CN105563465A - Photoelectric-static compound driving micro platform device - Google Patents
Photoelectric-static compound driving micro platform device Download PDFInfo
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- CN105563465A CN105563465A CN201610058520.7A CN201610058520A CN105563465A CN 105563465 A CN105563465 A CN 105563465A CN 201610058520 A CN201610058520 A CN 201610058520A CN 105563465 A CN105563465 A CN 105563465A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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Abstract
The invention discloses a photoelectric-static compound driving micro platform device which comprises a coarse movement table, an X-direction displacement adjusting platform, a Y-direction displacement adjusting platform, a Z-direction displacement adjusting platform, a T-type micro platform, a pulley guide rail mechanism, comb actuators, photoelectric ceramic bimorphs, mechanical sliding blocks and conducting wires. The Y-direction photoelectric ceramic bimorph generates static voltage under the irradiation of an ultraviolet light source and applies the static voltage to the Y-direction comb actuator to generate driving force, and the Y-direction comb actuator pushes the Y-direction displacement adjusting platform to conduct Y-direction displacement adjustment through a Y-direction amplifying mechanism. In the same way, the X-direction comb actuator pushes the X-direction displacement adjusting platform conduct X-direction displacement adjustment. During Z-direction displacement adjustment, a parallel plate is rotated by means of static voltage applied to the parallel plate, so that vertical-direction displacement adjustment is conducted. The photoelectric-static compound driving micro platform device is simple and compact in structure, capable of achieving multi-degree-of-freedom adjustment and light-control non-contact driving, high in response speed and suitable for various occasions.
Description
Technical field
The present invention relates to a kind of drive unit, particularly a kind of photoelectricity-electrostatic composite flooding microfluidic platform device.
Background technology
MEMS has caused a microminaturization revolution in a lot of fields due to plurality of advantages such as its volume are little, stability is high.In recent years, the application of MEMS has extended in the fields such as information technology, Medical Devices, military project and electronic equipment, has become the emphasis of countries in the world research.
Traditional microfluidic platform adjusting device generally adopts the machine driving such as gear, leading screw, lever, there is the reasons such as friction, loss and makes displacement adjustment there is comparatively big error, be more and more unsuitable for being applied in MEMS.And for drive units such as Piezoelectric Driving, Electromagnetic Drive, electric heating owing to being subject to the factors such as its high power consumption, ambient influnence are larger, also there is the defects such as adaptability is not enough.Therefore, be badly in need of at present that a kind of structure is simple, miniaturization, low consumption, the microfluidic platform drive unit of multiple environment can be adapted to, but there is no associated description in prior art.
Summary of the invention
The object of the present invention is to provide a kind of photoelectricity-electrostatic composite flooding microfluidic platform device.
The technical solution realizing the object of the invention is: a kind of photoelectricity-electrostatic composite flooding microfluidic platform device, comprises coarse motion platform, Y-direction driving mechanism, Y-direction guide rail mechanism, Y-direction mechanical slide, Y-direction displacement adjustment platform, X-direction driving mechanism, X-direction guide rail mechanism, X-direction displacement adjustment platform and X-direction mechanical slide;
Described Y-direction guide rail mechanism comprises two guide rails, these two guide rails are symmetricly set on the both sides of coarse motion platform Y-direction axis, Y-direction displacement regulate platform be positioned at two guide rails top and along guide rail movement under the driving of driving mechanism in the Y direction, this Y-direction driving mechanism comprises two about the symmetrically arranged actuating mechanism in coarse motion platform Y-direction axis, each actuating mechanism includes the Y-direction comb actuator and Y-direction photoelectric ceramics twin lamella that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, Y-direction comb actuator is connected with Y-direction mechanical slide by corresponding Y-direction displacement amplifying mechanism, the other end and the Y-direction displacement of Y-direction mechanical slide regulate platform to be connected,
Y-direction displacement regulates on platform and arranges X-direction guide rail mechanism, described X-direction guide rail mechanism comprises two guide rails, these two guide rails are symmetrical arranged the both sides that displacement in the Y direction regulates platform X-direction axis, X-direction displacement regulate platform be positioned at two guide rails top and along guide rail movement under the driving of X-direction driving mechanism, this X-direction driving mechanism comprises two and regulates the symmetrically arranged actuating mechanism in platform X-direction axis about Y-direction displacement, each actuating mechanism includes the X-direction comb actuator and X-direction photoelectric ceramics twin lamella that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, X-direction comb actuator is connected with X-direction mechanical slide by corresponding X-direction displacement amplifying mechanism, the other end and the X-direction displacement of X-direction mechanical slide regulate platform to be connected,
Under ultraviolet source irradiation, Y-direction displacement regulates the photoelectric ceramics twin lamella on platform to produce electrostatic potential and is applied on X-direction comb actuator, then realizes the displacement adjustment of X-direction through displacement amplifying mechanism; Photoelectric ceramics twin lamella on coarse motion platform produces electrostatic potential and is applied on Y-direction comb actuator, then realizes the displacement adjustment of Y-direction through displacement amplifying mechanism.
