展，第32卷第4期. 2002 * |
| 微构件材料力学性能测试方法. 苏才钧，吴昊，郭占社，孟永钢，温诗铸.实验力学，第20卷第3期. 2005 |
| 微构件材料力学性能测试方法. 苏才钧，吴昊，郭占社，孟永钢，温诗铸.实验力学，第20卷第3期. 2005 * |
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Granted publication date: 20090729 Termination date: 20091221 |