X-direction displacement regulates on platform and is arranged through the connected Z-direction photoelectric ceramics twin lamella of wire and Z-direction displacement governor motion, Z-direction displacement governor motion arranges T-shaped microfluidic platform, wherein Z-direction displacement governor motion comprises parallel electrode plate and support, upper parallel electrode plate is positioned at the top of support and can rotates by opposite brackets, bottom and the X-direction displacement of support regulate platform to be connected, and upper parallel electrode plate arranges T-shaped microfluidic platform; The displacement that Z-direction displacement governor motion realizes on vertical direction through the rotation of upper parallel electrode plate regulates.
The present invention compared with prior art, its remarkable advantage is: photoelectricity of the present invention-electrostatic composite flooding microfluidic platform device utilizes photoelectric ceramics twin lamella to produce the characteristic of electrostatic potential through ultraviolet source irradiation, making it pass as driving voltage can, high voltage Large travel range can be realized regulate, and simple and compact for structure.Meanwhile, the drive source of this device is ultraviolet light, can realize light-operated contactless and rotation multiple degrees of freedom adjustment, avoid the environmental factor interference such as electromagnetism, fast response time, is applicable to multiple degrees of freedom and regulates and light-operated contactless field, is particularly useful for needing not by the occasion of electromagnetic interference.
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Accompanying drawing explanation
Fig. 1 is photoelectricity-electrostatic composite flooding microfluidic platform installation drawing.
Fig. 2 is photoelectricity-electrostatic composite flooding microfluidic platform device floor map.
Fig. 3 is pulley guide rails mechanism.
Fig. 4 is Z-direction driving mechanism and T-shaped microfluidic platform.
Implication representated by number in the figure is: 1. coarse motion platform, 2.Y direction comb actuator, 3.Y direction photoelectric ceramics twin lamella, 4.Y traversing guide mechanism, 5.Y direction mechanical slide, 6.Y direction displacement amplifying mechanism, the displacement of 7.Y direction regulates platform, 8.X direction displacement amplifying mechanism, 9.X direction photoelectric ceramics twin lamella, 10.X direction comb actuator, 11.Z direction photoelectric ceramics twin lamella, 12.Z direction displacement governor motion, 13.T type microfluidic platform, platform is reconciled in the displacement of 14.X direction, 15.X traversing guide mechanism, 16.X direction mechanical slide, parallel electrode plate on 17., 18. supports.
Detailed description of the invention
By reference to the accompanying drawings, a kind of photoelectricity of the present invention-electrostatic composite flooding microfluidic platform device, comprises coarse motion platform 1, Y-direction driving mechanism, Y-direction guide rail mechanism 4, Y-direction mechanical slide 5, Y-direction displacement adjustment platform 7, X-direction driving mechanism, X-direction guide rail mechanism 15, X-direction displacement adjustment platform 14 and X-direction mechanical slide 16;
Described Y-direction guide rail mechanism 4 comprises two guide rails, these two guide rails are symmetricly set on the both sides of axis, coarse motion platform 1Y direction, Y-direction displacement regulate platform 7 be positioned at two guide rails top and along guide rail movement under the driving of driving mechanism in the Y direction, this Y-direction driving mechanism comprises two about the symmetrically arranged actuating mechanism in axis, coarse motion platform 1Y direction, each actuating mechanism includes the Y-direction comb actuator 2 and Y-direction photoelectric ceramics twin lamella 3 that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, Y-direction comb actuator 2 is connected with Y-direction mechanical slide 5 by corresponding Y-direction displacement amplifying mechanism 6, the other end and the Y-direction displacement of Y-direction mechanical slide 5 regulate platform 7 to be connected,
Y-direction displacement regulates on platform 7 and arranges X-direction guide rail mechanism 15, described X-direction guide rail mechanism 15 comprises two guide rails, these two guide rails are symmetrical arranged the both sides that displacement in the Y direction regulates axis, platform 7X direction, X-direction displacement regulate platform 14 be positioned at two guide rails top and along guide rail movement under the driving of X-direction driving mechanism, this X-direction driving mechanism comprises two and regulates the symmetrically arranged actuating mechanism in axis, platform 7X direction about Y-direction displacement, each actuating mechanism includes the X-direction comb actuator 10 and X-direction photoelectric ceramics twin lamella 9 that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, X-direction comb actuator 10 is connected with X-direction mechanical slide 16 by corresponding X-direction displacement amplifying mechanism 8, the other end and the X-direction displacement of X-direction mechanical slide 16 regulate platform 14 to be connected,
Under ultraviolet source irradiation, Y-direction displacement regulates the photoelectric ceramics twin lamella 9 on platform 7 to produce electrostatic potential and is applied on X-direction comb actuator 10, then realizes the displacement adjustment of X-direction through displacement amplifying mechanism 8; Photoelectric ceramics twin lamella 3 on coarse motion platform 1 produces electrostatic potential and is applied on Y-direction comb actuator 2, then realizes the displacement adjustment of Y-direction through displacement amplifying mechanism 6.
Described X-direction displacement regulates on platform 14 and is arranged through the connected Z-direction photoelectric ceramics twin lamella 11 of wire and Z-direction displacement governor motion 12, Z-direction displacement governor motion 12 arranges T-shaped microfluidic platform 13, wherein Z-direction displacement governor motion 12 comprises parallel electrode plate 17 and support 18, upper parallel electrode plate 17 is positioned at the top of support 18 and can rotates by opposite brackets, bottom and the X-direction displacement of support 18 regulate platform 14 to be connected, and upper parallel electrode plate 17 arranges T-shaped microfluidic platform 13; The displacement that Z-direction displacement governor motion 12 realizes on vertical direction through the rotation of upper parallel electrode plate 17 regulates.
X-direction photoelectric ceramics twin lamella 9, Y-direction photoelectric ceramics twin lamella 3 and Z-direction photoelectric ceramics twin lamella 11 all adopt ultraviolet source irradiation to produce electrostatic drive voltage.
Below in conjunction with embodiment, further detailed description is done to the present invention.
Embodiment 1
Composition graphs 1, a kind of photoelectricity of the present invention-electrostatic composite flooding microfluidic platform device, comprises X-direction displacement and reconciles platform, Y-direction displacement adjustment platform, Z-direction displacement governor motion, X-direction comb actuator, Y-direction comb actuator, T-shaped microfluidic platform etc.X-direction displacement adjustment comprises X-direction displacement amplifying mechanism 8, X-direction mechanical slide 16, X-direction displacement adjustment platform 14, regulates axis, platform 7X direction symmetrically arranged X-direction comb actuator 10 and X-direction photoelectric ceramics twin lamella 9 about Y-direction displacement.Y-direction displacement regulate comprise Y-direction displacement amplifying mechanism 6, Y-direction mechanical slide 5, Y-direction displacement regulate platform 7, about axis, coarse motion platform 1Y direction symmetrically arranged Y-direction comb actuator 2 and Y-direction photoelectric ceramics twin lamella 3.The displacement of Z-direction regulates and comprises Z-direction displacement governor motion 12 and photoelectric ceramics twin lamella 11 and T-shaped microfluidic platform 13.
Coarse motion platform, X-direction displacement platform and Y-direction displacement platform are superimposed mutually by linear pulley guide rails between two, and pulley guide rails is as guiding mechanism, and pulley guide rails guiding mechanism as shown in Figure 3.X, Y-direction comb actuator are connected displacement platform by displacement amplifying mechanism with mechanical slide, and in Z-direction displacement regulating member, parallel top crown is connected with T-shaped microfluidic platform, controls T-shaped microfluidic platform by the rotation of parallel top crown.
X-direction photoelectric ceramics twin lamella 9 produces electrostatic potential under ultraviolet source irradiation, be applied on X-direction comb actuator 10 and produce driving force, X-direction displacement amplifying mechanism 8 is formed and drives angle and move in X direction after being subject to driving force, promote X-direction displacement platform 14 through mechanical slide, X-direction displacement platform 14 moves in X direction in pulley guide rails.
Y-direction photoelectric ceramics twin lamella 3 produces electrostatic potential under ultraviolet source irradiation, be applied on Y-direction comb actuator 2 and produce driving force, Y-direction displacement amplifying mechanism 6 is formed and drives angle and move along Y-direction after being subject to driving force, promote Y-direction displacement platform 7 through mechanical slide, Y-direction displacement platform 7 moves along Y-direction in pulley guide rails.
Composition graphs 4, in Z-direction displacement governor motion 12, T-shaped microfluidic platform 13 is fixed on the end of parallel electrode plate 17, and the parallel-plate other end is fixed on X-direction displacement platform 14 by support 18.
X, Y two direction displacement regulate after, Z-direction photoelectric ceramics twin lamella 11 produce under ultraviolet source irradiation electrostatic potential drive on parallel electrode plate rotate move to control T-shaped microfluidic platform with this, realize T-shaped microfluidic platform vertical direction regulate.
As from the foregoing, X, Y, Z-direction photoelectric ceramics twin lamella produce driving voltage after ultraviolet source irradiation, realize the adjustment of the Three Degree Of Freedom of T-shaped microfluidic platform under enlarger effect.Photoelectricity of the present invention-electrostatic composite flooding microfluidic platform device can realize high voltage Large travel range and regulate, and simple and compact for structure.Meanwhile, the drive source of this device is ultraviolet light, can realize light-operated contactless and rotation multiple degrees of freedom adjustment, avoid the environmental factor interference such as electromagnetism, fast response time, is applicable to multiple degrees of freedom and regulates and light-operated contactless field, is particularly useful for needing not by the occasion of electromagnetic interference.
Claims (3)
1. photoelectricity-electrostatic composite flooding microfluidic platform device, it is characterized in that, comprise coarse motion platform [1], Y-direction driving mechanism, Y-direction guide rail mechanism [4], Y-direction mechanical slide [5], Y-direction displacement adjustment platform [7], X-direction driving mechanism, X-direction guide rail mechanism [15], X-direction displacement adjustment platform [14] and X-direction mechanical slide [16];
Described Y-direction guide rail mechanism [4] comprises two guide rails, these two guide rails are symmetricly set on the both sides of coarse motion platform [1] Y-direction axis, Y-direction displacement regulate platform [7] be positioned at two guide rails top and along guide rail movement under the driving of driving mechanism in the Y direction, this Y-direction driving mechanism comprises two about the symmetrically arranged actuating mechanism in coarse motion platform [1] Y-direction axis, each actuating mechanism includes the Y-direction comb actuator [2] and Y-direction photoelectric ceramics twin lamella [3] that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, Y-direction comb actuator [2] is connected with Y-direction mechanical slide [5] by corresponding Y-direction displacement amplifying mechanism [6], the other end and the Y-direction displacement of Y-direction mechanical slide [5] regulate platform [7] to be connected,
Y-direction displacement regulates on platform [7] and arranges X-direction guide rail mechanism [15], described X-direction guide rail mechanism [15] comprises two guide rails, these two guide rails are symmetrical arranged the both sides that displacement in the Y direction regulates platform [7] X-direction axis, X-direction displacement regulate platform [14] be positioned at two guide rails top and along guide rail movement under the driving of X-direction driving mechanism, this X-direction driving mechanism comprises two and regulates the symmetrically arranged actuating mechanism in platform [7] X-direction axis about Y-direction displacement, each actuating mechanism includes the X-direction comb actuator [10] and X-direction photoelectric ceramics twin lamella [9] that are connected by wire, each actuating mechanism is all positioned at the outside of guide rail, X-direction comb actuator [10] is connected with X-direction mechanical slide [16] by corresponding X-direction displacement amplifying mechanism [8], the other end and the X-direction displacement of X-direction mechanical slide [16] regulate platform [14] to be connected,
Under ultraviolet source irradiation, Y-direction displacement regulates the photoelectric ceramics twin lamella [9] on platform [7] to produce electrostatic potential and is applied on X-direction comb actuator [10], then realizes the displacement adjustment of X-direction through displacement amplifying mechanism [8]; Photoelectric ceramics twin lamella [3] on coarse motion platform [1] produces electrostatic potential and is applied on Y-direction comb actuator [2], then realizes the displacement adjustment of Y-direction through displacement amplifying mechanism [6].
2. photoelectricity according to claim 1-electrostatic composite flooding microfluidic platform device, it is characterized in that, X-direction displacement regulates on platform [14] and is arranged through the connected Z-direction photoelectric ceramics twin lamella [11] of wire and Z-direction displacement governor motion [12], Z-direction displacement governor motion [12] is arranged T-shaped microfluidic platform [13], wherein Z-direction displacement governor motion [12] comprises parallel electrode plate [17] and support [18], upper parallel electrode plate [17] is positioned at the top of support [18] and can rotates by opposite brackets, bottom and the X-direction displacement of support [18] regulate platform [14] to be connected, upper parallel electrode plate [17] is arranged T-shaped microfluidic platform [13], the displacement that Z-direction displacement governor motion [12] realizes on vertical direction through the rotation of upper parallel electrode plate [17] regulates.
3. photoelectricity according to claim 1-electrostatic composite flooding microfluidic platform device, it is characterized in that, X-direction photoelectric ceramics twin lamella [9], Y-direction photoelectric ceramics twin lamella [3] and Z-direction photoelectric ceramics twin lamella [11] all adopt ultraviolet source irradiation to produce electrostatic drive voltage.
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| CN201610058520.7A CN105563465B (en) | 2016-01-28 | 2016-01-28 | A kind of photoelectrical electrostatic composite flooding microfluidic platform device |
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| CN201610058520.7A CN105563465B (en) | 2016-01-28 | 2016-01-28 | A kind of photoelectrical electrostatic composite flooding microfluidic platform device |
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Cited By (3)
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| CN106154974A (en) * | 2016-08-13 | 2016-11-23 | 南京理工大学 | A kind of photoelectric ceramics displacement Close loop servo control experimental provision and control method |
| CN106842555A (en) * | 2017-01-18 | 2017-06-13 | 南京理工大学 | A kind of three-dimensional piezoelectric drives micro mirror adjusting means |
| CN112428168A (en) * | 2020-11-27 | 2021-03-02 | 佛山科学技术学院 | Photoelectric-electrostatic repulsion force composite driven micro clamp |
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